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THE CLIMATIC STUDY OF CHANGBAI MOUNTAIN BY INTEGRATION OF REMOTE SENSING INFORMATION AND GEO-CODED IMAGES
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作者 Yang Meihua Department of Geography, Northeast Normal University Wang Yeqiao Changchun Inst. of Geography, Chinese Academy of Sciences 《遥感信息》 CSCD 1990年第A02期39-40,共2页
Ⅰ. INTRODUCTION Changbai Mountain is situated between E127°54′-128°08′, N40°58′-42°06′ about 2700 meters above sea level. It is the typical area of the mountainous climate in the monsoon area ... Ⅰ. INTRODUCTION Changbai Mountain is situated between E127°54′-128°08′, N40°58′-42°06′ about 2700 meters above sea level. It is the typical area of the mountainous climate in the monsoon area of the temperate zone on the globe. The well reserved primeval vertical distribution of natural landscape belts and the Natural Conservation of Changbai Mountains adopted by the UNESCO′s MAB Program cause the worldwide attention of geographers. Beside the complexity of the climatic structure itself, the mechanical effection of the high mountain body also effect the climate in the eastern part of China. In the mountain area where short of meteorological observation data, the climatic study by remote sensing is favorable for discovery and representation of climatic law in large area. 展开更多
关键词 THE CLIMATIC STUDY OF CHANGBAI MOUNTAIN BY integration OF REMOTE SENSING INFORMATION AND GEO-CODED imageS GEO data body
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Adaptive image decomposition method based on credible data fitting with local total variation 被引量:1
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作者 CHEN Ya GUO Qiang +2 位作者 ZHOU Yuanfeng LI Xuemei ZHANG Caiming 《Computer Aided Drafting,Design and Manufacturing》 2012年第4期11-15,共5页
In this paper we present a novel image decomposition method via credible data fitting with local total variation filter. The oscillation rate is used to measure the image complexity and characteristics. The filter par... In this paper we present a novel image decomposition method via credible data fitting with local total variation filter. The oscillation rate is used to measure the image complexity and characteristics. The filter parameter can be determined by a fitting curve which is reconstructed by oscillation rate. In addition, the approximate Gaussian algorithm and integral image are used to reduce the algorithm computation and the sensitivity of the filter window selection. Experiments show the new method is better than the exist- ing methods. 展开更多
关键词 image decomposition adaptive filter integral image Gaussian filter
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Digital Refocusing: All-in-Focus Image Rendering Based on Holoscopic 3D Camera
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作者 Obaidullah Abdul Fatah Peter Lanigan +1 位作者 Amar Aggoun Mohammad Rafiq Swash 《Journal of Computer and Communications》 2016年第6期24-35,共12页
This paper presents an innovative method for digital refocusing of different point in space after capturing and also extracts all-in-focus image. The proposed method extracts all-in-focus image using Michelson contras... This paper presents an innovative method for digital refocusing of different point in space after capturing and also extracts all-in-focus image. The proposed method extracts all-in-focus image using Michelson contrast formula hence, it helps in calculating the coordinates of the 3D object location. With light field integral camera setup the scene to capture the objects precisely positioned in a measurable distance from the camera therefore, it helps in refocusing process to return the original location where the object is focused;else it will be blurred with less contrast. The highest contrast values at different points in space can return the focused points where the objects are initially positioned as a result;all-in-focus image can also be obtained. Detailed experiments are conducted to demonstrate the credibility of proposed method with results. 展开更多
关键词 Holoscopic 3D image Integral image VIEWPOINT 3D image Digital Focusing Light Field image
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Integral imaging-based tabletop light field 3D display with large viewing angle 被引量:1
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作者 Yan Xing Xing-Yu Lin +9 位作者 Lin-Bo Zhang Yun-Peng Xia Han-Le Zhang Hong-Yu Cui Shuang Li Tong-Yu Wang Hui Ren Di Wang Huan Deng Qiong-Hua Wang 《Opto-Electronic Advances》 SCIE EI CAS CSCD 2023年第6期19-30,共12页
Light field 3D display technology is considered a revolutionary technology to address the critical visual fatigue issues in the existing 3D displays.Tabletop light field 3D display provides a brand-new display form th... Light field 3D display technology is considered a revolutionary technology to address the critical visual fatigue issues in the existing 3D displays.Tabletop light field 3D display provides a brand-new display form that satisfies multi-user shared viewing and collaborative works,and it is poised to become a potential alternative to the traditional wall and portable display forms.However,a large radial viewing angle and correct radial perspective and parallax are still out of reach for most current tabletop light field 3D displays due to the limited amount of spatial information.To address the viewing angle and perspective issues,a novel integral imaging-based tabletop light field 3D display with a simple flat-panel structure is proposed and developed by applying a compound lens array,two spliced 8K liquid crystal display panels,and a light shaping diffuser screen.The compound lens array is designed to be composed of multiple three-piece compound lens units by employing a reverse design scheme,which greatly extends the radial viewing angle in the case of a limited amount of spatial information and balances other important 3D display parameters.The proposed display has a radial viewing angle of 68.7°in a large display size of 43.5 inches,which is larger than the conventional tabletop light field 3D displays.The radial perspective and parallax are correct,and high-resolution 3D images can be reproduced in large radial viewing positions.We envision that this proposed display opens up possibility for redefining the display forms of consumer electronics. 展开更多
关键词 tabletop light field 3D display integral imaging compound lens array radial viewing angle
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The Flipping-Free Full-Parallax Tabletop Integral Imaging with Enhanced Viewing Angle Based on Space-Multiplexed Voxel Screen and Compound Lens Array
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作者 Peiren Wang Jinqiang Bi +3 位作者 Zilong Li Xue Han Zhengyang Li Xiaozheng Wang 《Computer Modeling in Engineering & Sciences》 SCIE EI 2023年第9期3197-3211,共15页
Tabletop integral imaging display with a more realistic and immersive experience has always been a hot spot in three-dimensional imaging technology,widely used in biomedical imaging and visualization to enhance medica... Tabletop integral imaging display with a more realistic and immersive experience has always been a hot spot in three-dimensional imaging technology,widely used in biomedical imaging and visualization to enhance medical diagnosis.However,the traditional structural characteristics of integral imaging display inevitably introduce the flipping effect outside the effective viewing angle.Here,a full-parallax tabletop integral imaging display without the flipping effect based on space-multiplexed voxel screen and compound lens array is demonstrated,and two holographic functional screens with different parameters are optically designed and fabricated.To eliminate the flipping effect in the reconstruction process,the space-multiplexed voxel screen consisting of a projector array and the holographic functional screen is presented to constrain light beams passing through the corresponding lens.To greatly promote imaging quality within the viewing area,the aspherical structure of the compound lens is optimized to balance the aberrations.It cooperates with the holographic functional screen to modulate the light field spatial distribution.Compared with the simulation results,the distortion rate of the imaging display is reduced to less than 9%from more than 30%.In the experiment,the floating high-quality reconstructed three-dimensional image without the flipping effect can be observed with the correct 3D perception at 96°×96°viewing angle,where 44,100 viewpoints are employed. 展开更多
关键词 Integral imaging display flipping effect large viewing angle optimized compound lens imaging distortion
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Enhanced 3D Point Cloud Reconstruction for Light Field Microscopy Using U-Net-Based Convolutional Neural Networks
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作者 Shariar Md Imtiaz Ki-Chul Kwon +4 位作者 F.M.Fahmid Hossain MdBiddut Hossain Rupali Kiran Shinde Sang-Keun Gil Nam Kim 《Computer Systems Science & Engineering》 SCIE EI 2023年第12期2921-2937,共17页
This article describes a novel approach for enhancing the three-dimensional(3D)point cloud reconstruction for light field microscopy(LFM)using U-net architecture-based fully convolutional neural network(CNN).Since the... This article describes a novel approach for enhancing the three-dimensional(3D)point cloud reconstruction for light field microscopy(LFM)using U-net architecture-based fully convolutional neural network(CNN).Since the directional view of the LFM is limited,noise and artifacts make it difficult to reconstruct the exact shape of 3D point clouds.The existing methods suffer from these problems due to the self-occlusion of the model.This manuscript proposes a deep fusion learning(DL)method that combines a 3D CNN with a U-Net-based model as a feature extractor.The sub-aperture images obtained from the light field microscopy are aligned to form a light field data cube for preprocessing.A multi-stream 3D CNNs and U-net architecture are applied to obtain the depth feature fromthe directional sub-aperture LF data cube.For the enhancement of the depthmap,dual iteration-based weighted median filtering(WMF)is used to reduce surface noise and enhance the accuracy of the reconstruction.Generating a 3D point cloud involves combining two key elements:the enhanced depth map and the central view of the light field image.The proposed method is validated using synthesized Heidelberg Collaboratory for Image Processing(HCI)and real-world LFM datasets.The results are compared with different state-of-the-art methods.The structural similarity index(SSIM)gain for boxes,cotton,pillow,and pens are 0.9760,0.9806,0.9940,and 0.9907,respectively.Moreover,the discrete entropy(DE)value for LFM depth maps exhibited better performance than other existing methods. 展开更多
关键词 3Dreconstruction 3Dmodeling point cloud depth estimation integral imaging light filedmicroscopy 3D-CNN U-Net deep learning machine intelligence
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Acute and Mid-Term Results after Pulmonary Veins Isolation Using a Novel Circular Irrigated Multielectrode Mapping and Ablation Catheter (nMARQ)
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作者 Ibrahim Marai Mahmoud Suleiman +3 位作者 Jonathan Lessick Miry Blich Sobhi Abadi Monther Boulos 《World Journal of Cardiovascular Diseases》 2016年第12期477-488,共13页
Background: Pulmonary vein isolation (PVI) is the cornerstone of atrial fibrillation (AF) ablation in both paroxysmal and persistent AF. However, this procedure is still challenging and time consuming. Objective: The ... Background: Pulmonary vein isolation (PVI) is the cornerstone of atrial fibrillation (AF) ablation in both paroxysmal and persistent AF. However, this procedure is still challenging and time consuming. Objective: The aim of this study was to present our approach for PVI using a novel circular irrigated multielectrode mapping and ablation catheter (nMARQ<sup>TM</sup>) and to present acute and mid-term results. Methods: The study included 31 consecutive patients with symptomatic AF (4 had persistent and 27 had paroxysmal AF) who underwent PVI using the nMARQ<sup>TM</sup> catheter. Circular ablation was guided by CT image integrated into fast anatomical map and by intra cardiac echo. Isolation of pulmonary veins was identified using the nMARQ<sup>TM</sup> catheter if it was possible to advance it into the veins, otherwise Lasso catheter was used. Patients were followed up to 20 months. Results: PVI was achieved in 119 (98%) out of 121 pulmonary veins identified, and final PVI was obtained in 30 (97%) out of 31 patients. Lasso catheter was needed for PVI confirmation in 16 (52%) patients. Touch up ablation using standard catheter guided by Lasso catheter was needed in 4 (13%) patients. Pericardial tamponade occurred in 1 patient who was treated with pericardiocentesis. No other major complications were detected. During follow-up (mean 15.9 ± 3.6 months, range 9 - 20 months), 4 (13%) patients had recurrence of atrial tachyarrhythmia. Conclusion: PVI using the novel nMARQ<sup>TM</sup> catheter is safe with good acute and mid-term efficacy. Long term follow up trials are needed. 展开更多
关键词 Atrial Fibrillation Catheter Ablation image integration nMARQ Lasso
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Continuous imaging space in three-dimensional integral imaging 被引量:1
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作者 张雷 杨勇 +3 位作者 王金刚 赵星 方志良 袁小聪 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第5期303-305,共3页
We report an integral imaging method with continuous imaging space. This method simultaneously reconstructs real and virtual images in the virtual mode, with a minimum gap that separates the entire imaging space into ... We report an integral imaging method with continuous imaging space. This method simultaneously reconstructs real and virtual images in the virtual mode, with a minimum gap that separates the entire imaging space into real and virtual space. Experimental results show that the gap is reduced to 45% of that in a conventional integral imaging system with the same parameters. 展开更多
关键词 three-dimensional integral imaging imaging space
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High Optical Magnification Three-Dimensional Integral Imaging of Biological Micro-organism
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作者 孙聃 陆瑶 +1 位作者 郝劲波 王凯歌 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第7期76-79,共4页
A high optical magnification three-dimensional imaging system is proposed using an optic microscope whose ocular (eyepiece) is retained and the structure of the transmission mode is not destroyed. The elemental imag... A high optical magnification three-dimensional imaging system is proposed using an optic microscope whose ocular (eyepiece) is retained and the structure of the transmission mode is not destroyed. The elemental image array is captured through the micro lens array. Due to the front diffuse transmission element, each micro lens sees a slightly different spatial perspective of the scene, and a different independent image is formed in each micro lens channel. Each micro lens channel is imaged by a Fourier lens and captured by a CCD. The design translating the stage in x or y provides no parallax. Compared with the conventional integral imaging of micro-objects, the optical magnification of micro-objects in the proposed system can enhanced remarkably. The principle of the enhancement of the image depth is explained in detail and the experimental results are presented. 展开更多
关键词 High Optical Magnification Three-Dimensional Integral Imaging of Biological Micro-organism
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3D Depth Measurement for Holoscopic 3D Imaging System
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作者 Eman Alazawi Mohammad Rafiq Swash Maysam Abbod 《Journal of Computer and Communications》 2016年第6期49-67,共19页
Holoscopic 3D imaging is a true 3D imaging system mimics fly’s eye technique to acquire a true 3D optical model of a real scene. To reconstruct the 3D image computationally, an efficient implementation of an Auto-Fea... Holoscopic 3D imaging is a true 3D imaging system mimics fly’s eye technique to acquire a true 3D optical model of a real scene. To reconstruct the 3D image computationally, an efficient implementation of an Auto-Feature-Edge (AFE) descriptor algorithm is required that provides an individual feature detector for integration of 3D information to locate objects in the scene. The AFE descriptor plays a key role in simplifying the detection of both edge-based and region-based objects. The detector is based on a Multi-Quantize Adaptive Local Histogram Analysis (MQALHA) algorithm. This is distinctive for each Feature-Edge (FE) block i.e. the large contrast changes (gradients) in FE are easier to localise. The novelty of this work lies in generating a free-noise 3D-Map (3DM) according to a correlation analysis of region contours. This automatically combines the exploitation of the available depth estimation technique with edge-based feature shape recognition technique. The application area consists of two varied domains, which prove the efficiency and robustness of the approach: a) extracting a set of setting feature-edges, for both tracking and mapping process for 3D depthmap estimation, and b) separation and recognition of focus objects in the scene. Experimental results show that the proposed 3DM technique is performed efficiently compared to the state-of-the-art algorithms. 展开更多
关键词 Holoscopic 3D image Edge Detection Auto-Thresholding Depthmap Integral image Local Histogram Analysis Object Recognition and Depth Measurement
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Dynamic Hyperlinker: Innovative Solution for 3D Video Content Search and Retrieval
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作者 Mohammad Rafiq Swash Amar Aggoun +1 位作者 Obaidullah Abdul Fatah Bei Li 《Journal of Computer and Communications》 2016年第6期10-23,共14页
Recently, 3D display technology, and content creation tools have been undergone rigorous development and as a result they have been widely adopted by home and professional users. 3D digital repositories are increasing... Recently, 3D display technology, and content creation tools have been undergone rigorous development and as a result they have been widely adopted by home and professional users. 3D digital repositories are increasing and becoming available ubiquitously. However, searching and visualizing 3D content remains a great challenge. In this paper, we propose and present the development of a novel approach for creating hypervideos, which ease the 3D content search and retrieval. It is called the dynamic hyperlinker for 3D content search and retrieval process. It advances 3D multimedia navigability and searchability by creating dynamic links for selectable and clickable objects in the video scene whilst the user consumes the 3D video clip. The proposed system involves 3D video processing, such as detecting/tracking clickable objects, annotating objects, and metadata engineering including 3D content descriptive protocol. Such system attracts the attention from both home and professional users and more specifically broadcasters and digital content providers. The experiment is conducted on full parallax holoscopic 3D videos “also known as integral images”. 展开更多
关键词 Holoscopic 3D image Integral image 3D Video 3D Display Video Search and Retrieval Hyperlinker Hypervideo
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1D integral imaging based on parallax images' virtual reconstruction 被引量:1
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作者 邓欢 王琼华 +2 位作者 李大海 罗成高 纪超超 《Chinese Optics Letters》 SCIE EI CAS CSCD 2013年第4期16-18,共3页
One-dimensional (ID) integral imaging based on parallax images' virtual reconstruction is proposed. The 1D integral imaging contains parallax images' capture process, parallax images' virtual reconstruction proce... One-dimensional (ID) integral imaging based on parallax images' virtual reconstruction is proposed. The 1D integral imaging contains parallax images' capture process, parallax images' virtual reconstruction process, and ID elemental image array's generation process. A pixel mapping algorithm is deduced to implement the last two processes; a ID elemental image array is generated by the mapping of pixels on the parallax images obtained using a ID camera array. The proposed ID integral imaging can capture the ID elemental image array of a real three-dimensional (3D) scene. 展开更多
关键词 integral imaging based on parallax images DII virtual reconstruction
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3D image reconstruction with a controllable overlapping number of elemental images in computational integral imaging
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作者 Myungjin Cho Donghak Shin 《Chinese Optics Letters》 SCIE EI CAS CSCD 2015年第5期31-34,共4页
In this Letter, we propose a three-dimensional (3D) image reconstruction method with a controllable overlapping number of elemental images in computational integral imaging. The proposed method can control the overl... In this Letter, we propose a three-dimensional (3D) image reconstruction method with a controllable overlapping number of elemental images in computational integral imaging. The proposed method can control the overlap- ping number of pixels coming from the elemental images by using the subpixel distance based on ray optics between a 3D object and an image sensor. The use of a controllable overlapping number enables us to provide an improved 3D image visualization by controlling the inter-pixel interference within the reconstructed pixels. To find the optimal overlapping number, we simulate the pickup and reconstruction processes and utilize the numerical reconstruction results using a peak signal-to-noise ratio (PSNR) metric. To demonstrate the feasibility of our work in optical experiments, we carry out the preliminary experiments and present the results. 展开更多
关键词 over CIIR image reconstruction with a controllable overlapping number of elemental images in computational integral imaging PSNR
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CMOS vision sensor with fully digital image process integrated into low power 1/8-inch chip
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作者 金湘亮 刘志碧 陈杰 《Chinese Optics Letters》 SCIE EI CAS CSCD 2010年第3期282-285,共4页
A digital still camera image processing system on a chip, different from the video camera system, is pre- sented for mobile phone to reduce the power consumption and size. A new color interpolation algorithm is propos... A digital still camera image processing system on a chip, different from the video camera system, is pre- sented for mobile phone to reduce the power consumption and size. A new color interpolation algorithm is proposed to enhance the image quality. The system can also process fixed patten noise (FPN) reduction, color correction, gamma correction, RGB/YUV space transfer, etc. The chip is controlled by sensor regis- ters by inter-integrated circuit (I2C) interface. The voltage for both the front-end analog and the pad cir- cuits is 2.8 V, and the volatge for the image signal processing is 1.8 V. The chip running under the external 13.5-MHz clock has a video data rate of 30 frames/s and the measured power dissipation is about 75 roW. 展开更多
关键词 CMOS vision sensor with fully digital image process integrated into low power 1/8-inch chip RATE RGB
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3D image reconstruction with controllable spatial filtering based on correlation of multiple periodic functions in computational integral imaging
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作者 Jae-Young Jang Myungjin Cho Eun-Soo Kim 《Chinese Optics Letters》 SCIE EI CAS CSCD 2015年第3期22-26,共5页
We propose a novel method of slice image reconstruction with controllable spatial filtering by using the correlation of periodic delta-function arrays (PDFAs) with elemental images in computational integral imaging.... We propose a novel method of slice image reconstruction with controllable spatial filtering by using the correlation of periodic delta-function arrays (PDFAs) with elemental images in computational integral imaging. The multiple PDFAs, whose spatial periods correspond to object's depths with the elemental image array (EIA), can generate a set of spatially filtered EIAs for multiple object depths compared with the conventional method for the depth of a single object. We analyze a controllable spatial filtering effect by the proposed method. To show the feasibility of the proposed method, we carry out preliminary experiments for multiple objects and present the results. 展开更多
关键词 image reconstruction with controllable spatial filtering based on correlation of multiple periodic functions in computational integral imaging EIA
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Distortion correction for the elemental images of integral imaging by introducing the directional diffuser
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作者 于迅博 桑新柱 +5 位作者 高鑫 杨神武 刘博阳 陈铎 颜玢玢 余重秀 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第4期56-60,共5页
A distortion correction method for the elemental images of integral imaging(Ⅱ) by utilizing the directional diffuser is demonstrated. In the traditional Ⅱ, the distortion originating from lens aberration wraps ele... A distortion correction method for the elemental images of integral imaging(Ⅱ) by utilizing the directional diffuser is demonstrated. In the traditional Ⅱ, the distortion originating from lens aberration wraps elemental images and degrades the image quality severely. According to the theoretical analysis and experiments, it can be proved that the farther the three-dimensional image is displayed from the lens array, the more serious the distortion is. To analyze the process of eliminating lens distortion, one lens and its corresponding elemental image are separated from the traditional Ⅱ. By introducing the directional diffuser, the aperture stop of the separated optical system changes from the eye's pupil to the lens. In terms of contrast experiments, the distortion of the improved display system is corrected effectively. In the experiment, when the distance between the reconstructed image and lens array is equal to 120 mm, the largest lens distortion is decreased from 46.6% to 3.3%. 展开更多
关键词 Distortion correction for the elemental images of integral imaging by introducing the directional diffuser
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Cross-talk-free integral imaging three-dimensional display based on a pyramid pinhole array 被引量:4
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作者 Huan Deng Qiong-Hua Wang +2 位作者 Fei Wu Cheng-Gao Luo Yao Liu 《Photonics Research》 SCIE EI 2015年第4期173-176,共4页
We propose a cross-talk-free integral imaging 3D display based on a pyramid pinhole array. The pyramid pinhole array is used to provide a point light source array. Since the generated point light source array is behin... We propose a cross-talk-free integral imaging 3D display based on a pyramid pinhole array. The pyramid pinhole array is used to provide a point light source array. Since the generated point light source array is behind a transmission-type display panel that displays an elemental image array, the pseudoscopic problem can be resolved. By setting the appropriate parameters for the pyramid pinhole array, the cross talk can be eliminated.We experimentally verify the reconstruction of the orthoscopic and cross-talk-free 3D images using the proposed 3D display. 展开更多
关键词 free Cross-talk-free integral imaging three-dimensional display based on a pyramid pinhole array EIA
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Crosstalk-free integral imaging display based on double plano-convex micro-lens array 被引量:2
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作者 王亚洲 王琼华 +2 位作者 李大海 邓欢 罗成高 《Chinese Optics Letters》 SCIE EI CAS CSCD 2013年第6期21-24,共4页
A crosstalk-free integral imaging display consisting of a display panel and double piano-convex micro-lens array is proposed. The double piano-convex micro-lens array includes two micro-lens arrays, A and B. Micro-len... A crosstalk-free integral imaging display consisting of a display panel and double piano-convex micro-lens array is proposed. The double piano-convex micro-lens array includes two micro-lens arrays, A and B. Micro-lens array A is used to eliminate crosstalk by completely reflecting crosstalk lights. Micro-lens array B, located near microqens array A, is used to display three-dimensional images. Computer simulations based on ray-tracing are conducted. Crosstalk-free reconstruction images may be clearly observed from the simulation results. 展开更多
关键词 free Crosstalk-free integral imaging display based on double plano-convex micro-lens array
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End-to-end optimization of a diffractive optical element and aberration correction for integral imaging 被引量:1
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作者 裴翔宇 于迅博 +4 位作者 高鑫 谢馨慧 王越笛 桑新柱 颜玢玢 《Chinese Optics Letters》 SCIE EI CAS CSCD 2022年第12期12-18,共7页
In the integral imaging light field display, the introduction of a diffractive optical element (DOE) can solve the problem of limited depth of field of the traditional lens. However, the strong aberration of the DOE s... In the integral imaging light field display, the introduction of a diffractive optical element (DOE) can solve the problem of limited depth of field of the traditional lens. However, the strong aberration of the DOE significantly reduces the final display quality. Thus, herein, an end-to-end joint optimization method for optimizing DOE and aberration correction is proposed. The DOE model is established using thickness as the variable, and a deep learning network is built to preprocess the composite image loaded on the display panel. The simulation results show that the peak signal to noise ratio value of the optimized image increases by 8 dB, which confirms that the end-to-end joint optimization method can effectively reduce the aberration problem. 展开更多
关键词 integral imaging diffractive optical element end-to-end optimization deep learning network aberration correction
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A lattice measuring method based on integral imaging technology 被引量:1
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作者 张晓东 李锁印 +3 位作者 韩志国 赵琳 梁法国 吴爱华 《Optoelectronics Letters》 EI 2021年第5期313-316,共4页
Aiming at the problem that the lattice feature exceeds the view field of the scanning electron microscope(SEM)measuring system,a new lattice measuring method is proposed based on integral imaging technology.When the s... Aiming at the problem that the lattice feature exceeds the view field of the scanning electron microscope(SEM)measuring system,a new lattice measuring method is proposed based on integral imaging technology.When the system works,the SEM measuring system is equivalent to an integral image acquisition system.Firstly,a lattice measuring method is researched based on integral imaging theory.Secondly,the system parameters are calibrated by the VLSI lattice standard.Finally,the value of the lattice standard to be tested is determined based on the calibration parameters and the lattice measuring algorithm.The experimental results show that,compared with the traditional electron microscope measurement method,the relative error of the measured value of the algorithm is maintained within 0.2%,with the same level of measurement accuracy,but it expands the field of view of the electron microscope measurement system,which is suitable for the measurement of samples under high magnification. 展开更多
关键词 SEM image A lattice measuring method based on integral imaging technology
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