期刊文献+
共找到4篇文章
< 1 >
每页显示 20 50 100
Improvement of fabrication and characterization methods for micromechanical disk resonators
1
作者 赵晖 骆伟 +2 位作者 郑海洋 杨晋玲 杨富华 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第10期189-194,共6页
In this paper we present a novel method to fabricate reliable micro-electro-mechanical system(MEMS) disk resonators with high yield and good performance.The key breakthrough in the fabrication process is a novel app... In this paper we present a novel method to fabricate reliable micro-electro-mechanical system(MEMS) disk resonators with high yield and good performance.The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon(polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid(HF)-based solutions.In addition,a measurement architecture based on a differential readout topology is demonstrated.The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier.This differential amplifier circuit configuration is also used to build up a notch filter.The preliminary result about the temperature dependence of the resonance frequency is discussed,and the device failure is analysed. 展开更多
关键词 disk resonator differential readout electro-chemical corrosion notch filter
下载PDF
SOI-based radial-contour-mode micromechanical disk resonator
2
作者 贾英茜 赵正平 +2 位作者 杨拥军 胡晓东 李倩 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第11期72-76,共5页
This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, w... This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum 展开更多
关键词 RF-MEMS micromechanical disk resonator SOI thermo-compression bonding
原文传递
Frequency stability of an RF oscillator with an MEMS-based encapsulated resonator
3
作者 彭波华 骆伟 +3 位作者 赵继聪 袁泉 杨晋玲 杨富华 《Journal of Semiconductors》 EI CAS CSCD 2015年第7期103-107,共5页
This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermeti... This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermetically encapsulated using low-cost Sn-rich Au-Sn solder bonding, which significantly improves the frequency stability. A low noise oscillator circuit was designed with a two-stage amplifying architecture which effectively improves both the frequency stability and phase noise performance. The measured phase noise is -96 dBc/Hz at 1 kHz offset and-128 dBc/Hz at far-from-carrier offsets. Moreover, the medium-term frequency stability and Allan deviation of the oscillator are 4-4 ppm and 10 ppb, respectively. The oscillator is a promising component in future wireless communication application. 展开更多
关键词 MEMS disk resonator oscillator phase noise frequency stability ENCAPSULATION
原文传递
Reliability testing of a 3D encapsulated VHF MEMS resonator
4
作者 Fengxiang Wang Quan Yuan +4 位作者 Xiao Kan Jicong Zhao Zeji Chen Jinling Yang Fuhua Yang 《Journal of Semiconductors》 EI CAS CSCD 2018年第10期64-67,共4页
The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitanc... The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board(PCB), a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃. 展开更多
关键词 3D encapsulation VHF disk resonator frequency stability parasitic effect
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部