High-κ /Ge gate stack has recently attracted a great deal of attention as a potential candidate to replace planar silicon transistors for sub-22 generation. However, the desorption and volatilization of GeO hamper th...High-κ /Ge gate stack has recently attracted a great deal of attention as a potential candidate to replace planar silicon transistors for sub-22 generation. However, the desorption and volatilization of GeO hamper the development of Ge-based devices. To cope with this challenge, various techniques have been proposed to improve the high-κ /Ge interface. However,these techniques have not been developed perfectly yet to control the interface. Therefore, in this paper, we propose an improved stress relieved pre-oxide（SRPO） method to improve the thermodynamic stability of the high-κ /Ge interface. The x-ray photoelectron spectroscopy（XPS） and atomic force microscopy（AFM） results indicate that the GeO volatilization of the high-κ /Ge gate stack is efficiently suppressed after 500℃ annealing, and the electrical characteristics are greatly improved.展开更多
High geo-stress and its engineering problems have severely affected the development of civil infrastructures in western China. The problems include high rock slope instabilities,rock burst,gas explosion and large-scal...High geo-stress and its engineering problems have severely affected the development of civil infrastructures in western China. The problems include high rock slope instabilities,rock burst,gas explosion and large-scale soft rock deformation in deep tunnels.This paper investigates the distribution of the high geo-stresses and the models of the stress concentration areas in the eastern margin of Qinghai-Tibet plateau so that a solid foundation can be formed to address the problems.The investigation is based on a comprehensive analysis of the previous research data of the eastern margin and uses remote sensing techniques,geophysics,geochemistry,and large scale geological surveying methods.The investigation has found that some special tectonic zones have high geo-stresses.The high geo-stresses are located at(1) the convergent boundary areas between two fault blocks with large strength differences,(2) the tectonic necks in front of active fault blocks,and(3) the intersection and/or termination areas of faults within the fault blocks.An example for(1) is the north Qilian high geo-stress area.Another example for(2) is the Minshan high geo-stress area in the northwest Sichuan.Furthermore,the investigation has summarized six basic models to characterize the high geo-stress concentration areas.The first one is the convergent stress concentration model at the boundary of two fault blocks.The other five stress concentration modes are oblique fissures or intersecting areas,areas without lower velocity layer in the crust,areas of compression induced tensile cracking,tectonic wedge areas,and tectonic neck areas,respectively.展开更多
文摘High-κ /Ge gate stack has recently attracted a great deal of attention as a potential candidate to replace planar silicon transistors for sub-22 generation. However, the desorption and volatilization of GeO hamper the development of Ge-based devices. To cope with this challenge, various techniques have been proposed to improve the high-κ /Ge interface. However,these techniques have not been developed perfectly yet to control the interface. Therefore, in this paper, we propose an improved stress relieved pre-oxide（SRPO） method to improve the thermodynamic stability of the high-κ /Ge interface. The x-ray photoelectron spectroscopy（XPS） and atomic force microscopy（AFM） results indicate that the GeO volatilization of the high-κ /Ge gate stack is efficiently suppressed after 500℃ annealing, and the electrical characteristics are greatly improved.
基金supported by the National Natural Science Foundation of China and Ertan Hydropower Development Company,Ltd.(EHDC)(Grant No.50539050)
文摘High geo-stress and its engineering problems have severely affected the development of civil infrastructures in western China. The problems include high rock slope instabilities,rock burst,gas explosion and large-scale soft rock deformation in deep tunnels.This paper investigates the distribution of the high geo-stresses and the models of the stress concentration areas in the eastern margin of Qinghai-Tibet plateau so that a solid foundation can be formed to address the problems.The investigation is based on a comprehensive analysis of the previous research data of the eastern margin and uses remote sensing techniques,geophysics,geochemistry,and large scale geological surveying methods.The investigation has found that some special tectonic zones have high geo-stresses.The high geo-stresses are located at(1) the convergent boundary areas between two fault blocks with large strength differences,(2) the tectonic necks in front of active fault blocks,and(3) the intersection and/or termination areas of faults within the fault blocks.An example for(1) is the north Qilian high geo-stress area.Another example for(2) is the Minshan high geo-stress area in the northwest Sichuan.Furthermore,the investigation has summarized six basic models to characterize the high geo-stress concentration areas.The first one is the convergent stress concentration model at the boundary of two fault blocks.The other five stress concentration modes are oblique fissures or intersecting areas,areas without lower velocity layer in the crust,areas of compression induced tensile cracking,tectonic wedge areas,and tectonic neck areas,respectively.
