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Optimization of the seismic processing phase-shift plus finite-difference migration operator based on a hybrid genetic and simulated annealing algorithm 被引量:2
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作者 Luo Renze Huang Yuanyi +2 位作者 Liang Xianghao Luo Jun Cao Ying 《Petroleum Science》 SCIE CAS CSCD 2013年第2期190-194,共5页
Although the phase-shift seismic processing method has characteristics of high accuracy, good stability, high efficiency, and high-dip imaging, it is not able to adapt to strong lateral velocity variation. To overcome... Although the phase-shift seismic processing method has characteristics of high accuracy, good stability, high efficiency, and high-dip imaging, it is not able to adapt to strong lateral velocity variation. To overcome this defect, a finite-difference method in the frequency-space domain is introduced in the migration process, because it can adapt to strong lateral velocity variation and the coefficient is optimized by a hybrid genetic and simulated annealing algorithm. The two measures improve the precision of the approximation dispersion equation. Thus, the imaging effect is improved for areas of high-dip structure and strong lateral velocity variation. The migration imaging of a 2-D SEG/EAGE salt dome model proves that a better imaging effect in these areas is achieved by optimized phase-shift migration operator plus a finite-difference method based on a hybrid genetic and simulated annealing algorithm. The method proposed in this paper is better than conventional methods in imaging of areas of high-dip angle and strong lateral velocity variation. 展开更多
关键词 Migration operator phase-shift plus finite-difference hybrid algorithm genetic andsimulated annealing algorithm optimization coefficient
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Nonlinear effect of the structured light profilometry in the phase-shifting method and error correction 被引量:3
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作者 张万祯 陈浙泊 +2 位作者 夏彬峰 林斌 曹向群 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期324-329,共6页
Digital structured light (SL) profilometry is increasingly used in three-dimensional (3D) measurement technology. However, the nonlinearity of the off-the-shelf projectors and cameras seriously reduces the measure... Digital structured light (SL) profilometry is increasingly used in three-dimensional (3D) measurement technology. However, the nonlinearity of the off-the-shelf projectors and cameras seriously reduces the measurement accuracy. In this paper, first, we review the nonlinear effects of the projector-camera system in the phase-shifting structured light depth measurement method. We show that high order harmonic wave components lead to phase error in the phase-shifting method. Then a practical method based on frequency domain filtering is proposed for nonlinear error reduction. By using this method, the nonlinear calibration of the SL system is not required. Moreover, both the nonlinear effects of the projector and the camera can be effectively reduced. The simulations and experiments have verified our nonlinear correction method. 展开更多
关键词 structured light profilometry depth measurement phase-shifting algorithm nonlinear effect
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Phase-shifting digital holography in image reconstruction 被引量:3
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作者 于瀛洁 周文静 +1 位作者 Yannis Orphanos Vivi Tornari 《Journal of Shanghai University(English Edition)》 CAS 2006年第1期59-64,共6页
A phase-shifting digital holography scheme developed to investigate internal defects in artworks is described. Phase-shifting is utilized to obtain a clear reconstructed object wave from a rough surface texture. A rev... A phase-shifting digital holography scheme developed to investigate internal defects in artworks is described. Phase-shifting is utilized to obtain a clear reconstructed object wave from a rough surface texture. A reverse-transform algorithm is employed to reconstruct the object wave on its original position of unknown distance or the imaging position from the object wave information on the holographic plane. To get the clearest reconstruction the exact registration of the unknown distance is determined by applying the intensity sum as the auto-focusing function, The spatial resolution of the reconstruction image is also investigated for a variety of affecting factors. Laboratory results of reconstruction images under deformation are presented. 展开更多
关键词 holographic interferometry digital holography phase-shifting technique reverse-transform algorithm auto-focusing function spatial resolution.
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基于干涉显微原理的表面形貌测量系统 被引量:10
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作者 王海珊 史铁林 +2 位作者 廖广兰 刘世元 张文栋 《光电工程》 EI CAS CSCD 北大核心 2008年第7期84-89,共6页
根据光学干涉显微法原理,设计开发了一套微纳结构表面形貌测量系统。该系统采用林尼克干涉显微镜,通过参考镜扫描的方法将扫描器与相移器集为一体,分别采用五步相移算法和基于采样定理的包络均方函数(SEST)算法实现相移干涉法(PSI)和垂... 根据光学干涉显微法原理,设计开发了一套微纳结构表面形貌测量系统。该系统采用林尼克干涉显微镜,通过参考镜扫描的方法将扫描器与相移器集为一体,分别采用五步相移算法和基于采样定理的包络均方函数(SEST)算法实现相移干涉法(PSI)和垂直扫描干涉法(VSI)两种模式对微纳结构的表面形貌测量。为验证该系统性能,采用标准多刻线样板和标准台阶作为样件对VSI和PSI两种模式分别进行了测量实验。结果证明,该系统能够完成微纳结构表面形貌的快速精确测量,可以满足微电子、微机电系统中微纳结构的表面形貌测量要求。 展开更多
关键词 相移干涉法 垂直扫描干涉法 林尼克干涉结构 五步相移算法 SEST算法
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Mirau相移干涉法测量微透镜阵列面形 被引量:8
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作者 焦国华 李育林 胡宝文 《光子学报》 EI CAS CSCD 北大核心 2007年第10期1924-1927,共4页
基于Mirau相移干涉法,在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源,干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器,通过5步相移法计算待测表面形貌.实... 基于Mirau相移干涉法,在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源,干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器,通过5步相移法计算待测表面形貌.实验结果表明,基于Mirau相移干涉法对微透镜阵列面形的测量,水平分辨率达到1.1μm,垂直测量准确度达到6.33nm,垂直测量范围为5μm.对于微透镜阵列的面形测量,通过将微透镜阵列划分为若干微小区域以保证局部面形最大高度小于5μm,然后辅以精密平移机构进行若干次5步相移法测量局部面形,再利用相位重建所得的数据进行拼接和3D轮廓重建,最终得到整个微透镜阵列的精确微表面形貌. 展开更多
关键词 Mirau干涉 相移干涉法 面形测量 5步相移法 压电陶瓷 微透镜阵列
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MEMS变形反射镜特性测试系统研究 被引量:3
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作者 陈家凤 陈海清 向东 《红外与激光工程》 EI CSCD 北大核心 2007年第5期675-679,共5页
为了实现对MEMS变形反射镜的静态形貌、动态离面变形及谐振频率的测量,提出了一种基于计算机控制的频闪显微干涉测量系统。测试中采用频闪照明技术及5步相移技术实现了对干涉相位的测量,利用空间及时间相位解缠算法恢复了反映物体真实... 为了实现对MEMS变形反射镜的静态形貌、动态离面变形及谐振频率的测量,提出了一种基于计算机控制的频闪显微干涉测量系统。测试中采用频闪照明技术及5步相移技术实现了对干涉相位的测量,利用空间及时间相位解缠算法恢复了反映物体真实信息的连续相位,从而得到了所需的特性参数。实验结果表明:该系统具有测量简便、自动化程度高及测量精度高等特点。 展开更多
关键词 光学测量 MEMS变形反射镜 频闪干涉测量系统 5步相移算法 相位解缠
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Study on an improved five-interferogram phase-shifting algorithm 被引量:2
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作者 罗志勇 代佳林 《Chinese Optics Letters》 SCIE EI CAS CSCD 2008年第5期342-345,共4页
Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming t... Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional fiveinterferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer. 展开更多
关键词 Study on an improved five-interferogram phase-shifting algorithm than length Figure
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A general method of designing phase-shifting algorithms for grating lateral shearing interferometry 被引量:1
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作者 Chao FANG Yang XIANG Ke-qi QI 《Frontiers of Information Technology & Electronic Engineering》 SCIE EI CSCD 2018年第6期809-814,共6页
We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. ... We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method. 展开更多
关键词 INTERFEROMETRY Phase measurement phase-shifting algorithms
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Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm(Invited Paper) 被引量:2
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作者 Joonku Hahn Hwi Kim +2 位作者 Yongjun Lim Eun-Hee Kim Byoungho Lee 《Chinese Optics Letters》 SCIE EI CAS CSCD 2009年第12期1113-1116,共4页
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properti... We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm. 展开更多
关键词 Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm
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基于自混合干涉技术和双调制方法的振动测量
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作者 宋欣敏 谭仁雪 《国外电子测量技术》 2018年第11期15-18,共4页
为了测量物体的微振动,提出一种基于自混合干涉(SMI)技术的新型调制方法--双调制。信号发生器产生正弦波输入到激光二极管(LD)控制器中,形成电流调制;三角波驱动电光调制器(EOM)实现相位调制;将两种调制方法相结合形成双调制技术。首先... 为了测量物体的微振动,提出一种基于自混合干涉(SMI)技术的新型调制方法--双调制。信号发生器产生正弦波输入到激光二极管(LD)控制器中,形成电流调制;三角波驱动电光调制器(EOM)实现相位调制;将两种调制方法相结合形成双调制技术。首先,用双调制方法调制物体未振动时的SMI信号,并使用五步相移算法解调;然后,用双调制方法与五步相移算法对物体振动时的SMI信号进行调制与解调,根据物体未振动和振动时的相位得到只由振动引起的相位,进而重构振动物体的微位移。实验结果表明:对峰峰值为2 000nm、频率为10Hz的正弦振动进行测量时,得到的最大重构误差为79.3nm。 展开更多
关键词 干涉测量 振动 双调制 五步相移算法
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The holographic reconstructing algorithm and its error analysis about phase-shifting phase measurement
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作者 LU Xiaoxu ZHONG Liyun ZHANG Yimo 《Frontiers of Electrical and Electronic Engineering in China》 CSCD 2007年第3期293-297,共5页
Phase-shifting measurement and its error estimation method were studied according to the holographic principle.A function of synchronous superposition of object complex amplitude reconstructed from N-step phase-shifti... Phase-shifting measurement and its error estimation method were studied according to the holographic principle.A function of synchronous superposition of object complex amplitude reconstructed from N-step phase-shifting through one integral period(N-step phase-shifting function for short)was proposed.In N-step phase-shifting measurement,the interferograms are seen as a series of in-line holo-grams and the reference beam is an ideal parallel-plane wave.So the N-step phase-shifting function can be obtained by multiplying the interferogram by the original reference wave.In ideal conditions,the proposed method is a kind of synchro-nous superposition algorithm in which the complex ampli-tude is separated,measured and superposed.When error exists in measurement,the result of the N-step phase-shifting function is the optimal expected value of the least-squares fitting method.In the above method,the N+1-step phase-shifting function can be obtained from the N-step phase-shifting function.It shows that the N-step phase-shifting function can be separated into two parts:the ideal N-step phase-shifting function and its errors.The phase-shifting errors in N-steps phase-shifting phase measurement can be treated the same as the relative errors of amplitude and intensity under the understanding of the N+1-step phase-shifting function.The difficulties of the error estimation in phase-shifting phase measurement were restricted by this error esti-mation method.Meanwhile,the maximum error estimation method of phase-shifting phase measurement and its formula were proposed. 展开更多
关键词 optical measurement information optics phase-shifting phase measurement N-step phase-shifting function N+1-step phase-shifting algorithm error
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Development of surface reconstruction algorithms for optical interferometric measurement 被引量:3
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作者 Dongxu WU Fengzhou FANG 《Frontiers of Mechanical Engineering》 SCIE CSCD 2021年第1期1-31,共31页
Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the m... Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology. 展开更多
关键词 surface topography MEASUREMENT optical interferometry coherence envelope phase-shifting algorithm
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