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B-implantation and Annealing for SiGe Epilayers
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作者 JIANG R L,LIU W P,JIANG N, ZHU S M,HU L H,ZHENG Y D (Dept.of Physics,Nanjing University,Nanjing 210093,CHN) 《Semiconductor Photonics and Technology》 CAS 1997年第4期286-289,共4页
Si 0.8 Ge 0.2 strained epilayer were grown on Si substrates by rapid thermal process/very low pressure-chemical vapor deposition (RTP/VLP-CVD) and implanted with boron at 40 keV,a dosage of 2.5×10 14 ... Si 0.8 Ge 0.2 strained epilayer were grown on Si substrates by rapid thermal process/very low pressure-chemical vapor deposition (RTP/VLP-CVD) and implanted with boron at 40 keV,a dosage of 2.5×10 14 cm -2 .Rapid thermal annealing (RTA) and steady-state furnace annealing with different temperature and time period were performed for comparison.Results indicate that RTA is better than furnace annealing.After RTA at 750 ℃~850 ℃ for 10 s or at 700 ℃ for 40 s,the implantation induced damage can be removed,the carrier mobility was about 300 cm 2/V·s and the activity was nearly 100%. 展开更多
关键词 Activity ANNEALING B-implantation doping technique SiGe/Si Heterostructures
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Hydrothermal fabrication of selectively doped organic assisted advanced ZnO nanomaterial for solar driven photocatalysis
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作者 K.Namratha K.Byrappa +3 位作者 S.Byrappa P.Venkateswarlu D.Rajasekhar B.K.Deepthi 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2015年第8期248-255,共8页
Hydrothermal fabrication of selectively doped(Ag++ Pd3+) advanced ZnO nanomaterial has been carried out under mild pressure temperature conditions(autogeneous; 150°C).Gluconic acid has been used as a surfa... Hydrothermal fabrication of selectively doped(Ag++ Pd3+) advanced ZnO nanomaterial has been carried out under mild pressure temperature conditions(autogeneous; 150°C).Gluconic acid has been used as a surface modifier to effectively control the particle size and morphology of these ZnO nanoparticles. The experimental parameters were tuned to achieve optimum conditions for the synthesis of selectively doped ZnO nanomaterials with an experimental duration of 4 hr. These selectively doped ZnO nanoparticles were characterized using powder X-ray diffraction(XRD), Fourier transform infrared spectroscopy(FT-IR), UV–Vis spectroscopy and scanning electron microscopy(SEM). The solar driven photocatalytic studies have been carried out for organic dyes, i.e., Procion MX-5B dye,Cibacron Brilliant Yellow dye, Indigo Carmine dye, separately and all three mixed, by using gluconic acid modified selectively doped advanced ZnO nanomaterial. The influence of catalyst, its concentration and initial dye concentration resulted in the photocatalytic efficiency of 89% under daylight. 展开更多
关键词 Hydrothermal technique Gluconic acid surface modification Selectively doped ZnO Photocatalytic degradation
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