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MOS Capacitance-Voltage Characteristics Ⅱ.Sensitivity of Electronic Trapping at Dopant Impurity from Parameter Variations 被引量:1
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作者 揭斌斌 薩支唐 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第12期1-11,共11页
Low-frequency and high-frequency Capacitance-Voltage (C-V) curves of Metal-Oxide- Semiconductor Capacitors (MOSC), including electron and hole trapping at the dopant donor and acceptor impurities, are presented to... Low-frequency and high-frequency Capacitance-Voltage (C-V) curves of Metal-Oxide- Semiconductor Capacitors (MOSC), including electron and hole trapping at the dopant donor and acceptor impurities, are presented to illustrate giant trapping capacitances, from 〉 0.01Cox to 〉 10Cox. Five device and materials parameters are varied for fundamental trapping parameter characterization, and electrical and optical signal processing applications. Parameters include spatially constant concentration of the dopant-donor-impurity electron trap, NDD, the ground state electron trapping energy level depth measured from the conduction band edge, Ec - ED, the degeneracy of the trapped electron at the ground state, gD, the device temperature, T, and the gate oxide thickness, xox. 展开更多
关键词 trapping capacitance donor dopant impurity electron trap MOS
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