In this paper,we propose a BPR-CNN(Biometric Pattern Recognition-Convolution Neural Network)classifier for hand motion classification as well as a dynamic threshold algorithm for motion signal detection and extraction...In this paper,we propose a BPR-CNN(Biometric Pattern Recognition-Convolution Neural Network)classifier for hand motion classification as well as a dynamic threshold algorithm for motion signal detection and extraction by EF(Electric Field)sensors.Currently,an EF sensor or EPS(Electric Potential Sensor)system is attracting attention as a next-generationmotion sensing technology due to low computation and price,high sensitivity and recognition speed compared to other sensor systems.However,it remains as a challenging problem to accurately detect and locate the authentic motion signal frame automatically in real-time when sensing body-motions such as hand motion,due to the variance of the electric-charge state by heterogeneous surroundings and operational conditions.This hinders the further utilization of the EF sensing;thus,it is critical to design the robust and credible methodology for detecting and extracting signals derived from the motion movement in order to make use and apply the EF sensor technology to electric consumer products such as mobile devices.In this study,we propose a motion detection algorithm using a dynamic offset-threshold method to overcome uncertainty in the initial electrostatic charge state of the sensor affected by a user and the surrounding environment of the subject.This method is designed to detect hand motions and extract its genuine motion signal frame successfully with high accuracy.After setting motion frames,we normalize the signals and then apply them to our proposed BPR-CNN motion classifier to recognize their motion types.Conducted experiment and analysis show that our proposed dynamic threshold method combined with a BPR-CNN classifier can detect the hand motions and extract the actual frames effectively with 97.1%accuracy,99.25%detection rate,98.4%motion frame matching rate and 97.7%detection&extraction success rate.展开更多
Resolvers are normally employed for rotor positioning in motors for electric vehicles, but resolvers are expensive and vulnerable to vibrations. Hall sensors have the advantages of low cost and high reliability, but t...Resolvers are normally employed for rotor positioning in motors for electric vehicles, but resolvers are expensive and vulnerable to vibrations. Hall sensors have the advantages of low cost and high reliability, but the positioning accuracy is low. Motors with Hall sensors are typically controlled by six-step commutation algorithm, which brings high torque ripple. This paper studies the high-performance driving and braking control of the in-wheel permanent magnetic synchronous motor (PMSM) based on low-resolution Hall sensors. Field oriented control (FOC) based on Hall-effect sensors is developed to reduce the torque ripple. The positioning accuracy of the Hall sensors is improved by interpolation between two consecutive Hall signals using the estimated motor speed. The position error from the misalignment of the Hall sensors is compensated by the precise calibration of Hall transition timing. The braking control algorithms based on six-step commutation and FOC are studied. Two variants of the six-step commutation braking control, namely, half-bridge commutation and full-bridge commutation, are discussed and compared, which shows that the full-bridge commutation could better explore the potential of the back electro-motive forces (EMF), thus can deliver higher efficiency and smaller current ripple. The FOC braking is analyzed with the phasor diagrams. At a given motor speed, the motor turns from the regenerative braking mode into the plug braking mode if the braking torque exceeds a certain limit, which is proportional to the motor speed. Tests in the dynamometer show that a smooth control could be realized by FOC driving control and the highest efficiency and the smallest current ripple could be achieved by FOC braking control, compared to six-step commutation braking control. Therefore, FOC braking is selected as the braking control algorithm for electric vehicles. The proposed research ensures a good motor control performance while maintaining low cost and high reliability.展开更多
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combin...This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.展开更多
After solution treatment, the 1420 Al-Li alloy samples were aged at different temperatures in an electric field with different intensity. The measurements made showed that the electric field increased the strength of ...After solution treatment, the 1420 Al-Li alloy samples were aged at different temperatures in an electric field with different intensity. The measurements made showed that the electric field increased the strength of the 1420 Al-Li alloy, and best properties were obtained when they were aged at 120 ℃ with E=4 kV/cm for 12 hrs. The electric field promoted the nucleation of δ′ phase, increased the quantity of the δ′ phase, and made the size of the δ′ phase particles smaller. The electric field restrained the formation and growth of PFZ, and increased the intensity of the electric field while the width of the PFZ was decreased.展开更多
The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibratin...The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.展开更多
Sea surface electric field observations off the coast from Goa (15°25'N, 73°47'E) to Madras (13°04'N, 80°15'E) around Sri Lanka, in a distance range 25-135 km from coast, during 9-2...Sea surface electric field observations off the coast from Goa (15°25'N, 73°47'E) to Madras (13°04'N, 80°15'E) around Sri Lanka, in a distance range 25-135 km from coast, during 9-20 May 1983 were taken. In this paper we have examined the diurnal variation of electric field in the Arabian Sea, Indian Ocean and Bay of Bengal regions covered during the cruise of the research ship ORV Gaveshani. An aspect of electric field dependence on coastal distance and Aitken Nuclei concentration has also been studied. An attempt to examine the latitude dependence of field was also made. Results obtained in the above studies are presented and compared with those obtained elsewhere.展开更多
For cases in which a robot with installed solar cells and a sensor operates in a nuclear reactor building or in space for extravehicular activity, we require elastic and extensible solar cells. More than two different...For cases in which a robot with installed solar cells and a sensor operates in a nuclear reactor building or in space for extravehicular activity, we require elastic and extensible solar cells. More than two different types of sensing are also required, minimally with photovoltaics and built-in electricity. Magnetic compound fluid (MCF) rubber solar cells are made of rubber, so they are elastic and extensible as well as sensitive. To achieve flexibility and an effective photovoltaic effect, MCF rubber solar cells must include both soluble and insoluble rubbers, Fe<sub>3</sub>O<sub>4</sub>, TiO<sub>2</sub>, Na<sub>2</sub>WO<sub>4</sub>∙2H<sub>2</sub>O, etc. On the basis of this constitution, we propose a consummate fabrication process for MCF rubber solar cells. The characteristics of these cells result from the semiconductor-like role of the molecules of TiO<sub>2</sub>, Fe<sub>3</sub>O<sub>4</sub>, Ni, Na<sub>2</sub>WO<sub>4</sub>∙2H<sub>2</sub>O, polydimethylsiloxane (PDMS), natural rubber (NR), oleic acid, polyvinyl alcohol (PVA), water and magnetic cluster involved in the MCF rubber. Their tendencies can be deduced by synthesizing knowledge about the enhancement of the reverse-bias saturation current <em>I</em><sub><em>S</em></sub> and the diode ideality factor <em>N</em>, with conventional knowledge about the semiconductor affected by <em>γ</em>-irradiation and the attenuation of the photon energy of <em>γ</em>-rays.展开更多
The variations noticed in the atmospheric electric field recorded at Pune (18°32'N, 73°51'E, 559 m ASL), a tropical inland station located in Dcccan Plateau, India, during the period 1930-1987, have ...The variations noticed in the atmospheric electric field recorded at Pune (18°32'N, 73°51'E, 559 m ASL), a tropical inland station located in Dcccan Plateau, India, during the period 1930-1987, have been examined in relation to the variations observed in the Angstrom turbidity coefficient (β) and selected meteorological parameters. The monthly and annual mean values of the atmospheric electric field. Angstrom turbidity coefficient (β), rainfall, temperature and relative humidity for the years 1930-1938, 1957-1958, 1964-1965, 1973-1974 and 1987 were considered in the study.The results of the above study indicated gradual increases in the atmospheric electric field over the period of study (1930-1987) which is statistically significant at less than 5%level. The increases noticed during different periods varied from 30 to 109%. The increase noticed during the period (1930-1938) and (1973-1974) was maximum (109%). The Angstrom turbidity coefficient also showed systematic increases during the period of study, which is consistent. The diurnal curve of the atmospheric electric field at the station by and large, showed a double oscillation, which is generally observed in the conlinental environments.展开更多
This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the...This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.展开更多
Large-bandwidth,high-sensitivity,and large dynamic range electric field sensors are gradually replacing their traditional counterparts.The lithium-niobate-on-insulator(LNOI)material has emerged as an ideal platform fo...Large-bandwidth,high-sensitivity,and large dynamic range electric field sensors are gradually replacing their traditional counterparts.The lithium-niobate-on-insulator(LNOI)material has emerged as an ideal platform for developing such devices,owing to its low optical loss,high electro-optical modulation efficiency,and significant bandwidth potential.In this paper,we propose and demonstrate an electric field sensor based on LNOI.The sensor consists of an asymmetric Mach–Zehnder interferometer(MZI)and a tapered dipole antenna array.The measured fiber-to-fiber loss is less than−6.7 dB,while the MZI structure exhibits an extinction ratio of greater than 20 dB.Moreover,64-QAM signals at 2 GHz were measured,showing an error vector magnitude(EVM)of less than 8%.展开更多
In planning and executing marine controlled-source electromagnetic methods, seafloor electromagnetic receivers must overcome the problems of noise, clock drift, and power consumption. To design a receiver that perform...In planning and executing marine controlled-source electromagnetic methods, seafloor electromagnetic receivers must overcome the problems of noise, clock drift, and power consumption. To design a receiver that performs well and overcomes the abovementioned problems, we performed forward modeling of the E-field abnormal response and established the receiver's characteristics. We describe the design optimization and the properties of each component, that is, low-noise induction coil sensor, low-noise Ag/AgCI electrode, low-noise chopper amplifier, digital temperature-compensated crystal oscillator module, acoustic telemetry modem, and burn wire system. Finally, we discuss the results of onshore and offshore field tests to show the effectiveness of the developed seafloor electromagnetic receiver and its performance: typical E-field noise of 0.12 nV/m/rt(Hz) at 0.5 Hz, dynamic range higher than 120 dB, clock drift lower than 1 ms/day, and continuous operation of at least 21 days.展开更多
圆片级真空封装是提高微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)电场传感器品质因数及批量化制造效率的重要途径.本文提出了一种基于绝缘体上硅(Silicon On Insulator,SOI)-玻璃体上硅(Silicon On Glass,SOG)键合的圆片...圆片级真空封装是提高微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)电场传感器品质因数及批量化制造效率的重要途径.本文提出了一种基于绝缘体上硅(Silicon On Insulator,SOI)-玻璃体上硅(Silicon On Glass,SOG)键合的圆片级真空封装MEMS电场传感器,设计并实现了从传感器敏感结构制备到真空封装的整套圆片级加工工艺.本文建立了传感器的结构电容模型,进行了有限元仿真,分析了传感器的特性,突破了传感器微结构制备与释放、SOI与SOG键合等工艺技术难点.该传感器具有工作电压低、品质因数高的突出优点.实验结果表明,工作电压仅为5 V直流与0.05 V交流电压.在60天测试过程中,传感器品质因数始终保持在5000以上.在0~50 kV/m范围内,传感器灵敏度为0.15 mV/(kV/m),线性度为2.21%,不确定度为4.74%.展开更多
使用正交排列的电容式传感单元的三维电场传感器(Three-dimensional electric field sensor,3D EFS)测量空间电场时,轴间耦合效应会严重影响EFS的测量精度。为此,提出了一种电场屏蔽电极,以降低3D EFS的轴间耦合效应,提高测量精度。首先...使用正交排列的电容式传感单元的三维电场传感器(Three-dimensional electric field sensor,3D EFS)测量空间电场时,轴间耦合效应会严重影响EFS的测量精度。为此,提出了一种电场屏蔽电极,以降低3D EFS的轴间耦合效应,提高测量精度。首先,利用多物理场仿真软件构建电场分布模型。其次,根据仿真结果建立带屏蔽电极的3D EFS电容式传感单元的屏蔽电极模型。最后,建立任意角度的测试平台,将带有屏蔽电极的3D EFS和无屏蔽电极的3D EFS进行实验对比。结果显示,有屏蔽电极的3D EFS的测量偏差在3.2%以内,比无屏蔽电极的3D EFS的测量偏差减少12%。因此,所设计的基于电场屏蔽结构的3D EFS可以使解耦矩阵更加可靠,有效降低空间电场测量偏差。展开更多
基金This work was supported by the NRF of Korea grant funded by the Korea government(MIST)(No.2019 R1F1A1062829).
文摘In this paper,we propose a BPR-CNN(Biometric Pattern Recognition-Convolution Neural Network)classifier for hand motion classification as well as a dynamic threshold algorithm for motion signal detection and extraction by EF(Electric Field)sensors.Currently,an EF sensor or EPS(Electric Potential Sensor)system is attracting attention as a next-generationmotion sensing technology due to low computation and price,high sensitivity and recognition speed compared to other sensor systems.However,it remains as a challenging problem to accurately detect and locate the authentic motion signal frame automatically in real-time when sensing body-motions such as hand motion,due to the variance of the electric-charge state by heterogeneous surroundings and operational conditions.This hinders the further utilization of the EF sensing;thus,it is critical to design the robust and credible methodology for detecting and extracting signals derived from the motion movement in order to make use and apply the EF sensor technology to electric consumer products such as mobile devices.In this study,we propose a motion detection algorithm using a dynamic offset-threshold method to overcome uncertainty in the initial electrostatic charge state of the sensor affected by a user and the surrounding environment of the subject.This method is designed to detect hand motions and extract its genuine motion signal frame successfully with high accuracy.After setting motion frames,we normalize the signals and then apply them to our proposed BPR-CNN motion classifier to recognize their motion types.Conducted experiment and analysis show that our proposed dynamic threshold method combined with a BPR-CNN classifier can detect the hand motions and extract the actual frames effectively with 97.1%accuracy,99.25%detection rate,98.4%motion frame matching rate and 97.7%detection&extraction success rate.
基金supported by National Hi-tech Research and Development Program of China (863 Program,Grant No.2008AA11A126)Program for New Century Excellent Talents in University of China (Grant No. NCET-10-0498)
文摘Resolvers are normally employed for rotor positioning in motors for electric vehicles, but resolvers are expensive and vulnerable to vibrations. Hall sensors have the advantages of low cost and high reliability, but the positioning accuracy is low. Motors with Hall sensors are typically controlled by six-step commutation algorithm, which brings high torque ripple. This paper studies the high-performance driving and braking control of the in-wheel permanent magnetic synchronous motor (PMSM) based on low-resolution Hall sensors. Field oriented control (FOC) based on Hall-effect sensors is developed to reduce the torque ripple. The positioning accuracy of the Hall sensors is improved by interpolation between two consecutive Hall signals using the estimated motor speed. The position error from the misalignment of the Hall sensors is compensated by the precise calibration of Hall transition timing. The braking control algorithms based on six-step commutation and FOC are studied. Two variants of the six-step commutation braking control, namely, half-bridge commutation and full-bridge commutation, are discussed and compared, which shows that the full-bridge commutation could better explore the potential of the back electro-motive forces (EMF), thus can deliver higher efficiency and smaller current ripple. The FOC braking is analyzed with the phasor diagrams. At a given motor speed, the motor turns from the regenerative braking mode into the plug braking mode if the braking torque exceeds a certain limit, which is proportional to the motor speed. Tests in the dynamometer show that a smooth control could be realized by FOC driving control and the highest efficiency and the smallest current ripple could be achieved by FOC braking control, compared to six-step commutation braking control. Therefore, FOC braking is selected as the braking control algorithm for electric vehicles. The proposed research ensures a good motor control performance while maintaining low cost and high reliability.
基金Supported by the National High Technology Research and Development Program of China(863 Program,2011AA-040405)the National Natural Science Foundation of China(Nos.61101049,61201078,61302032,61327810)
文摘This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.
文摘After solution treatment, the 1420 Al-Li alloy samples were aged at different temperatures in an electric field with different intensity. The measurements made showed that the electric field increased the strength of the 1420 Al-Li alloy, and best properties were obtained when they were aged at 120 ℃ with E=4 kV/cm for 12 hrs. The electric field promoted the nucleation of δ′ phase, increased the quantity of the δ′ phase, and made the size of the δ′ phase particles smaller. The electric field restrained the formation and growth of PFZ, and increased the intensity of the electric field while the width of the PFZ was decreased.
基金Supported by the National Natural Science Foundation of China (No.60172001).
文摘The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.
文摘Sea surface electric field observations off the coast from Goa (15°25'N, 73°47'E) to Madras (13°04'N, 80°15'E) around Sri Lanka, in a distance range 25-135 km from coast, during 9-20 May 1983 were taken. In this paper we have examined the diurnal variation of electric field in the Arabian Sea, Indian Ocean and Bay of Bengal regions covered during the cruise of the research ship ORV Gaveshani. An aspect of electric field dependence on coastal distance and Aitken Nuclei concentration has also been studied. An attempt to examine the latitude dependence of field was also made. Results obtained in the above studies are presented and compared with those obtained elsewhere.
文摘For cases in which a robot with installed solar cells and a sensor operates in a nuclear reactor building or in space for extravehicular activity, we require elastic and extensible solar cells. More than two different types of sensing are also required, minimally with photovoltaics and built-in electricity. Magnetic compound fluid (MCF) rubber solar cells are made of rubber, so they are elastic and extensible as well as sensitive. To achieve flexibility and an effective photovoltaic effect, MCF rubber solar cells must include both soluble and insoluble rubbers, Fe<sub>3</sub>O<sub>4</sub>, TiO<sub>2</sub>, Na<sub>2</sub>WO<sub>4</sub>∙2H<sub>2</sub>O, etc. On the basis of this constitution, we propose a consummate fabrication process for MCF rubber solar cells. The characteristics of these cells result from the semiconductor-like role of the molecules of TiO<sub>2</sub>, Fe<sub>3</sub>O<sub>4</sub>, Ni, Na<sub>2</sub>WO<sub>4</sub>∙2H<sub>2</sub>O, polydimethylsiloxane (PDMS), natural rubber (NR), oleic acid, polyvinyl alcohol (PVA), water and magnetic cluster involved in the MCF rubber. Their tendencies can be deduced by synthesizing knowledge about the enhancement of the reverse-bias saturation current <em>I</em><sub><em>S</em></sub> and the diode ideality factor <em>N</em>, with conventional knowledge about the semiconductor affected by <em>γ</em>-irradiation and the attenuation of the photon energy of <em>γ</em>-rays.
文摘The variations noticed in the atmospheric electric field recorded at Pune (18°32'N, 73°51'E, 559 m ASL), a tropical inland station located in Dcccan Plateau, India, during the period 1930-1987, have been examined in relation to the variations observed in the Angstrom turbidity coefficient (β) and selected meteorological parameters. The monthly and annual mean values of the atmospheric electric field. Angstrom turbidity coefficient (β), rainfall, temperature and relative humidity for the years 1930-1938, 1957-1958, 1964-1965, 1973-1974 and 1987 were considered in the study.The results of the above study indicated gradual increases in the atmospheric electric field over the period of study (1930-1987) which is statistically significant at less than 5%level. The increases noticed during different periods varied from 30 to 109%. The increase noticed during the period (1930-1938) and (1973-1974) was maximum (109%). The Angstrom turbidity coefficient also showed systematic increases during the period of study, which is consistent. The diurnal curve of the atmospheric electric field at the station by and large, showed a double oscillation, which is generally observed in the conlinental environments.
基金Supported by the National Natural Science Foundation of China (No.60172001).
文摘This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications.
基金supported by the National Key Research and Development Program of China(No.2021YFB2800104)the National Natural Science Foundation of China(Nos.62175079 and 62205119).
文摘Large-bandwidth,high-sensitivity,and large dynamic range electric field sensors are gradually replacing their traditional counterparts.The lithium-niobate-on-insulator(LNOI)material has emerged as an ideal platform for developing such devices,owing to its low optical loss,high electro-optical modulation efficiency,and significant bandwidth potential.In this paper,we propose and demonstrate an electric field sensor based on LNOI.The sensor consists of an asymmetric Mach–Zehnder interferometer(MZI)and a tapered dipole antenna array.The measured fiber-to-fiber loss is less than−6.7 dB,while the MZI structure exhibits an extinction ratio of greater than 20 dB.Moreover,64-QAM signals at 2 GHz were measured,showing an error vector magnitude(EVM)of less than 8%.
基金sponsored by the 863 Program(No.2009AA09A2012012AA09A201)+1 种基金China Geological Survey Project(No.201100307)the Fundamental Research Funds of the Ministry of Education for the Central Universities(No.2652011249)
文摘In planning and executing marine controlled-source electromagnetic methods, seafloor electromagnetic receivers must overcome the problems of noise, clock drift, and power consumption. To design a receiver that performs well and overcomes the abovementioned problems, we performed forward modeling of the E-field abnormal response and established the receiver's characteristics. We describe the design optimization and the properties of each component, that is, low-noise induction coil sensor, low-noise Ag/AgCI electrode, low-noise chopper amplifier, digital temperature-compensated crystal oscillator module, acoustic telemetry modem, and burn wire system. Finally, we discuss the results of onshore and offshore field tests to show the effectiveness of the developed seafloor electromagnetic receiver and its performance: typical E-field noise of 0.12 nV/m/rt(Hz) at 0.5 Hz, dynamic range higher than 120 dB, clock drift lower than 1 ms/day, and continuous operation of at least 21 days.
文摘圆片级真空封装是提高微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)电场传感器品质因数及批量化制造效率的重要途径.本文提出了一种基于绝缘体上硅(Silicon On Insulator,SOI)-玻璃体上硅(Silicon On Glass,SOG)键合的圆片级真空封装MEMS电场传感器,设计并实现了从传感器敏感结构制备到真空封装的整套圆片级加工工艺.本文建立了传感器的结构电容模型,进行了有限元仿真,分析了传感器的特性,突破了传感器微结构制备与释放、SOI与SOG键合等工艺技术难点.该传感器具有工作电压低、品质因数高的突出优点.实验结果表明,工作电压仅为5 V直流与0.05 V交流电压.在60天测试过程中,传感器品质因数始终保持在5000以上.在0~50 kV/m范围内,传感器灵敏度为0.15 mV/(kV/m),线性度为2.21%,不确定度为4.74%.