Separation technology is an indispensable step in the preparation of freestanding GaN substrate. In this paper, a largearea freestanding GaN layer was separated from the substrate by an electrochemical liftoff process...Separation technology is an indispensable step in the preparation of freestanding GaN substrate. In this paper, a largearea freestanding GaN layer was separated from the substrate by an electrochemical liftoff process on a sandwich structure composed of an Fe-doped GaN substrate, a highly conductive Si-doped sacrificial layer and a top Fe-doped layer grown by hydride vapor phase epitaxy(HVPE). The large difference between the resistivity in the Si-doped layer and Fe-doped layer resulted in a sharp interface between the etched and unetched layer. It was found that the etching rate increased linearly with the applied voltage, while it continuously decreased with the electrochemical etching process as a result of the mass transport limitation. Flaky GaN pieces and nitrogen gas generated from the sacrificial layer by electrochemical etching were recognized as the main factors responsible for the blocking of the etching channel. Hence, a thick Si-doped layer grown by HVPE was used as the sacrificial layer to alleviate this problem. Moreover, high temperature and ultrasonic oscillation were also found to increase the etching rate. Based on the results above, we succeeded in the liftoff of ~ 1.5 inch GaN layer. This work could help reduce the cost of freestanding GaN substrate and identifies a new way for mass production.展开更多
With the discrete element method(DEM) ,employing the diameter distribution of natural sands sampled from the Tengger Desert,a mixed-size sand bed was produced and the particle-bed collision was simulated in the mixed-...With the discrete element method(DEM) ,employing the diameter distribution of natural sands sampled from the Tengger Desert,a mixed-size sand bed was produced and the particle-bed collision was simulated in the mixed-size wind sand movement. In the simulation,the shear wind velocity,particle diameter,incident velocity and incident angle of the impact sand particle were given the same values as the experimental results. After the particle-bed collision,we collected all the initial velocities of rising sand particles,including the liftoff angular velocities,liftoff linear velocities and their horizontal and vertical components. By the statistical analysis on the velocity sample for each velocity component,its probability density functions were obtained,and they are the functions of the shear wind velocity. The liftoff velocities and their horizontal and vertical components are distributed as an exponential density function,while the angular velocities are distributed as a normal density function.展开更多
This paper is a redevelopment result of liftoff rates of saltating sand grains based on our previous work.Aeolian sand flow is a complex multi-phase flow because of a special two-phase gas-solid flow near ground surfa...This paper is a redevelopment result of liftoff rates of saltating sand grains based on our previous work.Aeolian sand flow is a complex multi-phase flow because of a special two-phase gas-solid flow near ground surface.Despite extensive research on the movement of blowing sand,no model fully characterizes aeolian sand flow,and large differences often exist between simulations of aeolian sand movement and field observations.One key problem is a few of sufficient research on liftoff rates of saltating sand grains(also called the number of liftoff sand grains per unit time and per unit bed area).It is necessary to re-search in advance liftoff rates of saltating sand grains.We redeveloped liftoff rates of saltating sand grains by establishing an optimization model based on the flux of aeolian sand flow at different heights of the sampler in wind tunnel and the simulated capture of saltating sand grains by different heights of the sampler that are from different liftoff position(distance from the sampler) in order to revise previous inversion condition of liftoff rates of saltating sand grains.Liftoff rates increased rapidly with increasing wind speed.For frictional wind velocities of u=0.67,0.77,0.82,0.83,and 0.87 m s-1,liftoff rates were 3840,954502,5235114,5499407,and 7696291 sand grain s-1 m-2,respectively.These rates could be expressed as the square of the instantaneous frictional wind velocity and a constant(0.663) that differs from the critical(threshold) frictional wind velocity at which saltation begins.Although our results require additional experimental validation and the simple optimization model must be improved,they nonetheless provide a strong basis for future research.展开更多
基金supported by the National Key R&D Program of China (Grant Nos. 2017YFB0404100 and 2017YFB0403000)the National Natural Science Foundation of China (Grant No. 61704187)the Key Research Program of the Frontier Science of the Chinese Academy of Sciences (Grant No. QYZDB-SSWSLH042)。
文摘Separation technology is an indispensable step in the preparation of freestanding GaN substrate. In this paper, a largearea freestanding GaN layer was separated from the substrate by an electrochemical liftoff process on a sandwich structure composed of an Fe-doped GaN substrate, a highly conductive Si-doped sacrificial layer and a top Fe-doped layer grown by hydride vapor phase epitaxy(HVPE). The large difference between the resistivity in the Si-doped layer and Fe-doped layer resulted in a sharp interface between the etched and unetched layer. It was found that the etching rate increased linearly with the applied voltage, while it continuously decreased with the electrochemical etching process as a result of the mass transport limitation. Flaky GaN pieces and nitrogen gas generated from the sacrificial layer by electrochemical etching were recognized as the main factors responsible for the blocking of the etching channel. Hence, a thick Si-doped layer grown by HVPE was used as the sacrificial layer to alleviate this problem. Moreover, high temperature and ultrasonic oscillation were also found to increase the etching rate. Based on the results above, we succeeded in the liftoff of ~ 1.5 inch GaN layer. This work could help reduce the cost of freestanding GaN substrate and identifies a new way for mass production.
基金the Key Project of the National Natural Science Foundation of China (Grant No. 10532040)
文摘With the discrete element method(DEM) ,employing the diameter distribution of natural sands sampled from the Tengger Desert,a mixed-size sand bed was produced and the particle-bed collision was simulated in the mixed-size wind sand movement. In the simulation,the shear wind velocity,particle diameter,incident velocity and incident angle of the impact sand particle were given the same values as the experimental results. After the particle-bed collision,we collected all the initial velocities of rising sand particles,including the liftoff angular velocities,liftoff linear velocities and their horizontal and vertical components. By the statistical analysis on the velocity sample for each velocity component,its probability density functions were obtained,and they are the functions of the shear wind velocity. The liftoff velocities and their horizontal and vertical components are distributed as an exponential density function,while the angular velocities are distributed as a normal density function.
基金supported by National Natural Science Foundation of China (Grant Nos.40601011,10532030)Key Technology Research and Development Program of China (Grant No.2006BAD26B03)+1 种基金the Beijing Nova Program (Grant No.2006A31)State Key Laboratory of Earth Surface Processes and Resource Ecology (Grant No.2008-ZY-02)
文摘This paper is a redevelopment result of liftoff rates of saltating sand grains based on our previous work.Aeolian sand flow is a complex multi-phase flow because of a special two-phase gas-solid flow near ground surface.Despite extensive research on the movement of blowing sand,no model fully characterizes aeolian sand flow,and large differences often exist between simulations of aeolian sand movement and field observations.One key problem is a few of sufficient research on liftoff rates of saltating sand grains(also called the number of liftoff sand grains per unit time and per unit bed area).It is necessary to re-search in advance liftoff rates of saltating sand grains.We redeveloped liftoff rates of saltating sand grains by establishing an optimization model based on the flux of aeolian sand flow at different heights of the sampler in wind tunnel and the simulated capture of saltating sand grains by different heights of the sampler that are from different liftoff position(distance from the sampler) in order to revise previous inversion condition of liftoff rates of saltating sand grains.Liftoff rates increased rapidly with increasing wind speed.For frictional wind velocities of u=0.67,0.77,0.82,0.83,and 0.87 m s-1,liftoff rates were 3840,954502,5235114,5499407,and 7696291 sand grain s-1 m-2,respectively.These rates could be expressed as the square of the instantaneous frictional wind velocity and a constant(0.663) that differs from the critical(threshold) frictional wind velocity at which saltation begins.Although our results require additional experimental validation and the simple optimization model must be improved,they nonetheless provide a strong basis for future research.
