Fabricating a Micro Electromagnetic Actuator with High Energy Density

This paper introduces a new technology to fabricate a micro electromagnetic actuator with high energy density without an enclosed magnetic circuit. This technology includes fabricating multi-turns planar micro coils and fabricating the thick magnetic （NiFe） core on the silicon wafer. The multi-turns planar micro coils are fabricated by the electroplating method from the surface along the line and by dynamically controlling the current density of the copper electrolytes. In order to fabricate thick NiFe plating,the adhesion properties between the NiFe plating and the silicon substrates are improved by changing the surface roughness of the silicon substrates and increasing the thickness of the seed layer. Furthermore,the micro electromagnetic actuator is tested and the energy density of the actuator is evaluated by force testing. The experiments show that the microactuator is efficient in producing high magnetic energy density and high magnetic force.

Effect of Electromagnetic Pulse Exposure on Brain Micro Vascular Permeability in Rats

Objective To observe the effect of electromagnetic pulse (EMP) exposure on cerebral micro vascular permeability in rats. Methods The whole-body of male Sprague-Dawley rats were exposed or sham exposed to 200 pulses or 400 pulses (1 Hz) of EMP at 200 kV/m. At 0.5, 1, 3, 6, and 12 h after EMP exposure, the permeability of cerebral micro vascular was detected by transmission electron microscopy and immunohistochemistry using lanthanum nitrate and endogenous albumin as vascular tracers, respectively. Results The lanthanum nitrate tracer was limited to the micro vascular lumen with no lanthanum nitrate or albumin tracer extravasation in control rat brain. After EMP exposure, the lanthanum nitrate ions reached the tight junction, basal lamina and pericapillary tissue. Similarly, the albumin immunopositive staining was identified in pericapillary tissue. The changes in brain micro vascular permeability were transient, the leakage of micro vascular vessels appeared at 1 h, and reached its peak at 3 h, and nearly recovered at 12 h, after EMP exposure. In addition, the leakage of micro vascular was more obvious after exposure of EMP at 400 pulses than after exposure of EMP at 200 pulses. Conclusion Exposure to 200 and 400 pulses (1 Hz) of EMP at 200 kV/m can increase cerebral micro vascular permeability in rats, which is recoverable.

Accuracy and Electromagnetic Safety Evaluation of a Portable Electromagnetic Localization System for Micro Invasive Medical Devices in Vivo

Aiming at localizing the telemetric capsule for detecting gastrointestinal physiological parameters in vivo accurately,a portable alternating current(AC)electromagnetic localization system is designed.To verify the feasibility of the method,the model and construction of the localization system are detailed.And static and dynamic accuracy of the localization system are tested by experiments.Next,we compare the simulating results of the electromagnetic radiation aroused by the localization system with the electromagnetic safety standards of human(ICNIRP guidelines and IEEE standard C95.1-1991).Finally,in terms of the results of the static and dynamic experiments,conclusions are drawn that the accuracy of portable positioning system is high(less than 10 mm)enough to satisfy the localization need of the micro invasive medical devices in vivo,and there is no harm of electromagnetic radiation to human.

Modeling and Configuration Design of Electromagnetic Actuation Coil for a Magnetically Controlled Microrobot

Non-contact actuated microbeads have attracted a lot of attention in recent years because of its enormous potential in medical, biological, and industrial applications. Researchers have proposed a multitude of electromagnetic actuation(EMA) systems consisting of a variety of coil pairs. However, a unified method to design and optimize a coil pair according to technical specifications still does not exist. Initially, this paper presented the modeling of an untethered ferromagnetic particle actuated by externally applied magnetic field. Based on the models, a simple method of designing and optimizing the EMA coil pair according to technical specifications, was proposed. A loop-shaped coil pair generating uniform magnetic and gradient fields was chosen to demonstrate this method clearly and practically. The results of the optimization showed that the best distance to radius ratio of a loop-shaped coil pair is 1.02 for a uniform magnetic field and 1.75 for a uniform gradient field. The applicability of the method to other shapes of coil configuration was also illustrated. The best width to distance ratio for a square-shaped coil pair is 0.558 and 0.958 for uniform magnetic and gradient fields, respectively. The best height to width ratio and distance to width ratio for a rectangle-shaped coil pair is h/w =[0.9,1.1], d/w =[0.5,0.6] for uniform magnetic field and h/w =[1.0,1.2], d/w =[0.9,1.1] for uniform gradient field. Furthermore, simulations of a microparticle tracking the targeted trajectory were conducted to analyze the performance of the newly designed coils. The simulations suggested the ability of manipulating microparticles via the coils designed by our proposed method. The research mainly proposed a unified design and optimization method for a coil pair, which can support researchers while designing a specific coil pair according to the technical requirements. This study is aimed at researchers who are interested in EMA system and microrobots.

Design and fabrication of a bistable electromagnetic microactuator

An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.

Earthworm-like micro robot based on electromagnetic driver

According to the principle of bionics, a prototype of the earthworm-like micro robot was developed and manufactured for entering the small tube. Based on the process of the action and mechanics analysis, the controller was designed. This micro robot with 6mm diameter was driven directly by three electromagnetic linear drivers. Mobile cells were joined with two degree-of-freedom joint and the whole body was flexible and soft. The driving force reached 10.8g in normal working condition. The direction of movement and the angle of imaging can be controlled by the shape memory alloy （SMA）. The driving force, velocity and movement of micro robot in flexural tube were tested through experiments, which indicated that the driving force was in proportion to the range of frequency, and the micro robot could current, and the velocity reached a maximum in certain move in the thin tube flexibly.

Drive and Control of Electromagnetic Drive Module on Reciprocally Rotating Disc Used for Micro-Gyroscope

An innovative 3-phase AC (Alternative Current) drive circuit for the seismic disc in micro-gyroscopes is designed and verified by computer simulations and experiments. The in-plane dynamic model of the seismic disc with mass eccentricity and air gap against the centre bearing and the mathematic expression of two sinusoidal magnetic fields are developed respectively. In order to prevent the seismic disc from collision with the centre bearing and the EM (Electromagnetic) poles, an anti-collision controller is established by employing two Look-up tables which define the intensity of the applied current to the EM poles. Self-sensing technique is included to measure the real-time offset of the disc by two orthogonal pairs of EM poles, without any additional sensors. The drive circuit under SPWM (Sinusoidal Pulse Width Modulation) operation and the anti-collision strategy are verified by intensive computer simulations via commercial software, OrCAD 9, and experiments.

Electromagnetism and Absorptivity of the Modified Micro-coiled Chiral Carbon Fibers

Micro-coiled chiral carbon fibers are modified by nano-Ni. X-ray diffraction （XRD） and scanning electron microscopy （SEM） are used to compare the composition and morphology of the unmodified and the modified fibers. The results show that electromagnetism parameters of the modified are different from those of the unmodified. After modification by nano-Ni, the micro-coiled chiral carbon fibers have decreased permittivity and electrical loss. The permeability and magnetic loss of the modified carbon fibers become larger than those of the unmodified ones. Moreover, the modification of unmodified chiral carbon fibers into the modified is much like changing hollow electric windings into those with magnetic cores inside. The modifier intensifies the cross polarization of the chiral carbon fibers and makes the permittivity and the permeability get closer to each other which improves the matching performance and enhances absorbability of coatings. In the range of 6-18 GHz, the reflectivity of the coating is 6-8dB and the bandwidth is 12 GHz. The area density of the coating is below 3 kg/m^2.

DISCHARGE CHANNEL GROWTH IN MICRO EDM OF HIGH FREQUENCY PULSE

The influences of intense magnetic pinch effect caused by electromagnetic field with high frequency on discharge channel expansion and plasma configuration change are discussed. The change of Lorentz force exerting on charged particles in discharge channel is calculated under the electromagnetic field with high frequency. Through the theoretical analysis and experimental study, the forming process of discharge channel is conjectured. And it is considered that the changes of discharge channel, such as the decrease of diameter and increase of energy density, coming from the intense magnetic pinch effect in high frequency electromagnetic field, are the main reasons for a series of special phenomena on the machined surface in micro EDM.

MicrOBEM:小型海底电磁接收机

海底电磁接收机主要用于海底大地电磁与可控源电磁信号高精度观测。针对现有海底电磁接收机(OBEM-Ⅲ型)体积大、功耗大、成本高等不足,开展了小型化、低功耗、低成本方面的技术研究。MicrOBEM小型海底电磁接收机开发了新的低功耗控制单元、低功耗前置放大器,配置了低功耗磁通门传感器,采取先进的电源管理技术,使得整机功耗由现有海底电磁接收机(OBEM-Ⅲ型)的1600 mW下降至500 mW(搭载感应式磁传感器配置)以内。针对传统的声学释放器昂贵、笨重(需要匹配更多的浮力材料)等问题,通过集成水声通讯模块,并增加外置的电腐蚀释放装置方式实现释放回收,MicrOBEM仅需一个直径为17 in(1 in=2.54 cm)的玻璃浮球作为浮体,大幅降低仪器的体积和硬件成本,提升了设备的集成度和作业效率。MicrOBEM的体积(不含测量臂等)相比OBEM-Ⅲ减少3/4,功耗减少2/3,成本降低1/2,并于2021年3月在南海南部开展了深水大地电磁试验,其大地电磁测量功能得到初步验证,具有小体积、低功耗、低成本的优势。

Influence of high frequency pulse on electrode wear in micro-EDM

An electromagnetic coupling mathematical model is established by finite element method and is verified by the contrastive experiments of copper matrix Ni-TiN cylindrical coating electrode,copper electrode and Cu50 W electrode.The wear mechanism of Ni-TiN/Cu composite electrode in the case of high-frequency pulse current is studied,and the influence of the fluctuation frequency of discharge current on electrode wear in micro-EDM is found out.Compared with the electrode made from homogeneous material,the high frequency electromagnetic properties of Ni-TiN composite layer can be used effectively to inhibit the effect of high frequency pulse on the electrode and improve the distribution trend of current density.

Current status of micro relay research

The current status and history of research on micro relays are reviewed. Through an analysis of the structure of electrostatic and electromagnetic micro relays and some problems in this area and measures for solving them are proposed.

利用废弃椰木制备B和N共掺杂碳微纳结构及其电磁波吸收性能

5G通信技术为社会发展和日常生活提供了极大的便利,但同时也带来严重的电磁波污染。为了减轻这种污染产生的危害,设计轻量化和环保的宽带电磁波吸收材料已成为研究热点。本文利用椰木做前驱体制备了一种具有竹节管状一维结构的B和N共掺杂碳材料,B和N共掺杂优化了生物质衍生碳的组成,改善了材料的阻抗匹配,一维的竹节中空结构有利于电磁波进入材料内部。制备的材料具有优异的电磁波吸收性能,最低反射损耗(RL)在14.12 GHz时达到-59.64 dB,有效吸收带宽(EAB)宽度范围为5.88 GHz,所需厚度仅为2.1 mm。研究结果表明这种材料优异的电磁波吸收性能来自于电磁波在材料中的多重折射和散射、偶极子极化、界面极化及电导极化等方面的共同作用。

具有阈值可调功能的磁自锁MEMS惯性开关

设计了一种阈值为5g的低g值磁自锁微机电系统(MEMS)惯性开关,具有阈值可调和自回复功能。该惯性开关的惯性敏感单元由1个方形质量块、1块固定在质量块下的方形棋盘状磁铁和4根支撑它的方形阿基米德螺旋梁组成。磁铁和4块位于移动电极下方的铁磁性固定电极、双层平面线圈一起共同实现磁自锁和阈值调节功能。通过有限元仿真软件ANSYS对其进行仿真分析,利用激光加工和PCB工艺制造样片机,并通过离心机对样品进行性能测试。测试结果显示,制作的MEMS惯性开关在垂直敏感方向上的阈值加速度为5.27g,通过施加−0.5~0.5 A范围的电流,阈值的调整范围为6g~3.75g。结果表明此结构能够在实现闭锁功能的同时,在无外力作用的情况下实现自回复,且在一定范围内阈值可调。

A Sub-100 mg Electromagnetically Driven Insect-inspired Flapping-wing Micro Robot Capable of Liftoff and Control Torques Modulation

Inspired by the unique,agile and efficient flapping flight of insects,we present a novel sub-100 mg,electromagnetically driven,tailless,flapping-wing micro robot.This robot utilizes two optimized electromagnetic actuators placed back to back to drive two wings separately,then kinematics of each wing can be independently controlled,which gives the robot the ability to generate all three control torques of pitch,roll and yaw for steering.To quantify the performance of the robot,a simplified aerodynamic model is used to estimate the generated lift and torques,and two customized test platforms for lift and torque measurement are built for this robot.The mean lift generated by the robot is measured to be proportional to the square of the input voltage amplitude.The three control torques are measured to be respectively proportional to three decoupled parameters of the control voltages,therefore the modulation of three control torques for the robot is independent,which is helpful for the further controlled flight.All these measured results fit well with the calculated results of the aerodynamic model.Furthermore,with a total weight of 96 mg and a wingspan of 3.5 cm,this robot can generate sufficient lift to take off.

基于均匀磁场标定的微动力测试平台研究

针对微纳卫星的微动力测量问题,设计了一种可对mN级微动力进行测试与分析的扭摆型微动力测试平台;基于电磁力法,采用通电导线和电磁铁组合的方式设计了该测试平台的关键装置--微小标定力产生装置。利用高精度电子天平和激光位移传感器对微动力测试平台进行了静态标定,并通过对导线在磁场中不同位置进行标定实验,得到重复性误差为0.264%,验证了均匀磁场标定的可行性;采用阶跃响应法对测试平台的系统参数进行了标定,最后对微动力测试平台的不确定度和标定方法带来的误差进行了分析。结果表明,该测试平台的测量范围为1~400 mN,分辨率约为1 mN,静态标定的不确定度为8.41 mN,标定方法误差为0.84%,误差较小,能为微动力测量提供一定的技术参考。

铝合金板阵列微结构零件电磁冲击液压成形研究

目的解决室温条件下因铝合金塑性流动不均而导致的零件开裂和尺寸偏差等问题。方法利用高速冲击提高材料成形极限以及流体均匀载荷精确控形的优势,提出了电磁冲击液压工艺并实现了铝合金阵列结构零件的成形,采用实验手段研究了放电电压和放电次数对零件贴模精度和厚度分布的影响。结果随着放电电压的增大,零件的成形深度增大。在单次放电8kV下,板料最大成形深度达到模具深度的97%,连续3次放电8kV后,零件通道填充率达到89.7%。建立了与物理实验模型一致的电磁-流体-结构的多物理场耦合仿真模型,发现冲击液体对板料施加的瞬态压强超过200MPa,板料最大变形速度达到40.5m/s。模拟得到的板料变形轮廓与实验结果一致,证明了多物理场耦合仿真模型的准确性。结论电磁冲击液压成形是一种新型的高速成形方法,能够实现铝合金阵列微结构零件的精确制造,为提高复杂薄壁难变形构件的成形性能和精度提供了新的技术手段。

基于均值孔隙介质层的阻尼孔壁面摩擦效应研究

阻尼孔广泛用于各种液压机械系统,其孔径通常在0.3 mm到2 mm之间,这种微小流道的流动不同于常规管道,壁面粗糙度对其流动特性有重要的影响。针对这一问题,以安装在液压电磁换向阀中的阻尼孔为研究对象,采用均值孔隙介质层(PML)模拟了阻尼孔的壁面粗糙度。首先,建立了阻尼孔的物理模型,使用ICEM CFD软件对模型进行了网格划分;然后,构建了流体控制方程以及PML动量方程,求解出了黏性阻力系数和惯性阻力系数;最后,采用了流体仿真软件Fluent,分析了壁面粗糙度对阻尼孔流体流动特性、流体完全发展距离长度以及流体温升的影响。研究结果表明:仿真所得阻力特性与文献中实验所得阻力特性结果一样,采用PML表征壁面粗糙度的方法可行;由于壁面粗糙度,阻尼孔中的流体受到的阻力增大,导致从阻尼孔入口至出口压降增加了2.25%;相同边界条件下,含PML的阻尼孔比光滑阻尼孔的完全发展距离长0.1 mm左右;壁面的发热量平均提高了1.5%。

Recent Advances in Asymmetric Structural Composites for Excellent Electromagnetic Interference Shielding:A Review

Since electromagnetic pollution is detrimental to human health and the environment,numerous efforts have been successively made to achieve excellent electromagnetic interference shielding effectiveness(EMI SE)via designing the hierarchical structures for electromagnetic interference(EMI)shielding polymer composites.Among the plentiful structures,the asymmetric structures are currently a hot spot,principally categorizing into multi-layered,porous,fibrous,and segregated asymmetric structures,which endows the high EMI shielding performance for polymer composites incorporated with magnetic,conductive,and/or dielectric micro/nano-fillers,due to the“absorption-reflection-reabsorption”shielding mechanism.Therefore,this review provides the retrospection and summary of the efforts with respect to abundant asymmetric structures and multifunctional micro/nano-fillers for enhancing EMI shielding properties,which is conducive to the booming development of polymeric EMI shielding materials for the promising prospect in modern electronics and 5-generation(5G)technology.

基于微纳结构设计的电磁性能调控研究进展

吸波材料通过吸收电磁波能量,减少或消除电磁波的反射,从而有效降低电磁波的干扰。材料的电磁参数决定其电磁波吸收性能,调整填充比例、改变宏观形态以及复合方式等传统的调控策略存在一定局限性,无法根本改变电磁参数,阻碍了吸波材料的进一步发展。微纳结构设计策略可以改变材料的电导率、电荷密度以及磁性等理化性质,进而根本性改变材料的电磁参数,在调控电磁波吸收能力上展现出巨大优势。由于精确设计微纳结构材料难度较大且批量生产较为困难,其发展受到限制。此外,确定微纳结构与电磁波响应和损失机制之间的结构-性质理论关系仍然是一个重大的挑战。基于此,本文分析了微纳结构与电磁性能的构效关系,阐明了微纳结构设计策略在调控电磁波吸收能力方面的绝对优势,并且梳理了元素掺杂设计、表面效应调控以及成核生长控制等微纳结构改变对电磁响应机制和损耗机制的影响,为研究者们提供了基于微纳结构调控电磁性能的策略和理论指导。最后,以量子点、纳米晶以及纳米线等典型微纳米材料作为范例,综述了其调控电磁参数的策略、优势以及在电磁波吸波领域的研究现状与应用前景,为微纳米材料在电磁波吸波领域的发展提供了理论基础和策略支撑。