A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performa...A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems.展开更多
基金Sponsored by the National Natural Science Foundation of China(Grant No.52175491).
文摘A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems.
