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Nano-scale gap filling and mechanism of deposit-etch-deposit process for phase-change material 被引量:1
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作者 任万春 刘波 +4 位作者 宋志棠 向阳辉 王宗涛 张北超 封松林 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第11期335-339,共5页
Ge2Sb2Te5 gap filling is one of the key processes for phase-change random access memory manufacture. Physical vapor deposition is the mainstream method of Ge2Sb2Te5 film deposition due to its advantages of film qualit... Ge2Sb2Te5 gap filling is one of the key processes for phase-change random access memory manufacture. Physical vapor deposition is the mainstream method of Ge2Sb2Te5 film deposition due to its advantages of film quality, purity, and accurate composition control. However,the conventional physical vapor deposition process cannot meet the gap- filling requirement with the critical device dimension scaling down to 90 nm or below. In this study, we find that the deposit-etch-deposit process shows better gap-filling capability and scalability than the single-step deposition process, especially at the nano-scale critical dimension. The gap-filling mechanism of the deposit-etch-deposit process was briefly discussed. We also find that re-deposition of phase-change material from via the sidewall to via the bottom by argon ion bombardment during the etch step was a key ingredient for the final good gap filling. We achieve void-free gap filling of phase-change material on the 45-nm via the two-cycle deposit-etch-deposit process. We gain a rather comprehensive insight into the mechanism of deposit-etch-deposit process and propose a potential gap-filling solution for over 45-nm technology nodes for phase-change random access memory. 展开更多
关键词 deposit-etch deposit process single step deposit gap filling RE-DEPOSITION
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Gap Filling of Net Ecosystem CO<sub>2</sub>Exchange (NEE) above Rain-Fed Maize Using Artificial Neural Networks (ANNs) 被引量:1
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作者 Babak Safa Timothy J. Arkebauer +2 位作者 Qiuming Zhu Andy Suyker Suat Irmak 《Journal of Software Engineering and Applications》 2021年第5期150-171,共22页
<span style="font-family:Verdana;">The eddy covariance technique is an accurate and direct tool to measure the Net Ecosystem Exchange (NEE) of carbon dioxide. However, sometimes conditions are not amen... <span style="font-family:Verdana;">The eddy covariance technique is an accurate and direct tool to measure the Net Ecosystem Exchange (NEE) of carbon dioxide. However, sometimes conditions are not amenable to measurements using this technique. Thus, different methods have been developed to allow gap-filling and quality assessment of eddy covariance data sets. In this study first, two different Artificial Neural Networks (ANNs) approaches, the Multi-layer Perceptron (MLP) trained by the Back-Propagation (BP) algorithm, and the Radial Basis Function (RBF), were used to fill missing NEE data measured above rain-fed maize at the University of Nebraska-Lincoln Agricultural Research and Development Center near Mead, Nebraska. The gap-filled data were then compared by different statistical indices to gap-filled data obtained with the technique suggested by Suyker and Verma in 2005 [S&V method], and the ANN approach presented by Papale in 2003. The results showed that the RBF network was able to find better fits for missing values compared to the MLP (BP) network and S&V method. In addition, unlike the S&V method, which depends on different gap-filling procedures over the year;the structure of RBF and MLP (BP) networks was constant. However, data analysis indicated Papale’s approach gave better fits than the RBF and MLP (BP) methods. Thus, based on this work, Papale’s approach is the best method to estimate the missing data;though the applied statistical indices, which were used for model evaluation, show little difference between Papale’s approach and the RBF and MLP (BP).</span> 展开更多
关键词 gap filling Net Ecosystem Exchange of Carbon Dioxide Artificial Neural Networks Eddy Covariance System
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The efficacy of Kriging spatial interpolation for filling temporal gaps in daily air temperature data: A case study in northeast China 被引量:1
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作者 YanLin Zhang XiaoLi Chang +2 位作者 Ji Liang DongLiang Luo RuiXia He 《Research in Cold and Arid Regions》 CSCD 2016年第5期441-449,共9页
Quality-controlled and serially complete daily air temperature data are essential to evaluating and modelling the influences of climate change on the permafrost in cold regions. Due to malfunctions and location chang... Quality-controlled and serially complete daily air temperature data are essential to evaluating and modelling the influences of climate change on the permafrost in cold regions. Due to malfunctions and location changes of observing stations, temporal gaps (i.e., missing data) are common in collected datasets. The objective of this study was to assess the efficacy of Kriging spatial interpolation for estimating missing data to fill the temporal gaps in daily air temperature data in northeast China. A cross-validation experiment was conducted. Daily air temperature series from 1960 to 2012 at each station were estimated by using the universal Kriging (UK) and Kriging with an external drift (KED), as appropriate, as if all the ob-servations at a given station were completely missing. The temporal and spatial variation patterns of estimation uncertainties were also checked. Results showed that Kriging spatial interpolation was generally desirable for estimating missing data in daily air temperature, and in this study KED performed slightly better than UK. At most stations the correlation coefficients (R2) between the observed and estimated daily series were 〉0.98, and root mean square errors (RMSEs) of the estimated daily mean (Tmean), maximum (Tmax), and minimum (Tmin) of air temperature were 〈3 ℃. However, the estimation quality was strongly affected by seasonality and had spatial variation. In general, estimation uncertainties were small in summer and large in winter. On average, the RMSE in winter was approximately 1 ℃ higher than that in summer. In addition, estimation uncertainties in mountainous areas with complex terrain were significantly larger than those in plain areas. 展开更多
关键词 daily air temperature gap filling Kriging spatial interpolation northeast China
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A Data-Adaptive Filter of the Tahiti-Darwin Southern Oscillation Index and the Associate Scheme of Filling Data Gaps
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作者 张邦林 《Advances in Atmospheric Sciences》 SCIE CAS CSCD 1994年第4期447-458,共12页
The Tahiti-Darwin Southern Oscillation index provided by Climate Analysis Center of USA has been used in numerous studies. But, it has some deficiency. It contains noise mainly due to high month-to-month variability. ... The Tahiti-Darwin Southern Oscillation index provided by Climate Analysis Center of USA has been used in numerous studies. But, it has some deficiency. It contains noise mainly due to high month-to-month variability. In order to reduce the level of noise in the SO index, this paper introduces a fully data-adaptive filter based on singular spectrum analysis. Another interesting aspect of the filter is that it can be used to fill data gaps of the SO index by an iterative process. Eventually, a noiseless long-period data series without any gaps is obtained. 展开更多
关键词 Southern Oscillation index Data-adaptive filter Scheme of filling data gaps Iterative process
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Sapo Fills the Gaps of 200 W 1064 nm Diode Pumping Modules in China
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《光机电信息》 2006年第12期62-63,共2页
Wuhan Sapo Laser Industry Ltd.has recently introduced HipoweTM series 1064 nm high power doide laser pumping modules,which not only fill the gaps in Chinese market and end the history of importing this kind products ... Wuhan Sapo Laser Industry Ltd.has recently introduced HipoweTM series 1064 nm high power doide laser pumping modules,which not only fill the gaps in Chinese market and end the history of importing this kind products from abroad,but also have great influence on Chinese laser industry and medical laser market. 展开更多
关键词 high NM Sapo Fills the gaps of 200 W 1064 nm Diode Pumping Modules in China
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Sapo Fills the Gaps of 200 W 1 064 nm Diode Pumping Modules in China
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《光机电信息》 2006年第6期85-86,共2页
关键词 high Sapo Fills the gaps of 200 W 1 064 nm Diode Pumping Modules in China NM
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The In-orbit Application of 25Nms Gyroscope Fills the Gap in Domestic Market
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《Aerospace China》 2012年第3期16-16,共1页
After the successful launch of Yaogan 14, the 25Nms control moment gyroscope onboard the Yaogan 14 satellite successfully finished the attitude maneuver commands to the satellite and operates in a normal state. The su... After the successful launch of Yaogan 14, the 25Nms control moment gyroscope onboard the Yaogan 14 satellite successfully finished the attitude maneuver commands to the satellite and operates in a normal state. The successful maiden use of the 25Nms gyroscope fills the gap in the field of small control moment gyroscopes in 展开更多
关键词 The In-orbit Application of 25Nms Gyroscope Fills the gap in Domestic Market
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GSA and BIGD:Filling the Gap of Bioinformatics Resource and Service in China 被引量:1
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作者 Jingchu Luo 《Genomics, Proteomics & Bioinformatics》 SCIE CAS CSCD 2017年第1期11-13,共3页
In the 2017 first issue of this Journal - Genomes, Proteomes and Bioinformatics - a special database article entitled "GSA: Gen- ome Sequence Archive" is published. This article provides a brief introduction to th... In the 2017 first issue of this Journal - Genomes, Proteomes and Bioinformatics - a special database article entitled "GSA: Gen- ome Sequence Archive" is published. This article provides a brief introduction to the platform developed by the authors from the BIG Data Center (BIGD) of Beijing Institute of Genomics (BIG), Chinese Academy of Sciences (CAS). The aim of the GSA project is to collect, integrate, and archive raw sequence data submitted by domestic and international users. It is one of the major activities being carried on by a team of around 50 young bioinformaticians at BIGD. In addition to the GSA system, they are also working on several bioinformatics service-orientated projects as described in one of their recent publications . 展开更多
关键词 GSA and BIGD filling the gap of Bioinformatics Resource and Service in China
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Band structure characteristics of T-square fractal phononic crystals
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作者 刘晓健 凡友华 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第3期380-384,共5页
The T-square fractal two-dimensional phononic crystal model is presented in this article.A comprehensive study is performed for the Bragg scattering and locally resonant fractal phononic crystal.We find that the band ... The T-square fractal two-dimensional phononic crystal model is presented in this article.A comprehensive study is performed for the Bragg scattering and locally resonant fractal phononic crystal.We find that the band structures of the fractal and non-fractal phononic crystals at the same filling ratio are quite different through using the finite element method.The fractal design has an important impact on the band structures of the two-dimensional phononic crystals. 展开更多
关键词 fractal design phononic crystal band gap filling ratio
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Filling the Income Gap
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《Beijing Review》 2010年第11期36-37,共2页
Income distribution has become one of the people’s main concerns in China where more than 30 years of reform and opening up have also resulted in an ever-expanding wealth gap. But narrowing down
关键词 In filling the Income gap
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Tunable Photonic Band Gaps In Photonic Crystal Fibers Filled With a Cholesteric Liquid Crystal
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作者 Thomas Tanggaard Larsen David Sparre Hermann Anders Bjarklev 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期15-16,共2页
A photonic crystal fiber has been filled with a cholesteric liquid crystal. A temperature sensitive photonic band gap effect was observed, which was especially pronounced around the liquid crystal phase transition tem... A photonic crystal fiber has been filled with a cholesteric liquid crystal. A temperature sensitive photonic band gap effect was observed, which was especially pronounced around the liquid crystal phase transition temperature. 展开更多
关键词 PCF of as Te for on from HAVE Tunable Photonic Band gaps In Photonic Crystal Fibers Filled With a Cholesteric Liquid Crystal CLC
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