Ultra-thin (20-100nm) polymethylmethacrylate(PMMA) films prepared by Langmuir-Blodgett techniques have been explored as high resolution electron beam resists. A Hitachi S-450 Scanning Electron Microscope (SEM) has bee...Ultra-thin (20-100nm) polymethylmethacrylate(PMMA) films prepared by Langmuir-Blodgett techniques have been explored as high resolution electron beam resists. A Hitachi S-450 Scanning Electron Microscope (SEM) has been refitted for a high resolution electron beam exposure system. The lithographic properties and exposure conditions of LB PMMA films were investigated. 0.15μm lines-and-spaces patterns were achieved by using the SEM as the exposure tool. The results demonstrate that the etch resistance of such films is sufficiently good to allow patterning of a 20 nm aluminum film suitable for mask fabrication.展开更多
An experimental investigation were performed on the effect of the impulse electron-beam irradiation upon microstruc-ture of the surface layer and on wear resistance of a cutting tool for sintered TiC/NiCr cermet. The ...An experimental investigation were performed on the effect of the impulse electron-beam irradiation upon microstruc-ture of the surface layer and on wear resistance of a cutting tool for sintered TiC/NiCr cermet. The results showed that the surface electron-beam treatment of the TiC/NiCr cermet is an efficient method for investigating the mi-crostructure and phase composition in the surface layer of the powder composite and there are optimal regimes of electron-beam treatment, which ensure a substantial increase in the resistance of the cermet to wear during cutting of metals.展开更多
Electron beam (EB) curing of composites has many advantages. Heat-resistant EB-curing composites could substitute polyimide composites used in aeronautical engines. In this paper, the effects of catalyst and dose on t...Electron beam (EB) curing of composites has many advantages. Heat-resistant EB-curing composites could substitute polyimide composites used in aeronautical engines. In this paper, the effects of catalyst and dose on the cured resin were investigated. The heat-resistance of the resin cured by EB was evaluated by dynamic mechanical analysis (DMA). The experimental results show that the mechanical properties of the composites cured by EB could meet the specifications of aeronautical engines at 250 degreesC.展开更多
Nb/Ta multilayer films deposited on Ti6A14V substrate with Nb and Ta monolayer thicknesses of 30 nm, 120 nm, and 240 nm were irradiated by a high current pulse electron beam （HCPEB） to prepare Nb-Ta alloyed layers. ...Nb/Ta multilayer films deposited on Ti6A14V substrate with Nb and Ta monolayer thicknesses of 30 nm, 120 nm, and 240 nm were irradiated by a high current pulse electron beam （HCPEB） to prepare Nb-Ta alloyed layers. The mi- crostructure and the composition of the outmost surface of melted alloyed layers were investigated using a transmission electron microscope （TEM） equipped with an X-ray energy dispersive spectrometer （EDS） attachment. The Ta content of the alloyed surface layer prepared from the monolayer of thickness 30 nm, 120 nm, and 240 nm was- 27.7 at.%, 6.37 at.%, and 0 at.%, respectively. It was found that the Ta content in the alloyed layer plays a dominant role in the microstructure of the films. The hardness and the wear rate of the alloyed layers decrease with the increasing content of Ta in the surface laver.展开更多
In this study, compounded surface modification technology-high current pulsed electron beam （HCPEB） ＋ micro-plasma oxidation （MPO） was applied to treat ZK60 Mg alloys. The characteristics of the microstructure of...In this study, compounded surface modification technology-high current pulsed electron beam （HCPEB） ＋ micro-plasma oxidation （MPO） was applied to treat ZK60 Mg alloys. The characteristics of the microstructure of ZK60 Mg alloy after single MPO and HCPEB＋MPO compounded treatment were investigated by SEM. The results showed that the density of the ceramic layer of HCPEB＋MPO-treated ZK60 Mg alloy was improved and defects were reduced compared to that under MPO treatment alone. Surface modified layer of ZK60 Mg alloys treated by HCPEB＋MPO was divided into three zones, namely the top loose ceramic zone, middle compact zone and inside HCPEB-induced melted zone. Corrosion resistance of ZK60 Mg alloy before and after the compounded surface modification was measured in a solution of 3.5% NaCl by potentiodynamic polarization curves. It was found that the corrosion current density of ZK60 Mg alloys could be reduced by about three orders of magnitude, from 311μA/cm^2 of the original sample to 0.2μA/cm^2 of the HCPEB＋MPO-treated sample. This indicates the great application potential of the HCPEB＋MPO compounded surface modification technology in improving the corrosion resistance of ZK60 Mg alloys in the future.展开更多
M2高速钢是使用最广泛和最具代表性的工具钢。采用电子束选区熔化(selective electron beam melting,SEBM)增材制造技术成形M2高速钢能有效避免传统铸造组织粗大、碳化物偏析等问题,有望大幅改善高速钢力学、磨损等性能。通过使用不同...M2高速钢是使用最广泛和最具代表性的工具钢。采用电子束选区熔化(selective electron beam melting,SEBM)增材制造技术成形M2高速钢能有效避免传统铸造组织粗大、碳化物偏析等问题,有望大幅改善高速钢力学、磨损等性能。通过使用不同扫描参数与2种粉床预热温度在316L不锈钢基板上制备了M2高速钢块体试样,重点研究了扫描参数和粉床预热温度对成形M2高速钢致密度及晶粒尺寸、碳化物等显微组织的影响。在最优化参数下,成形M2高速钢致密度达99.7%,平均晶粒尺寸在3~6μm,碳化物细小且分布较为均匀。通过维氏硬度试验和摩擦磨损试验分析了SEBM成形M2高速钢的硬度与磨损性能。结果表明,在最优化参数下成形的M2高速钢维氏硬度可达1034.2HV_(0.2),远高于商用M2高速钢刀具(815HV_(0.2)~845HV_(0.2)),同时磨损率仅有(3.58±0.36)×10^(-5)mm^(3)·N^(-1)·m^(-1),较回火态锻造母材降低了13.7%。此外,SEBM成形M2高速钢的磨损机制主要为磨粒磨损和粘着磨损。展开更多
Large pulsed electron beam(LPEB) irradiation was employed as a surface treatment of magnesium(Mg)alloy AZ31B to enhance its corrosion and wear resistance. Selective evaporation of Mg induced by LPEB irradiation at an ...Large pulsed electron beam(LPEB) irradiation was employed as a surface treatment of magnesium(Mg)alloy AZ31B to enhance its corrosion and wear resistance. Selective evaporation of Mg induced by LPEB irradiation at an energy density of 5J/cm^2 for 40 cycles has led to the formation of an Al-enriched resolidified layer with nano-grained structure consisting of Mg3.1 Al0.9 metastable phase. The formation of such a re-solidified layer after LPEB irradiation has enabled a decrease in corrosion rate of Mg alloy AZ31B in 3.5% NaCl solution. Different equivalent electrical circuit models were proposed to account for the corrosion behavior of untreated Mg alloy AZ31B and those subjected to LPEB irradiation. A decrease in wear depth when compared to that of the untreated alloy suggests an increase in wear resistance of LPEB-irradiated Mg alloy AZ31B. Adhesive wear is the predominant mechanism of untreated Mg alloy AZ31B while abrasive wear mechanism dominates for LPEB-irradiated Mg alloy AZ31B.展开更多
The high-current pulsed electron beam(HCPEB) treatment with current density 6 J/cm^2 was applied on AZ91 Mg alloy to improve its corrosion resistance. Results showed that the net-like Mg_(17)Al_(12) disappeared on the...The high-current pulsed electron beam(HCPEB) treatment with current density 6 J/cm^2 was applied on AZ91 Mg alloy to improve its corrosion resistance. Results showed that the net-like Mg_(17)Al_(12) disappeared on the surface of AZ91 Mg alloy after irradiation by HCPEB, which was instead of supersaturated Al element on the surface. Nevertheless, the application of HCPEB also led to the formation of crater-like and groove-like structures as well as micro-cracks on the surface of AZ91 Mg alloy. After HCPEB treatment by 3, 5 and 10 pulses, the AZ91 Mg alloy exhibited better corrosion resistance.However, the increasing amount of micro-cracks reduced the anti-corrosive properties of AZ91 Mg alloy as the pulse increased to 20 and 30.展开更多
文摘Ultra-thin (20-100nm) polymethylmethacrylate(PMMA) films prepared by Langmuir-Blodgett techniques have been explored as high resolution electron beam resists. A Hitachi S-450 Scanning Electron Microscope (SEM) has been refitted for a high resolution electron beam exposure system. The lithographic properties and exposure conditions of LB PMMA films were investigated. 0.15μm lines-and-spaces patterns were achieved by using the SEM as the exposure tool. The results demonstrate that the etch resistance of such films is sufficiently good to allow patterning of a 20 nm aluminum film suitable for mask fabrication.
文摘An experimental investigation were performed on the effect of the impulse electron-beam irradiation upon microstruc-ture of the surface layer and on wear resistance of a cutting tool for sintered TiC/NiCr cermet. The results showed that the surface electron-beam treatment of the TiC/NiCr cermet is an efficient method for investigating the mi-crostructure and phase composition in the surface layer of the powder composite and there are optimal regimes of electron-beam treatment, which ensure a substantial increase in the resistance of the cermet to wear during cutting of metals.
文摘Electron beam (EB) curing of composites has many advantages. Heat-resistant EB-curing composites could substitute polyimide composites used in aeronautical engines. In this paper, the effects of catalyst and dose on the cured resin were investigated. The heat-resistance of the resin cured by EB was evaluated by dynamic mechanical analysis (DMA). The experimental results show that the mechanical properties of the composites cured by EB could meet the specifications of aeronautical engines at 250 degreesC.
基金Project supported by the National Basic Research Program of China (Grant No. 2013CB632305)the Guangdong Province University-Industry Cooperation Project of the Ministry of Education, China (Grant No. 2010B090400444)+1 种基金the Guangdong International Cooperation Projects, China (Grant No. 2010B050900003)the Guangdong Science and Technology Plan Projects, China (Grant No. 2010A070500002)
文摘Nb/Ta multilayer films deposited on Ti6A14V substrate with Nb and Ta monolayer thicknesses of 30 nm, 120 nm, and 240 nm were irradiated by a high current pulse electron beam （HCPEB） to prepare Nb-Ta alloyed layers. The mi- crostructure and the composition of the outmost surface of melted alloyed layers were investigated using a transmission electron microscope （TEM） equipped with an X-ray energy dispersive spectrometer （EDS） attachment. The Ta content of the alloyed surface layer prepared from the monolayer of thickness 30 nm, 120 nm, and 240 nm was- 27.7 at.%, 6.37 at.%, and 0 at.%, respectively. It was found that the Ta content in the alloyed layer plays a dominant role in the microstructure of the films. The hardness and the wear rate of the alloyed layers decrease with the increasing content of Ta in the surface laver.
基金supported by Liaoning BaiQianWan Talents Program of China (No. 2008921028)Doctoral Fund of Ministry of Education of China (No. 200801451082)
文摘In this study, compounded surface modification technology-high current pulsed electron beam （HCPEB） ＋ micro-plasma oxidation （MPO） was applied to treat ZK60 Mg alloys. The characteristics of the microstructure of ZK60 Mg alloy after single MPO and HCPEB＋MPO compounded treatment were investigated by SEM. The results showed that the density of the ceramic layer of HCPEB＋MPO-treated ZK60 Mg alloy was improved and defects were reduced compared to that under MPO treatment alone. Surface modified layer of ZK60 Mg alloys treated by HCPEB＋MPO was divided into three zones, namely the top loose ceramic zone, middle compact zone and inside HCPEB-induced melted zone. Corrosion resistance of ZK60 Mg alloy before and after the compounded surface modification was measured in a solution of 3.5% NaCl by potentiodynamic polarization curves. It was found that the corrosion current density of ZK60 Mg alloys could be reduced by about three orders of magnitude, from 311μA/cm^2 of the original sample to 0.2μA/cm^2 of the HCPEB＋MPO-treated sample. This indicates the great application potential of the HCPEB＋MPO compounded surface modification technology in improving the corrosion resistance of ZK60 Mg alloys in the future.
文摘M2高速钢是使用最广泛和最具代表性的工具钢。采用电子束选区熔化(selective electron beam melting,SEBM)增材制造技术成形M2高速钢能有效避免传统铸造组织粗大、碳化物偏析等问题,有望大幅改善高速钢力学、磨损等性能。通过使用不同扫描参数与2种粉床预热温度在316L不锈钢基板上制备了M2高速钢块体试样,重点研究了扫描参数和粉床预热温度对成形M2高速钢致密度及晶粒尺寸、碳化物等显微组织的影响。在最优化参数下,成形M2高速钢致密度达99.7%,平均晶粒尺寸在3~6μm,碳化物细小且分布较为均匀。通过维氏硬度试验和摩擦磨损试验分析了SEBM成形M2高速钢的硬度与磨损性能。结果表明,在最优化参数下成形的M2高速钢维氏硬度可达1034.2HV_(0.2),远高于商用M2高速钢刀具(815HV_(0.2)~845HV_(0.2)),同时磨损率仅有(3.58±0.36)×10^(-5)mm^(3)·N^(-1)·m^(-1),较回火态锻造母材降低了13.7%。此外,SEBM成形M2高速钢的磨损机制主要为磨粒磨损和粘着磨损。
基金supported financially by the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (Nos. 2018R1A2B3007806 and 2017R1A5A1015311)the Development of High Power Density Electron Beam Micro-drilling Machine and Process for High Aspect-ratio Micro-hole Parts funded by Ministry of Trade, Industry and Energy (No. 10063367)
文摘Large pulsed electron beam(LPEB) irradiation was employed as a surface treatment of magnesium(Mg)alloy AZ31B to enhance its corrosion and wear resistance. Selective evaporation of Mg induced by LPEB irradiation at an energy density of 5J/cm^2 for 40 cycles has led to the formation of an Al-enriched resolidified layer with nano-grained structure consisting of Mg3.1 Al0.9 metastable phase. The formation of such a re-solidified layer after LPEB irradiation has enabled a decrease in corrosion rate of Mg alloy AZ31B in 3.5% NaCl solution. Different equivalent electrical circuit models were proposed to account for the corrosion behavior of untreated Mg alloy AZ31B and those subjected to LPEB irradiation. A decrease in wear depth when compared to that of the untreated alloy suggests an increase in wear resistance of LPEB-irradiated Mg alloy AZ31B. Adhesive wear is the predominant mechanism of untreated Mg alloy AZ31B while abrasive wear mechanism dominates for LPEB-irradiated Mg alloy AZ31B.
基金the finacial support from the National Natural Science Foundation of China(Nos.51771128 and 51771129)the Projects of International Cooperation in Shanxi(No.201703D421039)the Natural Science Foundation of Shanxi(No.201601D011034)
文摘The high-current pulsed electron beam(HCPEB) treatment with current density 6 J/cm^2 was applied on AZ91 Mg alloy to improve its corrosion resistance. Results showed that the net-like Mg_(17)Al_(12) disappeared on the surface of AZ91 Mg alloy after irradiation by HCPEB, which was instead of supersaturated Al element on the surface. Nevertheless, the application of HCPEB also led to the formation of crater-like and groove-like structures as well as micro-cracks on the surface of AZ91 Mg alloy. After HCPEB treatment by 3, 5 and 10 pulses, the AZ91 Mg alloy exhibited better corrosion resistance.However, the increasing amount of micro-cracks reduced the anti-corrosive properties of AZ91 Mg alloy as the pulse increased to 20 and 30.
