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Integrated interpretation of dual frequency induced polarization measurement based on wavelet analysis and metal factor methods 被引量:2
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作者 韩世礼 张术根 +2 位作者 柳建新 胡厚继 张文山 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第5期1465-1471,共7页
In mineral exploration, the apparent resistivity and apparent frequency (or apparent polarizability) parameters of induced polarization method are commonly utilized to describe the induced polarization anomaly. When... In mineral exploration, the apparent resistivity and apparent frequency (or apparent polarizability) parameters of induced polarization method are commonly utilized to describe the induced polarization anomaly. When the target geology structure is significantly complicated, these parameters would fail to reflect the nature of the anomaly source, and wrong conclusions may be obtained. A wavelet approach and a metal factor method were used to comprehensively interpret the induced polarization anomaly of complex geologic bodies in the Adi Bladia mine. Db5 wavelet basis was used to conduct two-scale decomposition and reconstruction, which effectively suppress the noise interference of greenschist facies regional metamorphism and magma intrusion, making energy concentrated and boundary problem unobservable. On the basis of that, the ore-induced anomaly was effectively extracted by the metal factor method. 展开更多
关键词 dual frequency induced polarization method wavelet analysis metal factor Arabian-Nubian shield volcanogenic massive sulfide deposit
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Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy 被引量:2
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作者 赵国利 徐勇 +3 位作者 尚建平 刘文耀 朱爱民 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第1期61-67,共7页
Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small s... Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small separate volume in plasma, thus enabling to diagnose the plasma uniformity for different experimental parameters. Both the gas pressure and the low- frequency (LF) power have apparent effects on the radial uniformity of argon plasma. With the increase in either pressure or LF power, the emission profiles changed from a bell-shaped to a double-peak distribution. The influence of a fused-silica ring around the electrodes on the plasma uniformity was also studied using the optical probe. Possible reasons that result in nonuniform plasmas in our experiments are discussed. 展开更多
关键词 dual frequency capacitively coupled plasma optical probe plasma uniformity
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Strong optical feedback in birefringent dual frequency laser 被引量:1
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作者 毛威 张书练 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第2期340-346,共7页
Strong optical feedback in a birefringent dual frequency He-Ne laser with a high reflectivity feedback mirror has been investigated for the first time. The output characteristics of two orthogonally polarized modes ar... Strong optical feedback in a birefringent dual frequency He-Ne laser with a high reflectivity feedback mirror has been investigated for the first time. The output characteristics of two orthogonally polarized modes are demonstrated in two different optical feedback cases: one is for both modes being fed back and the other is for only one of the modes being fed back. Strong mode competition can be observed between the two modes with strong optical feedback, And when one mode's intensity is near its maximum, the other mode is nearly extinguished. When both modes are fed back into the laser cavity, the mode competition is stronger than when only one mode is fed back, The difference in initial intensity between the two orthogonally polarized modes plays an important role in the mode competition, which has been experimentally and theoretically demonstrated. 展开更多
关键词 strong optical feedback intensity modulation dual frequency laser mode competition
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Anomalous Variation of Beat Frequency in a Dual Frequency He-Ne Laser
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作者 刘维新 孙明哲 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第2期51-54,共4页
The beat frequency in a dual frequency He-Ne laser varies while the resonant cavity length is tuned. As to the laser with two longitudinal modes, the variation amplitude is commonly less than 500 kHz, proven by experi... The beat frequency in a dual frequency He-Ne laser varies while the resonant cavity length is tuned. As to the laser with two longitudinal modes, the variation amplitude is commonly less than 500 kHz, proven by experiments and theories. This study reveals an anomalous variation of the beat frequency when a piece of element is put into the cavity and is aligned with the laser axis. Consequently the variation amplitude couM reach 22 MHz, several dozen times larger than that without the intra-cavity element. This cannot be explained only by laser mode pulling and pushing effects. Some influencing factors are investigated experimentally, including the tilted angle of the element and the distance between its surface and cavity mirror. The qualitative analysis is discussed, which agrees with the experimental results. 展开更多
关键词 of on AS IT or Anomalous Variation of Beat frequency in a dual frequency He-Ne Laser in IS
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Shaping Stability and Temperature Field in Dual Frequency Electromagnetic Confinement and Shaping
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作者 SONGChang-jiang XUZhenming +2 位作者 LIANGGao-fei SHENJun LIJian-guo 《Journal of Iron and Steel Research International》 SCIE CAS CSCD 2005年第3期14-17,共4页
Dual frequency electromagnetic confinement and shaping (EMCS) makes it easier to adjust and control the shaping temperature field and magnetic field than single frequency EMCS. The shaping stability and temperature fi... Dual frequency electromagnetic confinement and shaping (EMCS) makes it easier to adjust and control the shaping temperature field and magnetic field than single frequency EMCS. The shaping stability and temperature field of the dual frequency EMCS were investigated. The results indicate that to shape stably, the upper liquid/solid interface should be in appropriate position and the lower liquid/solid interface must be above the critical position. The current of heating induction coil and the drawing speed of sample affect the shaping temperature and its peak position, while the current of the shaping induction coil only influences the shaping temperature. During EMCS, the speed of shaped sample affects not the height of the molten metal, but the temperature of molten metal. The height of the molten metal for steady shaping was about 15 mm in the experimental conditions. Several stainless steel plate-like parts with high width to thickness ratio (≥3.5) and directional structure were obtained. 展开更多
关键词 electromagnetic confinement and shaping dual frequency stainless steel directional solidification
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Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model
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作者 赵璐璐 刘悦 Tagra Samir 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第12期361-370,共10页
A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically... A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr (1 Torr=1.33322102 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase; the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases. 展开更多
关键词 dual frequency gas pressure glow discharge
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Two-Dimensional Simulation of a Dual Frequency Sheath Near an Electrode with a Cylindrical Hole
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作者 戴忠玲 刘传生 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第3期283-289,共7页
The characteristics of a collisional dual frequency (DF) sheath near an electrode with a cylindrical hole are studied by utilizing a two-dimensional model which includes time-dependent fluid equations coupled with t... The characteristics of a collisional dual frequency (DF) sheath near an electrode with a cylindrical hole are studied by utilizing a two-dimensional model which includes time-dependent fluid equations coupled with the Poisson equation and an equivalent-circuit model, The effects of the gas pressure on the two-dimensional profiles of the potential, electric field, ion fluid velocity in a DF sheath are investigated. The simulation results show that the cylindrical hole on the electrode has a significant influence on the DF sheath structure, i.e., the sheath profile tends to wrap around the contour of the hole feature. Moreover, it is shown that the structure of the DF sheath is different from that of a single frequency (SF) sheath because the profile of the DF sheath is modulated by the combination of the high and low frequency sources. In addition the characteristics of the DF sheath are obviously affected by the collisional effects in the DF sheath. 展开更多
关键词 dual frequency sheath TWO-DIMENSIONAL numerical simulation
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Dual Frequency Transformer for Efficient SDR-to-HDR Translation
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作者 Gang Xu Qibin Hou Ming-Ming Cheng 《Machine Intelligence Research》 EI CSCD 2024年第3期538-548,共11页
The SDR-to-HDR translation technique can convert the abundant standard-dynamic-range (SDR) media resources to high-dynamic-range (HDR) ones, which can represent high-contrast scenes, providing more realistic visual ex... The SDR-to-HDR translation technique can convert the abundant standard-dynamic-range (SDR) media resources to high-dynamic-range (HDR) ones, which can represent high-contrast scenes, providing more realistic visual experiences. While recent vision Transformers have achieved promising performance in many low-level vision tasks, there are few works attempting to leverage Transformers for SDR-to-HDR translation. In this paper, we are among the first to investigate the performance of Transformers for SDR-to-HDR translation. We find that directly using the self-attention mechanism may involve artifacts in the results due to the inappropriate way to model long-range dependencies between the low-frequency and high-frequency components. Taking this into account, we advance the self-attention mechanism and present a dual frequency attention (DFA), which leverages the self-attention mechanism to separately encode the low-frequency structural information and high-frequency detail information. Based on the proposed DFA, we further design a multi-scale feature fusion network, named dual frequency Transformer (DFT), for efficient SDR-to-HDR translation. Extensive experiments on the HDRTV1K dataset demonstrate that our DFT can achieve better quantitative and qualitative performance than the recent state-of-the-art methods. The code of our DFT is made publicly available at https://github.com/CS-GangXu/DFT. 展开更多
关键词 Standard-dynamic-range to high-dynamic-range(SDR-to-HDR)translation TRANSFORMER dual frequency attention(DFA) frequency-aware feature decomposition efficient model
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Electrically switchable structural patterns and diffractions in a dual frequency nematic liquid crystal 被引量:2
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作者 宋振鹏 李子扬 +4 位作者 尚小虎 李超逸 马玲玲 陆延青 李炳祥 《Chinese Optics Letters》 SCIE EI CAS CSCD 2023年第1期38-43,共6页
Electrically driven structural patterns in liquid crystals(LCs)have attracted considerable attention due to their electrooptical applications.Here,we disclose various appealing reconfigurable LC microstructures in a d... Electrically driven structural patterns in liquid crystals(LCs)have attracted considerable attention due to their electrooptical applications.Here,we disclose various appealing reconfigurable LC microstructures in a dual frequency nematic LC(DFNLC)owing to the electroconvection-induced distortion of the LC director,including one-dimensional rolls,chevron pattern,two-dimensional grids,and unstable chaos.These patterns can be switched among each other,and the lattice constants are modulated by tuning the amplitude and frequency of the applied electric field.The electrically switchable self-assembled microstructures and their beam steering capabilities thus provide a feasible way to tune the functions of DFNLC-based optical devices. 展开更多
关键词 dual frequency liquid crystals pattern formation GRATINGS diffractions
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Characteristics of dual-frequency capacitively coupled SF_6/O_2 plasma and plasma texturing of multi-crystalline silicon 被引量:2
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作者 徐东升 邹帅 +2 位作者 辛煜 苏晓东 王栩生 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第6期361-369,共9页
Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper,... Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper, capacitively coupled plasma (CCP) driven by a dual frequency (DF) of 40.68 MHz and 13.56 MHz is first used for plasma texturing of mc-Si with SF6/O2 gas mixture. Using a hairpin resonant probe and optical emission techniques, DF-CCP characteristics and their influence on mc-silicon surface plasma texturing are investigated at different flow rate ratios, pressures, and radio-frequency (RF) input powers. Experimental results show that suitable plasma texturing of mc-silicon occurs only in a narrow range of plasma parameters, where electron density ne must be larger than 6.3 x 109 cm-3 and the spectral intensity ratio of the F atom to that of the O atom ([F]/[O]) in the plasma must be between 0.8 and 0.3. Out of this range, no cone-like structure is formed on the mc-silicon surface. In our experiments, the lowest reflectance of about 7.3% for mc-silicon surface texturing is obtained at an [F]/[O] of 0.5 and ne of 6.9 × 109 cm-3. 展开更多
关键词 dual frequency capacitively coupled plasma plasma texturing multi-crystalline silicon electrondensity
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Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges: One-Dimensional Fluid Simulation 被引量:2
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作者 王帅 徐翔 +1 位作者 宋远红 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第1期57-60,共4页
A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage d... A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail. 展开更多
关键词 capacitively coupled plasmas dual frequency HYDRODYNAMICS SHEATH
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Study on As-Cast Structure of DC Casting Aluminum Alloy Under Dual Frequency Electromagnetic Field
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作者 ZHAO Zhi-hao WANG Gao-song CUI Jian-zhong 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2012年第S1期265-268,共4页
The as-cast structures of semi-continuous casting aluminum alloy under dual-frequency electromagnetic field were experimental investigated.The results showed that the electromagnetic fields with different frequency ha... The as-cast structures of semi-continuous casting aluminum alloy under dual-frequency electromagnetic field were experimental investigated.The results showed that the electromagnetic fields with different frequency have different function for improving the cast structure of aluminum alloy casting.Imposing medium frequency electromagnetic field can change the surface morphology of melt pool in the casting process,increase the height of melt meniscus,improve the ingot's surface quality,and reduce the thickness of surface segregation.The low frequency electromagnetic field is most obvious to as-cast structure improvement effect because of its high permeability in conductance material.Imposing low-frequency electromagnetic field can change flow pattern and temperature field in the melt,strengthen the heat transfer and mass transfer in the melt,decrease the depth of the sttmp and reduce the temperature gradient.Thus,the as-cast structures are greatly refined,which can lead to the fine equiaxed as-cast structures throughout the cross-section of the ingot. 展开更多
关键词 dual frequency electromagnetic field semi-continuous casting aluminum alloy as-cast structure
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Notched Triangular Microstrip Antenna for Dual-Frequency Operation
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作者 江轶慧 钟顺时 《Journal of Shanghai University(English Edition)》 CAS 2003年第4期375-378,共4页
A novel equilateral triangular patch with a rectangular notch etched to one radiating edge on organic magnetic substrate is proposed for dual frequency operation. Both operations of these dual frequencies arise from t... A novel equilateral triangular patch with a rectangular notch etched to one radiating edge on organic magnetic substrate is proposed for dual frequency operation. Both operations of these dual frequencies arise from the perturbation of TM 10 and TM 11 mode by simply cutting a rectangular notch at the patch bottom. Simulations and experiments have shown the validity of this design. Using an organic magnetic material as the substrate, the antenna exhibits a broader bandwidth of 5.5% and 4.7% at dual-frequencies 1.56 GHz and 2.45 GHz, respectively, as well as a reduced size compared to the dual-frequency patch antennas on non-magnetic material. 展开更多
关键词 triangular microstrip antenna NOTCH dual frequency organic magnetic material.
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Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
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作者 王虹宇 姜巍 +2 位作者 孙鹏 赵双云 李阳 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第2期143-146,共4页
We analyzed perpendicularly configured dual-frequency(DF) capacitively coupled plasmas(CCP).In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by tw... We analyzed perpendicularly configured dual-frequency(DF) capacitively coupled plasmas(CCP).In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency(RF) sources.Particle-in-cell/Monte Carlo(PIC/MC) simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects.Some variation and potential application of the discharging configuration is discussed briefly. 展开更多
关键词 CCP dual frequency coupling PIC/MC
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Microphysical Characteristics of Rainfall Based on Long-Term Observations with a 2DVD in Yangbajain,Tibet
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作者 Ming LI Yongheng BI +4 位作者 Yonghai SHEN Yinan WANG Ciren Nima Tianlu CHEN Daren LYU 《Advances in Atmospheric Sciences》 SCIE CAS CSCD 2024年第9期1721-1734,共14页
Raindrop size distribution(DSD)plays a crucial role in enhancing the accuracy of radar quantitative precipitation estimates in the Tibetan Plateau(TP).However,there is a notable scarcity of long-term,high-resolution o... Raindrop size distribution(DSD)plays a crucial role in enhancing the accuracy of radar quantitative precipitation estimates in the Tibetan Plateau(TP).However,there is a notable scarcity of long-term,high-resolution observations in this region.To address this issue,long-term observations from a two-dimensional video disdrometer(2DVD)were leveraged to refine the radar and satellite-based algorithms for quantifying precipitation in the hinterland of the TP.It was observed that weak precipitation(R<1,mm h-1)accounts for 86%of the total precipitation time,while small raindrops(D<2 mm)comprise 99%of the total raindrop count.Furthermore,the average spectral width of the DSD increases with increasing rain rate.The DSD characteristics of convective and stratiform precipitation were discussed across five different rain rates,revealing that convective precipitation in Yangbajain(YBJ)exhibits characteristics similar to maritime-like precipitation.The constrained relationships between the slopeΛand shapeμ,D_(m)and N_(w)of gamma DSDs were derived.Additionally,we established a correlation between the equivalent diameter and drop axis ratio and found that raindrops on the TP attain a nearly spherical shape.Consequently,the application of the rainfall retrieval algorithms of the dual-frequency precipitation radar in the TP is improved based on the statistical results of the DSD. 展开更多
关键词 Tibetan Plateau raindrop size distribution 2DVD dual frequency radar microphysical features
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AES Encrypted FSK Generation at X-Band Frequency using a Single Reflex Klystron
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作者 Mohuya Chakraborty Amiya Kumar Mallick 《China Communications》 SCIE CSCD 2010年第3期1-9,共9页
This paper describes a high security data transmission system over X-band microwave frequency. The paper has two parts. The first part deals with encryption of binary data by Advanced Encryption Standard (AES) using V... This paper describes a high security data transmission system over X-band microwave frequency. The paper has two parts. The first part deals with encryption of binary data by Advanced Encryption Standard (AES) using VHDL modeling of Field Programmable Gate Array (FPGA). The second part deals with a novel idea of transmitting the encrypted data by using a single klystron. This requires the simultaneous generation of a pair of two independent RF frequencies from a reflex klystron working for X-band frequency range. In this scheme, the klystron is suitably biased on the repeller terminal and superimposed on a train of AES encrypted binary data so as to create two RF frequencies one corresponding to negative peaks and the other one to the positive peaks of the data resulting in an Frequency Shift Keying (FSK) signal. The results have been verified experimentally. 展开更多
关键词 Advanced Encryption Standard (AES) dual frequency generation FSK modulation FPGA Reflex Klystron VHDL
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Design of Six Element MIMO Antenna with Enhanced Gain for 28/38 GHz mm-Wave 5G Wireless Application
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作者 K.Jayanthi A.M.Kalpana 《Computer Systems Science & Engineering》 SCIE EI 2023年第8期1689-1705,共17页
The fifth-generation(5G)wireless technology is the most recent standardization in communication services of interest across the globe.The concept of Multiple-Input-Multiple-Output antenna(MIMO)systems has recently bee... The fifth-generation(5G)wireless technology is the most recent standardization in communication services of interest across the globe.The concept of Multiple-Input-Multiple-Output antenna(MIMO)systems has recently been incorporated to operate at higher frequencies without limitations.This paper addresses,design of a high-gain MIMO antenna that offers a bandwidth of 400 MHz and 2.58 GHz by resonating at 28 and 38 GHz,respectively for 5G millimeter(mm)-wave applications.The proposed design is developed on a RT Duroid 5880 substrate with a single elemental dimension of 9.53×7.85×0.8 mm^(3).The patch antenna is fully grounded and is fed with a 50-ohm stepped impedance microstrip line.It also has an I-shaped slot and two electromagnetically coupled parasitic slotted components.This design is initially constructed as a single-element structure and proceeded to a six-element MIMO antenna configuration with overall dimensions of 50×35×0.8 mm^(3).The simulated prototype is fabricated and measured for analyzing its performance characteristics,along with MIMO antenna diversity performance factors making the proposed antenna suitable for 5G mm-wave and 5G-operated handheld devices. 展开更多
关键词 MIMO antenna parasitic elements 5G mm-wave dual band frequency diversity factors
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Dual-frequency fringe for improving measurement accuracy of three-dimensional shape measurement 被引量:2
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作者 Zixiao Miao Qican Zhang 《Chinese Optics Letters》 SCIE EI CAS CSCD 2021年第10期81-87,共7页
A new phase unwrapping method based on dual-frequency fringe is proposed to improve both high accuracy and large measurement range of three-dimensional shape measurement by synthesizing the projected dual-frequency fr... A new phase unwrapping method based on dual-frequency fringe is proposed to improve both high accuracy and large measurement range of three-dimensional shape measurement by synthesizing the projected dual-frequency fringes obtaining higher and lower frequencies.The lower-frequency one is their phase difference,which can help unwrap the wrapped phase of the higher-frequency one from their phase sum.In addition,the relationship between the measuring accuracy and the frequencies of the projected fringes is studied to guide the frequency selection in actual measurement.It is found that the closer the two frequencies are,the higher the measurement accuracy will be.The computer simulation and experiment results show the viability of this method. 展开更多
关键词 fringe projection 3D shape measurement dual frequency phase shifting phase sum
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Dual-frequency Discontinuous Space Vector Pulse Width Modulation for Five-phase Voltage Source Inverters with Harmonic Injection
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作者 Tianyu Pu Feifei Bu +1 位作者 Haijun Xu Wenxin Huang 《CSEE Journal of Power and Energy Systems》 SCIE CSCD 2021年第3期665-675,共11页
This paper proposes a dual-frequency discontinuous space vector pulse width modulation(DFDSVPWM)for a five-phase voltage source inverter with harmonic injection.In this modulation,for dual-frequency voltage output and... This paper proposes a dual-frequency discontinuous space vector pulse width modulation(DFDSVPWM)for a five-phase voltage source inverter with harmonic injection.In this modulation,for dual-frequency voltage output and reduction of switching losses,two different zero-vector-inserted modes are flexibly employed by alternatively using two types of zero vectors.Based on the comparison with continuous SVPWM,the idea and principle of the proposed DFDSVPWM are analyzed and an example of PWM signals for one bridge is also presented.For switching losses analysis,the impact factors and the calculation method are investigated and the corresponding implementation is given as well.The simulation and experimental results from a prototype verify the correctness and effectiveness of the proposed modulation and it has the advantages of outputting dual-frequency voltage and reducing switching losses. 展开更多
关键词 Discontinuous space vector pulse width modulation dual frequency five-phase voltage source inver terharmonic injection switching losses
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2-D FLUID SIMULATION OF DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMA
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作者 LU Yi-jia YAN Da-qiang CHEN Yao-song 《Journal of Hydrodynamics》 SCIE EI CSCD 2009年第6期814-819,共6页
Dual-frequency aegon discharge at 100 m Torr is modeled with a 2-D fluid model in this study. The plate gap of the system is 20 ram, and discharges are modeled at High Frequency (HF) 40 MHz, 60 MHz, 80 MHz, Low Freq... Dual-frequency aegon discharge at 100 m Torr is modeled with a 2-D fluid model in this study. The plate gap of the system is 20 ram, and discharges are modeled at High Frequency (HF) 40 MHz, 60 MHz, 80 MHz, Low Frequency (LF) 2 MHz, 5 MHz, 10 MHz, low-frequency voltage 50 V, 75 V, 100 V and high-frequency voltage 200 V, respectively. The spatial distribution of electron density and ion density and the periodic evolution of instantaneous electric potential in bulk plasma and sheath are discussed. The numerical results show that plasma density increases with HFs and LFs and LF voltage, while HFs has more effect on the density. It is concluded that improving the ratio of HFs/LFs and increasing LF voltages is a method to gain high density and high ion bombardment energy simultaneously based on the analysis of electric potential distribution. 展开更多
关键词 dual frequency CCP discharge 2-D fluid model
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