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Glass homogeneity efect on wavefront aberration in lithography projection lens
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作者 尚红波 黄纬 +2 位作者 刘春来 许伟才 杨旺 《Chinese Optics Letters》 SCIE EI CAS CSCD 2013年第9期1-3,共3页
Analysis of glass homogeneity using the attaching interferometric data model neglects body distribution.To improve analysis accuracy,we establish the three-dimensional gradient index(GRIN) model of glass index by anal... Analysis of glass homogeneity using the attaching interferometric data model neglects body distribution.To improve analysis accuracy,we establish the three-dimensional gradient index(GRIN) model of glass index by analyzing fused silica homogeneity distribution in two perpendicular measurement directions.Using the GRIN model,a lithography projection lens with a numerical aperture of 0.75 is analyzed.Root mean square wavefront aberration deteriorates from 0.9 to 9.65 nm and then improves to 5.9 nm after clocking. 展开更多
关键词 Glass homogeneity efect on wavefront aberration in lithography projection lens
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Hyperbolicity of unitary involutions
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作者 KARPENKO Nikita A. 《Science China Mathematics》 SCIE 2012年第5期937-945,共9页
We prove the so-called Unitary Hyperbolicity Theorem,a result on hyperbolicity of unitary involutions.The analogous previously known results for the orthogonal and symplectic involutions are formal consequences of the... We prove the so-called Unitary Hyperbolicity Theorem,a result on hyperbolicity of unitary involutions.The analogous previously known results for the orthogonal and symplectic involutions are formal consequences of the unitary one.While the original proofs in the orthogonal and symplectic cases were based on the incompressibility of generalized Severi-Brauer varieties,the proof in the unitary case is based on the incompressibility of their Weil transfers. 展开更多
关键词 algebraic groups INVOLUTIONS projective homogeneous varieties Chow groups and motives Steenrod operations
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