In this paper we present a novel method to fabricate reliable micro-electro-mechanical system(MEMS) disk resonators with high yield and good performance.The key breakthrough in the fabrication process is a novel app...In this paper we present a novel method to fabricate reliable micro-electro-mechanical system(MEMS) disk resonators with high yield and good performance.The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon(polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid(HF)-based solutions.In addition,a measurement architecture based on a differential readout topology is demonstrated.The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier.This differential amplifier circuit configuration is also used to build up a notch filter.The preliminary result about the temperature dependence of the resonance frequency is discussed,and the device failure is analysed.展开更多
This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, w...This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum展开更多
This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermeti...This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermetically encapsulated using low-cost Sn-rich Au-Sn solder bonding, which significantly improves the frequency stability. A low noise oscillator circuit was designed with a two-stage amplifying architecture which effectively improves both the frequency stability and phase noise performance. The measured phase noise is -96 dBc/Hz at 1 kHz offset and-128 dBc/Hz at far-from-carrier offsets. Moreover, the medium-term frequency stability and Allan deviation of the oscillator are 4-4 ppm and 10 ppb, respectively. The oscillator is a promising component in future wireless communication application.展开更多
The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitanc...The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board(PCB), a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃.展开更多
基金Project supported by the National Basic Research Program of China (Grant Nos. 2009CB320305 and 2011CB933102)
文摘In this paper we present a novel method to fabricate reliable micro-electro-mechanical system(MEMS) disk resonators with high yield and good performance.The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon(polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid(HF)-based solutions.In addition,a measurement architecture based on a differential readout topology is demonstrated.The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier.This differential amplifier circuit configuration is also used to build up a notch filter.The preliminary result about the temperature dependence of the resonance frequency is discussed,and the device failure is analysed.
文摘This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum
基金Project supported by the National Natural Science Foundation of China(Nos.61234007,61404136)the State Key Development Program for Basic Research of China(Nos.2011CB933102,2013YQ16055103)
文摘This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermetically encapsulated using low-cost Sn-rich Au-Sn solder bonding, which significantly improves the frequency stability. A low noise oscillator circuit was designed with a two-stage amplifying architecture which effectively improves both the frequency stability and phase noise performance. The measured phase noise is -96 dBc/Hz at 1 kHz offset and-128 dBc/Hz at far-from-carrier offsets. Moreover, the medium-term frequency stability and Allan deviation of the oscillator are 4-4 ppm and 10 ppb, respectively. The oscillator is a promising component in future wireless communication application.
基金Project supported by the National Key Research and Development Program of China(No.2017YFB0405400)the National Natural Science Foundation of China(Nos.61234007,61734007,61404136,61704166)the Key Research Program of Frontier Science of CAS(No.QYZDY-SSW-JSC004)
文摘The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board(PCB), a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃.