Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay caref...Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay careful attention to its equipment design and thedevelopment of process techniques. The present status of research and development of micro EDMequipment and process techniques is overviewed. A micro electro discharge machine incorporated withan inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine fordrilling micro holes suitable to industrial use is also introduced. Some of the machiningexperiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDMtechnology to practical use is discussed.展开更多
A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication proc...A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.展开更多
文摘Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay careful attention to its equipment design and thedevelopment of process techniques. The present status of research and development of micro EDMequipment and process techniques is overviewed. A micro electro discharge machine incorporated withan inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine fordrilling micro holes suitable to industrial use is also introduced. Some of the machiningexperiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDMtechnology to practical use is discussed.
文摘A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.
