in an inductively-coupled plasma (ICP), the dependence of radio-frequency (rf) tuned self-DC bias of substrate on the discharge parameters such as rf source power, gas pressure, gas now rate and electric connection of...in an inductively-coupled plasma (ICP), the dependence of radio-frequency (rf) tuned self-DC bias of substrate on the discharge parameters such as rf source power, gas pressure, gas now rate and electric connection of upper cover with ground have been studied. Experimental results show that the tuned bias of substrate can be generated and independently controlled in an inductively- coupled plasma without a rf bias source, and the advantage of this technique together with inductively-coupled plasma can find potential applications in plasma-enhanced chemical vapor deposition.展开更多
CO2 decomposition is a very strongly endothermic reaction where very high temperatures are required to thermally dissociate CO2.Radio frequency inductively-coupled plasma enables to selectively activate and dissociate...CO2 decomposition is a very strongly endothermic reaction where very high temperatures are required to thermally dissociate CO2.Radio frequency inductively-coupled plasma enables to selectively activate and dissociate CO2 at room temperature.Tuning the flow rate and the frequency of the radio frequency inductively-coupled plasma gives high yields of CO under mild conditions.Finally the discovery of a plasma catalytic effect has been demonstrated for CO2 dissociation that shows a significant increase of the CO yield by metallic meshes.The metallic meshes become catalysts under exposure to plasma to activate the recombination reaction of atomic O to yield O2,thereby reducing the reaction to convert CO back to CO2.Inductively-coupled hybrid plasma catalysis allows access to study and to utilize high CO2 conversion in a non-thermal plasma regime.This advance offers opportunities to investigate the possibility to use radio frequency inductively-coupled plasma to store superfluous renewable electricity into high-valuable CO in time where the price of renewable electricity is plunging.展开更多
Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP...Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP） source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ＇convex＇ shape and ＇saddle＇ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC q- RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.展开更多
[Objective] The inductively coupled plasma mass spectrometry(ICP-MS)was constructed to determine the contents of lead,cadmium,mercury and arsenic in Archyranthes bidentata Blume.[Method]Under the optimum operation con...[Objective] The inductively coupled plasma mass spectrometry(ICP-MS)was constructed to determine the contents of lead,cadmium,mercury and arsenic in Archyranthes bidentata Blume.[Method]Under the optimum operation condition of ICP-MS,the samples were digested by microwave.The element 114In was taken as an internal standard element to compensate body effect and ICP-MS method was used to determine the contents of lead,cadmium,mercury and arsenic.[Result]For the determined elements,the correlation coefficient(r)of standard curve was over 0.9995 and recovery rate was from 96.7% to 106.4% while RSD was less than 11.2%.The result of determination showed that the heavy metal content in Archyranthes bidentata Blume.beyond standard was serious.[Conclusion]The constructed ICP-MS method with simple operation,rapid response,accuracy and high sensitivity in this experiment could be used for quality control of Chinese medicinal materials by detecting heavy metal contents in different Chinese medicinal materials from original places.展开更多
Large area uniform plasma sources,such as high-density magnetized inductively coupled plasma(ICP)and helicon plasma,have broad applications in industry.A comprehensive comparison of ICP and helicon plasma,excited by a...Large area uniform plasma sources,such as high-density magnetized inductively coupled plasma(ICP)and helicon plasma,have broad applications in industry.A comprehensive comparison of ICP and helicon plasma,excited by a single-loop antenna,is presented in this paper from the perspectives of mode transition,hysteresis behavior,and density distribution.The E-H mode transition in ICP and the E-H-W mode transition in helicon plasma are clearly observed in the experiments.Besides,the considerable variation of hysteresis behavior from inverse hysteresis to normal hysteresis by the influence of the magnetic field is explored.The bi-Maxwellian and Maxwellian electron energy distribution functions in each discharge are used to explain this phenomenon,which is essentially related to the transition from a nonlocal kinetic property to a local kinetic property of electrons.In addition,we notice that the plasma density,in the radial direction,is peaked in the center of the tube in ICP,but a complicated distribution is formed in helicon plasma.In the axial direction,the maximum plasma density is still in the center of the antenna in ICP,whereas the highest plasma density is located downstream,far away from the antenna,in helicon plasma.It is believed that the reflected electrons in the sheath and pre-sheath by the upper metallic endplate and downstream propagated helicon wave will be responsible for this plasma density profile in helicon plasma.Due to the constrained electron motion in the magnetic field,an extremely uniform density distribution will be obtained with an appropriate axial magnetic field in the wave discharge mode.展开更多
In this paper, the double-discharge plasma generated by radio frequency （RF） and direct current （DC） has been investigated. In comparison with their single-frequency counterpart, the interaction between the two ex...In this paper, the double-discharge plasma generated by radio frequency （RF） and direct current （DC） has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.展开更多
Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma （ICP） process was carried out. The microstructure of the polymer sub...Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma （ICP） process was carried out. The microstructure of the polymer substrate surfaces, which were exposed to different kinds of plasma treatment, was identified by scanning electron microscopy（SEM） analysis, peel strength of the copper coating and water surface contact angle. The adhesion of the substrate was largely enhanced by plasma treatment and the copper deposited coating reached a value of 7.68 kgf/m in verifying the adhesion of the copper coating with polymer material. The quality of the line/space 50/50 μm produced in the laboratory was examined by the pressure cooker test and proved to meet the requirement.展开更多
基金This work is supported by the National Natural Science Foundation of China. No.19835030.
文摘in an inductively-coupled plasma (ICP), the dependence of radio-frequency (rf) tuned self-DC bias of substrate on the discharge parameters such as rf source power, gas pressure, gas now rate and electric connection of upper cover with ground have been studied. Experimental results show that the tuned bias of substrate can be generated and independently controlled in an inductively- coupled plasma without a rf bias source, and the advantage of this technique together with inductively-coupled plasma can find potential applications in plasma-enhanced chemical vapor deposition.
基金supported by the National Natural Science Foundation of China(No.51561135013 and No.21603202).
文摘CO2 decomposition is a very strongly endothermic reaction where very high temperatures are required to thermally dissociate CO2.Radio frequency inductively-coupled plasma enables to selectively activate and dissociate CO2 at room temperature.Tuning the flow rate and the frequency of the radio frequency inductively-coupled plasma gives high yields of CO under mild conditions.Finally the discovery of a plasma catalytic effect has been demonstrated for CO2 dissociation that shows a significant increase of the CO yield by metallic meshes.The metallic meshes become catalysts under exposure to plasma to activate the recombination reaction of atomic O to yield O2,thereby reducing the reaction to convert CO back to CO2.Inductively-coupled hybrid plasma catalysis allows access to study and to utilize high CO2 conversion in a non-thermal plasma regime.This advance offers opportunities to investigate the possibility to use radio frequency inductively-coupled plasma to store superfluous renewable electricity into high-valuable CO in time where the price of renewable electricity is plunging.
基金supported by National Natural Science Foundation of China under Grant No. 11475038
文摘Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP） source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ＇convex＇ shape and ＇saddle＇ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC q- RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.
基金Supported by the National Science Foundation for Post-doctoral Scientists of China(20070410616)Excellent Youth Foundation of He'nan Scientific Committee(074100510018)~~
文摘[Objective] The inductively coupled plasma mass spectrometry(ICP-MS)was constructed to determine the contents of lead,cadmium,mercury and arsenic in Archyranthes bidentata Blume.[Method]Under the optimum operation condition of ICP-MS,the samples were digested by microwave.The element 114In was taken as an internal standard element to compensate body effect and ICP-MS method was used to determine the contents of lead,cadmium,mercury and arsenic.[Result]For the determined elements,the correlation coefficient(r)of standard curve was over 0.9995 and recovery rate was from 96.7% to 106.4% while RSD was less than 11.2%.The result of determination showed that the heavy metal content in Archyranthes bidentata Blume.beyond standard was serious.[Conclusion]The constructed ICP-MS method with simple operation,rapid response,accuracy and high sensitivity in this experiment could be used for quality control of Chinese medicinal materials by detecting heavy metal contents in different Chinese medicinal materials from original places.
基金This study was partly supported by National Natural Science Foundation of China(No.11975047)。
文摘Large area uniform plasma sources,such as high-density magnetized inductively coupled plasma(ICP)and helicon plasma,have broad applications in industry.A comprehensive comparison of ICP and helicon plasma,excited by a single-loop antenna,is presented in this paper from the perspectives of mode transition,hysteresis behavior,and density distribution.The E-H mode transition in ICP and the E-H-W mode transition in helicon plasma are clearly observed in the experiments.Besides,the considerable variation of hysteresis behavior from inverse hysteresis to normal hysteresis by the influence of the magnetic field is explored.The bi-Maxwellian and Maxwellian electron energy distribution functions in each discharge are used to explain this phenomenon,which is essentially related to the transition from a nonlocal kinetic property to a local kinetic property of electrons.In addition,we notice that the plasma density,in the radial direction,is peaked in the center of the tube in ICP,but a complicated distribution is formed in helicon plasma.In the axial direction,the maximum plasma density is still in the center of the antenna in ICP,whereas the highest plasma density is located downstream,far away from the antenna,in helicon plasma.It is believed that the reflected electrons in the sheath and pre-sheath by the upper metallic endplate and downstream propagated helicon wave will be responsible for this plasma density profile in helicon plasma.Due to the constrained electron motion in the magnetic field,an extremely uniform density distribution will be obtained with an appropriate axial magnetic field in the wave discharge mode.
基金supported by National Natural Science Foundation of China(No.11475038)
文摘In this paper, the double-discharge plasma generated by radio frequency （RF） and direct current （DC） has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.
文摘Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma （ICP） process was carried out. The microstructure of the polymer substrate surfaces, which were exposed to different kinds of plasma treatment, was identified by scanning electron microscopy（SEM） analysis, peel strength of the copper coating and water surface contact angle. The adhesion of the substrate was largely enhanced by plasma treatment and the copper deposited coating reached a value of 7.68 kgf/m in verifying the adhesion of the copper coating with polymer material. The quality of the line/space 50/50 μm produced in the laboratory was examined by the pressure cooker test and proved to meet the requirement.
