Multilayer dielectric gratings(MLDGs)are crucial for pulse compression in picosecond-petawatt laser systems.Bulged nodular defects,embedded in coating stacks during multilayer deposition,influence the lithographic pro...Multilayer dielectric gratings(MLDGs)are crucial for pulse compression in picosecond-petawatt laser systems.Bulged nodular defects,embedded in coating stacks during multilayer deposition,influence the lithographic process and performance of the final MLDG products.In this study,the integration of nanosecond laser conditioning(NLC)into different manufacturing stages of MLDGs was proposed for the first time on multilayer dielectric films(MLDFs)and final grating products to improve laser-induced damage performance.The results suggest that the remaining nodular ejection pits introduced by the two protocols exhibit a high nanosecond laser damage resistance,which remains stable when the irradiated laser fluence is more than twice the nanosecond-laser-induced damage threshold(nanosecond-LIDT)of the unconditioned MLDGs.Furthermore,the picosecond-LIDT of the nodular ej ection pit conditioned on the MLDFs was approximately 40%higher than that of the nodular defects,and the loss of the grating structure surrounding the nodular defects was avoided.Therefore,NLC is an effective strategy for improving the laser damage resistance of MLDGs.展开更多
The conditioning of grinding tools is one of the most important factors for achieving an optimal grinding process. It influences the grinding forces and temperatures and, therefore, the achievable material removal rat...The conditioning of grinding tools is one of the most important factors for achieving an optimal grinding process. It influences the grinding forces and temperatures and, therefore, the achievable material removal rate, dimensional accuracy and the surface integrity of the workpiece. Furthermore, the roundness, profile accuracy and the wear of the grinding tools are strongly influenced by the conditioning process. The conditioning process should be matched to the abrasive type and the bonding of the grinding tool. Laser conditioning is a promising unconventional and non-contact method, which is able to condition all kinds of abrasives and bonding types. The main advantages of this novel method are no tool wear, good repeatability and controllability, high precision and a relatively short process time. Additionally, using this method, grinding tools can be micro-structured. This paper reviews the literature on the laser conditioning of grinding tools, covering the associated setups, wheel conditioning and structuring mechanisms, and experimental results. It also discusses the technical barriers that have to be overcome before laser conditioning can be fully integrated into manufacturing.展开更多
基金supported by the National Key R&D Program of China(Grant No.2018YFE0115900)the Key Foreign Cooperation Projects of Bureau of the International Cooperation of Chinese Academy of Sciences(Grant No.181231KYSB20210001)the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDA25020314).
文摘Multilayer dielectric gratings(MLDGs)are crucial for pulse compression in picosecond-petawatt laser systems.Bulged nodular defects,embedded in coating stacks during multilayer deposition,influence the lithographic process and performance of the final MLDG products.In this study,the integration of nanosecond laser conditioning(NLC)into different manufacturing stages of MLDGs was proposed for the first time on multilayer dielectric films(MLDFs)and final grating products to improve laser-induced damage performance.The results suggest that the remaining nodular ejection pits introduced by the two protocols exhibit a high nanosecond laser damage resistance,which remains stable when the irradiated laser fluence is more than twice the nanosecond-laser-induced damage threshold(nanosecond-LIDT)of the unconditioned MLDGs.Furthermore,the picosecond-LIDT of the nodular ej ection pit conditioned on the MLDFs was approximately 40%higher than that of the nodular defects,and the loss of the grating structure surrounding the nodular defects was avoided.Therefore,NLC is an effective strategy for improving the laser damage resistance of MLDGs.
文摘The conditioning of grinding tools is one of the most important factors for achieving an optimal grinding process. It influences the grinding forces and temperatures and, therefore, the achievable material removal rate, dimensional accuracy and the surface integrity of the workpiece. Furthermore, the roundness, profile accuracy and the wear of the grinding tools are strongly influenced by the conditioning process. The conditioning process should be matched to the abrasive type and the bonding of the grinding tool. Laser conditioning is a promising unconventional and non-contact method, which is able to condition all kinds of abrasives and bonding types. The main advantages of this novel method are no tool wear, good repeatability and controllability, high precision and a relatively short process time. Additionally, using this method, grinding tools can be micro-structured. This paper reviews the literature on the laser conditioning of grinding tools, covering the associated setups, wheel conditioning and structuring mechanisms, and experimental results. It also discusses the technical barriers that have to be overcome before laser conditioning can be fully integrated into manufacturing.