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Combined optical fiber interferometric sensors for the detection of acoustic emission 被引量:2
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作者 LIANG Yi-jun MU Lin-lin LIU Jun-feng YU Xiao-tao 《Optoelectronics Letters》 EI 2008年第3期184-187,共4页
A type of combined optical fiber interferometric acoustic emission sensor is proposed. The sensor can be independent on the laser source and make light interference by matching the lengths of two arms,so it can be use... A type of combined optical fiber interferometric acoustic emission sensor is proposed. The sensor can be independent on the laser source and make light interference by matching the lengths of two arms,so it can be used to monitor the health of large structure. Theoretical analyses indicate that the system can be equivalent to the Michelson interferometer with two optical fiber loop reflectors,and its sensitivity has been remarkably increased because of the decrease of the losses of light energy. PZT is powered by DC regulator to control the operating point of the system,so the system can accurately detect feeble vibration which is generated by ultrasonic waves propagating on the surface of solid. The amplitude and the frequency of feeble vibration signal are obtained by detecting the output light intensity of interferometer and using Fourier transform technique. The results indicate that the system can be used to detect the acoustic emission signals by the frequency characteristics. 展开更多
关键词 Acoustic emissions Acoustics Electric network analysis fiber optics fibers Fourier transforms Geodetic satellites INTERFEROMETERS interferometry Lattice vibrations Light sources Michelson interferometers optical fibers optical in Acoustic emission sensors Acoustic Emission signals fiber loop reflectors Fourier Frequency characteristics interferometric sensors Laser sources Light energy Light intensities Operating points optical Vibration signals
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Utilization of Extrinsic Fabry-Perot Interferometers with Spectral Interferometric Interrogation for Microdisplacement Measurement
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作者 Leonid Liokumovich Aleksandr Markvart Nikolai Ushakov 《Journal of Electronic Science and Technology》 CAS CSCD 2020年第1期59-75,共17页
The paper presents a number of signal processing approaches for the spectral interferometric interrogation of extrinsic Fabry-Perot interferometers(EFPIs). The analysis of attainable microdisplacement resolution is pe... The paper presents a number of signal processing approaches for the spectral interferometric interrogation of extrinsic Fabry-Perot interferometers(EFPIs). The analysis of attainable microdisplacement resolution is performed and the analytical equations describing the dependence of resolution on parameters of the interrogation setup are derived. The efficiency of the proposed signal processing approaches and the validity of analytical derivations are supported by experiments. The proposed approaches allow the interrogation of up to four multiplexed sensors with attained resolution between 30 pm and 80 pm, up to three times improvement of microdisplacement resolution of a single sensor by means of using the reference interferometer and noisecompensating approach, and ability to register signals with frequencies up to 1 kHz in the case of 1 Hz spectrum acquisition rate. The proposed approaches can be used for various applications, including biomedical, industrial inspection, and others, amongst the microdisplacement measurement. 展开更多
关键词 Absolute MEASUREMENT dynamic MEASUREMENT fabry-perot interferometer LEAST-SQUARES methods optical fiber sensors RESOLUTION analysis RESOLUTION enhancement sensor multiplexing SPECTRAL interferometry
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Mesa Diaphragm-Based Fabry-Perot Optical MEMS Pressure Sensor
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作者 Yi-Xian Ge Ming Wang Hai-Tao Yan 《Journal of Electronic Science and Technology of China》 2008年第4期466-469,共4页
An optical micro electron mechanical system (MEMS) pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the... An optical micro electron mechanical system (MEMS) pressure sensor with a mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Perot (F-P) interference and the relation between deflection and pressure is analyzed. Both the mechanical model of the mesa structure diaphragm and the signal averaging effect is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the parallelism and can reduce the signal averaging effect. Experimental results demonstrate that the mesa structure sensor has a reasonable linearity and sensitivity. 展开更多
关键词 fabry-perot interference microelectron mechanical system mesa structure optical fiber sensor parallelism.
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Accurate Analysis of Multi-Mode Interferometric Optical Fiber Sensor
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作者 Lijun LI Congying JIA +1 位作者 Qian MA Tianzong XU 《Photonic Sensors》 SCIE EI CSCD 2024年第1期48-58,共11页
In view of the problem that the sensing characteristics of the multi-mode interferometric fiber sensors cannot be accurately analyzed,an analysis method based on the fast Fourier transform(FFT)and inverse fast Fourier... In view of the problem that the sensing characteristics of the multi-mode interferometric fiber sensors cannot be accurately analyzed,an analysis method based on the fast Fourier transform(FFT)and inverse fast Fourier transform(IFFT)is proposed and demonstrated theoretically and experimentally.The suitabilities of the rectangular window function with the narrow main lobe(high spectrum resolution)and low side lobe(high main mode energy leakage)and the Hanning window function with the wide main lobe(low spectrum resolution)and high side lobe(high energy concentration)in this kind of sensor analysis are discussed,respectively.This method can not only realize the sensing performance analysis of the various modes,but also overcome the inconsistency of the different interference wavelength(dip)sensing characteristics in the conventional analysis methods.At the same time,this method is also beneficial to solve the repetitive problem of such sensors. 展开更多
关键词 Window function FFT optical fiber interferometric sensor analysis method
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Miniaturized Fiber-Optic Fabry-Perot Interferometer for Highly Sensitive Refractive Index Measurement
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作者 Ming Deng Tao Zhu +1 位作者 Yun-Jiang Rao Hong Li 《Journal of Electronic Science and Technology of China》 2008年第4期365-368,共4页
This paper presents a novel miniaturized fiber-optic Fabry-Peort interferometer (FPI) for highly sensitive refractive index measurement. This device was tested for the refractive indices of various liquids including... This paper presents a novel miniaturized fiber-optic Fabry-Peort interferometer (FPI) for highly sensitive refractive index measurement. This device was tested for the refractive indices of various liquids including acetone and ethanol at room temperature. The sensitivity for measurement of refractive index change of ethanol is 1138 nm/RIU at the wavelength of 1550 nm. In addition, the sensor fabrication is simple including only cleaving, splicing, and etching. The signal is stable with high visibility. Therefore, it provides a valuable tool in biological and chemical applications. 展开更多
关键词 fiber optic sensors fabry-perot miniature sensor photonic crystal fiber refractive indexmeasurement.
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A new demodulation technique for optical fiber interferometric sensors with[3×3]directional couplers 被引量:12
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作者 刘亭亭 崔杰 +2 位作者 陈德胜 肖灵 孙德兴 《Chinese Optics Letters》 SCIE EI CAS CSCD 2008年第1期12-15,共4页
Optical fiber interferometric sensors based on [3×3] couplers have been used in many fields. A new technique is proposed to demodulate output signals of this kind of sensors. The technique recovers the signal of ... Optical fiber interferometric sensors based on [3×3] couplers have been used in many fields. A new technique is proposed to demodulate output signals of this kind of sensors. The technique recovers the signal of interest by fitting coefficients of elliptic (Lissajous) curves between each fiber pair. Different from other approaches, this technique eliminates the dependence on the idealization of [3×3] coupler, provides enhanced tolerance to the variance of photoelectric converters, and is anti-polarization in a certain extent. The main algorithm has been successfully demonstrated both by numerical simulation and experimental result. 展开更多
关键词 directional couplers A new demodulation technique for optical fiber interferometric sensors with[3
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Asymmetric Fabry-Pérot interferometric cavity for fiber optical sensors 被引量:1
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作者 江绍基 梁有程 +1 位作者 朱析 汪河洲 《Chinese Optics Letters》 SCIE EI CAS CSCD 2006年第10期563-565,共3页
Good linearity and wide dynamic range are the advantages of asymmetric Fabry-Pérot (F-P) interferometric cavity, whose realization has been long for. Based on optical thin film characteristic matrix theory, an ... Good linearity and wide dynamic range are the advantages of asymmetric Fabry-Pérot (F-P) interferometric cavity, whose realization has been long for. Based on optical thin film characteristic matrix theory, an asymmetric F-P interferometric cavity with good linearity and wide dynamic range is designed. And by choosing the material of two different thin metallic layers, the asymmetric F-P interferometric cavity is successfully fabricated. The design theory and method of this asymmetric F-P interferometric cavity have been described in detailed. In this paper an asymmetric F-P interferometric cavity used in fiber optical sensor is reported. 展开更多
关键词 rot interferometric cavity for fiber optical sensors Asymmetric Fabry-P
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Reflectometric and interferometric fiber optic sensor's principles and applications 被引量:6
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作者 Muhammad Noaman ZAHID Jianliang JIANG Saad RIZVI 《Frontiers of Optoelectronics》 EI CSCD 2019年第2期215-226,共12页
Fiber optic sensors have been widely used and studied in recent times. This paper presents operating principles and applications of fiber optic sensors namely reflectometric and interferometric fiber optic sensors. Ma... Fiber optic sensors have been widely used and studied in recent times. This paper presents operating principles and applications of fiber optic sensors namely reflectometric and interferometric fiber optic sensors. Majority of optical fiber sensors fall under these two broad categories. Both interferometric and reflectometric fiber optic sensors are becoming popular for their ease of use, flexibility, long distance sensing, and potentially noise free detection. Also, these sensors can easily be used in various applications such as structural health monitoring, perimeter intrusion detection, temperature monitoring, and other numerous applications. This paper broadly classifies fiber optic sensors into two subtypes. The paper further highlights different sensors based on their sensing resolution, range, spatial advantages, and applications. 展开更多
关键词 fiber optic reflectometric interferometric optical fiber sensorS sensor applications
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Study on Fiber-Optic Low-Coherence Interferometric and Fiber Bragg Grating Sensors 被引量:2
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作者 Yunjiang RAO 《Photonic Sensors》 SCIE EI CAS 2011年第4期382-400,共19页
This article reviews author's research work on fiber-optic sensors over the last twenty years. It includes two aspects: low-coherence interferometric sensors (LCI) and fiber Bragg grating (FBG) sensors. For LCI ... This article reviews author's research work on fiber-optic sensors over the last twenty years. It includes two aspects: low-coherence interferometric sensors (LCI) and fiber Bragg grating (FBG) sensors. For LCI sensors, author's work mainly focuses on the interrogation and multiplexing methods for Fizeau and Fabry-Perot interferometric sensors at the University of Kent at Canterbury (UKC), UK, and study on novel Fabry-Perot interferometric sensors and their multiplexing methods at Chongqing University (CQU) and University of Electronic Science & Technology of China (UESTC), China, respectively. For FBG sensors, a number of multiplexing schemes are proposed and demonstrated at UKC, and then novel methods for realization of multi-parameter measurement and long-distance measurement based on the FBG sensor and its combination with other optical fiber sensors are also reported at CQU & UESTC. Thus, author's study on these two topics can be diviaed into two periods, at UKC and at CQU & UESTC, China. This review is presented in such a time sequence. 展开更多
关键词 fiber optic sensors low-coherence interferometry fiber Bragg grating fabry-perot
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测量光纤外腔Fabry-Perot干涉仪的白光干涉术 被引量:7
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作者 江毅 《光子学报》 EI CAS CSCD 北大核心 2006年第3期381-384,共4页
提出了一种基于白光干涉术测量低锐度光纤外腔Fabry-Perot干涉仪(EFPI)的方法·用宽带光源注入F-P腔,在接收端用一高锐度的可调谐光纤F-P滤波器对EFPI的反射光谱进行扫描,获得了周期性变化的光谱输出·为了测量出EFPI的腔长,对... 提出了一种基于白光干涉术测量低锐度光纤外腔Fabry-Perot干涉仪(EFPI)的方法·用宽带光源注入F-P腔,在接收端用一高锐度的可调谐光纤F-P滤波器对EFPI的反射光谱进行扫描,获得了周期性变化的光谱输出·为了测量出EFPI的腔长,对光谱信号进行傅里叶变换,得到光谱的周期,由此求出EFPI的绝对腔长·证明了用低锐度EFPI的测量准确度由腔长决定·F-P腔越长,测量准确度越高·在腔长分别是200μm,400μm和600μm时,测量的腔长与实际腔长相同· 展开更多
关键词 波导与纤维光学 光纤传感器 光纤外腔fabry-perot干涉仪 傅里叶变换
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微纳光纤Fabry-Perot超低温压力传感器研究 被引量:3
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作者 张雨彤 江毅(指导) +1 位作者 崔洋 冯新星 《光子学报》 EI CAS CSCD 北大核心 2022年第5期221-227,共7页
提出了一种用于超低温环境的微纳光纤非本征法布里-珀罗干涉仪压力传感器。单模光纤端面通过飞秒激光刻蚀出微孔,与无芯光纤熔接形成密闭的法珀腔。通过将无芯光纤切割、研磨等步骤,制作出微纳光纤压力传感器。利用飞秒激光微加工,可以... 提出了一种用于超低温环境的微纳光纤非本征法布里-珀罗干涉仪压力传感器。单模光纤端面通过飞秒激光刻蚀出微孔,与无芯光纤熔接形成密闭的法珀腔。通过将无芯光纤切割、研磨等步骤,制作出微纳光纤压力传感器。利用飞秒激光微加工,可以加工出不同孔径的微孔及不同厚度的膜片,得到不同灵敏度及测量压力范围的压力传感器。实验结果表明,提出的传感器在-196℃、0~5 MPa的压力范围内表现出良好的线性度,压力升高和降低过程中腔长-压力灵敏度分别为110.33 nm/MPa和110.68 nm/MPa。该传感器能够满足超低温环境下的压力测量需求。 展开更多
关键词 非本征法布里-珀罗干涉仪 光纤传感器 飞秒激光微加工 超低温 压力测量
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Fibre Optic Protection System for Concrete Structures
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作者 J.S.Leng A.Hameed +3 位作者 D.Winter R.A.Barnes G.C.Mays G.F.Fernando 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第3期404-410,共7页
The design concepts, modelling and implementation of various fibre optic sensor protection systems for development in concrete structures were investigated. Design concepts and on-site requirements for surface-mounted... The design concepts, modelling and implementation of various fibre optic sensor protection systems for development in concrete structures were investigated. Design concepts and on-site requirements for surface-mounted and embedded optical fibre sensor in concrete were addressed. Finite element (FE) modelling of selected sensor protection systems in strain-transfer efficiency from the structure to the sensing region was also studied. And experimental validation of specified sensor protection system was reported. Results obtained indicate that the protection system for the sensors performs adequately in concrete environment and there is very good correlation between results obtained by the protected fibre optic sensors and conventional electrical resistance strain gauges. 展开更多
关键词 Fibre optic sensor (FOS) sensor protection system (SPS) Concrete structures extrinsic fabry-perot interferometer (EFPI) sensor Smart Structures Strain transfer
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用于检测痕量铅离子的功能化反射结构光纤干涉传感器
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作者 赵可 刘震 +3 位作者 刘露遥 余长源 潘竞顺 黄旭光 《物理化学学报》 SCIE CAS CSCD 北大核心 2024年第4期167-175,共9页
铅离子(Pb^(2+))是日常生活中常接触的有毒重金属污染物之一。本研究开发了一种新型反射式光纤干涉传感器,用于检测痕量铅离子。该传感器结构由单模光纤、无芯光纤和细芯光纤(TCF)依次拼接而成。TCF的包层被氢氟酸部分腐蚀并涂覆功能化... 铅离子(Pb^(2+))是日常生活中常接触的有毒重金属污染物之一。本研究开发了一种新型反射式光纤干涉传感器,用于检测痕量铅离子。该传感器结构由单模光纤、无芯光纤和细芯光纤(TCF)依次拼接而成。TCF的包层被氢氟酸部分腐蚀并涂覆功能化的水凝胶传感膜。该传感膜选用甲基丙烯酸2-羟基乙酯(2-HEMA)作为识别单体。2-HEMA中的氧原子能与Pb^(2+)发生配体-受体相互作用,形成“-O-Pb-O-”交联结构,从而改变TCF的新包层有效折射率。因此,可以通过观察反射光谱中光信号的变化来检测水溶液中Pb^(2+)的浓度。所提出的传感器具有很高的检测灵敏度(1.926×10^(9)nm·mol^(-1)·L),其检测极限为4.14 ppt(1 ng·L^(-1)=1 ppt),比世界卫生组织(WHO)规定的饮用水中Pb^(2+)(10 ppb,1μg·L^(-1)=1 ppb)浓度低1000倍。此外,利用一个方程组实现了该传感器的温度自校准功能,成功地消除了环境温度的干扰。由于该传感器良好的特异性、稳定性以及反射式结构,非常便于实时远程检测,为环境和人类健康监测提供了广阔的前景。 展开更多
关键词 铅离子浓度 光学传感 反射式干涉结构 光纤传感器 温度干扰
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临近空间飞行高温真空光纤绝压传感器设计
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作者 张雨彤 江毅 +1 位作者 杨水旺 张大有 《火箭推进》 CAS 北大核心 2024年第3期118-123,共6页
研制了一种用于临近空间飞行器在高温环境下的蓝宝石非本征法布里-珀罗干涉仪(extrinsic Fabry-Perot interferometer,EFPI)型光纤绝对压力传感器。蓝宝石晶片压力传感头由3片厚度不同的蓝宝石晶片键合构成,形成复合法布里-珀罗(Fabry-P... 研制了一种用于临近空间飞行器在高温环境下的蓝宝石非本征法布里-珀罗干涉仪(extrinsic Fabry-Perot interferometer,EFPI)型光纤绝对压力传感器。蓝宝石晶片压力传感头由3片厚度不同的蓝宝石晶片键合构成,形成复合法布里-珀罗(Fabry-Perot,FP)腔,可以同时测量温度和绝对压力,通过实时监测温度,对压力测量进行温度补偿,去除温度对压力测量的影响。实验结果表明:900℃内的每个温度点下,密封FP腔的光学腔长随压力线性变化;室温下,压力灵敏度为11.6 nm/kPa,压力灵敏度随温度的上升略微升高,压力测量的分辨率达到86 Pa。 展开更多
关键词 光纤压力传感器 非本征法布里-珀罗干涉仪 蓝宝石晶片 绝对压力测量
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Recent Developments in Fiber Optic Spectral White-Light Interferometry 被引量:6
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作者 Yi JIANG Wenhui DING 《Photonic Sensors》 SCIE EI 2011年第1期62-71,共10页
Recent developments in spectral white-light interferometry(WLI)are reviewed.Firstly,the techniques for obtaining optical spectrum are introduced.Secondly,some novel measurement techniques are reviewed,including the im... Recent developments in spectral white-light interferometry(WLI)are reviewed.Firstly,the techniques for obtaining optical spectrum are introduced.Secondly,some novel measurement techniques are reviewed,including the improved peak-to-peak WLI,improved wavelength-tracking WLI,Fourier transform WLI,and 3×3 coupler based WLI.Furthermore,a hybrid measurement for the intensity-type sensors,interferometric sensors,and fiber Bragg grating sensors is achieved.It is shown that these developments have assisted in the progress of WLI. 展开更多
关键词 optical fiber sensors white-light interferometry optical path difference fiber fabry-perot tunable filter extrinsic fabry-perot interferometer
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单索面斜拉桥模型钢索载荷应变的光纤传感测量方法 被引量:19
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作者 章立滨 杨军 +2 位作者 刘志海 梁艺军 苑立波 《哈尔滨工程大学学报》 EI CAS CSCD 2000年第3期86-89,共4页
采用光纤应变测量仪对桥梁钢索的应力应变在载荷情况下的变化进行了实验研究 .采用有机玻璃和0 .8mm钢丝 ,设计并制作了单索面斜拉桥模型 .在该桥梁模型上进行了模拟活载的线性加载实验 ,为斜拉桥索力及应力应变的检测提供了一种新测... 采用光纤应变测量仪对桥梁钢索的应力应变在载荷情况下的变化进行了实验研究 .采用有机玻璃和0 .8mm钢丝 ,设计并制作了单索面斜拉桥模型 .在该桥梁模型上进行了模拟活载的线性加载实验 ,为斜拉桥索力及应力应变的检测提供了一种新测式方法 . 展开更多
关键词 光纤传感器 白光干涉 斜拉桥 应力应变
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一种温度补偿式光纤氢气检测技术 被引量:13
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作者 张毅 庄志 +2 位作者 黎启胜 张敏 杨振 《仪器仪表学报》 EI CAS CSCD 北大核心 2012年第7期1573-1578,共6页
基于非本征法布里-珀罗光纤传感检测技术,分析研究了氢敏薄膜特性,实现了氢气传感单元设计及制作,简要介绍了传感器结构、制作方法、镀膜工艺及设备。通过分析氢气浓度与法布里-珀罗腔长变化间的关系,建立了光纤法布里-珀罗氢气传感理... 基于非本征法布里-珀罗光纤传感检测技术,分析研究了氢敏薄膜特性,实现了氢气传感单元设计及制作,简要介绍了传感器结构、制作方法、镀膜工艺及设备。通过分析氢气浓度与法布里-珀罗腔长变化间的关系,建立了光纤法布里-珀罗氢气传感理论模型。为增强系统工程实用性,着重研究了传感器温度与氢气浓度交叉敏感问题,并利用温度补偿技术消除环境温度干扰。介绍了温度补偿原理并构建实验设备,最后通过氢气浓度响应实验及温度特性实验,证明理论公式推导结果与实验数据吻合较好,且氢气传感器温度敏感性降低。此设计具有一定工程实用价值。 展开更多
关键词 光纤传感器 氢气检测技术 温度补偿 非本征法布里珀罗干涉仪
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干涉型光纤传感器的消偏振衰落技术研究 被引量:13
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作者 荆振国 殷锴 +5 位作者 张敏 王立威 朱耀强 王子秋 王宏华 廖延彪 《光子学报》 EI CAS CSCD 北大核心 2009年第8期2024-2028,共5页
本文对消除干涉型光纤传感器信号偏振衰落的偏振分集接收PDR(Polarization Diversity Receiver)技术进行了理论分析.通过三态PDR方式,对输出的最大有效幅度信号进行选取,能够避免传输光偏振态变化导致干涉信号完全衰落的现象,使干涉信... 本文对消除干涉型光纤传感器信号偏振衰落的偏振分集接收PDR(Polarization Diversity Receiver)技术进行了理论分析.通过三态PDR方式,对输出的最大有效幅度信号进行选取,能够避免传输光偏振态变化导致干涉信号完全衰落的现象,使干涉信号有效幅度在一定范围内变化.采用基于反正切计算的相位生成载波PGC(Phase Generated Carrier)解调技术的相位测量结果不受由于偏振衰落导致干涉信号有效幅度变化的影响.提出结合三态PDR方式和基于反正切计算的PGC解调技术消除偏振衰落问题的影响,实现干涉型光纤传感器中相位信号的理想解调. 展开更多
关键词 干涉型光纤传感器 偏振衰落 偏振分集接收 相位生成载波
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用于干涉型光纤传感器的相位生成载波解调技术 被引量:20
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作者 黄建辉 曹芒 +1 位作者 李达成 程晓辉 《光学技术》 CAS CSCD 2000年第3期228-231,共4页
相位生成载波技术是用于光纤传感器中很重要的一种信号解调方法。简要说明了相位生成载波调制的原理和两种基本的调制方法 ,着重介绍了相位生成载波调制信号的解调方法 ,包括 :零差法、伪外差法和合成外差法 ,并对以上各种方法进行了分... 相位生成载波技术是用于光纤传感器中很重要的一种信号解调方法。简要说明了相位生成载波调制的原理和两种基本的调制方法 ,着重介绍了相位生成载波调制信号的解调方法 ,包括 :零差法、伪外差法和合成外差法 ,并对以上各种方法进行了分析比较。对相位生成载波技术在干涉型光纤传感器中的应用作了详细的介绍。针对现在最有希望用于智能结构的光纤布拉格光栅传感器 ,介绍了相位生成载波技术在这方面的应用。 展开更多
关键词 相位生成载波解调 干涉型光纤传感器
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微纳光纤高温压力传感器 被引量:11
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作者 江毅 马维一 +2 位作者 陈淑芬 王素梅 李宝娟 《光学技术》 CAS CSCD 北大核心 2017年第1期12-15,共4页
提出了一种基于飞秒激光加工技术制作的微纳光纤高温压力传感器。用飞秒激光在光纤端面加工出法珀腔,制作出的全光纤法珀干涉型压力传感器,从室温到1100℃范围进行了压力温度试验。在不同温度下,压力传感器都有良好的线性输出特性,短时... 提出了一种基于飞秒激光加工技术制作的微纳光纤高温压力传感器。用飞秒激光在光纤端面加工出法珀腔,制作出的全光纤法珀干涉型压力传感器,从室温到1100℃范围进行了压力温度试验。在不同温度下,压力传感器都有良好的线性输出特性,短时间工作温度超过1100℃,能够满足高温环境下压力测量的需求。 展开更多
关键词 高温传感器 压力传感器 飞秒激光加工 外腔式光纤法珀干涉仪
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