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Stimulated Raman scattering microscopy with phase-controlled light focusing and aberration correction for rapid and label-free, volumetric deep tissue imaging
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作者 Weiqi Wang Zhiwei Huang 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2024年第9期40-52,共13页
We report a novel stimulated Raman scattering(SRS)microscopy technique featuring phase-controlled light focusing and aberration corrections for rapid,deep tissue 3D chemical imaging with subcellular resolution.To acco... We report a novel stimulated Raman scattering(SRS)microscopy technique featuring phase-controlled light focusing and aberration corrections for rapid,deep tissue 3D chemical imaging with subcellular resolution.To accomplish phasecontrolled SRS(PC-SRS),we utilize a single spatial light modulator to electronically tune the axial positioning of both the shortened-length Bessel pump and the focused Gaussian Stokes beams,enabling z-scanning-free optical sectioning in the sample.By incorporating Zernike polynomials into the phase patterns,we simultaneously correct the system aberrations at two separate wavelengths(~240 nm difference),achieving a~3-fold enhancement in signal-to-noise ratio over the uncorrected imaging system.PC-SRS provides>2-fold improvement in imaging depth in various samples(e.g.,polystyrene bead phantoms,porcine brain tissue)as well as achieves SRS 3D imaging speed of~13 Hz per volume for real-time monitoring of Brownian motion of polymer beads in water,superior to conventional point-scanning SRS 3D imaging.We further utilize PC-SRS to observe the metabolic activities of the entire tumor liver in living zebrafish in cellsilent region,unraveling the upregulated metabolism in liver tumor compared to normal liver.This work shows that PCSRS provides unprecedented insights into morpho-chemistry,metabolic and dynamic functioning of live cells and tissue in real-time at the subcellular level. 展开更多
关键词 SRS 3D imaging phase-controlled light focusing image aberration corrections deep tissue imaging
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Cascaded metasurfaces enabling adaptive aberration corrections for focus scanning
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作者 Xiaotong Li Xiaodong Cai +5 位作者 Chang Liu Yeseul Kim Trevon Badloe Huanhuan Liu Junsuk Rho Shiyi Xiao 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2024年第10期28-39,共12页
Scanning focused light with corrected aberrations holds great importance in high-precision optical systems.However,conventional optical systems,relying on additional dynamical correctors to eliminate scanning aberrati... Scanning focused light with corrected aberrations holds great importance in high-precision optical systems.However,conventional optical systems,relying on additional dynamical correctors to eliminate scanning aberrations,inevitably result in undesired bulkiness and complexity.In this paper,we propose achieving adaptive aberration corrections coordinated with focus scanning by rotating only two cascaded transmissive metasurfaces.Each metasurface is carefully designed by searching for optimal phase-profile parameters of three coherently worked phase functions,allowing flexible control of both the longitudinal and lateral focal position to scan on any custom-designed curved surfaces.As proof-ofconcept,we engineer and fabricate two all-silicon terahertz meta-devices capable of scanning the focal spot with adaptively corrected aberrations.Experimental results demonstrate that the first one dynamically scans the focal spot on a planar surface,achieving an average scanning aberration of 1.18%within the scanning range of±30°.Meanwhile,the second meta-device scans two focal points on a planar surface and a conical surface with 2.5%and 4.6%scanning aberrations,respectively.Our work pioneers a breakthrough pathway enabling the development of high-precision yet compact optical devices across various practical domains. 展开更多
关键词 TERAHERTZ focus scanning aberration correction dielectric metasurface
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Multidimensional images and aberrations in STEM
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作者 Eric R.Hoglund Andrew R.Lupini 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第9期68-74,共7页
Recent advances in scanning transmission electron microscopy(STEM)have led to increased development of multidimensional STEM imaging modalities and novel image reconstruction methods.This interest arises because the m... Recent advances in scanning transmission electron microscopy(STEM)have led to increased development of multidimensional STEM imaging modalities and novel image reconstruction methods.This interest arises because the main electron lens in a modern transmission electron microscope usually has a diffraction-space information limit that is significantly better than the real-space resolution of the same lens.This state-of-affairs is sometimes shared by other scattering methods in modern physics and contributes to a broader excitement surrounding multidimensional techniques that scan a probe while recording diffraction-space images,such as ptychography and scanning nano-beam diffraction.However,the contrasting resolution in the two spaces raises the question as to what is limiting their effective performance.Here,we examine this paradox by considering the effects of aberrations in both image and diffraction planes,and likewise separate the contributions of pre-and post-sample aberrations.This consideration provides insight into aberration-measurement techniques and might also indicate improvements for super-resolution techniques. 展开更多
关键词 scanning transmission electron microscopy(STEM) aberrationS
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A Theory of Relativistic Asymptotic Aberrations of a Combined Focusing-Deflection System
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作者 李钰 《Science China Mathematics》 SCIE 1993年第8期957-968,共12页
In this paper, a general theory of the relativistic asymptotic third order geometrical and first order chromatic aberrations of a combined electrostatic-magnetostatic focuslng-deflection system have been presented. Al... In this paper, a general theory of the relativistic asymptotic third order geometrical and first order chromatic aberrations of a combined electrostatic-magnetostatic focuslng-deflection system have been presented. All their aberration coefficients contain no derivative higher than the second order. The divergence in Hawkes’ theory of asymptotic aberrations has been thoroughly voided in the present paper. 展开更多
关键词 electron optics focusing-deflection SYSTEM RELATIVISTIC ASYMPTOTIC aberrations.
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Experimental Characterization of the Electron Beam Focusing Effect Induced by Plasma Current in Opposite Directions
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作者 Lan Jiejie Zhao Quantang +5 位作者 Hu Zhanghu Ran Zhaohui Li Jia Zhou Youwei Yan Wenbing Cao Shuchunand Zhang Zimin 《IMP & HIRFL Annual Report》 2022年第1期89-89,共1页
In order to observe the oblique two-stream instability(OTSI)phenomenon,the experiment is currently underway at the High Energy Electron Radiography(HEER)platform at the Institute of Modern Physics(IMP),Chinese Academy... In order to observe the oblique two-stream instability(OTSI)phenomenon,the experiment is currently underway at the High Energy Electron Radiography(HEER)platform at the Institute of Modern Physics(IMP),Chinese Academy of Sciences by employing a gas-discharge plasma target with two 7.8 cm-long collinear quartz tubes.Such a long target is conducive to the observation of OTSI.And the simulation based on experimental parameters has been completed^([1]). 展开更多
关键词 electron OBLIQUE FOCUS
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Three-dimensional hexapole focusing of pulsed molecular beam for state selection
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作者 柯毅 邓小兵 胡忠坤 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第8期175-180,共6页
We theoretically investigate three-dimensional (3D) focusing of pulsed molecular beam using a series of hexapoles with different orientations. Transversely oriented hexapoles provide both the transverse and longitud... We theoretically investigate three-dimensional (3D) focusing of pulsed molecular beam using a series of hexapoles with different orientations. Transversely oriented hexapoles provide both the transverse and longitudinal focusing force and a longitudinally oriented one provides only the transverse force. The hexapole focusing position are designed to realize the simultaneous focusing in three directions. The additional longitudinal focusing compared with the conventional hexapole can suppress the effect of chromatic aberration induced by the molecular longitudinal velocity spread, thus improving the state-selection purity as well as the beam density. Performance comparison of state selection between this 3D focusing hexapole and a conventional one is made using numerical trajectory simulations, choosing CHF3 molecules as a tester. It is confirmed that our proposal can improve the state-selection purity from 68.2% to 96.1% and the beam density by a factor of 2.3. 展开更多
关键词 hexapole focusing state selection chromatic aberration
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A joint optimization algorithm for focused energy delivery in precision electronic warfare 被引量:4
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作者 Zhong-ping Yang Shu-ning Yang +3 位作者 Qing-song Zhou Jian-yun Zhang Zhi-hui Li Zhong-rui Huang 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2022年第4期709-721,共13页
Focused energy delivery(FED) is a technique that can precisely bring energy to the specific region,which arouses wide attention in precision electronic warfare(PREW).This paper first proposes a joint optimization mode... Focused energy delivery(FED) is a technique that can precisely bring energy to the specific region,which arouses wide attention in precision electronic warfare(PREW).This paper first proposes a joint optimization model with respect to the locations of the array and the transmitted signals to improve the performance of FED.As the problem is nonconvex and NP-hard,particle swarm optimization(PSO) is adopted to solve the locations of the array,while designing the transmitted signals under a feasible array is considered as a unimodular quadratic program(UQP) subproblem to calculate the fitness criterion of PSO.In the PSO-UQP framework established,two methods are presented for the UQP subproblem,which are more efficient and more accurate respectively than previous works.Furthermore,a threshold value is set in the framework to determine which method to adopt to take full advantages of the methods above.Meanwhile,we obtain the maximum localization error that FED can tolerate,which is significant for implementing FED in practice.Simulation results are provided to demonstrate the effectiveness of the joint optimization algorithm,and the correctness of the maximum localization error derived. 展开更多
关键词 Focused energy delivery Localization error Particle swarm optimization Precision electronic warfare Unimodular quadratic program
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AN INVERSE DESIGN OF ELECTROSTATIC FOCUSING FIELD FOR ELECTROSTATIC AND MAGNETIC IMAGING 被引量:1
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作者 倪国强 周立伟 +1 位作者 金伟其 方二伦 《Journal of Electronics(China)》 1990年第1期6-14,共9页
An inverse design of electrostatic focusing field for electrostatic and magneticimaging is investigated.Using the potential superimposition theorem of electrostatic field inmulti-electrode system,a mathematical model ... An inverse design of electrostatic focusing field for electrostatic and magneticimaging is investigated.Using the potential superimposition theorem of electrostatic field inmulti-electrode system,a mathematical model has been developed and an optimization methodhas been introduced into computation for designing the electrostatic focusing field of the imagingsystem. 展开更多
关键词 Photoelectronic Imaging electron optics ELECTROSTATIC and magnetic combined focusing INVERSE design of electron optical system CATHODE LENS
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Investigation of intense sheet electron beam transport using the macroscopic cold-fluid model and the single-particle orbit theory
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作者 韩莹 阮存军 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第5期207-213,共7页
The focusing and the stable transport of an intense elliptic sheet electron beam in a uniform magnetic field are investigated thoroughly by using the macroscopic cold-fluid model and the single-particle orbit theory.T... The focusing and the stable transport of an intense elliptic sheet electron beam in a uniform magnetic field are investigated thoroughly by using the macroscopic cold-fluid model and the single-particle orbit theory.The results indicate that the envelopes and the tilted angles of the sheet electron beam obtained by the two theories are consistent.The single-particle orbit theory is more accurate due to its treatment of the space-charge fields in a rectangular drift tube.The macroscopic cold-fluid model describes the collective transport process in order to provide detailed information about the beam dynamics,such as beam shape,density,and velocity profile.The tilt of the elliptic sheet beam in a uniform magnetic field is carefully studied and demonstrated.The results presented in this paper provide two complete theories for systemically discussing the transport of the sheet beam and are useful for understanding and guiding the practical engineering design of electron optics systems in high power vacuum electronic devices. 展开更多
关键词 focusing and transport macroscopic cold-fluid model sheet electron beam single-particle orbit theory
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Focused electron beam transport through a long narrow metal tube at elevated pressures in the forevacuum range
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作者 Ilya BAKEEV Kirill KARPOV +2 位作者 Aleksandr KLIMOV Efim OKS Aleksey ZENIN 《Plasma Science and Technology》 SCIE EI CAS CSCD 2023年第1期128-134,共7页
We present here our investigations of the features of focused electron beam transport in free space at elevated pressures of a few pascals.We have explored the effect of the beam accelerating voltage,operating gas pre... We present here our investigations of the features of focused electron beam transport in free space at elevated pressures of a few pascals.We have explored the effect of the beam accelerating voltage,operating gas pressure,and magnetic focusing upon the trajectory of beam electrons in the crossover region,in particular on the beam convergence and divergence angles.It is shown that for the forevacuum pressure range of 2-5 Pa explored,a distinctive feature of the propagation of a focused electron beam with a current of up to 20 mA at an accelerating voltage of 10-20 kV is the difference in the angles of convergence(before the focus)and divergence(after the focus).Whereas at a low pressure of 2 Pa the divergence angle is smaller than the convergence angle,as the pressure increases the divergence angle increases and for pressures greater than 5 Pa the divergence angle is greater than the convergence angle.The results obtained were used in experiments on electron beam transport through a long narrow metal tube with a diameter of 5.8-9.2 mm and length of 10-30 cm.We show that for a 30 cm long tube of 7.5 mm diameter,the focused beam transmission can exceed 70%. 展开更多
关键词 focused electron beam plasma electron source forevacuum pressure range long metal tube
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Development of a radiographic method for measuring the discrete spectrum of the electron beam from a plasma focus device
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作者 Neda SHAMSIAN Babak SHIRANI BIDABADI Hosein PIRJAMADI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第7期26-33,共8页
An indirect method is proposed for measuring the relative energy spectrum of the pulsed electron beam of a plasma focus device. The Bremsstrahlung x-ray, generated by the collision of electrons against the anode surfa... An indirect method is proposed for measuring the relative energy spectrum of the pulsed electron beam of a plasma focus device. The Bremsstrahlung x-ray, generated by the collision of electrons against the anode surface, was measured behind lead filters with various thicknesses using a radiographic film system. A matrix equation was considered in order to explain the relation between the x-ray dose and the spectral amplitudes of the electron beam. The electron spectrum of the device was measured at 0.6 mbar argon and 22 kV charging voltage, in four discrete energy intervals extending up to 500 keV. The results of the experiments show that most of the electrons are emitted in the 125-375 keV energy range and the spectral amplitude becomes negligible beyond 375 keV. 展开更多
关键词 magnetized plasma plasma focus plasma diagnostics electron beam energyspectrum x-ray dosimetry
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Comparative Analysis for Different Mathematical Models in Electron Optics
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作者 Valentin Ivanov 《Journal of Chemistry and Chemical Engineering》 2014年第10期990-995,共6页
The comparative analysis of modem mathematical models for 3D problems in electron optics is presented. The new approach to solve the electron optics problems in three dimensions is presented. It is based on the princi... The comparative analysis of modem mathematical models for 3D problems in electron optics is presented. The new approach to solve the electron optics problems in three dimensions is presented. It is based on the principal ray method suggested by G. Grinberg in 1948. That perspective approach was not realized before for full three-dimensional electron optic systems, probably because of the complexity of its mathematical apparatus. We describe the analytical technique of the BEM (boundary element method) for the field evaluation, and 3rd order aberration expansion for the trajectory analysis. The first version of such computer code "OPTICS-3" and some results of numerical simulations with this code were presented. 展开更多
关键词 electron optics aberration theory analytical technique boundary element method.
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Nanoparticles Production and Inclusion in <i>S. aureus</i>Incubated with Polyurethane: An Electron Microscopy Analysis
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作者 Lyubov V. Didenko George A. Avtandilov +7 位作者 Natalia V. Shevlyagina N. M. Shustrova Tatiana A. Smirnova I. Y. Lebedenko Roberta Curia Claudio Savoia Francesco Tatti Marziale Milani 《Open Journal of Medical Imaging》 2013年第2期69-73,共5页
This study shows that submicron/nanoparticles found in bacterial cells (S. aureus) incubated with polyurethane (a material commonly used for prostheses in odontostomatology) are a consequence of biodestruction. The pr... This study shows that submicron/nanoparticles found in bacterial cells (S. aureus) incubated with polyurethane (a material commonly used for prostheses in odontostomatology) are a consequence of biodestruction. The presence of polyurethane nanoparticles into bacterial vesicles suggests that the internalization process occurs through endocytosis. TEM and FIB/SEM are a suitable set of correlated instruments and techniques for this multi facet investigation: polyurethane particles influence the properties of S. aureus from the morpho-functional standpoint that may have undesirable effects on the human body. S. aureus and C. albicans are symbiotic microorganisms;it was observed that C. albicans has a similar interaction with polyurethane and an increment of the biodestruction capacity is expected by its mutual work with S. aureus. 展开更多
关键词 POLYURETHANE S. AUREUS Biodestruction Endocytosis FIB/SEM (Focused Ion Beam/Scanning electron Microscope) TEM (Transmission electron Microscope) STEM (Scanning Transmission electron Microscope)
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Stability and Electronic Properties of Hydrogenated Zigzag Carbon Nanotube Focused on Stone-Wales Defect
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作者 潘立军 张洁 +1 位作者 陈卫光 唐亚楠 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第3期82-86,共5页
We present a first-principles study of the chemisorption of hydrogen on a Stone-Wales (SW) defective carbon nanotube (10,0). The investigated configurations include four configurations covering single defects and ... We present a first-principles study of the chemisorption of hydrogen on a Stone-Wales (SW) defective carbon nanotube (10,0). The investigated configurations include four configurations covering single defects and double defects. One hydrogen dimer adsorption is energetically favored on bonds shared by carbon heptagon-heptagon for configurations with the defect parallel to the tube axis compared with the carbon pentagon-hexagon sites for ones with a slanted defect. This different behavior is also demonstrated for hydrogen dimer chain adsorption, the favored site for the former ones is through the defect, which is the nearest neighbor site to defect for the latter ones. It is found that the energy band gaps of hydrogenated configurations may be enlarged or decreased by altering the adsorption site or defect position. The semiconductor-to-metal transition may occur for configurations with the defect or defects parallel to the tube axis due to low electronic localization. Our results highlight the interest of the interaction of multi-factor system by providing a detailed bond and position picture of a hydrogenated defective carbon nanotube (10,0). 展开更多
关键词 SW Stability and electronic Properties of Hydrogenated Zigzag Carbon Nanotube Focused on Stone-Wales Defect
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Intense laser beam guiding in self-induced electron cavitation channel in underdense plasmas
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作者 苍宇 余玮 +2 位作者 武慧春 徐涵 田友伟 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第2期456-462,共7页
In underdense plasmas, the transverse ponderomotive force of an intense laser beam with Ganssian transverse profile expels electrons radially, and it can lead to an electron cavitstion. An improved cavitation model wi... In underdense plasmas, the transverse ponderomotive force of an intense laser beam with Ganssian transverse profile expels electrons radially, and it can lead to an electron cavitstion. An improved cavitation model with charge conservation constraint is applied to the determination of the width of the electron cavity. The envelope equation for spot size derived by using source-dependent expansion method is extended to including the electron cavity. The condition for self-guiding is given and illuminated by an effective potential for the laser spot size. The effects of the laser power, plasma density and energy dissipation on the self-guiding condition are discussed. 展开更多
关键词 relativistic self-focusing ponderomotive self-channelling self-induced electron cavitation self-guiding
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一种可调焦离轴两反光学系统精密调校工艺技术研究
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作者 张向明 吴奉泽 +5 位作者 赵红军 惠刚阳 杨熊 刘伟光 李月贵 王诚 《应用光学》 CAS 北大核心 2024年第4期858-864,共7页
针对可调焦离轴两反光学系统的精密装调,提出了一种共基准调校方法,使导轨导向与主镜和次镜光轴均以同一基准进行精确调校,实现导轨运动轴线与主镜和次镜光轴平行。主镜、次镜系统光轴一致性调试采用初调整和精调整两步完成,初调整实现... 针对可调焦离轴两反光学系统的精密装调,提出了一种共基准调校方法,使导轨导向与主镜和次镜光轴均以同一基准进行精确调校,实现导轨运动轴线与主镜和次镜光轴平行。主镜、次镜系统光轴一致性调试采用初调整和精调整两步完成,初调整实现主镜和次镜基本位于理论安装位置,降低装调误差,然后进行计算机辅助装调,实现主镜和次镜光轴一致性精调整,使系统波像差满足要求。实验结果表明:无穷远处系统波像差RMS达到(1/15)λ(λ=632.8 nm),系统衍射分辨率达到0.64″,系统调焦至10 mm处,实测主镜、次镜系统所成焦距为1608 mm,系统分辨率为2.6″,达到设计要求。 展开更多
关键词 离轴两反光学系统 调焦 共基准 波像差
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一维阵列电子注平面聚焦系统磁场分布特性 被引量:1
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作者 杨金生 纪焕丽 孙然 《太赫兹科学与电子信息学报》 2024年第1期1-5,共5页
针对平面集成行波管对一维阵列电子注聚焦的应用需求,设计了4通道电子注平面磁聚焦系统。将各通道磁场轴向和横向分量沿轴分布特征计算结果与测试结果进行对比,确认了Opera软件计算磁场分布特征的准确性。为与轴对称周期永磁(PPM)聚焦... 针对平面集成行波管对一维阵列电子注聚焦的应用需求,设计了4通道电子注平面磁聚焦系统。将各通道磁场轴向和横向分量沿轴分布特征计算结果与测试结果进行对比,确认了Opera软件计算磁场分布特征的准确性。为与轴对称周期永磁(PPM)聚焦系统电子注通道内磁场分布特性进行对比,建立了轴对称PPM聚焦系统模型,测试结果与计算结果一致性较好。通过平面聚焦系统与轴对称PPM聚焦系统电子注通道内的磁场纵向和横向分布特性对比表明,两种聚焦系统电子注通道内纵向和横向磁场具有相同的分布特征,在离轴相同位置的圆周上横向磁场分量与轴向分量的比值均为Bx/Bz≈0.11,该平面聚焦系统可实现一维阵列圆形电子注的良好聚焦。 展开更多
关键词 一维阵列电子注 平面磁聚焦系统 磁场分布特性 PPM聚焦系统
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STEM朗奇图和电子束斑模拟插件
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作者 朱倩 曲先林 王毅 《电子显微学报》 CAS CSCD 北大核心 2024年第4期473-478,共6页
在扫描透射电子显微镜(STEM)中,实现原子级分辨率的关键在于精确的像差校正,这通常依赖于朗奇图的测量和优化。对于STEM的新手而言,理解和优化朗奇图是一项极具挑战性的任务,往往需要长时间的实践积累才能掌握。本研究介绍了一种朗奇图... 在扫描透射电子显微镜(STEM)中,实现原子级分辨率的关键在于精确的像差校正,这通常依赖于朗奇图的测量和优化。对于STEM的新手而言,理解和优化朗奇图是一项极具挑战性的任务,往往需要长时间的实践积累才能掌握。本研究介绍了一种朗奇图及电子束斑模拟分析插件,用户可直接调整各种像差参数(包括像散、球差、慧差等),实时观察这些参数变化如何影响朗奇图,从而更直观地理解各种像差对朗奇图和电子束斑的影响。此外,插件还提供focus wobble功能,动态显示不同焦距下的朗奇图和电子束斑,模拟实际实验过程中在正焦附近循环调焦时的朗奇图和电子束斑。该插件不仅为初学者理解像差方程提供了直观图像演示,进而更加便捷和迅速地掌握球差校正电镜的调节和使用,也为研究人员提供了一种展示像差方程、朗奇图和电子束斑的图形化工具。 展开更多
关键词 朗奇图 电子束斑 像差校正 图像模拟
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W波段4路平面集成行波管
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作者 杨金生 纪焕丽 +5 位作者 孙然 穆涵硕 张小青 杜英华 蔡军 冯进军 《微波学报》 CSCD 北大核心 2024年第6期1-5,13,共6页
针对短毫米波有源相控阵应用,文中优化设计了W波段高效率高频系统、低电压电子枪、一维阵列电子注平面聚焦系统和4路平面集成行波管拓扑结构,采用常规PPM聚焦系统制管验证了高频系统设计的有效性,设计并制作了2路流通管样件,电子注流通... 针对短毫米波有源相控阵应用,文中优化设计了W波段高效率高频系统、低电压电子枪、一维阵列电子注平面聚焦系统和4路平面集成行波管拓扑结构,采用常规PPM聚焦系统制管验证了高频系统设计的有效性,设计并制作了2路流通管样件,电子注流通率均高于85%,验证了一维阵列电子注平面聚焦系统的设计有效性。基于验证的高频系统、低电压电子枪以及平面磁聚焦系统,设计了4路平面集成行波管拓扑结构,研制了W波段4路平面集成行波管样管。测试结果表明,4路行波管电子注流通率均高于80%,相同工作电压(12.6 kV)下4路行波管输出功率优于10 W,带宽均达到6 GHz,增益均高于25 dB,具有较好的电性能一致性,为短毫米波行波管有源相控阵应用提供了新的解决方案。 展开更多
关键词 W波段 平面集成行波管 一维阵列电子注 平面磁聚焦系统 电子注流通率
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原子力显微镜-扫描电子显微镜共定位表征系统的研发与应用
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作者 蔡蕊 万鹏 +2 位作者 徐强 吕天明 孙智广 《分析测试技术与仪器》 CAS 2024年第1期53-57,共5页
微纳加工过程中,常有样品需要进行聚焦离子束(FIB)溅射、切割,扫描电子显微镜(SEM)以及原子力显微镜(AFM)表征,而这三类仪器都需要将样品固定在样品台上才可测试,固定不佳会影响表征结果.但固定好的样品在不同仪器之间转移、拆卸、再固... 微纳加工过程中,常有样品需要进行聚焦离子束(FIB)溅射、切割,扫描电子显微镜(SEM)以及原子力显微镜(AFM)表征,而这三类仪器都需要将样品固定在样品台上才可测试,固定不佳会影响表征结果.但固定好的样品在不同仪器之间转移、拆卸、再固定的过程中极易受到破坏.基于以上问题,设计了AFM-SEM-FIB样品共定位系统,可实现样品在此三种仪器之间的无损转移及共定位,避免珍贵样品破坏及目标丢失,以及解决AFM扫描无法控制方向、迅速调整位点等问题.在微纳表征中有优异的表现,系统已被开发成产品并量产销售. 展开更多
关键词 共定位系统 原子力显微镜 扫描电子显微镜 聚焦离子束 微纳表征
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