As a potential flexible substrate for flexible electronics, a polymer-sandwiched ultra-thin silicon platform is stud- ied. SU-8 photoresist coated on the silicon membrane improves its flexibility as shown by an ANSYS ...As a potential flexible substrate for flexible electronics, a polymer-sandwiched ultra-thin silicon platform is stud- ied. SU-8 photoresist coated on the silicon membrane improves its flexibility as shown by an ANSYS simulation. Using the plasma enhanced chemical vapor deposited Si02/Si3N4 composite film as an etching mask, a 4＂ silicon- （100） wafer is thinned to 26[tm without rupture in a 30wt.% KOH solution. The thinned wafer is coated on both sides with 20 pm of SU-8 photoresist and is cut into strips. Then the strips are bent by a caliper to measure its bending radius. A sector model of bending deformation is adopted to estimate the radius of curvature. The determined minimal bending radius of the polymer-sandwiched ultra-thin silicon layer is no more than 3.3mm. The fabrication process of this sandwich structure can be used as a post-fabrication process for high performance flexible electronics.展开更多
An E//B neutral particle analyzer(NPA)has been designed and is under development at Sichuan University and Southwestern Institute of Physics.The main purpose of the E//B NPA is to measure the distribution function of ...An E//B neutral particle analyzer(NPA)has been designed and is under development at Sichuan University and Southwestern Institute of Physics.The main purpose of the E//B NPA is to measure the distribution function of fast ions in the HL-2A/3 tokamak.The E//B NPA contains three main units,i.e.the stripping unit,the analyzing unit and the detection unit.A gas stripping chamber was adopted as the stripping unit.The results of the simulations and beam tests for the stripping chamber are presented.Parallel electric and magnetic fields provided by a NdFeB permanent magnet and two parallel electric plates were designed and constructed for the analyzing unit.The calibration of the magnetic and electric fields was performed using a 50 kV electron cyclotron resonance ion source(ECRIS)platform.The detection unit consists of 32lutetium-yttrium oxyorthosilicate(LYSO)detector modules arranged in two rows.The response functions ofα,hydrogen ions(H^(+),H_(2)^(+)and H_(3)^(+))andγfor a detector module were measured with^(241)Am,^(137)Cs and^(152)Eu sources together with the 50 kV ECRIS platform.The overall results indicate that the designed E//B NPA device is capable of measuring the intensity of neutral hydrogen and deuteron atoms with energy higher than 20 keV.展开更多
基金Supported by the State Scholarship Fund of Chinathe Open Research Fund of Shanghai Key Laboratory of Multidimensional Information Processing of East China Normal University
文摘As a potential flexible substrate for flexible electronics, a polymer-sandwiched ultra-thin silicon platform is stud- ied. SU-8 photoresist coated on the silicon membrane improves its flexibility as shown by an ANSYS simulation. Using the plasma enhanced chemical vapor deposited Si02/Si3N4 composite film as an etching mask, a 4＂ silicon- （100） wafer is thinned to 26[tm without rupture in a 30wt.% KOH solution. The thinned wafer is coated on both sides with 20 pm of SU-8 photoresist and is cut into strips. Then the strips are bent by a caliper to measure its bending radius. A sector model of bending deformation is adopted to estimate the radius of curvature. The determined minimal bending radius of the polymer-sandwiched ultra-thin silicon layer is no more than 3.3mm. The fabrication process of this sandwich structure can be used as a post-fabrication process for high performance flexible electronics.
基金supported by the National Magnetic Confinement Fusion Energy R&D Program of China(No.2018YFE0310200)National Natural Science Foundation of China(Nos.11705242,11805138 and 12175156)the Fundamental Research Funds for the Central Universities in China(Nos.YJ201820 and YJ201954)。
文摘An E//B neutral particle analyzer(NPA)has been designed and is under development at Sichuan University and Southwestern Institute of Physics.The main purpose of the E//B NPA is to measure the distribution function of fast ions in the HL-2A/3 tokamak.The E//B NPA contains three main units,i.e.the stripping unit,the analyzing unit and the detection unit.A gas stripping chamber was adopted as the stripping unit.The results of the simulations and beam tests for the stripping chamber are presented.Parallel electric and magnetic fields provided by a NdFeB permanent magnet and two parallel electric plates were designed and constructed for the analyzing unit.The calibration of the magnetic and electric fields was performed using a 50 kV electron cyclotron resonance ion source(ECRIS)platform.The detection unit consists of 32lutetium-yttrium oxyorthosilicate(LYSO)detector modules arranged in two rows.The response functions ofα,hydrogen ions(H^(+),H_(2)^(+)and H_(3)^(+))andγfor a detector module were measured with^(241)Am,^(137)Cs and^(152)Eu sources together with the 50 kV ECRIS platform.The overall results indicate that the designed E//B NPA device is capable of measuring the intensity of neutral hydrogen and deuteron atoms with energy higher than 20 keV.
