High-κ /Ge gate stack has recently attracted a great deal of attention as a potential candidate to replace planar silicon transistors for sub-22 generation. However, the desorption and volatilization of GeO hamper th...High-κ /Ge gate stack has recently attracted a great deal of attention as a potential candidate to replace planar silicon transistors for sub-22 generation. However, the desorption and volatilization of GeO hamper the development of Ge-based devices. To cope with this challenge, various techniques have been proposed to improve the high-κ /Ge interface. However,these techniques have not been developed perfectly yet to control the interface. Therefore, in this paper, we propose an improved stress relieved pre-oxide（SRPO） method to improve the thermodynamic stability of the high-κ /Ge interface. The x-ray photoelectron spectroscopy（XPS） and atomic force microscopy（AFM） results indicate that the GeO volatilization of the high-κ /Ge gate stack is efficiently suppressed after 500℃ annealing, and the electrical characteristics are greatly improved.展开更多
For the study on the relationship between the dynamic phenomena in the min- ing such as mine earthquakes,outburst and faults slide,firstly,double shear friction ex- periments of sandstone were made,and its slide crite...For the study on the relationship between the dynamic phenomena in the min- ing such as mine earthquakes,outburst and faults slide,firstly,double shear friction ex- periments of sandstone were made,and its slide criterion was suggested considering the viewing of engineering.Secondly,in order to study the stability of underground rock and zone of tectonic stress field,based on the analysis on distribution characteristic of initial rock stress measurements,the geology structural model was built and tectonic stress field was made a back-analysis by applying finite element method.The calculating results fit with the analysis result of earthquakes mechanism and the distribution characteristic of the measurements.The high stress regional centers station locates discontinuous zone of I level faults and is corresponding to underground earthquakes scene.From then it is cer- tain that tectonic stress is the major origin and necessary condition of mine earthquakes. The instability slide of the faults is the main manifest and the mining activity is the leading factor.Beipiao fault has a dominate effect on other sub faults and tectonic stress area and is dynamical fountain of dynamic phenomena in the Beipiao Mines.展开更多
文摘High-κ /Ge gate stack has recently attracted a great deal of attention as a potential candidate to replace planar silicon transistors for sub-22 generation. However, the desorption and volatilization of GeO hamper the development of Ge-based devices. To cope with this challenge, various techniques have been proposed to improve the high-κ /Ge interface. However,these techniques have not been developed perfectly yet to control the interface. Therefore, in this paper, we propose an improved stress relieved pre-oxide（SRPO） method to improve the thermodynamic stability of the high-κ /Ge interface. The x-ray photoelectron spectroscopy（XPS） and atomic force microscopy（AFM） results indicate that the GeO volatilization of the high-κ /Ge gate stack is efficiently suppressed after 500℃ annealing, and the electrical characteristics are greatly improved.
基金the Project of China National"973"Program(2005CB221501)National Natural Science Foundation of China(50474010)Research Fund for the Doctoral Program of Higher Education(20040147005)
文摘For the study on the relationship between the dynamic phenomena in the min- ing such as mine earthquakes,outburst and faults slide,firstly,double shear friction ex- periments of sandstone were made,and its slide criterion was suggested considering the viewing of engineering.Secondly,in order to study the stability of underground rock and zone of tectonic stress field,based on the analysis on distribution characteristic of initial rock stress measurements,the geology structural model was built and tectonic stress field was made a back-analysis by applying finite element method.The calculating results fit with the analysis result of earthquakes mechanism and the distribution characteristic of the measurements.The high stress regional centers station locates discontinuous zone of I level faults and is corresponding to underground earthquakes scene.From then it is cer- tain that tectonic stress is the major origin and necessary condition of mine earthquakes. The instability slide of the faults is the main manifest and the mining activity is the leading factor.Beipiao fault has a dominate effect on other sub faults and tectonic stress area and is dynamical fountain of dynamic phenomena in the Beipiao Mines.
