The effect of iron trichloride （FeC13） on chemical mechanical polishing （CMP） of Ge2Sb2Te5 （GST） film is inves- tigated in this paper. The polishing rate of GST increases from 38 nm/min to 144 nm/min when the Fe...The effect of iron trichloride （FeC13） on chemical mechanical polishing （CMP） of Ge2Sb2Te5 （GST） film is inves- tigated in this paper. The polishing rate of GST increases from 38 nm/min to 144 nm/min when the FeC13 concentration changes from 0.01 wt% to 0.15 wt%, which is much faster than 20 nm/min for the 1 wt% H2O2-based slurry. This polish- ing rate trends are inversely correlated with the contact angle data of FeCl3-based slurry on the GST film surface. Thus, it is hypothesized that the hydrophilicity of the GST film surface is associated with the polishing rate during CMP. Atomic force microscope （AFM） and optical microscope （OM） are used to characterize the surface quality after CMP. The chemical mechanism is studied by potentiodynamic measurements such as Ecorr and Icorr to analyze chemical reaction between FeCl3 and GST surface. Finally, it is verified that slurry with FeCl3 has no influence on the electrical property of the post-CMP GST film by the resistivity-temperature （RT） tests.展开更多
Alkylation of benzene with propylene was carried out with FeCl_(3)-chloro-butyl-pyridine(FeCl_(3)-[bpc])ionic liquid as catalyst to obtain cumene.Significant improvements in propylene conversion and cumene selectivity...Alkylation of benzene with propylene was carried out with FeCl_(3)-chloro-butyl-pyridine(FeCl_(3)-[bpc])ionic liquid as catalyst to obtain cumene.Significant improvements in propylene conversion and cumene selectivity under mild reaction conditions were attained by modification of the catalyst with HCl.Under 20℃,0.1 MPa,reaction time 5 min,mole ratio of benzene to propylene 10:1 and mass ratio of FeCl_(3)-[bpc]to benzene 1:100,conversion of propylene can increase from 83.60%to 100.00%and selectivity of cumene can increase from 90.86%to 98.47%.If reaction is carried out in following two stages,the result will be very good.At the initial stage of the reaction,alkylation is the main reaction and a higher conversion of propylene is obtained at a lower tem-perature.At the later stage of the reaction,transalkylation is the main reaction and selectivity to cumene can be increased by appropriately raising the reaction temperature.展开更多
基金Project supported by the National Integrate Circuit Research Program of China(Grant Nos.2011ZX02704-002 and 2009ZX02030-001)the Funds fromthe Science and Technology Council of Shanghai,China(Grant Nos.0952nm00200 and 10QB1403600)the Chinese Academy of Sciences Visiting Professorship for Senior International Scientists
文摘The effect of iron trichloride （FeC13） on chemical mechanical polishing （CMP） of Ge2Sb2Te5 （GST） film is inves- tigated in this paper. The polishing rate of GST increases from 38 nm/min to 144 nm/min when the FeC13 concentration changes from 0.01 wt% to 0.15 wt%, which is much faster than 20 nm/min for the 1 wt% H2O2-based slurry. This polish- ing rate trends are inversely correlated with the contact angle data of FeCl3-based slurry on the GST film surface. Thus, it is hypothesized that the hydrophilicity of the GST film surface is associated with the polishing rate during CMP. Atomic force microscope （AFM） and optical microscope （OM） are used to characterize the surface quality after CMP. The chemical mechanism is studied by potentiodynamic measurements such as Ecorr and Icorr to analyze chemical reaction between FeCl3 and GST surface. Finally, it is verified that slurry with FeCl3 has no influence on the electrical property of the post-CMP GST film by the resistivity-temperature （RT） tests.
文摘Alkylation of benzene with propylene was carried out with FeCl_(3)-chloro-butyl-pyridine(FeCl_(3)-[bpc])ionic liquid as catalyst to obtain cumene.Significant improvements in propylene conversion and cumene selectivity under mild reaction conditions were attained by modification of the catalyst with HCl.Under 20℃,0.1 MPa,reaction time 5 min,mole ratio of benzene to propylene 10:1 and mass ratio of FeCl_(3)-[bpc]to benzene 1:100,conversion of propylene can increase from 83.60%to 100.00%and selectivity of cumene can increase from 90.86%to 98.47%.If reaction is carried out in following two stages,the result will be very good.At the initial stage of the reaction,alkylation is the main reaction and a higher conversion of propylene is obtained at a lower tem-perature.At the later stage of the reaction,transalkylation is the main reaction and selectivity to cumene can be increased by appropriately raising the reaction temperature.
