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OptoGPT: A foundation model for inverse design in optical multilayer thin film structures 被引量:1
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作者 Taigao Ma Haozhu Wang L.Jay Guo 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2024年第7期4-16,共13页
Optical multilayer thin film structures have been widely used in numerous photonic applications.However,existing inverse design methods have many drawbacks because they either fail to quickly adapt to different design... Optical multilayer thin film structures have been widely used in numerous photonic applications.However,existing inverse design methods have many drawbacks because they either fail to quickly adapt to different design targets,or are difficult to suit for different types of structures,e.g.,designing for different materials at each layer.These methods also cannot accommodate versatile design situations under different angles and polarizations.In addition,how to benefit practical fabrications and manufacturing has not been extensively considered yet.In this work,we introduce OptoGPT(Opto Generative Pretrained Transformer),a decoder-only transformer,to solve all these drawbacks and issues simultaneously. 展开更多
关键词 multilayer thin film structure inverse design foundation models deep learning structural color
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Dependence of R-G Currenton Bulk Traps Characteristics and Silicon Film Structure in SOI Gated-Diode
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作者 何进 黄如 +2 位作者 张兴 孙飞 王阳元 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第1期18-24,共7页
The dependence of the Recombination- Generation( R- G) current on the bulk trap characteristics and sili- con film structure in SOI lateral p+ p- n+ diode has been analyzed num erically by using the simulation tool,D... The dependence of the Recombination- Generation( R- G) current on the bulk trap characteristics and sili- con film structure in SOI lateral p+ p- n+ diode has been analyzed num erically by using the simulation tool,DESSIS- ISE.By varying the bulk trap characteristics such as the trap density and energy level spectrum systematically,the dependence of the R- G current on both of them has been dem onstrated in details.Moreover,the silicon film doping concentration and thickness are changed to make silicon body varies from the fully- depletion m ode into the partial- ly- depletion one.The influence of the transfer of silicon body characteristics on the R- G currenthas also been care- fully examined.A better understanding is obtained of the behavior of bulk trap R- G current in the SOI lateral gat- ed- diode. 展开更多
关键词 R- G current bulk trap energy level silicon film structure SOI gated- diode
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Effect of surfactants on the structure and photoelectric properties of ITO films by sol-gel method 被引量:4
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作者 LIU Jiaxiang, WU Da, ZHANG Nan, and WANG Yue College of Materials Science and Engineering, Beijing University of Chemical Technology, Beijing 100029, China 《Rare Metals》 SCIE EI CAS CSCD 2010年第2期143-148,共6页
The Indium tin oxide(ITO) thin film possesses excellent photoelectric properties that enable it to act as an ideal transparent conductor.To obtain high-quality ITO films through sol-gel method, the ionic surfactant ... The Indium tin oxide(ITO) thin film possesses excellent photoelectric properties that enable it to act as an ideal transparent conductor.To obtain high-quality ITO films through sol-gel method, the ionic surfactant monoethanolamine and the non-ionic surfactant polyethylene glycol(PEG) were added to the ITO precursor slurry.The influences of surfactants on the structural and photoelectric properties of ITO film samples were investigated.XRD patterns indicated that surfactant monoethanolamine contributed to film predominant grain orientation along the(400) plane.The high transmittance(over 95%) was attributed to the preferred orientation and the grain size expansion of ITO films.SEM showed that the surface particle size and the morphology of ITO films were strongly dependent on the kind of surfactants used.Moving to the shortwave region, the absorption edge of the films exhibited the Burstein-Moss shift. 展开更多
关键词 surfactants indium tin oxide films sol-gel structure photoelectricity
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Influence of Deposition Temperature and Pressure on Microstructure and Tribological Properties of Arc Ion Plated Ag Films 被引量:2
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作者 HU Ming GAO Xiaoming +3 位作者 SUN Jiayi WENG Lijun ZHOU Feng LIU Weimin 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2012年第4期838-844,共7页
The films deposited at low temperature(LT-films) have increasingly attracted theoretical and technical interests since such films exhibit obvious difference in structure and performances compared to those deposited ... The films deposited at low temperature(LT-films) have increasingly attracted theoretical and technical interests since such films exhibit obvious difference in structure and performances compared to those deposited at room temperature.Studies on the tribological properties of LT-films are rarely reported in available literatures.In this paper,the structure,morphology and tribological properties of Ag films,deposited at LT(166 K) under various Ar pressures on AISI 440C steel substrates by arc ion plating(AIP),are studied by X-ray diffraction(XRD),atomic force microscopy(AFM) and a vacuum ball-on-disk tribometer,and compared with the Ag films deposited at RT(300 K).XRD results show that(200) preferred orientation of the films is promoted at LT and low Ar pressure.The Crystallite sizes are 70 nm-80 nm for LT-Ag films deposited at 0.2 Pa and 0.8 Pa and larger than 100 nm for LT-Ag films deposited at 0.4 Pa and 0.6 Pa,while they are 55 nm-60 nm for RT-Ag films deposited at 0.2 Pa-0.6 Pa and 37 nm for RT-Ag films deposited at 0.8 Pa.The surfaces of LT-Ag films are fibre-like at 0.6 Pa and 0.8 Pa,terrace-like at 0.4 Pa,and sphere-like at 0.2 Pa,while the surfaces of RT-Ag films are composed of sphere-like grains separated by voids.Wear tests reveal that,due to the compact microstructure LT-Ag films have better wear resistances than RT-Ag film.These results indicate that the microstructure and wear resistance of Ag films deposited by AIP can be improved by low temperature deposition. 展开更多
关键词 low temperature Ag films structure tribological properties
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Effect of the Structure and Valence State on the Properties of VO_2 Thin Films 被引量:1
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作者 LUYong LINLi-bin 《Semiconductor Photonics and Technology》 CAS 2001年第2期98-103,共6页
VO 2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system. The structural, optical and electrical properties of the samples were ch... VO 2 thin films with good switching properties were prepared by controlling the annealing time and the annealing temperature in a vacuum system. The structural, optical and electrical properties of the samples were characterized by using XRD、XPS、UV-VIS and electrical measurements. The switching parameters of VO 2 thin film were investigated too. The results indicate that before and after phase transition the resistance of VO 2 thin films changes about three orders of magnitude, the variation of film transmittance of 40 % has been carried out with the absorptivity switching velocity of about 0.260 7 /min at 900 nm . The structural property of samples has been improved but the phase-transition properties have been decreased by increasing the annealing time and annealing temperature. The valence of V ions and the structure of samples have great effect on phase transition properties of VO 2 thin films. Discussion on the effects of annealing time and annealing temperature on the phase-transition temperature and hysteresis width shows that the best reasonable annealing time and annealing temperature can be achieved. 展开更多
关键词 VO 2 thin film Phase transition film structure Valence state
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Electromagnetic analysis of GMI effect in sandwich structured films
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作者 黄灿星 刘龙平 +1 位作者 赵振杰 马学鸣 《Journal of Shanghai University(English Edition)》 CAS 2006年第4期357-361,共5页
A model of giant magneto-impedance (GMI) effect in sandwich-structured film has been proposed based on the superposition principle of electromagnetic field. The expression of impedance is derived in the frames of el... A model of giant magneto-impedance (GMI) effect in sandwich-structured film has been proposed based on the superposition principle of electromagnetic field. The expression of impedance is derived in the frames of electrodynamics and ferromagnetism. Electromagnetic interaction between the inner layer and outer layer is discussed. Numerical simulation is conducted and the results show that the conductivity of the inner layer is much larger than that of the outer ferromagnetic layer. The skin effect and the maximum GMI effect of the sandwich film may appear at a much lower frequency compared to that of monofilm. The computational results agree with experimental data. 展开更多
关键词 GMI effect electromagnetic interaction sandwich structured film.
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Crystal Structure during Film Formation
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作者 Guoping DU Hui SHEN +2 位作者 Lanping YUE Weiguo YAO Zongquan LI and Zhenzhong QI (Institute of Solid State Physics, Academia Sinica, Hefei, 230031, China)(To whom correspondence should be addressed) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1994年第2期117-120,共4页
For evaporation-deposited Ti films, face-centred cubic structure was observed at the initial stage of film growth, then transited to the hexagonal close-packed structure during film growing (less than 50 nm thick). Wh... For evaporation-deposited Ti films, face-centred cubic structure was observed at the initial stage of film growth, then transited to the hexagonal close-packed structure during film growing (less than 50 nm thick). While. for ion-beam sputter-deposited films. the structure of films always kept the fcc structure during all stages of film formation. The structure of film at initial growth stages relates with the substrate. It is discussed that different film processes and different growth stages provide different thermodynamic condition of film formation and result in the different crystal structures of films during the film formation 展开更多
关键词 NACL Crystal structure during film Formation NM
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Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag2O Films by Direct-Current Reactive Magnetron Sputtering
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作者 郜小勇 冯红亮 +2 位作者 张增院 马姣民 卢景霄 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第2期235-238,共4页
(111) preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and op... (111) preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and optical properties are then characterized by x-ray diffractometry, scanning electron microscopy, and spectrophotometry, respectively. The results indicate that no clear Ag diffraction peak is discernable in the Ag2O film annealed below 200°C. In comparison, the Ag2O film annealed at 200°C begins to exhibit characteristic Ag diffraction peaks, and in particular the Ag2O film annealed at 250°C can demonstrate enhanced Ag diffraction peaks. This implies that the threshold of the thermal decomposition reaction to produce Ag particles is approximately 200°C for the Ag2O film. In addition, an evolution of the film surface morphology from compact and pyramid-like to a rough and porous structure clearly occurred with increasing annealing temperature. The porous structure might be attributable to the escape of the oxygen produced during annealing, while the rough surface might originate from the reconstruction of the surface. The dispersion of interference peak intensity in the reflectance and transmission spectra could be attributed to the Ag particles produced. The lowered crystallinity and Ag particles produced induce a lattice defect, which results in an enhanced transmissivity in the violet region and a weakened transmissivity in the infrared region. 展开更多
关键词 Semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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Composition and Microstructure of Magnetron Sputtering Deposited Ti-containing Amorphous Carbon Films
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作者 Jun DU Ping ZHANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第4期571-573,共3页
Ti-containing carbon films were deposited by using magnetron sputtering deposition. The composition and microstructure of the carbon films were characterized in detail by combining the techniques of Rutherford backsca... Ti-containing carbon films were deposited by using magnetron sputtering deposition. The composition and microstructure of the carbon films were characterized in detail by combining the techniques of Rutherford backscattering spectrometry (RBS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and transmission electron microscopy (TEM). It is found that carbon films contain Ti 18 at pct; after Ti incorporation, the films consist of titanium carbide; C1s peak appears at 283.4 eV and it could be divided into 283.29 and 284.55 eV, representing sp2 and sp3, respectively, and sp2 is superior to sp3. This Ti-containing film with dominating sp2 bonds is nanocomposites with nanocrystalline TiC clusters embedded in an amorphous carbon matrix, which could be proved by XRD and TEM. 展开更多
关键词 Magnetron sputtering deposition Carbon film Carbon bond structure
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THE STRUCTURE OF LANGMUIR-BLODGETT FILMS OF TETRA-NONYL PHTHALOCYANINE COPPER
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作者 Tao LUO Wei Qing ZHANG Fu Xi GAN Shanghai Institute of Optics and Fine Mechanics,Academia Sinica P.O.Box 800216 Shanghai 201800 《Chinese Chemical Letters》 SCIE CAS CSCD 1992年第1期63-66,共4页
Langmuir-Blodgett(LB)films of tetra-nonyl phthalocyanine copper (TNPcCu)were prepared.Molecular arrangement and orientation of these films were studied in detail.LB multilayer films of TNPcCu show a very Strong x-ray ... Langmuir-Blodgett(LB)films of tetra-nonyl phthalocyanine copper (TNPcCu)were prepared.Molecular arrangement and orientation of these films were studied in detail.LB multilayer films of TNPcCu show a very Strong x-ray diffration peak and two weak peaks which indicate that the LB films form a quasi-crystal structure which molecules are arranged orderly.IR reflection absorption spectra and polarized VIS absorption spectra not only confirm the previous result but also indicate that phthalocyanine rings orient nearly perpendicular to the substrate surface and perpendicular to the lifting direction and the side-chain segments are not preferred oriented. 展开更多
关键词 TETRA IR THE structure OF LANGMUIR-BLODGETT filmS OF TETRA-NONYL PHTHALOCYANINE COPPER
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Evolution of Magnetic Domain Structure in a YIG Thin Film
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作者 王然 尚雅轩 +2 位作者 吴锐 杨金波 姬扬 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第4期126-129,共4页
The evolution of a magnetic domain structure induced by temperature and magnetic field is reported in silicon- doped yttrium iron garnet (YIG) films with perpendicular anisotropy. During a cooling-down procedure fro... The evolution of a magnetic domain structure induced by temperature and magnetic field is reported in silicon- doped yttrium iron garnet (YIG) films with perpendicular anisotropy. During a cooling-down procedure from 300K to 7K, a 20% change in the domain width is observed, with the long tails of the stripes being shortened and the twisting stripes being straightened. Under the influence of the stray field of a barium ferrite, the garnet presents an interesting domain structure, which shows an appearance of branching protrusions. The intrinsic mechanisms in these two processes are also discussed. 展开更多
关键词 of on YIG Evolution of Magnetic Domain structure in a YIG Thin film in
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Coacervate Structures of CdI_2 Thin Film Grown during Phase Transformation
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作者 Xiaoyan YE and Lili CAO(Dept. of Chemistry, Tsinghua University, Beijing 100084, China)Jizhong ZHANG and Hengde LI(Dept. of Materials Scieuce & Engineering, Tsinghua University, Beijing 100084, China) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1997年第4期296-298,共3页
The microstructure of CdI2 thin film grown during vapor-phase deposition was investigated by scanning electron microscopy (SEM). The thin film deposited on Si crystal consists of numerous sunflower-like aggregates. Th... The microstructure of CdI2 thin film grown during vapor-phase deposition was investigated by scanning electron microscopy (SEM). The thin film deposited on Si crystal consists of numerous sunflower-like aggregates. These aggregates display well self-assembly characteristics. The size of Sunflower-like aggregates is between 12 and 44 μm. Each sunflower-like aggregate is surrounded with many adjacent wings-'petals'. The structure of central region of the 'sunflower' is obviously difFerent from that of the 'petal'. Electron spectroscopy for chemical analysis (ESCA) was employed in determining the chemical valence of the thin film. Self-organization efFect is used to explain the coring growth process of CdI2 thin film 展开更多
关键词 Thin Coacervate structures of CdI2 Thin film Grown during Phase Transformation
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Morphology and Structure of SiO_2 Film Using Thermal Oxidation Process on(111)Silicon Crystals in Dry Oxygen Atmosphere
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作者 TaokaT. 《Rare Metals》 SCIE EI CAS CSCD 1989年第1期32-38,共7页
By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon ... By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon monocrystal under dry oxygen atmosphere at 1100℃.Compared with their oxidation kinetic curves consisted of three stages,we suggested a mechanism on forming silicon oxide film.According to electron and X-ray diffraction analyses the silicon oxide films consisted of silica with different crystal structure.We also have discussed a stacking fault and a dislocation formed in the Si-Sio_2 interface region simulaneously forming silicon oxide film. 展开更多
关键词 Silicon Crystals in Dry Oxygen Atmosphere Morphology and structure of SiO2 film Using Thermal Oxidation Process on SIO
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Structure and Magnetic Properties of Fe-N Films Prepared by Dual Ion Beam Sputtering
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作者 诸葛兰剑 吴雪梅 +2 位作者 汤乃云 叶春兰 姚伟国 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第6期1049-1054,共6页
Fe-N films were prepared on Si substrate by dual ion beam sputtering (DIBS). It is found that the crystal structure of the films varies from α-Fe, to ε-Fe2-3N, ε-Fe2-3N +γ-Fe4N, and finally γ'-Fe4N with the i... Fe-N films were prepared on Si substrate by dual ion beam sputtering (DIBS). It is found that the crystal structure of the films varies from α-Fe, to ε-Fe2-3N, ε-Fe2-3N +γ-Fe4N, and finally γ'-Fe4N with the increase in substrate temperature (TS). The magnetic properties of the films were investigated by a vibrating sample magnetometer (VSM). The structure of the films is insensitive to the ratios of N2/Ar in main ion source(MIS), and is mainly influenced by the substrate temperature (Ts). 展开更多
关键词 FE structure and Magnetic Properties of Fe-N films Prepared by Dual Ion Beam Sputtering
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Structure and Strain Properties of GaN Films Grown on Si(111) Substrates with AlxGa1-xN/AlyGa1-yN Superlattices
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作者 潘磊 倪金玉 +5 位作者 郁鑫鑫 董逊 彭大青 李传皓 李忠辉 陈堂胜 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期153-156,共4页
CaN films with an AlxGa1-xN/AlyGa1-xN superlattice (SL) buffer layer are grown on Si(111) substrates by metal-organic chemical vapor deposition (MOCVD). The structure and strain properties of the samples are stu... CaN films with an AlxGa1-xN/AlyGa1-xN superlattice (SL) buffer layer are grown on Si(111) substrates by metal-organic chemical vapor deposition (MOCVD). The structure and strain properties of the samples are studied by optical microscopy, Raman spectroscopy, x-ray diffractometry and atomic force microscopy. The results show that the strain status and crystalline quality of the CaN layers are strongly dependent on the difference of the Al composition between AlxCa1-xN barriers and AlyCa1-yN wells in the SLs. With a large Al composition difference, the CaN film tends to generate cracks on the surface due to the severe relaxation of the SLs. Otherwise, when using a small Al composition difference, the crystalline quality of the CaN layer degrades due to the poor function of the SLs in filtering dislocations. Under an optimized condition that the Al composition difference equals 0.1, the crack-free and compressive strained CaN film with an improved crystalline quality is achieved. Therefore, the AlxGa1-xN/AlyGal-yN SL buffer layer is a promising buffer structure for growing thick CaN films on Si substrates without crack generation. 展开更多
关键词 GaN x)N/Al_yGa y)N Superlattices Substrates with Al_xGa structure and Strain Properties of GaN films Grown on Si
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Tuning the Electronic Structure of Sr2IrO4 Thin Films by Bulk Electronic Doping Using Molecular Beam Epitaxy
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作者 李明颖 刘正太 +7 位作者 杨海峰 赵家琳 姚岐 樊聪聪 刘吉山 高波 沈大伟 谢晓明 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期124-128,共5页
By means of oxide molecular beam epitaxy with shutter-growth mode, we fabricate a series of electron-doped (Sr1-xLax)2IrO4 (001) (x=0, 0.05, 0.1 and 0.15) single crystalline thin films and then investigate the d... By means of oxide molecular beam epitaxy with shutter-growth mode, we fabricate a series of electron-doped (Sr1-xLax)2IrO4 (001) (x=0, 0.05, 0.1 and 0.15) single crystalline thin films and then investigate the doping dependence of the electronic structure utilizing in-situ angle-resolved photoemission spectroscopy. It is found that with the increasing doping content, the Fermi levels of samples progressively shift upward. Prominently, an extra electron pocket crossing the Fermi level around the M point is evidently observed in the 15% nominal doping sample. Moreover, bulk-sensitive transport measurements confirm that the doping effectively suppresses the insulating state with respect to the as-grown Sr2IrO4, though the doped samples still remain insulating at low temperatures due to the localization effect possibly stemming from disorders including oxygen deficiencies. Our work provides another feasible doping method to tune electronic structure of Sr2 IrO4. 展开更多
关键词 Sr Tuning the Electronic structure of Sr2IrO4 Thin films by Bulk Electronic Doping Using Molecular Beam Epitaxy RHEED La ARPES
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Fabrication and Properties of Double-Side Tl2Ba2CaCu2O8 Thin Film on CeO2 Buffered Sapphire Substrate 被引量:2
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作者 游峰 王争 +5 位作者 谢清连 季鲁 岳宏卫 赵新杰 方兰 阎少林 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第4期212-214,共3页
The double-side Tl2Ba2 CaCu2O8 (Tl-2212) superconducting thin films were fabricated on CeO2 buffered sapphire substrates. The reactive magnetron sputtering technique was used to grow CeO2 buffer thin films on sapphi... The double-side Tl2Ba2 CaCu2O8 (Tl-2212) superconducting thin films were fabricated on CeO2 buffered sapphire substrates. The reactive magnetron sputtering technique was used to grow CeO2 buffer thin films on sapphire substrates. Making use of the metal cerium as a sputtering source, the depositing rate is much higher compared with the CeO2 target. The Ti-2212 thin films on CeO2 buffered sapphire substrates were fabricated by adc magnetron sputtering and post-annealing process. The x-ray diffraction indicates that the thin film is pure Tl-2212 phase with the e-axis perpendicular to the substrate surfaces, and epitaxially grown on the CeO2 buffered sapphire. The critical transition temperature Tc is around 106K, the critical current density Jc is around 3.5 MA/cm^2 at 77K, and the microwave surface resistance R8 at 77K and 10 CHz of the film is as low as 390μ Ω. 展开更多
关键词 Superconductivity Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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Effects of Annealing Temperature on Structural and Optical Properties of ZnO Thin Films 被引量:2
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作者 徐建萍 石少波 +3 位作者 李岚 张晓松 王雅欣 陈希明 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第4期227-230,共4页
The effects of annealing temperature on the structural and optical properties of ZnO films grown on Si (100) substrates by sol-gel spin-coating are investigated. The structural and optical properties are characteriz... The effects of annealing temperature on the structural and optical properties of ZnO films grown on Si (100) substrates by sol-gel spin-coating are investigated. The structural and optical properties are characterized by x-ray diffraction, scanning electron microscopy and photoluminescence spectra. X-ray diffraction analysis shows the crystal quality of ZnO films becomes better after annealing at high temperature. The grain size increases with the temperature increasing. It is found that the tensile stress in the plane of ZnO films first increases and then decreases with the annealing temperature increasing, reaching the maximum value of 1.8 GPa at 700℃. PL spectra of ZnO films annealed at various temperatures consists of a near band edge emission around 380 nm and visible emissions due to the electronic defects, which are related to deep level emissions, such as oxide antisite (OZn), interstitial oxygen (Oi), interstitial zinc (Zni) and zinc vacancy (VZn^-), which are generated during annealing process. The evolution of defects is analyzed by PL spectra based on the energy of the electronic transitions. 展开更多
关键词 Condensed matter: electrical magnetic and optical Semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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Preparation and Thermal Characterization of Diamond-Like Carbon Films 被引量:2
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作者 白素媛 唐祯安 +3 位作者 黄正兴 余隽 王静 刘贵昌 《Chinese Physics Letters》 SCIE CAS CSCD 2009年第7期240-243,共4页
Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous s... Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films. 展开更多
关键词 Condensed matter: electrical magnetic and optical Semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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Effects of Grain Boundary Barrier in ZnO/Si Heterostructure 被引量:2
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作者 刘秉策 刘磁辉 +1 位作者 傅竹西 易波 《Chinese Physics Letters》 SCIE CAS CSCD 2009年第11期164-167,共4页
The influence of ZnO microstructure on electrical barriers is investigated using capacitance-voltage (C - V), current-voltage (I- V) and deep level transient spectroscopy (DLTS) measurements. A deep level center... The influence of ZnO microstructure on electrical barriers is investigated using capacitance-voltage (C - V), current-voltage (I- V) and deep level transient spectroscopy (DLTS) measurements. A deep level center located at Ec - 0.24 eV obtained by DLTS in the ZnO films is an intrinsic defect related to Zni. The surface states in the ZnO grains that have acceptor behavior of capturing electrons from Zni defects result in the formation of grain barriers. In addition, we find that the current transport is dominated by grain barriers after annealing at 600℃ at 02 ambient. With the increment of the annealing temperature, the current transport mechanism of ZnO/Si heterostructure is mainly dominated by thermo-emission. 展开更多
关键词 Condensed matter: electrical magnetic and optical Semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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