Ion heat transport in electron cyclotron resonance heated L-mode plasma on the T-10 tokamak

Anomalous ion heat transport is analyzed in the T-10 tokamak plasma heated with electron cyclotron resonance heating(ECRH) in second-harmonic extra-ordinary mode. Predictive modeling with empirical scaling for Ohmical heat conductivity shows that in ECRH plasmas the calculated ion temperature could be overestimated, so an increase of anomalous ion heat transport is required. To study this effect two scans are presented: over the EC resonance position and over the ECRH power. The EC resonance position varies from the high-field side to the low-field side by variation of the toroidal magnetic field. The scan over the heating power is presented with on-axis and mixed ECRH regimes. Discharges with high anomalous ion heat transport are obtained in all considered regimes. In these discharges the power balance ion heat conductivity exceeds the neoclassical level by up to 10 times. The high ion heat transport regimes are distinguished by three parameters: the ratio Te/Ti, the normalized electron density gradient R/■, and the ion–ion collisionality νii~*. The combination of high Te/Ti, high νii~*, and R/■=6-10 results in values of normalized anomalous ion heat fluxes up to 10 times higher than in the low transport scenario.

Suppression of the m/n=2/1 tearing mode by electron cyclotron resonance heating on J-TEXT

Stabilization of tearing modes and neoclassical tearing modes is of great importance for tokamak operation.Electron cyclotron waves(ECWs)have been extensively used to stabilize the tearing modes with the virtue of highly localized power deposition.Complete suppression of the m/n=2/1 tearing mode(TM)by electron cyclotron resonance heating(ECRH)has been achieved successfully on the J-TEXT tokamak.The effects of ECW deposition location and power amplitude on the 2/1 TM suppression have been investigated.It is found that the suppression is more effective when the ECW power is deposited closer to the rational surface.As the ECW power increases to approximately 230 k W,the 2/1 TM can be completely suppressed.The island rotation frequency is increased when the island width is reduced.The experimental results show that the local heating inside the magnetic island and the resulting temperature perturbation increase at the O-point of the island play dominant roles in TM suppression.As the ECW power increases,the 2/1 island is suppressed to smaller island width,and the flow shear also plays a stabilizing effect on small magnetic islands.With the stabilizing contribution of heating and flow shear,the 2/1 TM can be completely suppressed.

Study of runaway electron behaviour during electron cyclotron resonance heating in the HL-2A Tokamak

During the current flat-top phase of electron cyclotron resonance heating discharges in the HL-2A Tokamak, the behaviour of runaway electrons has been studied by means of hard x-ray detectors and neutron diagnostics. During electron cyclotron resonance heating, it can be found that both hard x-ray radiation intensity and neutron emission flux fall rapidly to a very low level, which suggests that runaway electrons have been suppressed by electron cyclotron resonance heating. From the set of discharges studied in the present experiments, it has also been observed that the efficiency of runaway suppression by electron cyclotron resonance heating was apparently affected by two factors： electroh cyclotron resonance heating power and duration. These results have been analysed by using a test particle model. The decrease of the toroidal electric field due to electron cyclotron resonance heating results in a rapid fall in the runaway electron energy that may lead to a suppression of runaway electrons. During electron cyclotron resonance heating with different powers and durations, the runaway electrons will experience different slowing down processes. These different decay processes are the major cause for influencing the efficiency of runaway suppression. This result is related to the safe operation of the Tokamak and may bring an effective control of runaway electrons.

Mechanical Analysis and Measurements of a Multicomponent NbTi/Cu Superconducting Magnets Structure for the Fully Superconducting Electron Cyclotron Resonance Ion Source

A fully superconducting electron cyclotron resonance （ECR） ion source （SECRAL ID is currently being built in the Institute of Modern Physics, Chinese Academy of Sciences. Its key components are three superconducting solenoids （Nb-Ti/Cu） and six superconducting sextupoles （Nb-Ti/Cu）. Different from the conventional supercon- ducting ECR magnetic structure, the SEC17AL Ⅱ includes three superconducting solenoid coils＇ that are located inside the superconducting sextupoles. The SECRAL Ⅱ can significantly reduce the interaction forces between the sextupole and the solenoids, and the magnets can also be more compact in size. For this multi-component SECRAL Ⅱ generating its self field of -8 T and being often exposed to the high self field, the mechanical analysis has become the main issue to keep their stress at 〈200 MPa on coils. The analytical and experimental results in mechanics are presented in the SECRAL Ⅱ structure. To improve the accuracy and efficiency of analysis, according to the composite rule of micromechanics, the equivalent uniform windings are used to simulate the epoxy-impregnated Nb-Ti/Cu coils. In addition, using low temperature strain gauges and a wireless fast strain acquisition system, a fundamental experiment on the based on our analysis, the stresses and deformations optimized. strains developments of a sextupole is reported. Finally, for its assembly of each SECRAL Ⅱ coil will be further

A Polarizer with Sinusoidal Grooves in the Electron Cyclotron Resonance Heating System of the HL-2A Tokamak

Theoretical calculation and experimental results for a polarizer with sinusoidal grooves used in the electron cyclotron resonance heating （ECRH） system of the HL-2A tokamak are presented. The calculation is based on an integral method developed in the vector theory of diffraction gratings, and the polarization characteristics obtained with a low-power test are in good agreement with the numerical calculated results. With the polarizer assembled in a miter bend in the ECRH transmission line, pure ordinary mode （O-mode） and extraordinary mode （X-mode） polarized waves are also expected in the high-power experiment, depending on the polarizer rotation angle and the toroidal injection angle of the electron cyclotron （EC） wave beam. Second-harmonic X-mode experiments were successfully explored in HL-2A. Experimental result revealed that the electron temperature increased from 0.8 keV （Ohmic heating phase） to 1.5 keV （second X-mode heating phase）.

On the heating mechanism of electron cyclotron resonance thruster immerged in a non-uniform magnetic field

To study the heating mechanism of electron cyclotron resonance thruster(ECRT)immersed in a non-uniform magnetic field,experiments and simulations are performed based on an electron cyclotron resonance plasma source at ASIPP.It is found that the first harmonic of electron cyclotron resonance is essential for plasma ignition at high magnetic field(0.0875 T),while the plasma can sustain without the first and second harmonics of electron cyclotron resonance at low magnetic field(till 0.0170 T).Evidence of radial hollow density profile indicates that upper hybrid resonance,which has strong edge heating effect,is the heating mechanism of low-field ECRT.The heating mode transition from electron cyclotron resonance to upper hybrid resonance is also revealed.Interestingly,the evolutions of electron temperature and electron density with input power experience a‘delayed’jump,which may be correlated with the different power levels required for cyclotron and ionization.Moreover,when the field strength decreased,the variation of electron density behaves in an opposite trend with that of electron temperature,implying a possible competition of power deposition between them.The present work is of great interest for understanding the plasma discharge in ECRT especially immersed in a non-uniform magnetic field,and designing efficient ECRT using low magnetic field for economic space applications.

Electron Cyclotron Resonance Deposition of Wide Bandgap a-SiC:H Films Using Acetylene under High Hydrogen Dilution

The deposition of hydrogenated amorphous silicon carbide (a-SiC.H) films from a mixture of silane, acetylene and hydrogen gas using the electron cyclotron resonance chemical vapour deposition (ECR-CVD) process is reported. The variation of the deposition and film characteristics such as the deposition rate- optical bandgap, photoluminescence and the infra-red (IR) absorption as a function of the hydrogen dilution is investigated. The deposition rate increases to a maximum value of ~25 nm/min at a moderate hydrogen diIution ratio of ~20 [hydrogenflow (sccm)/acetylene+silane flow (sccm)], and decreases in response to a further increase in the hydrogen dilution. There is no strong dependence of the optical bandgap on the hydrogen dilution within the dilution range investigated (10 to 60), and the optical bandgap calculated from the E04 method varied marginally from ~2.85 eV to ~3.17 eV. The room temperaturephotoluminescence (PL) peak energy and intensity shows a prominent shift to a maximum value of ~2.17 eV corresponding to maximum PL intensity at a moderate hydrogen diIution of ~30.The PL intensity shows a strong dependence on the hydrogen dilution variation. IR absorption results show that films deposited at higher hydrogen dilution have more Si-C bonding.

Relative Irradiance Measurement and Bonding Configurations of Amorphous Fluorinated Carbon Films Deposited by Electron Cyclotron Resonance Plasma

a-C:F films are deposited by microwave electron cyclotron resonance (ECR)plasma chemical vapor deposition (CVD) using trifluoromethane (CHF3) and benzene (C6H6) as source gases at different microwave powers. The radicals in plasma originating from source gases dissociation are analyzed by relative irradiance measurement. The bonding configurations and binding state of a-C:F films are measured with Fourier-transformed infrared spectrometer (FTIR) and x-ray photoelectron spectroscopy (XPS). The results show that a-C:F films are mainly composed of CF radical at lower powers but of CF2 radical at higher powers. The deposition of films is related to the radicals generated in plasma and the main bonding configurations are dependent on the ratio of CF to CF2 radicals in films.

Simulation of nonlinear behavior in an electron cyclotron resonance plasma

Some nonlinear behavior in electron cyclotron resonance plasma was investigated using a two-dimension hybrid-mode with self-consistent microwave absorption. The saturation,oscillations of plasma parameters (plasma density, potential, electron temperature) versus operating conditions (pressure, power) are discussed. Our simulation results are consistent qualitatively with many experimental measurements.

Correlation ofⅢ/Ⅴsemiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance

Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance（ECR） were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I（V） characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I（V）characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I（V） characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ？5%, the etch rate shows a slightly concave shape in contrast to the plasma density.

Gap formation around Ω_e/2 and generation of low-band whistler waves by Landau-resonant electrons in the magnetosphere: Predictions from dispersion theory

In this paper we show that two significant phenomena of magnetospheric chorus emission can be explained by the participation of beam-like electron structures,created by Landau-resonant interaction with growing oblique whistler waves.The first concerns the widely observed spectral gap near half the electron cyclotron frequency Ωe;the second is related to the observation of very obliquely propagating lower-band waves that cannot be directly generated by temperature anisotropy.Concerning the gap,kinetic dispersion theory reveals that interference of the beam-related cyclotron mode ω~Ωe-kVb with the conventional whistler mode leads to mode splitting and the appearance of a ’forbidden’ area in the ω-k space.Thereby the beam velocity appears as an essential parameter.It is directly related to the phase velocity of the most unstable whistler wave mode,which is close to VAe/2 for sufficiently hot electrons(VAe is the electron Alfven velocity).To clarify the second point,we show that Landau-resonant beams with Vb Vb<VAe/2,which arise in cold plasmas from unstable upper-band waves,are able to generate lower-band whistler mode waves at very oblique propagation(θ≥60°).Our studies demonstrate the important role of Landau-resonant electrons in nonlinear whistler wave generation in the magnetosphere.

工质流量对ECR离子源束流影响研究

栅格进气道电子回旋共振(electron cyclotron resonance,ECR)离子源推进剂供给压强低、无阴极,有应用于吸气式电推进系统的潜力。流量对离子源的束流影响显著,当流量超过临界流量时,离子束流的增长受到抑制。为明晰限制离子束流增长的根本原因,开展不同流量下氮工质栅格进气道ECR离子源的Langmuir探针诊断实验,并基于诊断结果计算了寻常(ordinary,O)波截止区和电子获能指标的分布。研究结果表明,当流量低于临界流量时,随着流量增加,离子密度快速增加,限制离子束流增长的主要因素是中性气体密度。当流量超出临界流量时,O波截止区几乎覆盖整个等离子体产生区域,这导致电子能量获取效率下降了一个数量级。此时,限制离子束流增长的主要因素转变为电子温度。

Electron Cyclotron Harmonic Wave Heating in Tokamak Plasmas with Different Polarization Modes

Electron cyclotron heating on HL-2A has been simulated by TORAY-GA with a second harmonic extraordinary wave and a fundamental ordinary wave. The results show that the wave absorption of the second harmonic extraordinary wave is better than that of the fundamental ordinary wave. In order to understand the interaction mechanism between electrons and the two different polarization modes, the energy exchange between electrons and the two modes are theoretically analyzed, and it is found that the coupling intensity described by the Bessel function and different polarizations of the two modes are the main reasons leading to the above phenomenon. The theoretical results of this study fit well with the simulated and numerical results.

双放电腔微波-ECR等离子体源增强磁控溅射沉积技术

因其设备简单、沉积速率高等特点 ,磁控溅射沉积技术被广泛地用于各种薄膜制备中 .但用反应磁控溅射制备化合物薄膜如氧化物、氮化物膜时 ,为了得到化学配比的膜层 ,薄膜生长表面的反应激活基团、离子等的密度必须足够大 .为此对原有的微波 -ECR等离子体源进行了改造 .研究了双放电腔微波 -ECR等离子体源增强磁控溅射的放电特性 ,并用该方法制备了氮化碳膜 .结果表明 :该方法是一种有效的制备化合物薄膜的技术 ;用该方法制备的氮化碳膜 。

氩气和氪气作为ECR中和器工质的性能比较

为比较使用不同气体工质的电子回旋共振(ECR)中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明:以氩气为工质,ECR中和器在体积流量0.8 m L/min时,88.6 V电压可引出103.8 m A的电子电流,工质利用效率和电子损耗分别为1.278 9 W/A和194.573 W/A;以氪气为工质,ECR中和器在体积流量0.6 m L/min时,75 V电压可引出108 m A电子电流,工质利用效率和电子产生损耗分别为1.783 2W/A和176.7 W/A。以氪气为工质的中和器性能明显优于氩气,但2种工质都可以满足ECR离子源中和离子束流的需要。

用于半导体加工的腔耦合－磁多极型ECR源的研究

本实验室研制出一台谐振腔耦合一多极场位形的电子回旋共振（ＥＣＲ）微波等离子体源（ＭＥＰ）。采用朗谬探针和离子能量分析器，测量了ＭＥＰ中Ａｒ等离子体的放电特性。实验结果表明．ＭＥＰ能在很宽的运行参数范围，高效率地产生具有较高密度、较低离子温度和空间电位的大面积均匀等离子体，特别适合于半导体加工应用研究。

微推力ECR离子推力器等离子体源电子获能计算分析

为满足小型航天器的微推进需求,开展了微推力电子回旋共振(ECR)离子推力器的计算研究。实现该推力器的关键是ECR等离子体源合理的磁场和电场分布数值计算,从而使电子在穿过ECR谐振区时能够获得最大能量。为此以双环形永磁材料结构作为磁路,分别以直线形、环形和盘形微波耦合天线产生微波电磁场,同时改变等离子体源特征长度,利用有限元软件计算并分析ECR等离子体源内磁场和微波电场的分布规律以及电子在ECR区的获能规律。结果以微波输入功率5W、频率4.2GHz为例,发现环形耦合天线与较短等离子体源特征长度的结构组合可使电子在ECR区的获能指标达到最大且分布最佳。

Langmuir探针诊断微波ECR非平衡磁控溅射等离子体

利用朗谬尔探针诊断了ECR非平衡磁控溅射等离子体,给出了微观等离子体参量随宏观工艺参量变化关系。实验测得基片架附近等离子体密度达到1010～1011数量级,电子温度在(5～10)eV之间。随溅射靶功率变化,等离子体密度在130W时取得最大值;同样随微波源功率变化,等离子体密度在功率为850W时也达到最大值。电子温度、等离子体空间电位变化与等离子体密度呈相同趋势。

Deposition of High Quality GaN Film Under High ECR Plasma Density

Aim To investigate the influence of ion density( n i) on the deposition of wurtzite GaN films on the substrate of α Al 2O 3(0001) by electron cyclotron resonance plasma. Methods Langmuir probe measurement, Double crystal X ray diffraction and Hall measurement were used. Results The quality of GaN film strongly depended on its growth condition. The higher ion density resulted in a higher amount ratio of N/Ga and a lower background electron concentration of GaN film. When the GaN was prepared in the ion density of 2 0×10 11 cm -3 , the amount ratio of N/Ga was close to 1, the electron background density was 3 7×10 18 cm -3 and its full width at half magnitude(FWHM) was 16?arcmin. Conclusion The quality of GaN film can be improved by raising the plasma density.

不同磁路结构ECRIT放电室实验研究

电子回旋共振离子推力器(ECRIT)属于静电型推力器,其工作原理是利用微波能和圆台型放电室内永磁体环产生的外加磁场产生高电离度的电子回旋共振(ECR)等离子体,再通过屏栅和加速栅之间的陡峭电势差加速其中的离子,从而产生推力。由于ECRIT采用了无阴极放电方案,因而它具有寿命长、结构简单的特点。ECRIT放电室内恰当的放电室磁路结构对于推力器的可靠工作非常重要,一方面它要产生满足ECR等离子体形成需要的磁场位形;另一方面要使栅极附近的等离子体分布比较均匀,从而提高推力密度,降低离子对栅极的冲刷;再者还要求放电室能在比较高的能量利用效率下工作。在圆台型放电室内,文章采用了两种磁路结构,分别开展了真空环境下放电室内ECR等离子体的产生实验;认为放电室中的离子未被磁化,采用朗缪尔探针直接诊断两种磁路结构放电室内的电子温度和离子密度,分析氩等离子体场的结构。实验的结果是:靠近放电室大端面的永磁体环能够使推力器的能量利用效率提高,同时能够使栅极附近的等离子体分布更均匀,从而提高推力密度、降低离子对栅极的冲刷。