Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process

The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system（MEMS）devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness.In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio（re） is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices.

Influence of Spray Gun Position and Orientation on Liquid Film Development along a Cylindrical Surface

A method combining computationalfluid dynamics(CFD)and an analytical approach is proposed to develop a prediction model for the variable thickness of the spray-induced liquidfilm along the surface of a cylindrical workpiece.The numerical method relies on an Eulerian-Eulerian technique.Different cylinder diameters and positions and inclinations of the spray gun are considered and useful correlations for the thickness of the liquidfilm and its distribution are determined using various datafitting algorithms.Finally,the reliability of the pro-posed method is verified by means of experimental tests where the robot posture is changed.The provided cor-relation are intended to support the optimization of spray-based coating applications.

Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

In conventional pulsed laser deposition （PLD） technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition distribution for a multicomponent film and eventually leading to low device quality and low rate of final products. We present a novel method based on PLD for depositing large CIGS films with uni- form thickness and stoichiometry. By oscillating a mirror placed coaxially with the incident laser beam, the laser＇s focus is scanned across the rotating target surface. This arrangement maintains a constant re- flectance and optical distance, ensuring that a consistent energy density is delivered to the target surface by each laser pulse. Scanning the laser spot across the target suppresses the formation of micro-columns, and thus the plume deflection effect that reduces film uniformity in conventional PLD technique is eliminated. This coaxial scanning PLD method is used to deposit a CIGS film, 500 nm thick, with thickness uniformity exceeding ±3% within a 5 cm diameter, and exhibiting a highly homogeneous elemental distribution.