Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequenci...Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequencies of SAW devices are typically limited to within a few gigahertz, which severely restricts their applications in 5G communication, precision sensing, photonics, and quantum control. To solve this critical problem, we propose a hybrid strategy that integrates a nanomanufacturing process (i.e., nanolithography) with a LiNbO_(3)/SiO_(2)/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices, in addition to large electromechanical coupling coefficients of up to 15.7%. We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms. To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms, we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm2·μg−1, which is about 1011 times higher than that of a conventional quartz crystal microbalance (QCM) and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.展开更多
Several technical problems of numerical method in TLM procedures arediscussed.The bandwidth of single mode in four kinds of dielectric slab loaded rect-angular waveguides is investigated,and the optimum bandwidth whic...Several technical problems of numerical method in TLM procedures arediscussed.The bandwidth of single mode in four kinds of dielectric slab loaded rect-angular waveguides is investigated,and the optimum bandwidth which is related tothe dimensions and dielectric constants is obtained.These results are useful to the de-sign of dielectric slab loaded rectangular waveguide.展开更多
基金supported by the National Science Foundation of China(NSFC)(52075162)the Program of New and High-Tech Industry of Hunan Province(2020GK2015 and 2021GK4014)+5 种基金the Excellent Youth Fund of Hunan Province(2021JJ20018)the Key Program of Guangdong(2020B0101040002)the Joint Fund of the Ministry of Education(Young Talents)the Natural Science Foundation of Changsha(kq2007026)the Tianjin Enterprise Science and Technology Commissioner Project(19JCTPJC56200)the Engineering Physics and Science Research Council of the United Kingdom(EPSRC EP/P018998/1).
文摘Surface acoustic wave (SAW) technology has been extensively explored for wireless communication, sensors, microfluidics, photonics, and quantum information processing. However, due to fabrication issues, the frequencies of SAW devices are typically limited to within a few gigahertz, which severely restricts their applications in 5G communication, precision sensing, photonics, and quantum control. To solve this critical problem, we propose a hybrid strategy that integrates a nanomanufacturing process (i.e., nanolithography) with a LiNbO_(3)/SiO_(2)/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices, in addition to large electromechanical coupling coefficients of up to 15.7%. We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms. To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms, we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm2·μg−1, which is about 1011 times higher than that of a conventional quartz crystal microbalance (QCM) and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.
文摘Several technical problems of numerical method in TLM procedures arediscussed.The bandwidth of single mode in four kinds of dielectric slab loaded rect-angular waveguides is investigated,and the optimum bandwidth which is related tothe dimensions and dielectric constants is obtained.These results are useful to the de-sign of dielectric slab loaded rectangular waveguide.
