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The Effect of Pressure on the Dissociation of H_2/CH_4Gas Mixture during Diamond Films Growth via Chemical Vapor Deposition 被引量:1
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作者 赵庆勋 辛红丽 +2 位作者 韩佳宁 文钦若 杨景发 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第1期1113-1118,共6页
Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used... Monte Carlo simulations are adopted to study the electron motion in the mixture of H2 and CH4 during diamond synthesis via Glow Plasma-assisted Chemical Vapor Deposition (GPCVD). The non-uniform electric field is used and the avalanche of electrons is taken into account in this simulation. The average energy distribution of electrons and the space distribution of effective species such as CH3, CH+3, CH+ and H at various gas pressures are given in this paper, and optimum experimental conditions are inferred from these results. 展开更多
关键词 The Effect of Pressure on the Dissociation of H2/CH4gas Mixture during Diamond Films Growth via Chemical Vapor deposition CH
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Emerging MoS_(2)Wafer-Scale Technique for Integrated Circuits 被引量:3
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作者 Zimeng Ye Chao Tan +4 位作者 Xiaolei Huang Yi Ouyang Lei Yang Zegao Wang Mingdong Dong 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第3期129-170,共42页
As an outstanding representative of layered materials,molybdenum disulfide(MoS_(2))has excellent physical properties,such as high carrier mobility,stability,and abundance on earth.Moreover,its reasonable band gap and ... As an outstanding representative of layered materials,molybdenum disulfide(MoS_(2))has excellent physical properties,such as high carrier mobility,stability,and abundance on earth.Moreover,its reasonable band gap and microelectronic compatible fabrication characteristics makes it the most promising candidate in future advanced integrated circuits such as logical electronics,flexible electronics,and focal-plane photodetector.However,to realize the all-aspects application of MoS_(2),the research on obtaining high-quality and large-area films need to be continuously explored to promote its industrialization.Although the MoS_(2)grain size has already improved from several micrometers to sub-millimeters,the high-quality growth of wafer-scale MoS_(2)is still of great challenge.Herein,this review mainly focuses on the evolution of MoS_(2)by including chemical vapor deposition,metal–organic chemical vapor deposition,physical vapor deposition,and thermal conversion technology methods.The state-of-the-art research on the growth and optimization mechanism,including nucleation,orientation,grain,and defect engineering,is systematically summarized.Then,this review summarizes the wafer-scale application of MoS_(2)in a transistor,inverter,electronics,and photodetectors.Finally,the current challenges and future perspectives are outlined for the wafer-scale growth and application of MoS_(2). 展开更多
关键词 Wafer-scale growth Molybdenum disulfide gas deposition Integrated circuits
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Atomic layer deposition of ultrathin layered TiO_2 on Pt/C cathode catalyst for extended durability in polymer electrolyte fuel cells
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作者 Sangho Chung Myounghoon Choun +2 位作者 Beomgyun Jeong Jae Kwang Lee Jaeyoung Lee 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2016年第2期256-262,共7页
This study shows the preparation of a TiO2 coated Pt/C(TiO2/Pt/C) by atomic layer deposition(ALD),and the examination of the possibility for TiO2/Pt/C to be used as a durable cathode catalyst in polymer electrolyt... This study shows the preparation of a TiO2 coated Pt/C(TiO2/Pt/C) by atomic layer deposition(ALD),and the examination of the possibility for TiO2/Pt/C to be used as a durable cathode catalyst in polymer electrolyte fuel cells(PEFCs). Cyclic voltammetry results revealed that TiO2/Pt/C catalyst which has 2 nm protective layer showed similar activity for the oxygen reduction reaction compared to Pt/C catalysts and they also had good durability. TiO2/Pt/C prepared by 10 ALD cycles degraded 70% after 2000 Accelerated degradation test, while Pt/C corroded 92% in the same conditions. TiO2 ultrathin layer by ALD is able to achieve a good balance between the durability and activity, leading to TiO2/Pt/C as a promising cathode catalyst for PEFCs. The mechanism of the TiO2 protective layer used to prevent the degradation of Pt/C is discussed. 展开更多
关键词 Polymer electrolyte hydrogen fuel cells Atomic layer deposition gas diffusion layer Protective layer Titanium dioxide
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Selective oxidation of methane and carbon deposition over Fe_2O_3/Ce_(1-x)Zr_xO_2 oxides 被引量:4
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作者 Xiu-Li Sang Kong-Zhai Li +1 位作者 Hua Wang Yong-Gang Wei 《Rare Metals》 SCIE EI CAS CSCD 2014年第2期230-238,共9页
A series of Fe2O3/Al2O3, Fe2O3/CeO2, Ce0.7Zr0.3O2, and Fe2O3/Ce1-xZrxO2(x = 0.1–0.4) oxides was prepared and their physicochemical features were investigated by X-ray diffraction(XRD), transmission electron micro... A series of Fe2O3/Al2O3, Fe2O3/CeO2, Ce0.7Zr0.3O2, and Fe2O3/Ce1-xZrxO2(x = 0.1–0.4) oxides was prepared and their physicochemical features were investigated by X-ray diffraction(XRD), transmission electron microscope(TEM), and H2-temperature-programmed reduction(H2-TPR) techniques. The gas–solid reactions between these oxides and methane for syngas generation as well as the catalytic performance for selective oxidation of carbon deposition in O2-enriched atmosphere were investigated in detail. The results show that the samples with the presence of Fe2O3show much higher activity for methane oxidation compared with the Ce0.7Zr0.3O2solid solution,while the CeO2-contained samples represent higher CO selectively in methane oxidation than the Fe2O3/Al2O3sample. This suggests that the iron species should be the active sites for methane activation, and the cerium oxides provide the oxygen source for the selective oxidation of the activated methane to syngas during the reaction between methane and Fe2O3/Ce0.7Zr0.3O2. For the oxidation process of the carbon deposition, the CeO2-containing samples show much higher CO selectivity than the Fe2O3/Al2O3sample, which indicates that the cerium species should play a very important role in catalyzing the carbon selective oxidation to CO. The presence of the Ce–Zr–O solid solution could induce the growth direction of the carbonfilament, resulting in a loose contact between the carbon filament and the catalyst. This results in abundant exposed active sites for catalyzing carbon oxidation, strongly improving the oxidation rate of the carbon deposition over this sample. In addition, the Fe2O3/Ce0.7Zr0.3O2also represents much higher selectivity(ca. 97 %) for the conversion of carbon to CO than the Fe2O3/CeO2sample, which can be attributed to the higher concentration of reduced cerium sites on this sample. The increase of the Zr content in the Fe2O3/Ce1-xZrxO2samples could improve the reactivity of the materials for methane oxidation, but it also reduces the selectivity for CO formation. 展开更多
关键词 Methane Carbon deposition gas–solid reaction Selective oxidation of carbon Fe2O3/Ce1-xZrxO2 catalysts
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