The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper. The lateral vi...The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper. The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors.展开更多
基金Supported by the National Natural Science Foundation of China ( No. 50135040 ) the Science Foundation of Shanghai Municipal Bureau for Key Discipline (No. 970104)+1 种基金 the Sci-ence and Technology Development Foundation of Shanghai (No. 0111nm020) and th
文摘The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper. The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors.
