Over millions of years of natural evolution,organisms have developed nearly perfect structures and functions.The self-fabrication of organisms serves as a valuable source of inspiration for designing the next-generati...Over millions of years of natural evolution,organisms have developed nearly perfect structures and functions.The self-fabrication of organisms serves as a valuable source of inspiration for designing the next-generation of structural materials,and is driving the future paradigm shift of modern materials science and engineering.However,the complex structures and multifunctional integrated optimization of organisms far exceed the capability of artificial design and fabrication technology,and new manufacturing methods are urgently needed to achieve efficient reproduction of biological functions.As one of the most valuable advanced manufacturing technologies of the 21st century,laser processing technology provides an efficient solution to the critical challenges of bionic manufacturing.This review outlines the processing principles,manufacturing strategies,potential applications,challenges,and future development outlook of laser processing in bionic manufacturing domains.Three primary manufacturing strategies for laser-based bionic manufacturing are elucidated:subtractive manufacturing,equivalent manufacturing,and additive manufacturing.The progress and trends in bionic subtractive manufacturing applied to micro/nano structural surfaces,bionic equivalent manufacturing for surface strengthening,and bionic additive manufacturing aiming to achieve bionic spatial structures,are reported.Finally,the key problems faced by laser-based bionic manufacturing,its limitations,and the development trends of its existing technologies are discussed.展开更多
Sn_(1−x)Er_(x)O_(2)(x=0%,8%,16%,24%)micro/nanofibers were prepared by electrospinning combined with heat treatment using erbium nitrate,stannous chloride and polyvinylpyrrolidone(PVP)as raw materials.The target produc...Sn_(1−x)Er_(x)O_(2)(x=0%,8%,16%,24%)micro/nanofibers were prepared by electrospinning combined with heat treatment using erbium nitrate,stannous chloride and polyvinylpyrrolidone(PVP)as raw materials.The target products were characterized by thermogravimetric analyzer,X-ray diffrotometer,fourier transform infrared spectrometer,scanning electron microscope,spectrophotometer and infrared emissivity tester,and the effects of Er^(3+)doping on its infrared and laser emissivity were studied.At the same time,the Sn_(1−x)Er_(x)O_(2)(x=0%,16%)doping models were constructed based on the first principles of density functional theory,and the related optoelectronic properties such as their energy band structure,density of states,reflectivity and dielectric constant were analyzed,and further explained the mechanism of Er^(3+)doping on SnO_(2)infrared emissivity and laser absorption from the point of electronic structure.The results showed that after calcination at 600℃,single rutile type SnO_(2)was formed,and the crystal structure was not changed by doping Er^(3+).The calcined products showed good fiber morphology,and the average fiber diameter was 402 nm.The infrared emissivity and resistivity of the samples both decreased first and then increased with the increase of Er^(3+)doping amount.When x=16%,the infrared emis-sivity of the sample was at least 0.71;and Er^(3+)doping can effectively reduce the reflectivity of SnO_(2)at 1.06μm and 1.55μm,when x=16%,its reflectivity at 1.06μm and 1.55μm are 50.5%and 40%,respectively,when x=24%,the reflectivity at 1.06μm and 1.55μm wavelengths are 47.3%and 42.1%,respectively.At the same time,the change of carrier concentration and electron transition before and after Er^(3+)doping were described by first-principle calculation,and the regulation mechanism of infrared emissivity and laser reflectivity was explained.This study provides a certain experimental and theoretical basis for the development of a single-type,light-weight and easily prepared infrared and laser compatible-stealth material.展开更多
Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable proc...Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.展开更多
At present, the most common micro/nano-scale fabri ca tion processes include the plane silicon process based on IC technology, stereo silicon process, LIGA, quasi-LIGA based on near ultra violet deep lithography, MEMS...At present, the most common micro/nano-scale fabri ca tion processes include the plane silicon process based on IC technology, stereo silicon process, LIGA, quasi-LIGA based on near ultra violet deep lithography, MEMS, energy beam etching and micro/nano-machining, etc. A common problem for t hese processes is the difficulty to fabricate arbitrary form for 3-dimensional micro/nano-parts, devices or mechanisms. To develop advanced MEMS manufacturin g technology, and to achieve fabrication of true 3-dimensional parts, devices or mechanisms, this paper proposes a nanofabrication technology for rapid proto typing of 3-dimensional parts, using plasma chemical vapor deposition (PCVD). This process can be describes as follows: A laser beam is produced by a low power, quasi molecule laser. It enters the vac uum chamber through a window, and is focused on with the substrate surface. A ga s in the chamber is ionized by the laser beam to produce PCVD on the substrate s urface, and forms a particle of the size of Ф100 nm (its thickness is about 100 nm). When the laser beam moves along X-axis, many particles form a line. Then the laser beam moves one step in Y-axis to form a new line. A plane is complete d by many lines. Then the substrate moves in Z-axis to form new plane. Eventu ally, many planes form a 3-dimensional component. Using available CAD/CAM softw are with this process, rapid prototyping of complex components can be achieved. A nanometer precision linear motor, such as that described in Chinese national p atent (patent No. ZL 98 2 16753.9), can be used to obtain the nanometer precisio n movements in the process. The process does not require mask, can be used for v arious rapid prototyping materials, to obtain high fabrication precision (its sc ale precision is 15 nm), and larger ratio of height to width of micro/nano-stru cture. It can find widespread applications in the fabrication of micro-mechani sm, trimming IC, and fabricating minilens, etc.展开更多
We put forward a protocolcombining laser treatment and acid etching to obtain multiscale micro/nano-texture surfaces of titanium alloy implant.Firstly,the operationalparameters of the laser were optimized to obtain an...We put forward a protocolcombining laser treatment and acid etching to obtain multiscale micro/nano-texture surfaces of titanium alloy implant.Firstly,the operationalparameters of the laser were optimized to obtain an optimum current.Secondly,the laser with the optimum operationalparameters was used to fabricate micro pits.Thirdly,multiple acid etching was used to clean the clinkers of micro pits and generate submicron and nanoscale structures.Finally,the bioactivity of the samples was measured in a simulated body fluid.The results showed that the micropits with a diameter of 150 μm and depth of 50 μm were built successfully with the optimized working current of 13 A.In addition,submicron and nanoscale structures,with 0.5-2 μm microgrooves and 10-20 nm nanopits,were superimposed on micro pits surface by multiple acid etching.There was thick and dense HA coating only observed on the multiscale micro/nano-textured surface compared with polished and micro-textured surface.This indicated that the multiscale micro/nano-texture surface showed better ability toward HA formation,which increased the bioactivity of implants.展开更多
Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface...Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface micro/nano structuring.Increasing research eforts in this feld have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures.In this paper,we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation.From an overview perspective,we frstly summarize the diferent roles that plasma plumes,from pulsed laser ablation of solids,play in diferent laser processing approaches.Then,the distinctive in-situ deposition process within surface micro/nano structuring is highlighted.Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures,through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase.The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches,adding a new dimension and more fexibility in controlling the fabrication of functional surface micro/nano structures.展开更多
We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydro...We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydrodynamic microfluidic motion of the melted layer that gives rise to the structures formation.The pulse train used,in particular,consists of a previously unexplored spatiotemporal intensity combination including one pulse with Gaussian and another with periodically modulated intensity distribution created by Direct Laser Interference Patterning(DLIP).The interpulse delay is appropriately chosen to reveal the contribution of the microfluidic melt flow,while it is found that the sequence of the Gaussian and DLIP pulses remarkably influences the surface profile attained.Results also demonstrate that both the spatial intensity of the double pulse and the effective number of pulses per irradiation spot can further be modulated to control the formation of complex surface morphologies.The underlying physical processes behind the complex patterns’generation were interpreted in terms of a multiscale model combining electron excitation with melt hydrodynamics.We believe that this work can constitute a significant step forward towards producing laser induced surface structures on demand by tailoring the melt microfluidic phenomena.展开更多
基金supported by the National Natural Science Foundation of China (Nos. 52235006 and 52025053)the National Key Research and Development Program of China (No. 2022YFB4600500)
文摘Over millions of years of natural evolution,organisms have developed nearly perfect structures and functions.The self-fabrication of organisms serves as a valuable source of inspiration for designing the next-generation of structural materials,and is driving the future paradigm shift of modern materials science and engineering.However,the complex structures and multifunctional integrated optimization of organisms far exceed the capability of artificial design and fabrication technology,and new manufacturing methods are urgently needed to achieve efficient reproduction of biological functions.As one of the most valuable advanced manufacturing technologies of the 21st century,laser processing technology provides an efficient solution to the critical challenges of bionic manufacturing.This review outlines the processing principles,manufacturing strategies,potential applications,challenges,and future development outlook of laser processing in bionic manufacturing domains.Three primary manufacturing strategies for laser-based bionic manufacturing are elucidated:subtractive manufacturing,equivalent manufacturing,and additive manufacturing.The progress and trends in bionic subtractive manufacturing applied to micro/nano structural surfaces,bionic equivalent manufacturing for surface strengthening,and bionic additive manufacturing aiming to achieve bionic spatial structures,are reported.Finally,the key problems faced by laser-based bionic manufacturing,its limitations,and the development trends of its existing technologies are discussed.
基金supported by the Key Research and Development Program of Hebei Province(No.21351501D)A Provincial and Ministerial Scientific Research Project(LJ20212C031165)Basic Frontier Science and Technology Innovation Project of Army Engineering University of PLA(KYSZJQZL2210)。
文摘Sn_(1−x)Er_(x)O_(2)(x=0%,8%,16%,24%)micro/nanofibers were prepared by electrospinning combined with heat treatment using erbium nitrate,stannous chloride and polyvinylpyrrolidone(PVP)as raw materials.The target products were characterized by thermogravimetric analyzer,X-ray diffrotometer,fourier transform infrared spectrometer,scanning electron microscope,spectrophotometer and infrared emissivity tester,and the effects of Er^(3+)doping on its infrared and laser emissivity were studied.At the same time,the Sn_(1−x)Er_(x)O_(2)(x=0%,16%)doping models were constructed based on the first principles of density functional theory,and the related optoelectronic properties such as their energy band structure,density of states,reflectivity and dielectric constant were analyzed,and further explained the mechanism of Er^(3+)doping on SnO_(2)infrared emissivity and laser absorption from the point of electronic structure.The results showed that after calcination at 600℃,single rutile type SnO_(2)was formed,and the crystal structure was not changed by doping Er^(3+).The calcined products showed good fiber morphology,and the average fiber diameter was 402 nm.The infrared emissivity and resistivity of the samples both decreased first and then increased with the increase of Er^(3+)doping amount.When x=16%,the infrared emis-sivity of the sample was at least 0.71;and Er^(3+)doping can effectively reduce the reflectivity of SnO_(2)at 1.06μm and 1.55μm,when x=16%,its reflectivity at 1.06μm and 1.55μm are 50.5%and 40%,respectively,when x=24%,the reflectivity at 1.06μm and 1.55μm wavelengths are 47.3%and 42.1%,respectively.At the same time,the change of carrier concentration and electron transition before and after Er^(3+)doping were described by first-principle calculation,and the regulation mechanism of infrared emissivity and laser reflectivity was explained.This study provides a certain experimental and theoretical basis for the development of a single-type,light-weight and easily prepared infrared and laser compatible-stealth material.
基金supported by the National Natural Science Foundation of China(No.52075289)the Tsinghua-Jiangyin Innovation Special Fund(TJISF,No.2023JYTH0104).
文摘Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.
文摘At present, the most common micro/nano-scale fabri ca tion processes include the plane silicon process based on IC technology, stereo silicon process, LIGA, quasi-LIGA based on near ultra violet deep lithography, MEMS, energy beam etching and micro/nano-machining, etc. A common problem for t hese processes is the difficulty to fabricate arbitrary form for 3-dimensional micro/nano-parts, devices or mechanisms. To develop advanced MEMS manufacturin g technology, and to achieve fabrication of true 3-dimensional parts, devices or mechanisms, this paper proposes a nanofabrication technology for rapid proto typing of 3-dimensional parts, using plasma chemical vapor deposition (PCVD). This process can be describes as follows: A laser beam is produced by a low power, quasi molecule laser. It enters the vac uum chamber through a window, and is focused on with the substrate surface. A ga s in the chamber is ionized by the laser beam to produce PCVD on the substrate s urface, and forms a particle of the size of Ф100 nm (its thickness is about 100 nm). When the laser beam moves along X-axis, many particles form a line. Then the laser beam moves one step in Y-axis to form a new line. A plane is complete d by many lines. Then the substrate moves in Z-axis to form new plane. Eventu ally, many planes form a 3-dimensional component. Using available CAD/CAM softw are with this process, rapid prototyping of complex components can be achieved. A nanometer precision linear motor, such as that described in Chinese national p atent (patent No. ZL 98 2 16753.9), can be used to obtain the nanometer precisio n movements in the process. The process does not require mask, can be used for v arious rapid prototyping materials, to obtain high fabrication precision (its sc ale precision is 15 nm), and larger ratio of height to width of micro/nano-stru cture. It can find widespread applications in the fabrication of micro-mechani sm, trimming IC, and fabricating minilens, etc.
基金Funded by the National Natural Science Foundation of China(51175306 and 51575320)the Tai Shan Scholar Foundation(TS20130922)the Fundamental Research Funds for the Central Universities(2014JC020)
文摘We put forward a protocolcombining laser treatment and acid etching to obtain multiscale micro/nano-texture surfaces of titanium alloy implant.Firstly,the operationalparameters of the laser were optimized to obtain an optimum current.Secondly,the laser with the optimum operationalparameters was used to fabricate micro pits.Thirdly,multiple acid etching was used to clean the clinkers of micro pits and generate submicron and nanoscale structures.Finally,the bioactivity of the samples was measured in a simulated body fluid.The results showed that the micropits with a diameter of 150 μm and depth of 50 μm were built successfully with the optimized working current of 13 A.In addition,submicron and nanoscale structures,with 0.5-2 μm microgrooves and 10-20 nm nanopits,were superimposed on micro pits surface by multiple acid etching.There was thick and dense HA coating only observed on the multiscale micro/nano-textured surface compared with polished and micro-textured surface.This indicated that the multiscale micro/nano-texture surface showed better ability toward HA formation,which increased the bioactivity of implants.
基金support by the National Key Research and Development Program of China(No.2017YFB1104300)the National Natural Science Foundation of China(Nos.51575309 and 51210009)the Tsinghua University Initiative Scientifc Research Program(No.2018Z05JZY009).
文摘Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface micro/nano structuring.Increasing research eforts in this feld have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures.In this paper,we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation.From an overview perspective,we frstly summarize the diferent roles that plasma plumes,from pulsed laser ablation of solids,play in diferent laser processing approaches.Then,the distinctive in-situ deposition process within surface micro/nano structuring is highlighted.Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures,through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase.The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches,adding a new dimension and more fexibility in controlling the fabrication of functional surface micro/nano structures.
基金support by the European Union’s Horizon 2020 research and innovation program through the project BioCombs4Nanofibres(Grant Agreement No.862016)。
文摘We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydrodynamic microfluidic motion of the melted layer that gives rise to the structures formation.The pulse train used,in particular,consists of a previously unexplored spatiotemporal intensity combination including one pulse with Gaussian and another with periodically modulated intensity distribution created by Direct Laser Interference Patterning(DLIP).The interpulse delay is appropriately chosen to reveal the contribution of the microfluidic melt flow,while it is found that the sequence of the Gaussian and DLIP pulses remarkably influences the surface profile attained.Results also demonstrate that both the spatial intensity of the double pulse and the effective number of pulses per irradiation spot can further be modulated to control the formation of complex surface morphologies.The underlying physical processes behind the complex patterns’generation were interpreted in terms of a multiscale model combining electron excitation with melt hydrodynamics.We believe that this work can constitute a significant step forward towards producing laser induced surface structures on demand by tailoring the melt microfluidic phenomena.
