Electrohydrodynamicjet （E-Jet） is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liqui...Electrohydrodynamicjet （E-Jet） is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liquid jet, which is further disintegrated into droplets. The major advantage of the E-Jet technique is that the sizes of the jet formed can be at the nanoscale far smaller than the nozzle size, which can realize high printing resolution with less risk of nozzle blockage. The E-Jet technique, which mainly includes E-Jet deposition and E-Jet printing, has a wide range of applications in the fabrication ofmicro/nano-structures for micro/nano-electromechanical system devices. This tech- nique is also considered a micro/nano-fabrication method with a great potential for commercial use. This study mainly reviews the E-Jet deposition/printing fundamentals, fabrication process, and applications.展开更多
制备了锆钛酸铅(PZT)悬浮液,采用电射流沉积(EJD)技术,在硅衬底上沉积了PZT厚膜。研究了电射流沉积高度、流量及悬浮液混合条件对厚膜致密性的影响。结果表明:降低电射流沉积高度和流量有助于提高沉积PZT厚膜致密性;采用球磨方法充分混...制备了锆钛酸铅(PZT)悬浮液,采用电射流沉积(EJD)技术,在硅衬底上沉积了PZT厚膜。研究了电射流沉积高度、流量及悬浮液混合条件对厚膜致密性的影响。结果表明:降低电射流沉积高度和流量有助于提高沉积PZT厚膜致密性;采用球磨方法充分混合PZT悬浮液,沉积的PZT厚膜致密性明显提高。采用优化的电射流沉积参数和球磨20 h的PZT悬浮液,制备了10μm无裂纹PZT厚膜,其压电常数d33为67 p C·N-1,相对介电常数εr为255。展开更多
文摘Electrohydrodynamicjet （E-Jet） is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liquid jet, which is further disintegrated into droplets. The major advantage of the E-Jet technique is that the sizes of the jet formed can be at the nanoscale far smaller than the nozzle size, which can realize high printing resolution with less risk of nozzle blockage. The E-Jet technique, which mainly includes E-Jet deposition and E-Jet printing, has a wide range of applications in the fabrication ofmicro/nano-structures for micro/nano-electromechanical system devices. This tech- nique is also considered a micro/nano-fabrication method with a great potential for commercial use. This study mainly reviews the E-Jet deposition/printing fundamentals, fabrication process, and applications.
文摘制备了锆钛酸铅(PZT)悬浮液,采用电射流沉积(EJD)技术,在硅衬底上沉积了PZT厚膜。研究了电射流沉积高度、流量及悬浮液混合条件对厚膜致密性的影响。结果表明:降低电射流沉积高度和流量有助于提高沉积PZT厚膜致密性;采用球磨方法充分混合PZT悬浮液,沉积的PZT厚膜致密性明显提高。采用优化的电射流沉积参数和球磨20 h的PZT悬浮液,制备了10μm无裂纹PZT厚膜,其压电常数d33为67 p C·N-1,相对介电常数εr为255。
