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Hierarchical Honeycomb-Structured Electret/Triboelectric Nanogenerator for Biomechanical and Morphing Wing Energy Harvesting 被引量:14
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作者 Kai Tao Zhensheng Chen +8 位作者 Haiping Yi Ruirong Zhang Qiang Shen Jin Wu Lihua Tang Kangqi Fan Yongqing Fu Jianmin Miao Weizheng Yuan 《Nano-Micro Letters》 SCIE EI CAS CSCD 2021年第8期136-151,共16页
Flexible,compact,lightweight and sustainable power sources are indispensable for modern wearable and personal electronics and small-unmanned aerial vehicles(UAVs).Hierarchical honeycomb has the unique merits of compac... Flexible,compact,lightweight and sustainable power sources are indispensable for modern wearable and personal electronics and small-unmanned aerial vehicles(UAVs).Hierarchical honeycomb has the unique merits of compact mesostructures,excellent energy absorption properties and considerable weight to strength ratios.Herein,a honeycomb-inspired triboelectric nanogenerator(h-TENG)is proposed for biomechanical and UAV morphing wing energy harvesting based on contact triboelectrification wavy surface of cellular honeycomb structure.The wavy surface comprises a multilayered thin film structure(combining polyethylene terephthalate,silver nanowires and fluorinated ethylene propylene)fabricated through high-temperature thermoplastic molding and wafer-level bonding process.With superior synchronization of large amounts of energy generation units with honeycomb cells,the manufactured h-TENG prototype produces the maximum instantaneous open-circuit voltage,short-circuit current and output power of 1207 V,68.5μA and 12.4 mW,respectively,corresponding to a remarkable peak power density of 0.275 mW cm^(−3)(or 2.48 mW g^(−1))under hand pressing excitations.Attributed to the excellent elastic property of self-rebounding honeycomb structure,the flexible and transparent h-TENG can be easily pressed,bent and integrated into shoes for real-time insole plantar pressure mapping.The lightweight and compact h-TENG is further installed into a morphing wing of small UAVs for efficiently converting the flapping energy of ailerons into electricity for the first time.This research demonstrates this new conceptualizing single h-TENG device’s versatility and viability for broad-range real-world application scenarios. 展开更多
关键词 Honeycomb-inspired structure Morphing wing energy harvesting electret power generation Triboelectric nanogenerator Self-powered insole pressure mapping
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The aerosol penetration through an electret fibrous filter 被引量:2
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作者 姜伟 张镇顺 +1 位作者 陈昌麒 朱超 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第8期1864-1870,共7页
The aim of this paper is to present a theoretical study of the aerosol penetration through an electret fibrous filter, using a numerical approach. The aerosol sizes considered in this study were in the submicron range... The aim of this paper is to present a theoretical study of the aerosol penetration through an electret fibrous filter, using a numerical approach. The aerosol sizes considered in this study were in the submicron range, and in the numerical model, the conventional mechanical mechanisms (impaction, interception, diffusion and gravitationally settling) were taken into consideration along with the electrostatic mechanisms, including the Coulombic and dielectrophoretic effects. The aerosol penetration through an electret fibrous filter is heavily dependent on the aerosol penetration of a single fibre. The aerosol penetration through a single electret fibre under various filtration conditions was calculated. The effects of aerosol diameter, aerosol and fibre charge state, face velocity, packing density and aerosol dielectric constant on the aerosol penetration were investigated. 展开更多
关键词 electrostatic mechanism mechanical mechanism aerosol penetration through an electret fibre
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Inhibition effects of a negative electret 5-FU patch on the growth of a hypertrophic scar 被引量:1
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作者 Wang YUAN Lili XU +3 位作者 Ping HUANG Xiaoqiang AN Lili CUI Jian JIANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第5期78-83,共6页
In this study,the hypertrophic scar(HS) model in rats was established.5-fluorouracil(5-FU)patch,-1000 V and-2000 V polypropylene(PP) electret 5-FU patches were prepared and applied onto the wound.The in vitro pe... In this study,the hypertrophic scar(HS) model in rats was established.5-fluorouracil(5-FU)patch,-1000 V and-2000 V polypropylene(PP) electret 5-FU patches were prepared and applied onto the wound.The in vitro permeation experiment was performed using the Franz diffusion cell system to determine the permeation cumulative amount and retention amount of5-FU through/in scar skin.The inhibition effect of negative electret on growth of HS was studied by hematoxylin-eosin(HE) staining,Masson staining and the immunohistologicall methods.The permeation study indicated that a negative electret could enhance the permeation and retention of 5-FU through and in scar skin respectively.HE staining and Masson staining indicated a better effect for-1000 V and-2000 V electret 5-FU patches on HS inhibition after28 d post-wounding compared with 5-FU patch.The immunohistological study showed much more reduced expressions of collegan type I,collegan type III,TGF-β1 and HSP47 in scar tissue after application of negative electret 5-FU patches than those of 5-FU patch.A negative electret5-FU patch may be advantageous for HS treatment. 展开更多
关键词 electret hypertrophic scar 5-FLUOROURACIL PATCH COLLAGEN TGF-β HSP47
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Optimization of Out-of-Plane Vibration Energy Harvesters Employing Electret 被引量:1
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作者 Chunhui Gao Shiqiao Gao +2 位作者 Haipeng Liu Lei Jin Junhu Lu 《Journal of Beijing Institute of Technology》 EI CAS 2017年第3期304-310,共7页
This paper investigated the dependence of out-of-plane electret-based vibration energy harvesters’output power,frequency bandwidth,and resonance frequency on surface charge density and load resistance.As the external... This paper investigated the dependence of out-of-plane electret-based vibration energy harvesters’output power,frequency bandwidth,and resonance frequency on surface charge density and load resistance.As the external acceleration amplitude and electret size were held constant,the following results are predicted by the numerical investigation:(1)An optimum value exists in the surface charge density to maximize the output power.As the surface charge density is increasing,electrostatic forces are enhanced,which emphasizes that the soft spring effect widens the frequency bandwidth and lowers the resonance frequency.(2)Different surface charge densities correspond to different optimum initial air gaps,resonance frequency,and optimum load resistance.(3)With the attenuation of the surface potential,the output power,frequency drift,and frequency bandwidth decreased.(4)An optimum value exists in the load resistance to maximize the output power.As the load resistance is decreasing,electrostatic force is enhanced,which lowers the resonance frequency.(5)A maximum frequency bandwidth exists with further load resistance increasing,and the initial air gap is smaller,the greater the frequency bandwidth. 展开更多
关键词 electret OPTIMUM surface charge density load resistance
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Effect of heating treatment on trap level distribution in polyamide 66 film electrets
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作者 徐佩 张兴元 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第3期541-544,共4页
The effect of heating treatment on the trap level distribution in polyamide 66 film electret is studied by thermally stimulated depolarization current (TSDC) technique. For annealed polyamide 66, there are three tra... The effect of heating treatment on the trap level distribution in polyamide 66 film electret is studied by thermally stimulated depolarization current (TSDC) technique. For annealed polyamide 66, there are three trap levels that respectively originate from space charge trapped in amorphous phase, interphase and crystalline phase. There is one peak that originates from space charge trapped in amorphous phase for quenched one. Using multi-point method to fit the experimental curves, the detrapping current peaks can be separated and the trap depth is obtained. The shallower trap levels trapped in amorphous phase and interphase are obviously close to the deeper trap level trapped in crystalline phase for annealed polyamide 66 as the polarization temperature increases, while the trap level distribution remains unaffected by polarization temperature for quenched one. 展开更多
关键词 polyamide 66 film electret thermally stimulated depolarization current heating treatment
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Evaluations of dielectric property and drug release profile of 5-FU patches based on plasma charged electrets
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作者 苑旺 梁合鹃 +3 位作者 黄平 安晓强 江键 崔黎丽 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第5期110-116,共7页
In the present study,the electret 5-fluorouracil patch was developed,the effective surface potential,piezoelectric coefficient d33,open-circuit thermally stimulated discharge(TSD) current spectra and shear adhesion ... In the present study,the electret 5-fluorouracil patch was developed,the effective surface potential,piezoelectric coefficient d33,open-circuit thermally stimulated discharge(TSD) current spectra and shear adhesion of the patch were measured.The drug release profile of the patch was determined by using high performance liquid chromatography method.A stable potential difference which was positively dependent on the surface potential of the electret was generated on two sides of the patch.The measurements of d33 coefficient,TSD current spectra and adhesion performance showed that the electrostatic field of the electret could cause polarization and cohesive strength decreasing of the matrix molecules,change the distribution and interaction of the drug molecules in patch,therefore to increase the release of drug from the transdermal patch. 展开更多
关键词 electret hypertrophic scar thermally stimulated discharge current 5-fluorouracil patch piezoelectric coefficient
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Charge dynamic characteristics in corona-charged polytetrafluoroethylene film electrets
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作者 陈钢进 肖慧明 朱春凤 《Journal of Zhejiang University Science》 EI CSCD 2004年第8期923-927,共5页
In this work, the charge dynamics characteristics of injection, transport and decay in porous and non-porous polytetrafluoroethylene (PTFE) film electrets were investigated by means of corona charging, isothermal and ... In this work, the charge dynamics characteristics of injection, transport and decay in porous and non-porous polytetrafluoroethylene (PTFE) film electrets were investigated by means of corona charging, isothermal and thermal stimulating surface-potential decay measurements. The results showed that the initial surface potential, whether positively or negatively charging, is much higher in non-porous PTFE than in porous PTFE. For porous film the value of initial sur-face potentials increases with increase of film thickness. Higher charging temperature can remarkably improve charge stability. The charge dynamics are correlated to materials microstructure according to their scanning electron micrographs.For non-porous PTFE films, polarizability change of C-F bonds is the main origin of electret charges; but for porous PTFE film a large number of bulk and interface type traps are expected because of the greater area of interface and higher crys-tallinity. 展开更多
关键词 Polymer electrets Charge dynamics Material microstructure
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TRAITEMENT DES PSEUDARTHROSES AVEC DES FILMS D'ELECTRETE——A PROPOS DE 12 CAS
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作者 郑纯波 马元璋 +3 位作者 陈正中 张和康 王寿泰 张国光 《Medical Bulletin of Shanghai Jiaotong University》 CAS 1991年第1期92-98,共7页
Since 1982, the authors made research on the electret film FEP (fluorine ethylene-propylene; trade name: Bone-curing film) which was used to wrap on the surface on the limb for promoting bone union. From 1984, they us... Since 1982, the authors made research on the electret film FEP (fluorine ethylene-propylene; trade name: Bone-curing film) which was used to wrap on the surface on the limb for promoting bone union. From 1984, they used the electret film to treat 12 cases of nonunion. After 2-8 months of treatment and observation, among these 12 cases only 1 case which has lost of follow-up, 8 cases were united and 3 cases remained united. 展开更多
关键词 electret NONUNION
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A New Electrostatic Generator Driven by Only an Electric Field of an Electret
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作者 Katsuo Sakai 《Journal of Electromagnetic Analysis and Applications》 2021年第12期161-171,共11页
Today, the sun is a very useful source of energy because it continuously radiates energy. An electron is radiating energy continuously, too. A new electrostatic generating method using this electric field energy from ... Today, the sun is a very useful source of energy because it continuously radiates energy. An electron is radiating energy continuously, too. A new electrostatic generating method using this electric field energy from electrons as a driving force of charge carriers was invented, and its success was presented on ESA 2017 and ESA 2019. This new electrostatic generator was realized by asymmetric electrostatic force, which is a new phenomenon. Unfortunately, its experimental success rate was rare. Therefore, the cause was searched by many experiments. Finally, it became apparent that the acceleration force of the charge carrier was not stronger than the deceleration force of the charge carrier with this experimental equipment. Therefore, the electrode arrangement of this equipment was improved. As a result, the acceleration force was increased, and the deceleration force was decreased. Then, the experimental success rate became 100%. 展开更多
关键词 Electrostatic Generator electret Asymmetric Electrostatic Force Charge Carrier Asymmetric Shape Charged Conductor
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Electrets Properties of Polyethylene Films with Starch and Aerosil
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作者 Dmitry Temnov Elena Fomicheva Boris Tazenkov Elena Karulina Yuri Gorokhovatsky 《材料科学与工程(中英文A版)》 2013年第7期494-498,共5页
关键词 聚乙烯薄膜 驻极体 淀粉 可生物降解 性质 聚乙烯膜 稳定性 组合物
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Inhibiting scar formation via wearable multilayer stacked electret patch:Self-creation of persistent and customizable DC electric field for fibrogenic activity restriction 被引量:1
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作者 Sung-Won Kim Sumin Cho +10 位作者 Donghan Lee Jiyu Hyun Sunmin Jang Inwoo Seo Hyun Su Park Hee Jae Hwang Hyung-Seop Han Dae Hyeok Yang Heung Jae Chun Suk Ho Bhang Dongwhi Choi 《InfoMat》 SCIE CSCD 2024年第3期66-80,共15页
Electrical stimulation has recently received attention as noninvasive treatment in skin wound healing with its outstanding biological property for clinical setting.However,the complexity of equipment for applying appr... Electrical stimulation has recently received attention as noninvasive treatment in skin wound healing with its outstanding biological property for clinical setting.However,the complexity of equipment for applying appropriate electrical stimulation remains an ongoing challenge.Here,we proposed a strategy for skin scar inhibition by providing electrical stimulation via a multilayer stacked electret(MS-electret),which can generate direct current(DC)electric field(EF)without any power supply equipment.In addition,the MS-electret can easily control the intensity of EFs by simply stacking electret layers and maintain stable EF with the surface potential of 3400 V over 5 days owing to the injected charges on the electret surface.We confirmed inhibition of type 1 collagen andα-SMA expression of human dermal fibroblasts(hDFs)by 90%and 44%in vitro,indicating that the transition of hDFs to myofibroblasts was restricted by applying stable electrical stimulation.We further revealed a 20%significant decrease in the ratio of myofibroblasts caused by the MS-electret in vivo.These findings present that the MS-electret is an outstanding candidate for effective skin scar inhibition with a battery-free,physiological electrical microenvironment,and noninvasive treatment that allows it to prevent external infection. 展开更多
关键词 DC electric field dermal fibroblasts electret scar formation restriction self-creation of electrical stimulation
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Experimental and theoretical analysis of loading characteristics of electret filter media for charged particles
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作者 Yiqi Cai Rongrong Cai Lizhi Zhang 《Particuology》 SCIE EI CAS CSCD 2024年第10期87-98,共12页
The degradation of filtration performance in electret filter media during usage poses a significant challenge. Pre-charging of aerosols has been identified as an effective method to mitigate this issue. However, the e... The degradation of filtration performance in electret filter media during usage poses a significant challenge. Pre-charging of aerosols has been identified as an effective method to mitigate this issue. However, the effects of particle charging characteristics on the loading characteristics of electret filters still need a comprehensive understanding. In this study, a needle-cylinder corona charger was employed to pre-charge aerosols, and the particle charge state was determined by multiphysics simulation. The effects of particle charge polarity and charge quantity on the loading performance of the electret filter were quantitatively investigated. The results showed that the particle charge polarity had a negligible impact on the loading performance under the condition of the equivalent particle charge quantity. In addition, the charged particles effectively improved the efficiency degradation during the loading process of electret media, with higher charge quantities resulting in more pronounced improvements. The electrostatic attenuation factor showed a negative exponential correlation with the particle charge quantity. This was attributed to the uneven particle deposition on fiber surface due to the attraction of charged particles by the opposite charges on the electret fibers, which alleviated the effect of electrostatic shielding. 展开更多
关键词 electret filter Charged particles Loadingcharacteristic Corona charging Electrostatic screening
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Enhanced Flexoelectric Response from Functionally Gradient Electrets Undergoing Crumpling Deformation
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作者 Jianhua Ma Jinrui Xu +1 位作者 Jun Li Binglei Wang 《Acta Mechanica Solida Sinica》 SCIE EI CSCD 2024年第4期541-554,共14页
Non-uniform deformation of the dielectric subjected to external forces can induce the flexoelectric effect, a phenomenon that couples electrical polarization to strain gradients. However, limited by the size effects, ... Non-uniform deformation of the dielectric subjected to external forces can induce the flexoelectric effect, a phenomenon that couples electrical polarization to strain gradients. However, limited by the size effects, flexoelectricity is not significant at the macroscale and only becomes catchable at the microscale and nanoscale. In recent work, we obtained a considerable flexoelectric-like response by crumpling the dielectric embedded with charges, i.e., the electret, which significantly improved the flexoelectric effect at the macroscale. In this work, we further optimize the macroscopic performance of the flexoelectric response by applying gradient treatment to the electret films. Specifically, we analytically derive the electromechanical coupling of crumpled electret films with gradients of different thicknesses, charge densities, and Young’s moduli as key design variables. It is shown that the gradient-oriented electret film can be tuned to nearly five times that of a uniform electret film. 展开更多
关键词 Functionally gradient electret Size effects Crumpling Flexoelectric-like response
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Ferroelectrets:Heterogenous polymer electrets with high piezoelectric sensitivity for transducers 被引量:1
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作者 Xunlin Qiu Peng Fang +4 位作者 Axel Mellinger Ruy Alberto Pisani Altafim Werner Wirges Gunnar Gidion Dmitry Rychkov 《Journal of Advanced Dielectrics》 2023年第4期3-26,共24页
Nowadays,the demand for advanced functional materials in transducer technology is growing rapidly.Piezoelectric materials transform mechanical variables(displacement or force)into electrical signals(charge or voltage)... Nowadays,the demand for advanced functional materials in transducer technology is growing rapidly.Piezoelectric materials transform mechanical variables(displacement or force)into electrical signals(charge or voltage)and vice versa.They are interesting from both fundamental and application points of view.Ferrooelectrets(also called piezoelectrets)are a relatively young group of piezo-,pyro-and ferroelectric materials.They exhibit ferroic behavior phenomenologically undistinguishable from that of traditional ferroelectrics,although the materials per se are essentially non-polar space-charge electrets with artificial macroscopic dipoles(i.e.,internally charged cavities).A lot of work has been done on ferroelectrets and their applications up to now.In this paper,we review and discuss mostly the work done at University of Potsdam on the research and development of ferroelectrets.We will,however,also mention important results from other teams,and prospect the challenges and future progress trend of the field of ferroelectret research. 展开更多
关键词 Ferroelectret piezoelectret space-charge electret TRANSDUCER advanced functional materials
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History and recent progress in ferroelectrets produced in Brazil 被引量:1
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作者 Ruy Alberto Pisani Altafim Ruy Alberto Corrêa Altafim 《Journal of Advanced Dielectrics》 2023年第4期27-34,共8页
More than 30 years ago,a group of researchers in Tampere-Finland developed a thin foamed polymeric material for capacitive sensors.Such soft-voided films exhibited electrical charging characteristics,forming a powerfu... More than 30 years ago,a group of researchers in Tampere-Finland developed a thin foamed polymeric material for capacitive sensors.Such soft-voided films exhibited electrical charging characteristics,forming a powerful combination,which resulted in a smart-material with ferroelectric properties.The discovery of the electro-thermo mechanical film(ETMF)has sparked the curiosity of the electret community,leading to the development of several studies.At that time,ETMF became known as cellular electrets and,later,as ferroelectrets or piezoelectrets regarding their electromechanical properties.This paper provides a timeline review of the research on ferroelectrets produced in Brazil,between the years 1990 and 2020,towards demonstrating how the interest in the electret electrical charging mechanism has resulted in the use of ferroelectrets with well-controlled cavities for ultrasound applications. 展开更多
关键词 Cellular electrets piezoelectrets FERROelectretS electromechanical films
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Multilayered electret films based triboelectric nanogenerator 被引量:14
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作者 Tao Zhou Limin Zhang +3 位作者 Fei Xue Wei Tang Chi Zhang Zhong Lin wang 《Nano Research》 SCIE EI CAS CSCD 2016年第5期1442-1451,共10页
A triboelectric nanogenerator (TENG) is a simple and cost effective device that converts ambient mechanical energy into electricity based on the surface contact electrification of thin films. The limited surface cha... A triboelectric nanogenerator (TENG) is a simple and cost effective device that converts ambient mechanical energy into electricity based on the surface contact electrification of thin films. The limited surface charge density may affect the overall performance of the TENG. In this paper, a novel electret film based TENG (E-TENG) fabricated by corona charging is proposed that greatly enhances the effective surface charge density of the thin films as compared to those subjected to contact electrification. The short-circuit current, transferred electric charge density, and open-circuit voltage of the E-TENG have been investigated, using different corona charging voltages, pinpoint distances and times in order to explore the optimum experimental conditions. The short-circuit current, transferred electric charge density, and open-circuit voltage of the E-TENG are found to be about seven times larger than those of the ordinary polytetrafluoroethylene (PTFE) film based TENG. Based on corona charging, several multilayered E-TENGs have been fabricated, and the short-circuit current, transferred electric charge density, and open-circuit voltage of the E-TENGs with different number of layers are studied for achieving optimal performances. This work offers an effective approach for improving the effective surface charge density and thereby increasing the output capability of the TENG, which would greatly promote TENG applications in self-powered portable electronics and sensor networks. 展开更多
关键词 triboelectric nanogenerator electret thin film corona charging energy harvesting
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Au nanocomposite enhanced electret film for triboelectric nanogenerator 被引量:8
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作者 Bao Dong Chen Wei Tang +8 位作者 Chi Zhang Liang Xu Lai Pan Zhu Lei Jing Yang Chuan He Jian Chen Long Liu Tao Zhou Zhong Lin Wang 《Nano Research》 SCIE EI CAS CSCD 2018年第6期3096-3105,共10页
A triboelectric nanogenerator (TENG) with an organic nanocomposite electret thin film as the triboelectric layer for mechanical energy harvesting was investigated systematically. In combination with corona charging,... A triboelectric nanogenerator (TENG) with an organic nanocomposite electret thin film as the triboelectric layer for mechanical energy harvesting was investigated systematically. In combination with corona charging, a TENG was fabricated by using embedded-nanocapacitor-structure polytetrafluoroethylene (PTFE) impregnated with gold nanoparticles (Au-NPs). The output performances, stability, and durability of the TENGs with Au-PTFE nanocomposite films were characterized after being washed in water. It was found that the output current increases by 70% and the equivalent surface charge density (ESCD) reaches 85 μC/m^2 in comparison to the virgin PTFE film. Such outstanding performance is likely due to the equivalent nanocapacitors between the Au-NPs and PTFE molecules, which serve as nano charge traps in the nanocomposite electret film under negative high-voltage corona charging. This work not only expands the practical applications of TENGs, but also opens up new possibilities for the development of high performance triboelectric materials. 展开更多
关键词 equivalent nanocapacitor structure polytetrafluoroethylene(PTFE) electret thin film gold nanoparticles equivalent surface charge density
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Multi-block electret-based mechanical antenna model for low frequency communication 被引量:5
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作者 Bowen Liang Yong Cui +2 位作者 Xiao Song Liangya Li Chen Wang 《International Journal of Modeling, Simulation, and Scientific Computing》 EI 2019年第5期143-155,共13页
In an LF/VLF transmission system,the performance of the antenna is of great importance to the entire system.Currently,the electret-based mechanical LF/VLF antenna uses mechanical movement to accelerate electret charge... In an LF/VLF transmission system,the performance of the antenna is of great importance to the entire system.Currently,the electret-based mechanical LF/VLF antenna uses mechanical movement to accelerate electret charges to produce LF/VLF electromagnetic waves,and the frequency of these electromagnetic waves is limited by the rotation speed of the actuating motor.Based on research that addressed the relationship between antenna structure and electromagnetic wave frequency,this paper—in order to increase the frequency of electromagnetic waves—alters the charge distribution mode of the mechanical antenna while keeping the motor’s rotational speed constant to realize an increase of transmission signal frequency.The effectiveness of this method was verified by model simulation. 展开更多
关键词 electret LF/VLF antenna model magnetic field computing
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Study on PECVD SiO_2 /Si_3 N_4 double-layer electrets with different thicknesses 被引量:1
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作者 ZOU XuDong ZHANG JinWen 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第8期2123-2129,共7页
In this paper, performance of PECVD SiO 2 /Si 3 N 4 double layers electrets with different thicknesses were investigated detailedly in respect of chargeability, storage charge stability in high temperature and reliabi... In this paper, performance of PECVD SiO 2 /Si 3 N 4 double layers electrets with different thicknesses were investigated detailedly in respect of chargeability, storage charge stability in high temperature and reliability in high humidity environment. Samples with different thicknesses of Si 3 N 4 and SiO 2 were prepared on Pyrex 7740 glass substrates and characterized by isothermal and high humidity charge decay. The results of experiment approved that the PECVD SiO 2 /Si 3 N 4 double layers electrets on glass substrate has as good chargeability and charge stability in high temperature and high humidity environment as thermal oxidation or APCVD/LPCVD ones on silicon substrates. The experiment results indicated that a Si 3 N 4 layer no less than 50 nm is necessary for good charge stability in high temperature and a Si 3 N 4 layer thicker than 500 nm decreases the chargeability. Even a 2 nm Si 3 N 4 layer is enough to significantly improve the charge stability in high humidity environment. Thick SiO 2 layer can increase the surface potential of electrets under the same charging condition and its charge stability in high temperature. However, the electrets with high surface potential also exhibit poor uniformity of charge stability in high humidity environment. 展开更多
关键词 PECVD SiO 2 /Si 3 N 4 double layer electretS thicknesses
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Mechanical characteristics of SiO_2 electrets
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作者 常利 雒建斌 张伟 《Science China(Technological Sciences)》 SCIE EI CAS 2002年第4期444-448,共5页
1μm SiO2 layer was thermally grown on silicon wafer. Negative and positive charging of SiO2 layer was performed by means of corona method at room temperature. By controlling grid voltage, we have obtained uniformly c... 1μm SiO2 layer was thermally grown on silicon wafer. Negative and positive charging of SiO2 layer was performed by means of corona method at room temperature. By controlling grid voltage, we have obtained uniformly charged SiO2 with surface potential from 500 to +200 V. With certain electric field, the electrostatic force between charged SiO2 is investigated. Experimental results indicate that attraction not only exists between charged SiO2 with different polarity, but also exists between charged SiO2 with the same polarity, and no repulsion has been observed. The attractive force is related to both surface potential difference of charged SiO2 and the uniformity of the electric field. Based on the experiment, the attractive force is supposed to be caused by polarization when two charged SiO2 wafers are close. 展开更多
关键词 SiO2 electret electrostatic MECHANICAL characteristics.
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