The effects of the modification of electrode/ceramic interfaces through a chemical solution deposition-derived PbO buffer layer on the fatigue endurance of lead zirconate titanate(PZT) thin films were investigated.T...The effects of the modification of electrode/ceramic interfaces through a chemical solution deposition-derived PbO buffer layer on the fatigue endurance of lead zirconate titanate(PZT) thin films were investigated.The grain size and the surface roughness of the PZT films increased through PbO interfacial modification.Moreover,the PZT films with PbO interfacial modification had a better crystallographic structure and no evident secondary phases were observed.While the remanent polarization and dielectric constant were reduced,the fatigue endurance was improved.Based on the results,the mechanism for the fatigue endurance improvement was discussed.展开更多
The behaviors of lead zirconate titanate (PZT) deposited as the dielectric for high-voltage devices are investigated experimentally and theoretically. The devices demonstrate not only high breakdown voltages above 3...The behaviors of lead zirconate titanate (PZT) deposited as the dielectric for high-voltage devices are investigated experimentally and theoretically. The devices demonstrate not only high breakdown voltages above 350 V, but also excellent memory behaviors. A drain current–gate voltage (ID-VG) memory window of about 2.2 V is obtained at the sweep voltages of ±10 V for the 350-V laterally diffused metal oxide semiconductor (LDMOS). The retention time of about 270 s is recorded for the LDMOS through a controlled ID-VG measurement. The LDMOS with memory behaviors has potential to be applied in future power conversion circuits to boost the performance of the energy conversion system.展开更多
In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate (LZT) film are studied by X-ray diffraction (XRD) and scanning eletron microscope (SEM). The ratio of PbTi...In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate (LZT) film are studied by X-ray diffraction (XRD) and scanning eletron microscope (SEM). The ratio of PbTiOJPbZrO3 in LZT is 53/47, which is around morphotropic phase boundary (MPB). LZT film is composed of cubic particles with the average size of 5 ~ma. Density of thin film is figured out through the datum measured in experiments. The displacement model used to analyze the driving ability of bimorph is set up, and the effect of elastic intermediate layer is taken into account. Piezoelectric coefficient of LZT film is worked out by using the displacement model. Experiments of driving ability show that deformation of bimorph free end does not increase with times of crystal growth processes and the maximum deformation is obtained after two times crystal growth processes. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.展开更多
A new hybrid piezoelectric ultrasonic motor, which consists of one rotor and two stators, was proposed in this paper. In order to match the resonance frequencies of longitudinal vibration and torsional vibration excit...A new hybrid piezoelectric ultrasonic motor, which consists of one rotor and two stators, was proposed in this paper. In order to match the resonance frequencies of longitudinal vibration and torsional vibration excited in the stators, a symmetrical structure was adopted in design of the motor. A so-called mass matching method, namely adding two rings to the outside circumference of the two stators respectively, was used to adjust the resonance frequencies of these two vibrations. A finite element model was developed using ANSYS software for the purpose of analyzing the resonance frequencies of longitudinal vibration and torsional vibration as well as the function of the adjusting rings. The results show that the resonance frequency of torsional vibration varies with the position of the ring, but the resonance frequency of longitudinal vibration changes little. By means of adjusting the mass and the position of the rings, the first order resonance frequency of longitudinal vibration is coincided with that of torsional vibration and the value is 20.75kHz. An experimental prototype motor was fabricated according to the analytical results and its performance is in agreement with the theoretical predictions. The speed of motor reaches the maximum 92r/min at the working frequency 19.0kHz.展开更多
To improve the efficiency of MEMS piezoelectric vibration energy harvesters(PVEHs), the bulk lead zirconate titanate(PZT) has been used to substitute the thin film PZT for the higher mechanical-electrical coupling coe...To improve the efficiency of MEMS piezoelectric vibration energy harvesters(PVEHs), the bulk lead zirconate titanate(PZT) has been used to substitute the thin film PZT for the higher mechanical-electrical coupling coefficients. The expensive equipment of micromachining set a high entry barrier on the research of PVEHs with high efficiency. To solve this issue, this paper developed an efficient PVEH with bulk PZT using common precision machining, whose dimensions and electrical outputs are comparable to the MEMS devices. After numerically analyzing the effects of the length ratio of the proof mass to the harvester on the output power, a compact PVEH consisting of a cantilevered uni-morph and a tungsten proof mass was designed. Simulations show that the mechanical damping ratio and the thickness have little effects on the optimized length ratio. By using a uni-morph with the copper structural layer of about 80-90μm and the bulk PZT-5 H layer of 139μm, a low-cost harvester prototype was assembled. The key parameters of the prototype were experimentally identified and compared with the theoretical predictions. Under the harmonic base excitation of 0.4 g(where g = 9.8 m/s^2) at 160 Hz, the maximum output power of the prototype is about 76.7μW, with the normalized power density of about 3.35 mW/cm^3/g^2. Under base excitation of 0.4 g at 159 Hz, the prototype charged a 680μF capacitor from 0 to 4.84 V in about 154 seconds.展开更多
The relationship between composition and the electric mechanical properties for La2O3-doped lead niobium stibium zirconate titanate(La2O3-doped PNSZT) piezoelectric ceramics,in which there are tetragonal and rhombohed...The relationship between composition and the electric mechanical properties for La2O3-doped lead niobium stibium zirconate titanate(La2O3-doped PNSZT) piezoelectric ceramics,in which there are tetragonal and rhombohedral coexistent phases, was studied. A series of piezoelectric ceramics with good properties was obtained, having dielectric constants (ε= 1500 ~ 2500), plane electromechanical coupling factor(Kp = 0.45 ~ 0.65), mechanical quality factor( Qm = 500 ~ 1600). These materials are used for making ultrasonic sensor and filter, and marine acoustic launching and receiving device, and so on. It has been explored that the influence of composition on the lattice constant and phase composition of La2O3-doped PNSZT piezoelectric ceramics by XRD(X-ray diffraction) . The character of dielectric constant changing of La2O3-doped PNSZT piezoelectric ceramics before polarization and after polarization was studied. The affecting mechanism about composition on the electric machine properties of phase coexistent La2O3-doped PNSZT piezoelectric ceramics was analyzed and discussed.展开更多
The effect of La^(3+)and Nd^(3+)on piezoelectric,dielectric and ferroelectric properties of PZT(Pb(Zr_(0.53)Ti_(0.47))O_(3))was studied.The powders were prepared by“wet-chemical”route followed by calcination at 800...The effect of La^(3+)and Nd^(3+)on piezoelectric,dielectric and ferroelectric properties of PZT(Pb(Zr_(0.53)Ti_(0.47))O_(3))was studied.The powders were prepared by“wet-chemical”route followed by calcination at 800℃for 4 h.XRD analysis of the calcined powders confirms the tetragonal phase in the undoped PZT,which gradually decreases with the dopant concentration and the appearance of rhombohedral phase simultaneously.SEM study of sintered pellets reveals the decrease in grain size with the increase in dopant concentration beyond 0.02 mol Nd^(3+)and 0.03 mol La^(3+)respectively.The piezoelectric constant(d_(33))and dielectric properties were maximum for 0.02 mol Nd^(3+)and 0.03 mol La^(3+)respectively.The remnant polarization of La^(3+)-doped sample was higher than Nd^(3+)-doped sample,and the sample with combined dopants shows intermediate remnant polarization(P_(r)).Based on the above study,it is concluded that La^(3+)is more effective than Nd^(3+),including in a mixture of La^(3+)and Nd^(3+)dopants.展开更多
基金support of Beijing Nova Program of China (2007B025)the National Natural Science Foundation of China (10979013)+1 种基金the Innovative Research Team in Universities (IRT 0509)the Major State Basic Research Development Program of China (No.2009CB623306)
文摘The effects of the modification of electrode/ceramic interfaces through a chemical solution deposition-derived PbO buffer layer on the fatigue endurance of lead zirconate titanate(PZT) thin films were investigated.The grain size and the surface roughness of the PZT films increased through PbO interfacial modification.Moreover,the PZT films with PbO interfacial modification had a better crystallographic structure and no evident secondary phases were observed.While the remanent polarization and dielectric constant were reduced,the fatigue endurance was improved.Based on the results,the mechanism for the fatigue endurance improvement was discussed.
基金the National Basic Research Program of China(Grant No.50772019)the National Natural Science Foundation of China(Grant No.61204084)
文摘The behaviors of lead zirconate titanate (PZT) deposited as the dielectric for high-voltage devices are investigated experimentally and theoretically. The devices demonstrate not only high breakdown voltages above 350 V, but also excellent memory behaviors. A drain current–gate voltage (ID-VG) memory window of about 2.2 V is obtained at the sweep voltages of ±10 V for the 350-V laterally diffused metal oxide semiconductor (LDMOS). The retention time of about 270 s is recorded for the LDMOS through a controlled ID-VG measurement. The LDMOS with memory behaviors has potential to be applied in future power conversion circuits to boost the performance of the energy conversion system.
基金This project is supported by National Natural Science Foundation of China (No.50675025)Scientific Research Foundation of Ministry of Education,Dalian City for the Returned Overseas Chinese ScholarsDoctoral Startup Fund of Liaoning Province of China (No.20051080).
文摘In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate (LZT) film are studied by X-ray diffraction (XRD) and scanning eletron microscope (SEM). The ratio of PbTiOJPbZrO3 in LZT is 53/47, which is around morphotropic phase boundary (MPB). LZT film is composed of cubic particles with the average size of 5 ~ma. Density of thin film is figured out through the datum measured in experiments. The displacement model used to analyze the driving ability of bimorph is set up, and the effect of elastic intermediate layer is taken into account. Piezoelectric coefficient of LZT film is worked out by using the displacement model. Experiments of driving ability show that deformation of bimorph free end does not increase with times of crystal growth processes and the maximum deformation is obtained after two times crystal growth processes. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.
文摘A new hybrid piezoelectric ultrasonic motor, which consists of one rotor and two stators, was proposed in this paper. In order to match the resonance frequencies of longitudinal vibration and torsional vibration excited in the stators, a symmetrical structure was adopted in design of the motor. A so-called mass matching method, namely adding two rings to the outside circumference of the two stators respectively, was used to adjust the resonance frequencies of these two vibrations. A finite element model was developed using ANSYS software for the purpose of analyzing the resonance frequencies of longitudinal vibration and torsional vibration as well as the function of the adjusting rings. The results show that the resonance frequency of torsional vibration varies with the position of the ring, but the resonance frequency of longitudinal vibration changes little. By means of adjusting the mass and the position of the rings, the first order resonance frequency of longitudinal vibration is coincided with that of torsional vibration and the value is 20.75kHz. An experimental prototype motor was fabricated according to the analytical results and its performance is in agreement with the theoretical predictions. The speed of motor reaches the maximum 92r/min at the working frequency 19.0kHz.
基金financially supported by the National Natural Science Foundation of China(Nos.61774026 and61376116)
文摘To improve the efficiency of MEMS piezoelectric vibration energy harvesters(PVEHs), the bulk lead zirconate titanate(PZT) has been used to substitute the thin film PZT for the higher mechanical-electrical coupling coefficients. The expensive equipment of micromachining set a high entry barrier on the research of PVEHs with high efficiency. To solve this issue, this paper developed an efficient PVEH with bulk PZT using common precision machining, whose dimensions and electrical outputs are comparable to the MEMS devices. After numerically analyzing the effects of the length ratio of the proof mass to the harvester on the output power, a compact PVEH consisting of a cantilevered uni-morph and a tungsten proof mass was designed. Simulations show that the mechanical damping ratio and the thickness have little effects on the optimized length ratio. By using a uni-morph with the copper structural layer of about 80-90μm and the bulk PZT-5 H layer of 139μm, a low-cost harvester prototype was assembled. The key parameters of the prototype were experimentally identified and compared with the theoretical predictions. Under the harmonic base excitation of 0.4 g(where g = 9.8 m/s^2) at 160 Hz, the maximum output power of the prototype is about 76.7μW, with the normalized power density of about 3.35 mW/cm^3/g^2. Under base excitation of 0.4 g at 159 Hz, the prototype charged a 680μF capacitor from 0 to 4.84 V in about 154 seconds.
文摘The relationship between composition and the electric mechanical properties for La2O3-doped lead niobium stibium zirconate titanate(La2O3-doped PNSZT) piezoelectric ceramics,in which there are tetragonal and rhombohedral coexistent phases, was studied. A series of piezoelectric ceramics with good properties was obtained, having dielectric constants (ε= 1500 ~ 2500), plane electromechanical coupling factor(Kp = 0.45 ~ 0.65), mechanical quality factor( Qm = 500 ~ 1600). These materials are used for making ultrasonic sensor and filter, and marine acoustic launching and receiving device, and so on. It has been explored that the influence of composition on the lattice constant and phase composition of La2O3-doped PNSZT piezoelectric ceramics by XRD(X-ray diffraction) . The character of dielectric constant changing of La2O3-doped PNSZT piezoelectric ceramics before polarization and after polarization was studied. The affecting mechanism about composition on the electric machine properties of phase coexistent La2O3-doped PNSZT piezoelectric ceramics was analyzed and discussed.
文摘The effect of La^(3+)and Nd^(3+)on piezoelectric,dielectric and ferroelectric properties of PZT(Pb(Zr_(0.53)Ti_(0.47))O_(3))was studied.The powders were prepared by“wet-chemical”route followed by calcination at 800℃for 4 h.XRD analysis of the calcined powders confirms the tetragonal phase in the undoped PZT,which gradually decreases with the dopant concentration and the appearance of rhombohedral phase simultaneously.SEM study of sintered pellets reveals the decrease in grain size with the increase in dopant concentration beyond 0.02 mol Nd^(3+)and 0.03 mol La^(3+)respectively.The piezoelectric constant(d_(33))and dielectric properties were maximum for 0.02 mol Nd^(3+)and 0.03 mol La^(3+)respectively.The remnant polarization of La^(3+)-doped sample was higher than Nd^(3+)-doped sample,and the sample with combined dopants shows intermediate remnant polarization(P_(r)).Based on the above study,it is concluded that La^(3+)is more effective than Nd^(3+),including in a mixture of La^(3+)and Nd^(3+)dopants.