To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modifie...To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the ＋1 order, and an efficiency root mean square of 0.051.展开更多
基金supported by the National Natural Science Foundation of China under Grant No.11375175
文摘To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the ＋1 order, and an efficiency root mean square of 0.051.
