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Effect of pretreatment on electrochemical etching behavior of Al foil in HCl-H_2SO_4 被引量:6
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作者 班朝磊 何业东 +1 位作者 邵鑫 杜鹃 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第4期1039-1045,共7页
The aluminum foil for high voltage aluminum electrolytic capacitor was immersed in 0.5 mol/L H3PO4 or 0.125 mol/L NaOH solution at 40 ℃ for different time and then DC electro-etched in 1 mol/L HC1+2.5 mol/L H2SO4 el... The aluminum foil for high voltage aluminum electrolytic capacitor was immersed in 0.5 mol/L H3PO4 or 0.125 mol/L NaOH solution at 40 ℃ for different time and then DC electro-etched in 1 mol/L HC1+2.5 mol/L H2SO4 electrolyte at 80 ℃. The pitting potential and self corrosion potential of A1 foil were measured with polarization curves (PC). The potentiostatic current--time curve was recorded and the surface and cross section images of etched A1 foil were observed with SEM. The electrochemical impedance spectroscopy (EIS) of etched A1 foil and potential transient curves (PTC) during initial etching stage were measured. The results show the chemical pretreatments can activate A1 foil surface, facilitate the absorption, diffusion and migration of C1- onto the A1 foil during etching, and improve the initiation rate of meta-stable pits and density of stable pits and tunnels, leading to much increase in the real surface area and special capacitance of etched A1 foil. 展开更多
关键词 A1 foil POLARIZATION pitting corrosion electrochemical etching AI electrolytic capacitor
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Preparation of Electrode Array by Electrochemical Etching Based on FEM
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作者 Minghuan WANG Di ZHU Lei WANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2008年第6期845-849,共5页
Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining (wire-EDM) and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and the... Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining (wire-EDM) and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and then machined into cylindrical shape by electrochemical etching. However, the shape of the multiple electrodes and the consistent sizes of the electrodes row are not easy to be controlled. In the electrochemical process, the shape of the cathode electrode determines the current density distribution on the anode and so the forming of multiple electrodes. This paper proposes a finite element method (FEM) to accurately optimize the electrode profile. The microelectrodes row with uniformity diameters with size from hundreds micrometers to several decades could be fabricated, and mathematical model controlling the shape and diameter of multiple microelectrodes was provided. Furthermore, a good agreement between experimental and theoretical results was confirmed. 展开更多
关键词 Electrode array electrochemical etching Finite element method (FEM) Micro-electrodes
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Selective electrochemical etching of cantilever-type SOI-MEMS devices
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作者 Xiuchun Hao Peiling He Xin Li 《Nanotechnology and Precision Engineering》 CAS CSCD 2022年第2期21-26,共6页
It is possible to achieve selective electrochemical etching between different materials,such as p-and n-type silicon.However,achieving selective electrochemical etching on two different regions of the same p-type sili... It is possible to achieve selective electrochemical etching between different materials,such as p-and n-type silicon.However,achieving selective electrochemical etching on two different regions of the same p-type silicon material is a problem that has rarely been considered.Herein,a novel selective electrochemical etching technique for cantilever-type silicon-on-insulator(SOI)wafer-based microswitches is proposed.In this study,a p-type handle layer was selectively etched,and a p-type device layer was passivated.This was achieved using a circuit with two voltage sources:voltages of−1.2 and 0 V were applied to the handle and device layers,respectively.It was found that the proposed etching process can effectively prevent the in-use sticking of a cantilever-type switch.This is accomplished by increasing the gap between the device layer and its underlying handle layer and increasing the roughness of these layers.The technique is applicable to the fabrication of various cantilever-type SOI microelectromechanical systems,irrespective of the resistivity of the SOI wafer. 展开更多
关键词 SOI-MEMS selective electrochemical etching cantilever-type switch STICKING
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Disordered wall arrays by photo-assisted electrochemical etching in n-type silicon 被引量:1
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作者 雷耀虎 赵志刚 +2 位作者 郭金川 李冀 牛憨笨 《Journal of Semiconductors》 EI CAS CSCD 2016年第10期88-92,共5页
The fabrication of ordered, high aspect-ratio microstructures in silicon by use of photo-assisted electrochemical etching is an important technology, where voltage and current density are significant factors. In this ... The fabrication of ordered, high aspect-ratio microstructures in silicon by use of photo-assisted electrochemical etching is an important technology, where voltage and current density are significant factors. In this paper, disordered walls appear in 5-inch n-type silicon wafers when a large current density is used. Based on the theory of space charge region, these disordered walls are caused by the contradiction between the protection from dissolution by a high applied voltage and the dissolution by a high current density. To verify this point, wall arrays were fabricated at different applied voltages and current densities. Moreover, the critical voltage was kept constant and different current densities were applied to obtain conditions for avoiding disordered walls and achieving uniform wall arrays. Finally, a wall array with a period of 5.6 μm and a depth of 55 μm was achieved at an applied voltage of 3 V and a monotonically increasing current density ranging from 22.9 to 24.5 mA/cm^2. 展开更多
关键词 electrochemical etching wall array high aspect-ratio SILICON disordered wall
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Green and scalable electrochemical routes for cost‐effective mass production of MXenes for supercapacitor electrodes 被引量:2
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作者 Zimo Huang Jiadong Qin +9 位作者 Yuxuan Zhu Kelin He Hao Chen Hui Ying Hoh Munkhbayar Batmunkh Tania MBenedetti Qitao Zhang Chenliang Su Shanqing Zhang Yu Lin Zhong 《Carbon Energy》 SCIE EI CAS CSCD 2023年第10期13-24,共12页
One of the most unique properties of two-dimensional carbides and nitrides of transition metals(MXenes)is their excellent water dispersibility and yet possessing superior electrical conductivity but their industrial-s... One of the most unique properties of two-dimensional carbides and nitrides of transition metals(MXenes)is their excellent water dispersibility and yet possessing superior electrical conductivity but their industrial-scale application is limited by their costly chemical synthesis methods.In this work,the niche feature of MXenes was capitalized in the packed-bed electrochemical reactor to produce MXenes at an unprecedented reaction rate and yield with minimal chemical waste.A simple NH4F solution was employed as the green electrolyte,which could be used repeatedly without any loss in its efficacy.Surprisingly,both fluoride and ammonium were found to play critical roles in the electrochemical etching,functionalization,and expansion of the layered parent materials(MAXs)through which the liberation of ammonia gas was observed.The electrochemically produced MXenes with excellent conductivity,applied as supercapacitor electrodes,could deliver an ultrahigh volumetric capacity(1408 F cm^(−3))and a volumetric energy density(75.8 Wh L^(−1)).This revolutionary green,energy-efficient,and scalable electrochemical route will not only pave the way for industrial-scale production of MXenes but also open up a myriad of versatile electrochemical modifications for improved functional MXenes. 展开更多
关键词 packed‐bed electrochemical reactor electrochemical etching MXene SUPERCAPACITOR
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Efficient nanostructured heterogeneous catalysts by electrochemical etching of partially crystallized Fe-based metallic glass ribbons
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作者 Qiaoyue Zhang Shun-Xing Liang +3 位作者 Zhe Jia Wenchang Zhang Weimin Wang Lai-Chang Zhang 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2021年第2期159-168,共10页
Although an increasing interest has been attracted to further develop heterostructured catalysts from metallic glasses(MGs) by heat treatment, overcoming surface oxidation effect is still a critical problem for such e... Although an increasing interest has been attracted to further develop heterostructured catalysts from metallic glasses(MGs) by heat treatment, overcoming surface oxidation effect is still a critical problem for such environmental catalysts. Herein, a short-time electrochemical etching of partially crystallized Febased ribbons in 0.3 M H3 PO4 electrolyte enables the formation of honeycomb-like nanoporous structure as effective catalytic active sites in Fenton-like process. Studies of structure and surface morphologies reveal that the formation of nanoporous structure by potentiostatic etching originates from electrochemical potential difference of nanocrystals(a-Fe(Si) and Fe2 B) and residual amorphous phase in partially crystallized ribbons, where Fe2 B having a lower open circuit potential tends to be selectively dissolved.Simultaneously, thin oxide layer after electrochemical etching exposes more active sites for H2 O2 activation and provides an effective protection of nanocrystals from massive loss during etching. Investigation of optimal processing conditions suggests that the selection of electrolyte plays an important role;dye degradation rates of etched ribbons in HNO3 and Na2 SO4 electrolytes can also achieve at least 2 times higher than that of as-annealed ribbons. This work holds the promise to develop novel environmental catalysts by effective electrochemical etching of partially crystallized ribbons. 展开更多
关键词 Metallic glass Nanoporous structure CRYSTALLIZATION electrochemical etching Selective dissolution
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Effect of chemical plating Zn on DC-etching behavior of Al foil in HCl-H_2SO_4 被引量:4
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作者 班朝磊 何业东 +2 位作者 邵鑫 杜鹃 王利平 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第12期3650-3657,共8页
The Al foil for high voltage Al electrolytic capacitor usage was immersed in 5.0%NaOH solution containing trace amount of Zn2+and Zn was chemically plated on its surface through an immersion-reduction reaction. Such ... The Al foil for high voltage Al electrolytic capacitor usage was immersed in 5.0%NaOH solution containing trace amount of Zn2+and Zn was chemically plated on its surface through an immersion-reduction reaction. Such Zn-deposited Al foil was quickly transferred into HCl-H 2 SO 4 solution for DC-etching. The effects of Zn impurity on the surface and cross-section etching morphologies and electrochemical behavior of Al foil were investigated by SEM, polarization curve (PC) and electrochemical impedance spectroscopy (EIS). The special capacitance of 100 V formation voltage of etched foil was measured. The results show that the chemical plating Zn on Al substrate in alkali solution can reduce the pitting corrosion resistance, enhance the pitting current density and improve the density and uniform distribution of pits and tunnels due to formation of the micro Zn-Al galvanic local cells. The special capacitance of etched foil grows with the increase of Zn2+concentration. 展开更多
关键词 Al foil POLARIZATION pitting corrosion electrochemical etching Al electrolytic capacitor
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Electrochemical liftoff of freestanding GaN by a thick highly conductive sacrificial layer grown by HVPE 被引量:1
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作者 Xiao Wang Yu-Min Zhang +4 位作者 Yu Xu Zhi-Wei Si Ke Xu Jian-Feng Wang Bing Cao 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第6期531-535,共5页
Separation technology is an indispensable step in the preparation of freestanding GaN substrate. In this paper, a largearea freestanding GaN layer was separated from the substrate by an electrochemical liftoff process... Separation technology is an indispensable step in the preparation of freestanding GaN substrate. In this paper, a largearea freestanding GaN layer was separated from the substrate by an electrochemical liftoff process on a sandwich structure composed of an Fe-doped GaN substrate, a highly conductive Si-doped sacrificial layer and a top Fe-doped layer grown by hydride vapor phase epitaxy(HVPE). The large difference between the resistivity in the Si-doped layer and Fe-doped layer resulted in a sharp interface between the etched and unetched layer. It was found that the etching rate increased linearly with the applied voltage, while it continuously decreased with the electrochemical etching process as a result of the mass transport limitation. Flaky GaN pieces and nitrogen gas generated from the sacrificial layer by electrochemical etching were recognized as the main factors responsible for the blocking of the etching channel. Hence, a thick Si-doped layer grown by HVPE was used as the sacrificial layer to alleviate this problem. Moreover, high temperature and ultrasonic oscillation were also found to increase the etching rate. Based on the results above, we succeeded in the liftoff of ~ 1.5 inch GaN layer. This work could help reduce the cost of freestanding GaN substrate and identifies a new way for mass production. 展开更多
关键词 electrochemical etching LIFTOFF hydride vapor phase epitaxy(HVPE) freestanding GaN
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Halogen chlorine triggered oxygen vacancy-rich Ni(OH)_(2) with enhanced reaction kinetics for pseudocapacitive energy storage 被引量:1
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作者 Jiangyu Hao Lijin Yan +6 位作者 Liang Luo Qiaohui Liu Youcun Bai Yuying Han Yang Zhou Xuefeng Zou Bin Xiang 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2023年第7期296-306,I0007,共12页
Two-dimensional (2D)Ni(OH)_(2) nanosheets can theoretically expose their active sites of 100%.Whereas,their intrinsic easy accumulation and low conductivity lead to weak and unsustainable reaction kinetics.Herein,we p... Two-dimensional (2D)Ni(OH)_(2) nanosheets can theoretically expose their active sites of 100%.Whereas,their intrinsic easy accumulation and low conductivity lead to weak and unsustainable reaction kinetics.Herein,we propose a novel halogen chlorine-triggered electrochemical etching strategy to controllably manage the reaction kinetics of 2D Ni(OH)_(2) nanosheets(EE/Cl-Ni(OH)_(2)).It is found that halogen chlorine doping can adjust the interlamellar spacing flexibly and promote the lattice oxygen activation to achieve controlled construction of superficial oxygen defects at the adjustable voltage.The optimal EE/Cl-Ni(OH)_(2) electrode exhibits a high rate capability and excellent specific capacity of 206.9 mA h g^(-1) at 1 A g^(-1) in a three-electrode system,which is more than twice as high as the pristine Ni(OH)_(2).Furthermore,EE/Cl-Ni(OH)_(2) cathode and FeOOH@rGO anode are employed for developing an aqueous Ni-Fe battery with an excellent energy density of 83 W h kg^(-1),a high power density of 17051 W kg^(-1),and robust durability over 20,000 cycles.This strategy exploits a fresh channel for the ingenious fabrication of highefficiency and stable nickel-based deficiency materials for energy storage. 展开更多
关键词 Ni(OH)_(2) electrochemical etching Lattice defects High energy density Ni-Fe battery
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An integrated strategy towards the facile synthesis of core-shell SiC-derived carbon@N-doped carbon for high-performance supercapacitors 被引量:3
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作者 Zhongya Pang Guangshi Li +7 位作者 Xingli Zou Chenteng Sun Conghui Hu Wei Tang Li Ji Hsien-Yi Hsu Qian Xu Xionggang Lu 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2021年第5期512-521,共10页
Porous active core-shell carbon material with excellent synergistic effect has been regarded as a prospective material for supercapacitors.Herein,we report an integrated method for the facile synthesis of carbide-deri... Porous active core-shell carbon material with excellent synergistic effect has been regarded as a prospective material for supercapacitors.Herein,we report an integrated method for the facile synthesis of carbide-derived carbon(CDC)encapsulated with porous N-doped carbon(CDC@NC)towards highperformance supercapacitors.Polydopamine(PDA)as nitrogen and carbon sources was simply coated on SiC nanospheres to form SiC@PDA,which was then directly transformed into CDC@NC via a onestep molten salt electro-etching/in-situ doping process.The synthesized CDC@NC with hierarchically porous structure has a high specific surface area of 1191 m^(2) g^(-1).The CDC core and NC shell are typical amorphous carbon and more ordered N-doped carbon,respectively.Benefitting from its unique dual porous structures,the CDC@NC demonstrates high specific capacitances of 255 and 193 F g^(-1) at 0.5 and20 A g^(-1),respectively.The reaction mechanism of the electro-etching/in-situ doping process has also been investigated through experimental characterizations and theoretical density functional theory calculations.It is suggested that the molten salt electro-etching/in-situ doping strategy is promising for the synthesis of active core-shell porous carbon materials with synergistic properties for supercapacitors without the need for additional doping/activation processes. 展开更多
关键词 Molten salt electrochemical etching Core-shell structure Porous carbon In-situ nitrogen doping SUPERCAPACITORS
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Optical absorption and photoelectron collection properties of silicon wafers with conical quantum nanocrystals structure
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作者 Yuriy Vashpanov Jae-Il Jeong 《Nano-Micro Letters》 SCIE EI CAS 2010年第3期149-153,共5页
A conical form of nano-sized quantum cluster was formed on the surface of p-type crystalline silicon [111] wafer by anode electrochemical etching in HF-based solution.The conical surface is highly effective in absorbi... A conical form of nano-sized quantum cluster was formed on the surface of p-type crystalline silicon [111] wafer by anode electrochemical etching in HF-based solution.The conical surface is highly effective in absorbing sunlight and transporting photoelectrons to semiconductor material.These are because each cone has a graded band gap with the energy level in the range from 1.1 to 3 eV which can be considered as consisting of quantum dots in different sizes.Since the boron concentration on the surface of each cone gradually decreases from top to bottom,a continuously varying electrical field is created along the cone height.This electric field is forcing photoelectrons generated in the cone to move rapidly to the direction perpendicular to wafer surface.Hence the drift time of photoelectrons can be less than their recombination time within the thin layer close to the bottom of the cone. 展开更多
关键词 Silicon NANOCRYSTALS electrochemical etching Solar cells
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Colloidal silicon nanocrystallites for low-cost solar cell development
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作者 V.Svrcek 《Nano-Micro Letters》 SCIE EI CAS 2009年第1期40-44,共5页
In this letter a formation of solution based of bulk-heterojunction based on freestanding silicon nanocrystals(Si-ncs) and conjugated((poly(3-hexylthiophene)(P3HT) polymer is demonstrated. Surfactant free Si-ncs prepa... In this letter a formation of solution based of bulk-heterojunction based on freestanding silicon nanocrystals(Si-ncs) and conjugated((poly(3-hexylthiophene)(P3HT) polymer is demonstrated. Surfactant free Si-ncs prepared by low-cost electrochemical etching are applied for fabrication of bulk-heterojunction and photo-conductive blends. We show that the optimum blend performance is at 40 wt% nanocrystallites concentration within the P3 HT polymer matrix. Furthermore, we illustrate that solar cell transport properties can be improved by nanosecond laser fragmentation of the nanocrystallites micrograins in ethanol. It argues that the Si-ncs/polymer blend with refine nanocrystaline structure may impact the development of low-cost solar cells by environmental- friendly mean. 展开更多
关键词 Silicon NANOCRYSTALS electrochemical etching Solar cell
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A Simple Method for Fabrication of Gold Nanoelectrodes
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作者 Xiao Lei WANG Wen Rui JIN 《Chinese Chemical Letters》 SCIE CAS CSCD 2003年第7期728-729,共2页
A facile method has been developed for the fabrication of Au nanoelecrodes (Au NEs). The tip of Au NEs can be controlled within the range from dozens to hundreds of nanometer.
关键词 Gold nanoelectrode electrochemical etching.
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Porous waveguide facilitated low divergence quantum cascade laser 被引量:1
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作者 尹雯 陆全勇 +6 位作者 刘万峰 张锦川 王利军 刘俊岐 李路 刘峰奇 王占国 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第6期51-54,共4页
A quantum cascade laser with a porous waveguide structure emitting at 4.5μm is reported.A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical e... A quantum cascade laser with a porous waveguide structure emitting at 4.5μm is reported.A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process.In contrast to the common ridge waveguide laser,devices with a porous structure give rather better beam quality.Utilizing this porous structure as a high-order mode absorber,the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°. 展开更多
关键词 quantum cascade laser ridge waveguide porous structure electrochemical etching
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Novel method of separating macroporous arrays from p-type silicon substrate
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作者 彭波波 王斐 +4 位作者 刘涛 杨振亚 王连卫 Ricky K.Y.Fu 朱剑豪 《Journal of Semiconductors》 EI CAS CSCD 2012年第4期28-31,共4页
This paper presents a novel method to fabricate separated macroporous silicon using a single step of photo-assisted electrochemical etching. The method is applied to fabricate silicon microchannel plates in 1 O0 mm p-... This paper presents a novel method to fabricate separated macroporous silicon using a single step of photo-assisted electrochemical etching. The method is applied to fabricate silicon microchannel plates in 1 O0 mm p-type silicon wafers, which can be used as electron multipliers and three-dimensional Li-ion microbatteries. Increasing the backside illumination intensity and decreasing the bias simultaneously can generate additional holes during the electrochemical etching which will create lateral etching at the pore tips. In this way the silicon microchannel can be separated from the substrate when the desired depth is reached, then it can be cut into the desired shape by using a laser cutting machine. Also, the mechanism of lateral etching is proposed. 展开更多
关键词 electrochemical etching MCP macroporous silicon p-type silicon separation
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Cell osteogenic bioactivity mediated precisely by varying scaled micro-pits on ordered micro/nano hierarchical structures of titanium 被引量:4
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作者 Yanmei Zhang Xiankuan Wang +8 位作者 Yaxian Li Jianhe Liang Pinliang Jiang Qiaoling Huang Yun Yang Hongping Duan Xiang Dong Gang Rui Changjian Lin 《Regenerative Biomaterials》 SCIE EI 2022年第1期597-611,共15页
Hierarchical surface structures with micro–nano scale play a crucial role in regulation of cell proliferation and osteogenic differentiation.It has been proven that cells are extremely sensitive to the nanoscaled str... Hierarchical surface structures with micro–nano scale play a crucial role in regulation of cell proliferation and osteogenic differentiation.It has been proven that cells are extremely sensitive to the nanoscaled structure and show multifarious phenotypes.Though a vital function of microstructure on osseointegration has been confirmed,the cell performances response to different microscaled structure is needed to be further dissected and in depth understood.In this work,the ordered micro–nano hierarchical structures with varying micro-scaled pits were precisely fabricated on titanium successfully by the combination of electrochemical,chemical etching and anodization as well.In vitro systematical assessments indicated that the micro–nano multilevel structures on titanium exhibited excellent cells adhesion and spreading ability,as well as steerable proliferation and osteogenic differentiation behaviors.It is shown that smaller micro-pits and lower roughness of the hierarchical structures enabled faster cell propagation.Despite cell growth was delayed on micro–nano titanium with relatively larger cell-match-size micro-pits and roughness,osteogenic-specific genes were significantly elevated.Furthermore,the alkaline phosphatase activity,collagen secretion and extracellular matrix mineralization of MC3T3-E1 on multiscaled titanium were suppressed by a large margin after adding IWP-2(an inhibitor of Wnt/b-catenin signal pathway),indicating this pathway played a crucial part in cell osteogenic differentiation modulated by micro–nano structures. 展开更多
关键词 electrochemical self-organizing etching varying micro-scaled pits OSTEOGENIC Wnt/b-catenin
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