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White Light Interference Solution for Novel 3D NAND VIA Dishing Metrology
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作者 Xiaoye Ding Sicong Wang +3 位作者 Yi Zhou Yanzhong Ma Le Yang Chi Chen 《Journal of Microelectronic Manufacturing》 2019年第4期40-44,共5页
In traditional 3D NAND design,peripheral circuit accounts for 20-30%of the chip realestate,which reduces the memory density of flash memory.As 3D NAND technology stacks to 128 layers or higher,peripheral circuits may ... In traditional 3D NAND design,peripheral circuit accounts for 20-30%of the chip realestate,which reduces the memory density of flash memory.As 3D NAND technology stacks to 128 layers or higher,peripheral circuits may account for more than 50%of the overall chip area.On the contrast,the Xtacking^TM technology arranges array and logic parts on two different wafers,and connects the memory arrays to the logic circuit by metal VIAs(Vertical Interconnect Accesses)to achieve unprecedented high storage density as well as DRAM level I/O speed.As a consequence,it becomes increasingly significant to monitor metal VIAs depth before wafer bonding process as to ensure reliability of array-logic connections.Currently,AFM(Atom Force Microscopy)is the main stream method of VIA depth monitoring.Apparently,AFM wins the battle of precision,however the low throughput limited its usage in mass production.In order to accomplish the requirement of VLSI production,a WLI(White Light Interference)metrology is revisited and a novel WLI method was developed to monitor VIAs depth.Basically there are two major limitations that keep WLI tools from wider use,transparent film impact and diffraction limitation.In this work,the engineering solutions are illustrated and inline dishing measurement is achieved with high accuracy and precision. 展开更多
关键词 WLI dishing METROLOGY 3D NAND BONDING
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Influence of oxidant passivation on controlling dishing in alkaline chemical mechanical planarization 被引量:1
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作者 贾少华 刘玉岭 +1 位作者 王辰伟 闫辰奇 《Journal of Semiconductors》 EI CAS CSCD 2015年第12期147-150,共4页
The article studied the electrochemical behavior of P2 alkaline polishing slurry. The main research is the changing discipline of Ecorr and Icorr in the Cu electrolyte at different concentrations of oxidant H2O2. It c... The article studied the electrochemical behavior of P2 alkaline polishing slurry. The main research is the changing discipline of Ecorr and Icorr in the Cu electrolyte at different concentrations of oxidant H2O2. It compares potentiodynamic polarization curves in different P2 slurries and analyzes the passivation function of H2O2 acting on controlling dishing. The result implies that the potential increases gradually and then levels offwhile the current density on the contrary decreases with the augment of H2O2 concentration. In addition, dishing declines with the increasing of H2O2 along with the optimization of planarization of the alkaline P2 slurry. 展开更多
关键词 hydrogen peroxide PASSIVATION dishing ALKALINE Cu CMP
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Solid Material Formula of Small Fragrant Chicken Soup Stock and Improvement of Boiling Process
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作者 Chaohang CHEN Dandan LU +7 位作者 Maozhao WU Haiyan WANG Jie XIE Guanghui YANG Shoumei WAN Lingling XIAO Shengxian PAN Jinyu ZHAO 《Asian Agricultural Research》 2023年第10期12-16,19,共6页
[Objectives]To study the solid material formula and boiling process of Small Fragrant Chicken Soup Stock.[Methods]Small fragrant chicken and edible fungi were used as the main raw materials to prepare instant chicken ... [Objectives]To study the solid material formula and boiling process of Small Fragrant Chicken Soup Stock.[Methods]Small fragrant chicken and edible fungi were used as the main raw materials to prepare instant chicken and Morchella esculenta soup stock,and the influencing factors such as solid material ratio,ratio of liquid to material,time and temperature were studied,and the optimal formula and process of the soup stock were screened out through sensory and instrument evaluation experiments.[Results]The optimal formula and process of Small Fragrant Chicken Soup Stock were as follows:small fragrant chicken 40%,M.esculenta 6%,Lyophyllum decastes 3%and Lentinus edodes 1.5%;the ratio of liquid to material was 2.5:1,the boiling time was 2 h,and the boiling temperature was 120℃.Under these conditions,the sensory score of Small Fragrant Chicken Soup Stock was the best.[Conclusions]This study provided a theoretical basis for the industrial production of edible mushroom prepared dishes. 展开更多
关键词 Edible fungi Instant heating type prepared dishes Processing technology
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弥漫性特发性骨质增生症合并脊柱骨折的临床特点 被引量:2
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作者 高宏阳 申勇 +3 位作者 董威 张宇宸 王伟 张国平 《中国脊柱脊髓杂志》 CAS CSCD 北大核心 2016年第10期954-956,共3页
弥漫性特发性骨质增生症(diffuse idiopathic skeletal hyperostosis,DISH)是一种以软组织钙化、骨化为特征的系统性疾病,最常累及脊柱,并引起脊柱强直。因此,DISH患者很容易并发脊柱骨折.而且与一般脊柱骨折相比,
关键词 弥漫性特发性骨质增生症 脊柱骨折 临床特点 软组织钙化 系统性疾病 脊柱强直 DISH
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应用HMG-CoA还原酶抑制剂筛选虾青素高产突变株 被引量:2
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作者 梁新乐 励建荣 《食品与发酵工业》 CAS CSCD 北大核心 2005年第7期23-25,共3页
研究了HMG-CoA还原酶抑制剂辛伐他汀对法夫酵母生长及其虾青素合成的影响,实验结果表明,当辛伐他汀浓度在4·78×10-6mol/L时对酵母细胞的生长的抑制表现不明显,但对虾青素合成具有显著的抑制作用。以此浓度作为筛选浓度,经亚... 研究了HMG-CoA还原酶抑制剂辛伐他汀对法夫酵母生长及其虾青素合成的影响,实验结果表明,当辛伐他汀浓度在4·78×10-6mol/L时对酵母细胞的生长的抑制表现不明显,但对虾青素合成具有显著的抑制作用。以此浓度作为筛选浓度,经亚硝基胍(NTG)诱变后,通过辛伐他汀平板初筛与摇瓶复筛,获得较高虾青素产率的突变株。实验结果表明,菌体生物量、类胡萝卜总量和虾青素产量都有明显的提高,其中NPX-3_05突变株类胡萝卜总量与虾青素产量分别达到3·823、2·755mg/L,比出发菌株依次提高了163%、143%(1·453mg/L、1·134mg/L)。菌株NPX-3_05经连续发酵5次的稳定性实验表明其性状稳定。目标产物经HPLC定性分析,确定为反式虾青素。因此,以辛伐他汀等HMG-CoA还原酶抑制剂作为选择压力,对虾青素高产突变株的筛选上具有较好的“筛分”能力。 展开更多
关键词 辛伐他汀 虾青素 法夫酵母 HMG-COA还原酶 Petri DISH HMG-COA还原酶抑制剂 高产突变株 筛选 稳定性实验
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弥漫性特发性骨质增生症与后纵韧带骨化并存的影像学表现 被引量:6
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作者 田小丽 蔡跃增 李景学 《天津医科大学学报》 2003年第2期231-233,共3页
目的 :探讨弥漫性特发性骨质增生症 (DISH)与后纵韧带骨化 (OPLL)并存病例的影像学表现 ,以提高对其诊断能力。方法 :收集DISH与OPLL并存患者20例 ,男18例 ,女2例。年龄39~78岁 ,平均54.4岁。20例均行X线检查 ,其中1例行体层摄影 ,4例... 目的 :探讨弥漫性特发性骨质增生症 (DISH)与后纵韧带骨化 (OPLL)并存病例的影像学表现 ,以提高对其诊断能力。方法 :收集DISH与OPLL并存患者20例 ,男18例 ,女2例。年龄39~78岁 ,平均54.4岁。20例均行X线检查 ,其中1例行体层摄影 ,4例行CT扫描 ,5例行MRI扫描。结果 :DISH以脊椎前、外侧缘的骨化及脊椎以外韧带和肌腱插入部的增生为特征。后纵韧带骨化影像学表现为椎体后方带状高密度影 ,与椎体后缘之间有透亮间隙 ,有不同程度椎管狭窄。结论 :DISH与OPLL并存者可能具有因退变易发生异位骨化或钙化的素质。 展开更多
关键词 弥漫性特发性骨质增生症(DISH) 后纵韧带骨化(OPLL) 椎管狭窄
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弥漫性特发性骨质增生症(DISH) 被引量:6
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作者 李文菁 赵宇 《中国骨与关节外科》 2013年第2期187-190,共4页
弥漫性特发性骨质增生症(diffuse idiopathic skeletal hyperostosis,DISH),60余年前由Forestier和Rotes—Querol首次详细报告,又称Forestier病[1]。DISH在临床上并不少见,好发于中老年人,以软组织(主要为韧带、肌腱附着点)部... 弥漫性特发性骨质增生症(diffuse idiopathic skeletal hyperostosis,DISH),60余年前由Forestier和Rotes—Querol首次详细报告,又称Forestier病[1]。DISH在临床上并不少见,好发于中老年人,以软组织(主要为韧带、肌腱附着点)部位的钙化和骨化为特征,最常累及脊柱。病因不明, 展开更多
关键词 弥漫性特发性骨质增生症 DISH 中老年人 病因不明 软组织
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颈椎弥漫性特发性骨肥厚症的特点和治疗 被引量:1
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作者 王长峰 贾连顺 《中国脊柱脊髓杂志》 CAS CSCD 2005年第10期639-640,共2页
关键词 弥漫性特发性骨肥厚症 颈椎 治疗 流行病学资料 DISH 临床症状 65岁以上 年龄增长 发病率
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弥漫性特发性骨质增生症36例X线诊断 被引量:1
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作者 杨山林 《吉林大学学报(医学版)》 CAS CSCD 北大核心 2008年第2期240-240,共1页
关键词 弥漫性特发性骨质增生症 X线诊断 退行性骨关节病 强直性脊柱炎 CT表现分析 临床症状 手术治疗 DISH
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郑州东赵遗址出土人骨的DISH古病理分析 被引量:2
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作者 何嘉宁 张家强 李楠 《黄河.黄土.黄种人》 2016年第5X期42-47,共6页
一、概述东赵遗址位于河南省郑州市西郊的高新区沟赵乡赵村。2012至2015年,北京大学考古文博学院与郑州市文物考古研究院对其进行大规模的考古发掘,发现了城址、祭祀坑、灰坑、窖穴、水井等很多重要遗迹,出土了丰富的陶器、石器、骨器... 一、概述东赵遗址位于河南省郑州市西郊的高新区沟赵乡赵村。2012至2015年,北京大学考古文博学院与郑州市文物考古研究院对其进行大规模的考古发掘,发现了城址、祭祀坑、灰坑、窖穴、水井等很多重要遗迹,出土了丰富的陶器、石器、骨器等文化遗物,其中包括90余座东周时期墓葬。墓葬出土了一批人骨材料,对这些人骨的初步观察发现了一些重要古病理现象。 展开更多
关键词 人骨 东赵 DISH 前纵韧带骨化 沟赵乡 考古发掘 东周时期 文化遗物 关节突关节面 灰坑
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Analysis of Translation Skills of Chinese Dish Name 被引量:1
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作者 蔡静一 《海外英语》 2010年第10X期169-170,共2页
China is a country that attaches great importance to names,honor,and prestige.The set phrase,to achieve both fame and wealth,gives the true meaning of the word fame.Chinese food culture has a long history,and forms a ... China is a country that attaches great importance to names,honor,and prestige.The set phrase,to achieve both fame and wealth,gives the true meaning of the word fame.Chinese food culture has a long history,and forms a variety of dishes,These Chinese dishes are popular with the whole world.English translation of Chinese dish can be found everywhere in China nowadays.For example:restaurants have bilingual menus;cook books are translated into English;food is discussed and recommended in English on newspaper,magazines and TV programs.Some of the English equivalents are so wordy or awkward that they read like recipes instead of names.Some are confusing and misleading.The problem is that some dish names embedded with cultural connotation are still translated literally,which makes the menus unintelligible and the target language reader lost chances to enjoy Chinese food culture.Owing to these features of the Chinese culinary culture,the names of Chinese food are kaleidoscopic and deny easy forms. 展开更多
关键词 CHINESE DISH NAME TRANSLATION SKILL
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Novel Pattern-Centric Solution for Xtacking^TM AFM Metrology
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作者 Sicong Wang Jian Mi +4 位作者 Abhishek Vikram Gao Xu Guojie Chen Liming Zhang Pan Liu 《Journal of Microelectronic Manufacturing》 2019年第4期18-21,共4页
3D NAND(three-dimensional NAND type)has rapidly become the standard technology for enterprise flash memories,and is also gaining widespread use in other applications.Continued manufacturing process improvements are es... 3D NAND(three-dimensional NAND type)has rapidly become the standard technology for enterprise flash memories,and is also gaining widespread use in other applications.Continued manufacturing process improvements are essential in delivering memory devices with higher I/O performance,higher bit density,and at lower cost.Current 3D NAND technology involves process steps that form array and peripheral CMOS(Complementary Metal-Oxide-Semiconductor)regions side-by-side,resulting in waste of silicon real estate and film stress compromises,and limits the paths of making advanced 3D NAND devices.An innovative architecture was invented to overcome these challenges by connecting two wafers electrically through metal VIAs(Vertical Interconnect Access)[1].Highly accurate and efficient metrology is required to monitor VIA interface due to increased process complexity and precision requirements.With the advanced processing of AFM(Atomic Force Microscopy)images,highly accurate and precise measurements have been achieved.An inline pattern-centric metrology solution that is designed for high volume mass production of high-performance 3D NAND is presented in this paper. 展开更多
关键词 VIA dishing AFM Image METROLOGY 3D NAND
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A Cognitive Study of the Naming Elements of Chinese Dish Names Based on the Prominence Principle
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作者 唐国宇 《海外英语》 2019年第7期243-244,246,共3页
The assortedness of Chinese food,together with the complexity of their naming elements,has ignited numerous scholars' interests in this field and prompted them to make abundant analyses of Chinese dish names.Most ... The assortedness of Chinese food,together with the complexity of their naming elements,has ignited numerous scholars' interests in this field and prompted them to make abundant analyses of Chinese dish names.Most of them,however,were done in studies of traditional linguistics,rhetoric,translatology and cross-cultural communication.And studies,based on corpus,on the naming elements of Chinese dishes under cognitive linguistic theories almost remain a blank.This paper aims to conduct a quantitative analysis of 4,000 Chinese dish names(500 ones selected freely from each of the eight cuisines),based on the Prominence Principle,in order to identify the specific naming elements of Chinese dishes and forward related statistics and ratios. 展开更多
关键词 Chinese DISH NAMES NAMING ELEMENTS PROMINENCE PRINCIPLE
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The Translation Strategies of Chinese Dish Names on Descriptive Translation Studies
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作者 乞聪妮 《海外英语》 2014年第13期135-136,共2页
It is well-known that Chinese dish names concentrate on the essence of traditional Chinese culture,reflecting the collective wisdom of Chinese nation.In recent years,good and awkward translation of Chinese dish names ... It is well-known that Chinese dish names concentrate on the essence of traditional Chinese culture,reflecting the collective wisdom of Chinese nation.In recent years,good and awkward translation of Chinese dish names coexist with each other,which has a negative influence on Chinese image.Nowadays many people have begun to center on and study the English translation of Chinese dishes names.Descriptive translation is a clear answer to it. 展开更多
关键词 CHINESE DISH DESCRIPTIVE TRANSLATION TRANSLATION s
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弥漫性特发性骨增生病(附30例分析)
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作者 王培利 丛培军 胡翠娟 《临沂医学专科学校学报》 1998年第3期202-203,共2页
关键词 脊椎 四肢骨关节 肌腱 韧带 钙化 骨化 DISH
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Dystrophic calcification and heterotopic ossification in fibrocartilaginous tissues of the spine in diffuse idiopathic skeletal hyperostosis(DISH) 被引量:4
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作者 Dale E.Fournier Patti K.Kiser +2 位作者 Ryan J.Beach S.Jeffrey Dixon Cheryle A.Séguin 《Bone Research》 SCIE CAS CSCD 2020年第2期209-218,共10页
Diffuse idiopathic skeletal hyperostosis(DISH) is a prevalent noninflammatory spondyloarthropathy characterized by ectopic mineral formation along the anterolateral aspect of the vertebral column, yet little is known ... Diffuse idiopathic skeletal hyperostosis(DISH) is a prevalent noninflammatory spondyloarthropathy characterized by ectopic mineral formation along the anterolateral aspect of the vertebral column, yet little is known about its underlying pathogenesis. Our objective was to evaluate the histopathological features and composition of ectopic mineral within spinal tissues affected by DISH in humans. Thoracic spine segments from six embalmed cadaveric donors(one female and five males;median age 82 years)meeting the radiographic diagnostic criteria for DISH were evaluated using radiological, histological, and physical analyses. Overall,the histological features of ectopic mineralization at individual motion segments were heterogeneous, including regions of heterotopic ossification and dystrophic calcification. Heterotopic ossifications were characterized by woven and lamellar bone,multifocal areas of metaplastic cartilage, and bony bridges along the anterior aspect of the intervertebral disc space. Dystrophic calcifications were characterized by an amorphous appearance, a high content of calcium and phosphorus, an X-ray diffraction pattern matching that of hydroxyapatite, and radiodensities exceeding that of cortical bone. Dystrophic calcifications were found within the anterior longitudinal ligament and annulus fibrosus in motion segments both meeting and not meeting the radiographic criteria for DISH. In summary, our findings indicate that in DISH, ectopic mineral forms along the anterior aspect of the spine by both heterotopic ossification and dystrophic calcification of fibrocartilaginous tissues. Although both types of ectopic mineralization are captured by current radiographic criteria for DISH, dystrophic calcification may reflect a distinct disease process or an early stage in the pathogenesis of DISH. 展开更多
关键词 DISH OSSIFICATION CALCIFICATION
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Rapid and easy determination of morphine in chafing dish condiments with colloidal gold labeling based lateral flow strips 被引量:4
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作者 Wei Chen Xin-ni Li +2 位作者 Qian Wu Li Yao Jianguo Xu 《Food Science and Human Wellness》 SCIE 2019年第1期40-45,共6页
In order to enhance the flavor of chafing dish and increase the attraction of consumers,the poppy shell is reported to be illegally added to the condiments of chafing dish.In this research,a rapid,simple,and convenien... In order to enhance the flavor of chafing dish and increase the attraction of consumers,the poppy shell is reported to be illegally added to the condiments of chafing dish.In this research,a rapid,simple,and convenient method based on the classic immunochromatographic lateral flow strip(LFS)with gold nanoparticles(GNPs)labeling was developed for easy monitoring of morphine(MOP),an effective component of poppy shell.Under optimized conditions,this developed LFS can well realize the detection of target MOP in the condiments of chafing dish in less than 10 min without any complicated pre-treatments.The limit of detection(LOD)can be achieved as low as 0.1 ppb for standard MOP or the MOP spiked condiments of chafing dish.All these results of the research strongly demonstrate that this established LFS method can be successfully applied in practical rapid and accurate on-site screening of poppy shell in condiments of chafing dish. 展开更多
关键词 Morphine(MOP) Gold nanoparticles(GNPs) Lateral flow strip(LFS) Chafing dish condiments
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On the regional characteristics of cuisine in China 被引量:2
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作者 Zhang ShulinDepartment of Geography, Chongqing Teachers College, Chongqing 630047, CHINA 《Journal of Geographical Sciences》 SCIE CSCD 1998年第1期95-100,共6页
This paper attempts to study regional differentiation of cuisine in China and set up a rudimentary framework for regional characteristic of cuisine This framework is mainly concerned with regional school of cuisine (o... This paper attempts to study regional differentiation of cuisine in China and set up a rudimentary framework for regional characteristic of cuisine This framework is mainly concerned with regional school of cuisine (or cuisine systems) and regional dishes It also gives them some explanations of the process of the formation 展开更多
关键词 CUISINE regional feature of cuisine regional school of cuisine regional dishes of local distinctive flavor and taste
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Multi dimensional Seismic Response Analysis of Base Isolated Frame Structure with 3D Isolator 被引量:1
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作者 XiongShishu HuangLiting ChenJinfeng SuJingsu 《Journal of China University of Geosciences》 SCIE CSCD 2005年第1期66-71,78,共7页
The three dimensional lead rubber dish spring bearing (3DB) is proposed in this paper. The 3DB is composed of lead rubber bearing (LRB) and dish spring bearing (DSB) with damper in series. The 3DB put forward in t... The three dimensional lead rubber dish spring bearing (3DB) is proposed in this paper. The 3DB is composed of lead rubber bearing (LRB) and dish spring bearing (DSB) with damper in series. The 3DB put forward in this paper is effective in the resolution of difficulties in strong vertical capacity and vertical damping of three dimensional isolation bearings. It effectively suppresses rocking motions as well. The analytical model and motion equations of multi dimensional seismic responses of 3D base isolated frame structures are established. Taking a five storey frame structure as an example, an extensive simulation analysis is carried out. The results show that the 3D base isolated structure with the proposed 3DB is effective in 3D isolation; it can reduce seismic responses by 50 % compared to a non isolated structure. Therefore, the 3D isolation problem in building can be solved easily and effectively with the 3DB proposed in this paper. 展开更多
关键词 D base isolator multi earthquake seismic responses lead rubber bearing dish spring bearing.
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针刀治疗弥漫性特发性骨肥厚症6例的体会 被引量:1
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作者 刘志杨 《医学信息(中旬刊)》 2010年第12期3570-3571,共2页
弥漫性特发性骨肥厚症(diffuseidio pathicskeletalh HJerostosis,DISH)是一种愈来常见的,随年龄增长而渐为增多的疾病。现常认为DISH是涉及并影响韧带的椎体退行性改变,而被认为是特殊表现的脊椎退行性疾病的范围。
关键词 弥漫性特发性骨肥厚症(DISH) 针刀治疗
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