Radio frequency capacitively coupled plasma source(RF-CCP)with a hollow electrode can increase the electron density through the hollow cathode effect(HCE),which offers a method to modify the spatial profiles of the pl...Radio frequency capacitively coupled plasma source(RF-CCP)with a hollow electrode can increase the electron density through the hollow cathode effect(HCE),which offers a method to modify the spatial profiles of the plasma density.In this work,the variations of the HCE in one RF period are investigated by using a two-dimensional particle-in-cell/Monte-Carlo collision(PIC/MCC)model.The results show that the sheath electric field,the sheath potential drop,the sheath thickness,the radial plasma bulk width,the electron energy distribution function(EEDF),and the average electron energy in the cavity vary in one RF period.During the hollow electrode sheath's expansion phase,the secondary electron heating and sheath oscillation heating in the cavity are gradually enhanced,and the frequency of the electron pendular motion in the cavity gradually increases,hence the HCE is gradually enhanced.However,during the hollow electrode sheath's collapse phase,the secondary electron heating is gradually attenuated.In addition,when interacting with the gradually collapsed hollow electrode sheaths,high-energy plasma bulk electrons in the cavity will lose some energy.Furthermore,the frequency of the electron pendular motion in the cavity gradually decreases.Therefore,during the hollow electrode sheath's collapse phase,the HCE is gradually attenuated.展开更多
Accurate and reliable triggering is one of the most important issues with high power pseudospark switch, because it not only has an impact on the design of discharge chamber of switch, but also has an influence on the...Accurate and reliable triggering is one of the most important issues with high power pseudospark switch, because it not only has an impact on the design of discharge chamber of switch, but also has an influence on the dynamic range of operation voltage, repetition frequencies and lifetime of switch. The unique feature of pseudospark switch is its hollow cathode geometry. The hollow cathode effect produced by the hollow cathode provides the protection of the switch for the triggering unit from erosion by high discharge plasma. In this paper, a zinc oxide (ZnO) surface flashover triggering is presented. This trigger unit possesses an excellent time delay (80 ns - 360 ns) and jitter (20 ns - 50 ns) at the switch voltage of 30 kV - 2 kV. The emitted plasma electron density is high enough to trigger switch reliably down to switch voltage of 440 V.展开更多
文摘Radio frequency capacitively coupled plasma source(RF-CCP)with a hollow electrode can increase the electron density through the hollow cathode effect(HCE),which offers a method to modify the spatial profiles of the plasma density.In this work,the variations of the HCE in one RF period are investigated by using a two-dimensional particle-in-cell/Monte-Carlo collision(PIC/MCC)model.The results show that the sheath electric field,the sheath potential drop,the sheath thickness,the radial plasma bulk width,the electron energy distribution function(EEDF),and the average electron energy in the cavity vary in one RF period.During the hollow electrode sheath's expansion phase,the secondary electron heating and sheath oscillation heating in the cavity are gradually enhanced,and the frequency of the electron pendular motion in the cavity gradually increases,hence the HCE is gradually enhanced.However,during the hollow electrode sheath's collapse phase,the secondary electron heating is gradually attenuated.In addition,when interacting with the gradually collapsed hollow electrode sheaths,high-energy plasma bulk electrons in the cavity will lose some energy.Furthermore,the frequency of the electron pendular motion in the cavity gradually decreases.Therefore,during the hollow electrode sheath's collapse phase,the HCE is gradually attenuated.
基金The project supported by the National Nature Science Foundation of China(No.10035020)
文摘Accurate and reliable triggering is one of the most important issues with high power pseudospark switch, because it not only has an impact on the design of discharge chamber of switch, but also has an influence on the dynamic range of operation voltage, repetition frequencies and lifetime of switch. The unique feature of pseudospark switch is its hollow cathode geometry. The hollow cathode effect produced by the hollow cathode provides the protection of the switch for the triggering unit from erosion by high discharge plasma. In this paper, a zinc oxide (ZnO) surface flashover triggering is presented. This trigger unit possesses an excellent time delay (80 ns - 360 ns) and jitter (20 ns - 50 ns) at the switch voltage of 30 kV - 2 kV. The emitted plasma electron density is high enough to trigger switch reliably down to switch voltage of 440 V.
