Fabrication of IBAD-MgO and PLD-CeO2 Layers for YBCO Coated Conductors

MgO thin films with different textures are fabricated by the ion beam assisted （IBAD） method on the Y2O3/Al2O3 buffered C276 tape. Then a CaO2 layer is directly grown on the IBAD-MgO film by the pulsed laser deposition （PLD） method. Effects of lBAD-MgO texture, substrata temperature and thickness on the grain alignment of the CeO2 layer are investigated. Film characterization is performed by x-ray diffraction and atomic force microscopy. It is found that the orientation and texture degree of the CaO2 layer are very sensitive to the IBAD-MgO texture. By optimizing the IBAD-MgO texture, CeO2 has pure （002） orientation and excellent biaxial texture deposited in a broad substrata temperature range. In addition, the PLD-CeO2 layer has a thickness effect. Under the optimized experimental condition, the PLD-CeO2 layer has a high in-plane texture of △φ = 2.9° and a smooth surface with an rms surface roughness of less than 2nm. The critical current density Jc of a 0.4μm-thick YBCO film deposited on the CeO2 layer is 6.25 × 106 A/cm2 at 77K and a self-field.

Implementation of Autofocus in Alignment System for Layered Imprint Fabrication

Autofocus method based on the analysis of image content information is investigated to reduce the alignment error resulting from mark positioning uncertainty due to defocus in microstructure layered fabrication process based on multilevel imprint lithography. The applicability of several autofocus functions to the alignment mark images is evaluated concerning their uniformity, sharpness near peak, reliability and measure computation efficiency and the most suitable one based on power spectrum in frequency domain (PSFD) is adopted. To solve the problem of too much computation amount needed in PSFD algorithm, the strategy of interested region detection and effective image reconstruction is proposed and the algorithm efficiency is improved. The test results show that the computation time is reduced from 0.316 s to 0.023 s under the same conditions while the other merits of the function are preserved, which indicates that the modified algorithm can meet the mark image autofocusing requirements in response time, accuracy and robustness. The alignment error due to defocus which is about 0.5 μm indicated by experimental results can be reduced or eliminated by the autofocusing implementation.

Liquid-phase epitaxial layer by layer brushing fabrication of metalorganic frameworks films

Development of metal-organic framework(MOF)films is of great importance to expand their applications.Herein,we report a facile and universal method of liquid-phase epitaxial(LPE)layer by layer(LBL)brushing approach for fabricating MOF films on various substrates in a high-throughput fashion.This MOF films preparation method offers a great prospective to cost-effectively construct films with short preparation time and little reagent consumption.Moreover,this LBL brushing approach has been implemented successfully to assemble various MOF films,including HKUST-1,zeolitic imidazolate framework-8(ZIF-8),Cu(bdc),and Cu_(2)(L)_(2)P(L=bdc,ndc,and cam;P=dabco and bipy).Afterwards,the classic MOF HKUST-1 and ZIF-8 films were grown on sensor chip electrode and porous fiber support for good volatile organic compounds(VOCs)selective sensing and water purification applications.This study demonstrates that this LBL brushing preparation method can be employed to synthesize various MOF films with a variety of characteristics to realize their sensing and separation applications.