In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the...In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror's pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method (HPM). It is observed that a sixth order perturbation approx- imation can precisely model the mirror's behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.展开更多
Arc-length-type and energy-type methods are two main strategies used in structural nonlinear tracing analysis, but the former is widely used due to the explicitness and clarity in conception, as well as the convenienc...Arc-length-type and energy-type methods are two main strategies used in structural nonlinear tracing analysis, but the former is widely used due to the explicitness and clarity in conception, as well as the convenience and reliability in calculation. It is very important to trace the complete load-deflection path in order to know comprehensively the characteristics of structures subjected to loads. Unfortunately, the nonlinear analysis techniques are only workable for tracing the limit-point-type equilibrium path. For the bifurcation-point-type path, most of them cannot secure a satisfactory result. In this paper, main arc-length-type methods are reviewed and compared, and the possible reasons of failures in tracing analysis are briefly discussed. Some improvements are proposed, a displacement perturbation method and a force perturbation method are presented for tracing the bifurcation-point-type paths. Finally, two examples are analyzed to verify the ideas, and some conclusions are drawn with respect to the arc-length-type methods.展开更多
文摘In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror's pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method (HPM). It is observed that a sixth order perturbation approx- imation can precisely model the mirror's behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.
基金The project supported by the Special Research Fund for Doctor Program of Universities (9424702)
文摘Arc-length-type and energy-type methods are two main strategies used in structural nonlinear tracing analysis, but the former is widely used due to the explicitness and clarity in conception, as well as the convenience and reliability in calculation. It is very important to trace the complete load-deflection path in order to know comprehensively the characteristics of structures subjected to loads. Unfortunately, the nonlinear analysis techniques are only workable for tracing the limit-point-type equilibrium path. For the bifurcation-point-type path, most of them cannot secure a satisfactory result. In this paper, main arc-length-type methods are reviewed and compared, and the possible reasons of failures in tracing analysis are briefly discussed. Some improvements are proposed, a displacement perturbation method and a force perturbation method are presented for tracing the bifurcation-point-type paths. Finally, two examples are analyzed to verify the ideas, and some conclusions are drawn with respect to the arc-length-type methods.