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Study on Hydrophobic and Mechanical Properties of Fluoro-Carbon Film
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作者 Ma Guojia1,2,Lin Guoqiang2,Sun Gang1,Wu Hongchen1 1Department of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China2National Key Laboratory of Science and Technology on Power Beam Processes,Beijing Aeronautical Manufacturing Technology Research Institute,Beijing 100024,China 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2011年第S4期199-202,共4页
The purpose of this paper is to investigate the hydrophobic and mechanical behavior of the fluoro-carbon film on the composite.Fluoro-carbon films were fabricated on C/C and C/SiC composite by microwave ECR chemical v... The purpose of this paper is to investigate the hydrophobic and mechanical behavior of the fluoro-carbon film on the composite.Fluoro-carbon films were fabricated on C/C and C/SiC composite by microwave ECR chemical vapor deposition combined with plasma source ion implantation technology (PSII).The films were investigated in terms of the surface morphology,chemical composition,hydrophobic behavior and mechanical properties.The hydrophobic property was determined by means of contact angle measurements,chemical bond structure was analyzed by fourier-transform infrared spectrum,and critical loading were measured by micro-scratch.The results showed that the fluorine presented mainly in the forms of CF2 group and C=CFx (x=1,2) in the film,the addition of fluorine to the carbon film had a critical influence on the hydrophobicity.Atomic force microscopy (AFM) were used for investigating the effect of surface morphology and roughness on hydrophobicity,it showed that fluoro-carbon films with appropriate surface morphology and roughness could achieve excellent hydrophobicity. 展开更多
关键词 fluoro-carbon film microwave ECR CVD PSII hydrophobicity.
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