A self-consistent fluid model is developed to investigate the radial distributions of dusty plasma parameters in a DC glow discharge,in which the extended fluid approach of plasma particles and the transport equations...A self-consistent fluid model is developed to investigate the radial distributions of dusty plasma parameters in a DC glow discharge,in which the extended fluid approach of plasma particles and the transport equations of dust particles are coupled.The electrical interaction between charged dust particles is considered in the model.The time evolution of radial distributions of dust density,plasma density,the radial component of electric field and the forces acting on dust particles when dust density tends to be stable,are obtained and analyzed under different discharge currents and dust particle radii.It is shown that the dust density structure is determined mainly by the radial electrostatic force,thermophoretic force and ion drag force in the discharge tube,and both discharge current and dust particle radius have an obvious effect on the transport processes of dust particles.The dust particles gather in the central region of the discharge tube for low discharge current and small dust radius,then dust voids are formed and become wider when the discharge current and dust radius increase.The plasma parameters in the dust gathering region are obviously affected by the dust particles due to the charging processes of electrons and ions to the dust surface.展开更多
Double glow plasma surface metallurgy technique was used to fabricate a Fe?Al?Cr?Nb alloyed layer onto the surface of the 45 steel. The microstructures and composition of th?eA Fl?eCr?Nb alloyed layer were analyzed by...Double glow plasma surface metallurgy technique was used to fabricate a Fe?Al?Cr?Nb alloyed layer onto the surface of the 45 steel. The microstructures and composition of th?eA Fl?eCr?Nb alloyed layer were analyzed by scanning electronic microscopy, X-ray diffraction and energy dispersive spectroscopy. The results indicate thatthe 20 μm alloyed layer is homogeneous and compact. The alloyed elements exhibit a gradient distribution along the cross section. Microhardness and nanoindentation tests imply that the surface hardness of the alloyed layer reaches HV 580, which is almost 2.8 times that of the substrate. Compared with the substrate, the alloyed layer has a much smaller displacement and a larger elastic modulus. According to the friction and wear tests at room temperature, the? FeAl?Cr?Nb alloyed layer has lower friction coefficient and less wear mass, implying that the Fe?Al?Cr?Nb alloyed layer can effectively improve the surface hardness and wear resistance of the substrate.展开更多
In this paper, a one-dimensional plasma fluid model is employed to study the self- sustained oscillations in DC-driven helium glow discharges at atmospheric pressure under different gas gaps. Our simulation results in...In this paper, a one-dimensional plasma fluid model is employed to study the self- sustained oscillations in DC-driven helium glow discharges at atmospheric pressure under different gas gaps. Our simulation results indicate that a harmonic current oscillation with tiny amplitude always occur at the onset of instability and transits into a relaxation one as the conductivity of the semiconductor is decreased. It is found that the dynamics of the oscillations are dependent on the gas gaps. The discharge can only exhibit a simple oscillation with unique amplitude and frequency at smaller gas gaps (〈2 mm) while it can exhibit a more complex oscillation with several different amplitudes and frequencies at larger gas gaps (〉2 mm). The discharge modes in these current oscillations have also been analyzed.展开更多
Through the study of the thermoluminescence(TL) of BaFClxBr1-x: Sm(0<x<1) system, it is found that former assignment of the glow peaks of BaFX(X = Cl, Br) is plausible. Through detailed study by several methods ...Through the study of the thermoluminescence(TL) of BaFClxBr1-x: Sm(0<x<1) system, it is found that former assignment of the glow peaks of BaFX(X = Cl, Br) is plausible. Through detailed study by several methods and techniques, a correct assignment is given in this paper, i.e. the first, second, and third glow peaks of BaFClxBr1-xSm are assigned to F(F-), F(Cl-), F(Br-) centers respectively, and the first andsecond glow peaks of BaFX are assigned to F(F-) and F(X-) centers respectively. This results are confirmed by theoretical consideration. Possible reasons for former plausible assignment are also pointed out here.展开更多
Resistance and capacity-coupled glow discharge (RCCGD) is a new method to produce atmospheric pressure glow discharge in air. In RCCGD, each electrode is connected with both a resistor R and a capacitor C. The R and...Resistance and capacity-coupled glow discharge (RCCGD) is a new method to produce atmospheric pressure glow discharge in air. In RCCGD, each electrode is connected with both a resistor R and a capacitor C. The R and C can provide a negative feedback to prevent the transition from glow to spark discharge. The influence of coupled resistance, coupled capacity, inter-electrode gap and power source frequency on the discharge is studied and discussed.展开更多
Direct exposure of samples to the active species of air generated by a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) has been used to etch and to increase the surface energy of metallic surfaces, photoresist, ...Direct exposure of samples to the active species of air generated by a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) has been used to etch and to increase the surface energy of metallic surfaces, photoresist, polymer films, and nonwoven fab- rics. The OAUGDP is a non-thermal plasma with the classical characteristics of a DC normal glow discharge that operates in air (and other gases) at atmospheric pres- sure. Neither a vacuum system nor batch processing is necessary. A wide range of applications to metals, photoresist, films, fabrics, and polymeric webs can be accom- modated by direct exposure of the workpiece to the plasma in parallel-plate reactors. This technolopy is simple, it produces effects that can be obtained in no other way at one atmosphere; it generates minimal pollutants or unwanted by-products; and it is suitable for individual sample or online treatment of metallic surfaces, wafers, films, and fabrics. Early exposures of solid materials to the OAUGDP required minutes to produce rela- tively small increases of surface energy. These durations appeared too long for com- mercial application to fast-moving webs. Recent improvements in OAUGDP gas com- position, power density, plasma quality, recireulating gas flow, and impedance match- ing of the power supply to the parallel plate plasma reactor have made it possible to raise the surface energy of a variety of polymeric webs (PP, PET PE etc.) to levels of 60 to 70 dynes/cm with one second of exposure. In air plasmas, the high surface ener- gies are not durable, and fall to 50 dynes/cm after periods of weeks to months. Here, we report the exposure of metallic surfaces, photoresist, polymeric films, and nonwo- ven fabrics made of PP and PET to an impedance matched parallel plate OAUGDP for durations ranging from one second to several tens of seconds. Data will be re- ported on the surface energy, wettability, wickability, and aging effect of polymeric films and fabrics as functions of time of exposure, and time after exposure; the rate and uniformity of photoresist etching; and the production of sub-micron structures by OAUGDP etching at one atmosphere.展开更多
An experimental system was established in order to study the interaction between electromagnetic waves, with a frequency of 300 kHz to 3 GHz, and DC glow discharge plasma. The results show that the DC glow discharge p...An experimental system was established in order to study the interaction between electromagnetic waves, with a frequency of 300 kHz to 3 GHz, and DC glow discharge plasma. The results show that the DC glow discharge plasma affects the transmission properties of elec- tromagnetic waves, while the waves can change both temperature and density of electrons.展开更多
Double glow plasma technique has a high deposition rate for preparing iridium coating. However, the glow plasma can influence the structure of the coating at the single substrate edge. In this study, the iridium coati...Double glow plasma technique has a high deposition rate for preparing iridium coating. However, the glow plasma can influence the structure of the coating at the single substrate edge. In this study, the iridium coating was prepared by double glow plasma on the surface of single niobium substrate. The microstructure of iridium coating at the substrate edge was observed by scanning electron microscopy. The composition of the coating was confirmed by energy dispersive spectroscopy and X-ray diffraction. There was a boundary between the coating and the substrate edge. The covered area for the iridium coating at the substrate edge became fewer and fewer from the inner area to the outer flange-area. The bamboo sprout-like particles on the surface of the substrate edge were composed of elemental niobium. The substrate edge was composed of the Nb coating and there was a transition zone between the Ir coating and the Nb coating. The interesting phenomenon of the substrate edge could be attributed to the effects of the bias voltages and the plasma cloud in the deposition chamber. The substrate edge effect could be mitigated or eliminated by adding lots of small niobium plates around the substrate in a deposition process.展开更多
The oxidative degradation of 4-chlorophenol (4-CP) in aqueous solution induced by plasma with submersed glow discharge has been investigated. The concentration of 4-CP and the reaction intermediates were determined ...The oxidative degradation of 4-chlorophenol (4-CP) in aqueous solution induced by plasma with submersed glow discharge has been investigated. The concentration of 4-CP and the reaction intermediates were determined by high performance liquid chromatography (HPLC). Various influencing factors such as the initial pH, the concentration of 4-CP and the catalytic action of Fe^2+ were examined. The results indicate that 4-CP is eventually degraded into inorganic ion, dioxide carbon and water. The attack of hydroxyl radicals on the benzene rings of 4-CP in the initial stage of oxidative reactions is presumed to be a key step. They also suggest that the reaction is of a pseudo-first order kinetic reaction and the proposed method is an efficient way for the 4-CP degradation,展开更多
Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (...Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (PET) film surface for improving hydrophilicity using the non-thermal plasma generated by atmospheric pressure glow discharge (APGD) in air is conducted. The discharge characteristics of APGD are shown by measurement of their electrical discharge parameters and observation of light-emission phenomena, and the surface properties of PET before and after the APGD treatment are studied using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). It is found that the APGD is homogeneous and stable in the whole gas gap, which differs from the commonly filamentary dielectric barrier discharge (DBD). A short time (several seconds) APGD treatment can modify the surface characteristics of PET film markedly and uniformly. After 10 s APGD treatment, the展开更多
A novel plasma atmospheric pressure abnormal glow discharge was used to investigate synthesis gas production from reforming methane and carbon dioxide. Special attentions were paid to the discharge characteristics and...A novel plasma atmospheric pressure abnormal glow discharge was used to investigate synthesis gas production from reforming methane and carbon dioxide. Special attentions were paid to the discharge characteristics and CH4, CO2 conversion, H2, CO selectivity, and ratio of H2/CO varied with the changing of discharging power, the total flux, and the ratio of CH4/CO2. Experiments were performed in wider operation variables, the discharging power of 240 to 600 W, the CH4/CO2 of 0.2 to 1.0 and the total flux of 140 to 500mL/min. The experiments showed that the conversion of CH4 and CO2 was up to 91.9% and 83.2%, the selectivity of CO and H2 was also up to 80% and 90% and H2/CO mole ratio was 0.2 to 1.2, respectively. A brief analysis for discharge characteristics and the experimental results were given.展开更多
This paper presents a novel set-up to be used in the degradation of dye, Various influencing factors, such as the voltage, the number of the anodes, and the catalytic action of Fe^2+, were examined. Chemical oxygen d...This paper presents a novel set-up to be used in the degradation of dye, Various influencing factors, such as the voltage, the number of the anodes, and the catalytic action of Fe^2+, were examined. Chemical oxygen demand (COD), ultraviolet (UV), FTIR absorption spectra, and atomic force microscopy (AFM) were used to monitor the degradation process. The results showed that the efficiency of degradation is raised by increasing the applied voltage, and is further improved when two or three anodes are used. Moreover, the use of Fe^2+ ion can promote the degradation reaction and shorten the degradation time. So the multi-electrode instrument is more efficient in degrading the dye and should be further studied.展开更多
The spatial distributions of the electron density and the mean electron energy of argon radio frequency (rf) glow discharge plasma in a plasma-enhanced chemical vapour deposition (PECVD) system have been investiga...The spatial distributions of the electron density and the mean electron energy of argon radio frequency (rf) glow discharge plasma in a plasma-enhanced chemical vapour deposition (PECVD) system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one: the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.展开更多
The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continui...The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.展开更多
The present work deals with the change in surface properties of polyethylene (PE) film using DC low pressure glow discharge air plasma and makes it useful for technical applications. The change in hydrophilicity of ...The present work deals with the change in surface properties of polyethylene (PE) film using DC low pressure glow discharge air plasma and makes it useful for technical applications. The change in hydrophilicity of the modified PE film surface was investigated by measuring contact angle and surface energy as a function of exposure time. Changes in the morphological and chemical composition of PE films were analyzed by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The improvement in adhesion was studied by measuring T-peel and lap-shear strength. The results show that the wettability and surface energy of the PE film has been improved due to the introduction of oxygen-containing polar groups and an increase in surface roughness. The XPS result clearly shows the increase in concentration of oxygen content and the formation of polar groups on the polymer surface. The AFM observation on PE film shows that the roughness of the surface increased due to plasma treatment. The above morphological and chemical changes enhanced the adhesive properties of the PE'film surfaces, which was confirmed by T-peel and lap-shear tests.展开更多
Atmospheric pressure glow discharges were generated in an air gap between a needle cathode and a water anode. Through changing the ballast resistor and gas gap width between the electrodes, it has been found that the ...Atmospheric pressure glow discharges were generated in an air gap between a needle cathode and a water anode. Through changing the ballast resistor and gas gap width between the electrodes, it has been found that the discharges are in normal glow regime judged from the currentvoltage characteristics and visualization of the discharges. Results indicate that the diameter of the positive column increases with increasing discharge current or increasing gap width. Optical emission spectroscopy is used to calculate the electron temperature and vibrational temperature. Both the electron temperature and the vibrational temperature increases with increasing discharge current or increasing gap width. Spatially resolved measurements show that the maxima of electron temperature and vibrational temperature appeared in the vicinity of the needle cathode.展开更多
This paper describes a novel method for the degradation of eosin by using glow discharge electrolysis (GDE). The effects of various parameters on the removal efficiency were studied. It was found that the eosin degr...This paper describes a novel method for the degradation of eosin by using glow discharge electrolysis (GDE). The effects of various parameters on the removal efficiency were studied. It was found that the eosin degradation could be raised considerably by increasing the applied voltage and the initial concentration, or by decreasing pH of the aqueous solution. Fe^2+ ion had an evident accelerating effect on the eosin degradation. The degradation process of eosin obeyed a pseudo-first-order reaction. The relationship between the degradation rate constant k and the reaction temperature T could be expressed by Arrhenius equation with which the apparent activation energy Ea of 14.110 kJ· mol^-1 and the pre-exponential factor k0 of 2.065× 10^-1 min^-1 were obtained, too. The determination of hydroxyl radical was carried out by using N, N-dimethyl -p-nitrosoaniline (RNO) as a scavenger. The results showed that the hydroxyl radical plays an important role in the degradation process.展开更多
In an aqueous solution, normal electrolysis at high voltages switches over spontaneously to glow discharge electrolysis and gives rise to hydroxyl radical, hydrogen peroxide, and aqueous electron, as well as several o...In an aqueous solution, normal electrolysis at high voltages switches over spontaneously to glow discharge electrolysis and gives rise to hydroxyl radical, hydrogen peroxide, and aqueous electron, as well as several other active species. Hydroxyl radical directly attacks organic contaminants to make them oxidized. In the present paper, 2-naphthylamine is eventually degraded into hydrogen carbonate and carbon dioxide. The degradation process is analyzed by using an Ultraviolet (UV) absorption spectrum, high-performance liquid chromatography (HPLC) and chemical oxygen demand (COD). It is demonstrated that 2-naphthylamine (co =30 mg·1-1) is completely converted within 2h at 30℃ and 600 V by glow discharge electrolysis, and the degradation is strongly dependent upon the presence of ferrous ions. COD is ascended in the absence of ferrous ions and descended in the presence of them.展开更多
An analytical method for the determination of 26 impurity elements (such as Li, Be, Na, Mg, Al, Si, P, S, K, Ca, Sc, Ti, V, Cr, Co, Ni, Ga, Ge, Y, Nb, Mo, Ag, Cd, Sb, W and Pb) in MnZn ferrite powder by direct curre...An analytical method for the determination of 26 impurity elements (such as Li, Be, Na, Mg, Al, Si, P, S, K, Ca, Sc, Ti, V, Cr, Co, Ni, Ga, Ge, Y, Nb, Mo, Ag, Cd, Sb, W and Pb) in MnZn ferrite powder by direct current glow discharge mass spectrometry (GD-MS) was established. MnZn ferrite powder was mixed with copper powder, used as a conductor, and pressed. The effects of MnZn ferrite powder preparation conditions and glow discharge parameters for the sensitivity and stability of signal analysis were investigated. By determining the choice of isotope and the application of the mass resolutions of 4000 (MR, medium resolution) and 10000 (HR, high resolution), mass spectral interference was eliminated. The contents of impurity elements in MnZn ferrite powder was calculated by subtraction after normalizing the total signal of Mn, Zn, Fe, O and Cu. The results showed that the detection limit of 26 kinds of impurity elements was between 0.002 and 0.57 μg/g, and the relative standard deviation (RSD) was between 3.33% and 32.35%. The accuracy of this method was verified by the ICP-MS. The method was simple and practical, which is applied to the determination of impurity elements in MnZn ferrite powder.展开更多
基金supported by the Stable-Support Scientific Project of China Research Institute of Radiowave Propagation(No.132101W07)National Natural Science Foundation of China(No.12105251)National Key Laboratory Foundation Electromagnetic Environment(Nos.A382101001,A382101002 and A152101731-C02).
文摘A self-consistent fluid model is developed to investigate the radial distributions of dusty plasma parameters in a DC glow discharge,in which the extended fluid approach of plasma particles and the transport equations of dust particles are coupled.The electrical interaction between charged dust particles is considered in the model.The time evolution of radial distributions of dust density,plasma density,the radial component of electric field and the forces acting on dust particles when dust density tends to be stable,are obtained and analyzed under different discharge currents and dust particle radii.It is shown that the dust density structure is determined mainly by the radial electrostatic force,thermophoretic force and ion drag force in the discharge tube,and both discharge current and dust particle radius have an obvious effect on the transport processes of dust particles.The dust particles gather in the central region of the discharge tube for low discharge current and small dust radius,then dust voids are formed and become wider when the discharge current and dust radius increase.The plasma parameters in the dust gathering region are obviously affected by the dust particles due to the charging processes of electrons and ions to the dust surface.
基金Project(51371097)supported by the National Natural Science Foundation of ChinaProject supported by the Priority Academic Program Development of Jiangsu Higher Education Institutions,China
文摘Double glow plasma surface metallurgy technique was used to fabricate a Fe?Al?Cr?Nb alloyed layer onto the surface of the 45 steel. The microstructures and composition of th?eA Fl?eCr?Nb alloyed layer were analyzed by scanning electronic microscopy, X-ray diffraction and energy dispersive spectroscopy. The results indicate thatthe 20 μm alloyed layer is homogeneous and compact. The alloyed elements exhibit a gradient distribution along the cross section. Microhardness and nanoindentation tests imply that the surface hardness of the alloyed layer reaches HV 580, which is almost 2.8 times that of the substrate. Compared with the substrate, the alloyed layer has a much smaller displacement and a larger elastic modulus. According to the friction and wear tests at room temperature, the? FeAl?Cr?Nb alloyed layer has lower friction coefficient and less wear mass, implying that the Fe?Al?Cr?Nb alloyed layer can effectively improve the surface hardness and wear resistance of the substrate.
基金supported by National Natural Science Foundation of China(Nos.11205044 and 11405042)Hebei Natural Science Fund of China(Nos.A2012201015 and A2011201006)+2 种基金the Research Foundation of Education Bureau of Hebei Province of China(No.Y2012009)the Postdoctoral Science Foundation of Hebei Province of China(No.B2014003004)the Postdoctoral Foundation of Hebei University
文摘In this paper, a one-dimensional plasma fluid model is employed to study the self- sustained oscillations in DC-driven helium glow discharges at atmospheric pressure under different gas gaps. Our simulation results indicate that a harmonic current oscillation with tiny amplitude always occur at the onset of instability and transits into a relaxation one as the conductivity of the semiconductor is decreased. It is found that the dynamics of the oscillations are dependent on the gas gaps. The discharge can only exhibit a simple oscillation with unique amplitude and frequency at smaller gas gaps (〈2 mm) while it can exhibit a more complex oscillation with several different amplitudes and frequencies at larger gas gaps (〉2 mm). The discharge modes in these current oscillations have also been analyzed.
文摘Through the study of the thermoluminescence(TL) of BaFClxBr1-x: Sm(0<x<1) system, it is found that former assignment of the glow peaks of BaFX(X = Cl, Br) is plausible. Through detailed study by several methods and techniques, a correct assignment is given in this paper, i.e. the first, second, and third glow peaks of BaFClxBr1-xSm are assigned to F(F-), F(Cl-), F(Br-) centers respectively, and the first andsecond glow peaks of BaFX are assigned to F(F-) and F(X-) centers respectively. This results are confirmed by theoretical consideration. Possible reasons for former plausible assignment are also pointed out here.
基金supported by the National Natural Science Foundation of China (Nos.50177002,10475014)
文摘Resistance and capacity-coupled glow discharge (RCCGD) is a new method to produce atmospheric pressure glow discharge in air. In RCCGD, each electrode is connected with both a resistor R and a capacitor C. The R and C can provide a negative feedback to prevent the transition from glow to spark discharge. The influence of coupled resistance, coupled capacity, inter-electrode gap and power source frequency on the discharge is studied and discussed.
文摘Direct exposure of samples to the active species of air generated by a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) has been used to etch and to increase the surface energy of metallic surfaces, photoresist, polymer films, and nonwoven fab- rics. The OAUGDP is a non-thermal plasma with the classical characteristics of a DC normal glow discharge that operates in air (and other gases) at atmospheric pres- sure. Neither a vacuum system nor batch processing is necessary. A wide range of applications to metals, photoresist, films, fabrics, and polymeric webs can be accom- modated by direct exposure of the workpiece to the plasma in parallel-plate reactors. This technolopy is simple, it produces effects that can be obtained in no other way at one atmosphere; it generates minimal pollutants or unwanted by-products; and it is suitable for individual sample or online treatment of metallic surfaces, wafers, films, and fabrics. Early exposures of solid materials to the OAUGDP required minutes to produce rela- tively small increases of surface energy. These durations appeared too long for com- mercial application to fast-moving webs. Recent improvements in OAUGDP gas com- position, power density, plasma quality, recireulating gas flow, and impedance match- ing of the power supply to the parallel plate plasma reactor have made it possible to raise the surface energy of a variety of polymeric webs (PP, PET PE etc.) to levels of 60 to 70 dynes/cm with one second of exposure. In air plasmas, the high surface ener- gies are not durable, and fall to 50 dynes/cm after periods of weeks to months. Here, we report the exposure of metallic surfaces, photoresist, polymeric films, and nonwo- ven fabrics made of PP and PET to an impedance matched parallel plate OAUGDP for durations ranging from one second to several tens of seconds. Data will be re- ported on the surface energy, wettability, wickability, and aging effect of polymeric films and fabrics as functions of time of exposure, and time after exposure; the rate and uniformity of photoresist etching; and the production of sub-micron structures by OAUGDP etching at one atmosphere.
基金supported by National Natural Science Foundation of China (No. 50877005), the National Science Foundation for Distinguished Young Scholars of China (No. 2010DFA61470) and the Project of International Scientific and Technological Cooperation of China (No. 61025001)
文摘An experimental system was established in order to study the interaction between electromagnetic waves, with a frequency of 300 kHz to 3 GHz, and DC glow discharge plasma. The results show that the DC glow discharge plasma affects the transmission properties of elec- tromagnetic waves, while the waves can change both temperature and density of electrons.
基金supported by National Natural Science Foundation of China(50872055/E020703)Funding for Outstanding Doctoral Dissertation in NUAA(BCXJ11-09)+1 种基金the Fundamental Research Funds for the Central UniversitiesFunding of Jiangsu Innovation Program for Graduate Education of China(CXLX110207)
文摘Double glow plasma technique has a high deposition rate for preparing iridium coating. However, the glow plasma can influence the structure of the coating at the single substrate edge. In this study, the iridium coating was prepared by double glow plasma on the surface of single niobium substrate. The microstructure of iridium coating at the substrate edge was observed by scanning electron microscopy. The composition of the coating was confirmed by energy dispersive spectroscopy and X-ray diffraction. There was a boundary between the coating and the substrate edge. The covered area for the iridium coating at the substrate edge became fewer and fewer from the inner area to the outer flange-area. The bamboo sprout-like particles on the surface of the substrate edge were composed of elemental niobium. The substrate edge was composed of the Nb coating and there was a transition zone between the Ir coating and the Nb coating. The interesting phenomenon of the substrate edge could be attributed to the effects of the bias voltages and the plasma cloud in the deposition chamber. The substrate edge effect could be mitigated or eliminated by adding lots of small niobium plates around the substrate in a deposition process.
基金The project partially supported by the Project of Key Science and Technology of Education Ministry (00250), the Natural ScienceFoundation of Gansu Province (3ZS041-A25-028), and the Project of KJCXGC-01, NWNU, China
文摘The oxidative degradation of 4-chlorophenol (4-CP) in aqueous solution induced by plasma with submersed glow discharge has been investigated. The concentration of 4-CP and the reaction intermediates were determined by high performance liquid chromatography (HPLC). Various influencing factors such as the initial pH, the concentration of 4-CP and the catalytic action of Fe^2+ were examined. The results indicate that 4-CP is eventually degraded into inorganic ion, dioxide carbon and water. The attack of hydroxyl radicals on the benzene rings of 4-CP in the initial stage of oxidative reactions is presumed to be a key step. They also suggest that the reaction is of a pseudo-first order kinetic reaction and the proposed method is an efficient way for the 4-CP degradation,
文摘Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (PET) film surface for improving hydrophilicity using the non-thermal plasma generated by atmospheric pressure glow discharge (APGD) in air is conducted. The discharge characteristics of APGD are shown by measurement of their electrical discharge parameters and observation of light-emission phenomena, and the surface properties of PET before and after the APGD treatment are studied using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). It is found that the APGD is homogeneous and stable in the whole gas gap, which differs from the commonly filamentary dielectric barrier discharge (DBD). A short time (several seconds) APGD treatment can modify the surface characteristics of PET film markedly and uniformly. After 10 s APGD treatment, the
基金supported by National Natural Science Foundation of China (No. 10475060)
文摘A novel plasma atmospheric pressure abnormal glow discharge was used to investigate synthesis gas production from reforming methane and carbon dioxide. Special attentions were paid to the discharge characteristics and CH4, CO2 conversion, H2, CO selectivity, and ratio of H2/CO varied with the changing of discharging power, the total flux, and the ratio of CH4/CO2. Experiments were performed in wider operation variables, the discharging power of 240 to 600 W, the CH4/CO2 of 0.2 to 1.0 and the total flux of 140 to 500mL/min. The experiments showed that the conversion of CH4 and CO2 was up to 91.9% and 83.2%, the selectivity of CO and H2 was also up to 80% and 90% and H2/CO mole ratio was 0.2 to 1.2, respectively. A brief analysis for discharge characteristics and the experimental results were given.
基金supported the by Project of Key Science and Technology of Education Ministry (20050)the Natural Science Foundation of Gansu Province (3ZS041-A25-028)the Invention Project of Science & Technology (KJCXGC-01, NWNU), China
文摘This paper presents a novel set-up to be used in the degradation of dye, Various influencing factors, such as the voltage, the number of the anodes, and the catalytic action of Fe^2+, were examined. Chemical oxygen demand (COD), ultraviolet (UV), FTIR absorption spectra, and atomic force microscopy (AFM) were used to monitor the degradation process. The results showed that the efficiency of degradation is raised by increasing the applied voltage, and is further improved when two or three anodes are used. Moreover, the use of Fe^2+ ion can promote the degradation reaction and shorten the degradation time. So the multi-electrode instrument is more efficient in degrading the dye and should be further studied.
文摘The spatial distributions of the electron density and the mean electron energy of argon radio frequency (rf) glow discharge plasma in a plasma-enhanced chemical vapour deposition (PECVD) system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one: the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.
基金Project supported by the National Natural Science Foundation of China (Grant Nos 50537020 and 50528707).
文摘The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.
文摘The present work deals with the change in surface properties of polyethylene (PE) film using DC low pressure glow discharge air plasma and makes it useful for technical applications. The change in hydrophilicity of the modified PE film surface was investigated by measuring contact angle and surface energy as a function of exposure time. Changes in the morphological and chemical composition of PE films were analyzed by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The improvement in adhesion was studied by measuring T-peel and lap-shear strength. The results show that the wettability and surface energy of the PE film has been improved due to the introduction of oxygen-containing polar groups and an increase in surface roughness. The XPS result clearly shows the increase in concentration of oxygen content and the formation of polar groups on the polymer surface. The AFM observation on PE film shows that the roughness of the surface increased due to plasma treatment. The above morphological and chemical changes enhanced the adhesive properties of the PE'film surfaces, which was confirmed by T-peel and lap-shear tests.
基金supported by National Natural Science Foundation of China(Nos.10805013 and 51077035)Funds for Distinguished Young Scientists of Hebei Province,China(No.A2012201045)+2 种基金the Key Project of Chinese Ministry of Education(No.210014)the Natural Science Foundation of Hebei Province(No.A2011201132)Hebei Province Department of Education for Outstanding Youth Project of China(Y2011120)
文摘Atmospheric pressure glow discharges were generated in an air gap between a needle cathode and a water anode. Through changing the ballast resistor and gas gap width between the electrodes, it has been found that the discharges are in normal glow regime judged from the currentvoltage characteristics and visualization of the discharges. Results indicate that the diameter of the positive column increases with increasing discharge current or increasing gap width. Optical emission spectroscopy is used to calculate the electron temperature and vibrational temperature. Both the electron temperature and the vibrational temperature increases with increasing discharge current or increasing gap width. Spatially resolved measurements show that the maxima of electron temperature and vibrational temperature appeared in the vicinity of the needle cathode.
基金the Key Projects of Science and Technology of Education Ministry(00250)the Natural Science Foundation of Gansu Province(3ZS041-A25-028)+1 种基金the Projects of KJCXGC-01,NWNUCansu Key Lab of Polymer Materials,China
文摘This paper describes a novel method for the degradation of eosin by using glow discharge electrolysis (GDE). The effects of various parameters on the removal efficiency were studied. It was found that the eosin degradation could be raised considerably by increasing the applied voltage and the initial concentration, or by decreasing pH of the aqueous solution. Fe^2+ ion had an evident accelerating effect on the eosin degradation. The degradation process of eosin obeyed a pseudo-first-order reaction. The relationship between the degradation rate constant k and the reaction temperature T could be expressed by Arrhenius equation with which the apparent activation energy Ea of 14.110 kJ· mol^-1 and the pre-exponential factor k0 of 2.065× 10^-1 min^-1 were obtained, too. The determination of hydroxyl radical was carried out by using N, N-dimethyl -p-nitrosoaniline (RNO) as a scavenger. The results showed that the hydroxyl radical plays an important role in the degradation process.
基金The project supported in part by the Project of Key Science and Technology of Education Ministry (00250)the Nature Science Foundation of Gansu Province (3ZS041-A25-028)the Invention Project of Science and Technology (KJCXGC-01, NWNU), 2000
文摘In an aqueous solution, normal electrolysis at high voltages switches over spontaneously to glow discharge electrolysis and gives rise to hydroxyl radical, hydrogen peroxide, and aqueous electron, as well as several other active species. Hydroxyl radical directly attacks organic contaminants to make them oxidized. In the present paper, 2-naphthylamine is eventually degraded into hydrogen carbonate and carbon dioxide. The degradation process is analyzed by using an Ultraviolet (UV) absorption spectrum, high-performance liquid chromatography (HPLC) and chemical oxygen demand (COD). It is demonstrated that 2-naphthylamine (co =30 mg·1-1) is completely converted within 2h at 30℃ and 600 V by glow discharge electrolysis, and the degradation is strongly dependent upon the presence of ferrous ions. COD is ascended in the absence of ferrous ions and descended in the presence of them.
基金Project(21275162)supported by the National Natural Science Foundation of ChinaProject(KJZH14217)supported by the Achievement Transfer Program of Institutions of Higher Education in Chongqing,ChinaProject(KJ1601224)supported by the Scientific and Technological Research Program of Chongqing Municipal Education Commission,China
文摘An analytical method for the determination of 26 impurity elements (such as Li, Be, Na, Mg, Al, Si, P, S, K, Ca, Sc, Ti, V, Cr, Co, Ni, Ga, Ge, Y, Nb, Mo, Ag, Cd, Sb, W and Pb) in MnZn ferrite powder by direct current glow discharge mass spectrometry (GD-MS) was established. MnZn ferrite powder was mixed with copper powder, used as a conductor, and pressed. The effects of MnZn ferrite powder preparation conditions and glow discharge parameters for the sensitivity and stability of signal analysis were investigated. By determining the choice of isotope and the application of the mass resolutions of 4000 (MR, medium resolution) and 10000 (HR, high resolution), mass spectral interference was eliminated. The contents of impurity elements in MnZn ferrite powder was calculated by subtraction after normalizing the total signal of Mn, Zn, Fe, O and Cu. The results showed that the detection limit of 26 kinds of impurity elements was between 0.002 and 0.57 μg/g, and the relative standard deviation (RSD) was between 3.33% and 32.35%. The accuracy of this method was verified by the ICP-MS. The method was simple and practical, which is applied to the determination of impurity elements in MnZn ferrite powder.