AlN films with preferred c-axis orientation are deposited on Si substrates using the radio frequency(RF) magnetron sputtering method.The post-processing is carried out under the cooling conditions including high vacuu...AlN films with preferred c-axis orientation are deposited on Si substrates using the radio frequency(RF) magnetron sputtering method.The post-processing is carried out under the cooling conditions including high vacuum,low vacuum under deposition gas ambient and low vacuum under dynamic N2 ambient.Structures and morphologies of the films are analyzed by X-ray diffraction(XRD) and atomic force microscopy(AFM).The hardness and Young's modulus are investigated by the nanoindenter.The experimental results indicate that the(100) and(110) peak intensities decrease in the XRD spectra and the root-mean-square of roughness(Rrms) of the film decreases gradually with the increase of the cooling rate.The maximum values of the hardness and Young modulus are obtained by cooling in low vacuum under deposition gas ambient.The reason for orientation variation of the films is explained from the perspective of the Al-N bond formation.展开更多
This paper presents a new 3D edge operator based on Legendre orthogonal moments. This operator can be used to extract the edge of 3D object in any window size,with more accurate surface orientation and more precise su...This paper presents a new 3D edge operator based on Legendre orthogonal moments. This operator can be used to extract the edge of 3D object in any window size,with more accurate surface orientation and more precise surface location. It also has full geometry meaning. Process of calculation is considered in the moment based method.We can greatly speed up the computation by calculating out the masks in advance. We integrate this operator into our rendering of medical image data based on ray casting algorithm. Experimental results show that it is an effective 3D edge operator that is more accurate in position and orientation.展开更多
基金supported by the National Natural Science Foundation of China (No.50972105)Tianjin Natural Science Foundation (Nos.09JCZDJC16500,08JCZDJC22700 and 10SYSYJC27700)
文摘AlN films with preferred c-axis orientation are deposited on Si substrates using the radio frequency(RF) magnetron sputtering method.The post-processing is carried out under the cooling conditions including high vacuum,low vacuum under deposition gas ambient and low vacuum under dynamic N2 ambient.Structures and morphologies of the films are analyzed by X-ray diffraction(XRD) and atomic force microscopy(AFM).The hardness and Young's modulus are investigated by the nanoindenter.The experimental results indicate that the(100) and(110) peak intensities decrease in the XRD spectra and the root-mean-square of roughness(Rrms) of the film decreases gradually with the increase of the cooling rate.The maximum values of the hardness and Young modulus are obtained by cooling in low vacuum under deposition gas ambient.The reason for orientation variation of the films is explained from the perspective of the Al-N bond formation.
基金This work was supported by the National Natural Science Foundation of China(Grant No.60272045)the National Basic Research Program of China(Grant No.2003CB716102).
文摘This paper presents a new 3D edge operator based on Legendre orthogonal moments. This operator can be used to extract the edge of 3D object in any window size,with more accurate surface orientation and more precise surface location. It also has full geometry meaning. Process of calculation is considered in the moment based method.We can greatly speed up the computation by calculating out the masks in advance. We integrate this operator into our rendering of medical image data based on ray casting algorithm. Experimental results show that it is an effective 3D edge operator that is more accurate in position and orientation.
