By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or a...By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll (air-to-air) process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.展开更多
To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of pla...To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.展开更多
Under the underdetermined blind sources separation(UBSS) circumstance,it is difficult to estimate the mixing matrix with high-precision because of unknown sparsity of signals.The mixing matrix estimation is proposed b...Under the underdetermined blind sources separation(UBSS) circumstance,it is difficult to estimate the mixing matrix with high-precision because of unknown sparsity of signals.The mixing matrix estimation is proposed based on linear aggregation degree of signal scatter plot without knowing sparsity,and the linear aggregation degree evaluation of observed signals is presented which obeys generalized Gaussian distribution(GGD).Both the GGD shape parameter and the signals' correlation features affect the observation signals sparsity and further affected the directionality of time-frequency scatter plot.So a new mixing matrix estimation method is proposed for different sparsity degrees,which especially focuses on unclear directionality of scatter plot and weak linear aggregation degree.Firstly,the direction of coefficient scatter plot by time-frequency transform is improved and then the single source coefficients in the case of weak linear clustering is processed finally the improved K-means clustering is applied to achieve the estimation of mixing matrix.The proposed algorithm reduces the requirements of signals sparsity and independence,and the mixing matrix can be estimated with high accuracy.The simulation results show the feasibility and effectiveness of the algorithm.展开更多
Based on the data synthesis simulation and the actual processing of the airgun seismic source signal,three quantitative indicators of signal-to-noise ratio,waveform correlation coefficient and phase offset,are superim...Based on the data synthesis simulation and the actual processing of the airgun seismic source signal,three quantitative indicators of signal-to-noise ratio,waveform correlation coefficient and phase offset,are superimposed. We systematically evaluate the functions of the following three stack methods including linearity,phase weighting and S-transform in the extraction of weak signals under strong background noise and quantitatively estimate the reliability of the stack results. Through the comprehensive discussion of the above three methods of stack results,the preliminary comparative analysis believes that the linear stack signal-to-noise ratio is low,but the waveform distortion is minimal; the phase-weighted superimposed signal-to-noise ratio is high and the phase offset is small,but the results of the waveform quality and linear stack are larger than the deviation; the S-transform stack has a relatively higher signal-to-noise ratio and a small loss of waveform amplitude,but there is a certain phase shift phenomenon. It is therefore suggested that linear stack technology should be used when the requirements of both waveform quality and time precision are high. However,the selection of the stack method when the airgun source excitation is limited should be emphasized. If high fidelity is required, the S-transform stack method should be selected; if the required time is high,accuracy can be selected by phase-weighted stack method to achieve reasonable extraction of weak signals.展开更多
In high-energy flash radiography,scattered photons degrade the acquiring image,which limits the resolving power of interfaces and density of dense object.The application of large anti-scatter grid can reduce the scatt...In high-energy flash radiography,scattered photons degrade the acquiring image,which limits the resolving power of interfaces and density of dense object.The application of large anti-scatter grid can reduce the scattered photons remarkably,but this requires a stable source position in order to reduce the loss of signal photons in the grid structure.The pinhole imaging technique is applied to observe spatial jitters of a triple-pulse radiographic source of a linear induction accelerator.Numerical simulations are conducted to analyze the imaging performance with the same or close parameters of the pinhole object and experimental alignment.Experiments are carried out to observe spatial jitters of the source between different measurements.Deviations of the source position between different pulses are measured in each experiment.展开更多
In order to more easily highlight the influence of cooled ambient air through an air-ground heat exchanger on the process of diffusion and mixing of heat around an electronic component and a photovoltaic solar module,...In order to more easily highlight the influence of cooled ambient air through an air-ground heat exchanger on the process of diffusion and mixing of heat around an electronic component and a photovoltaic solar module, we undertook to study the thermal field beforehand. The turbulent model has applied a realizable k-ε two equations model and the two-dimensional Reynolds Averaged Navier-Stokes (RANS) equations are discretized with the second order upwind scheme. The SIMPLE algorithm, which is developed using control volumes, is adopted as the numerical procedure. Calculations were performed for a wide variation of the Reynolds numbers. Our results reveal, on the one hand, that the use of an air-ground heat exchanger accelerates the dispersion of the thermal field around the PV panel. On the other hand, with increasing Reynolds number, the instabilities appear in the wake zone, showing an oscillatory flow, also called von Karman Vortex Street. Our air-ground heat exchanger has an important influence on the diffusion process of the thermal field. Comparison of numerical results with the experimental data available in the literature is satisfactory.展开更多
基金supported by National Natural Science Foundation of China(No.11205201)
文摘By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll (air-to-air) process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.
基金by Hunan Provincial Science and Technology Department'Key Field Research and Development Project'(No.2019WK2011)。
文摘To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.
基金Supported by the National Natural Science Foundation of China(No.51204145)Natural Science Foundation of Hebei Province of China(No.2013203300)
文摘Under the underdetermined blind sources separation(UBSS) circumstance,it is difficult to estimate the mixing matrix with high-precision because of unknown sparsity of signals.The mixing matrix estimation is proposed based on linear aggregation degree of signal scatter plot without knowing sparsity,and the linear aggregation degree evaluation of observed signals is presented which obeys generalized Gaussian distribution(GGD).Both the GGD shape parameter and the signals' correlation features affect the observation signals sparsity and further affected the directionality of time-frequency scatter plot.So a new mixing matrix estimation method is proposed for different sparsity degrees,which especially focuses on unclear directionality of scatter plot and weak linear aggregation degree.Firstly,the direction of coefficient scatter plot by time-frequency transform is improved and then the single source coefficients in the case of weak linear clustering is processed finally the improved K-means clustering is applied to achieve the estimation of mixing matrix.The proposed algorithm reduces the requirements of signals sparsity and independence,and the mixing matrix can be estimated with high accuracy.The simulation results show the feasibility and effectiveness of the algorithm.
基金sponsored by the Spark Program of Earthquake Science and Technology,CEA(XH16003)the National Natural Science Foundation(NNSF) of China under Grant No.41474087
文摘Based on the data synthesis simulation and the actual processing of the airgun seismic source signal,three quantitative indicators of signal-to-noise ratio,waveform correlation coefficient and phase offset,are superimposed. We systematically evaluate the functions of the following three stack methods including linearity,phase weighting and S-transform in the extraction of weak signals under strong background noise and quantitatively estimate the reliability of the stack results. Through the comprehensive discussion of the above three methods of stack results,the preliminary comparative analysis believes that the linear stack signal-to-noise ratio is low,but the waveform distortion is minimal; the phase-weighted superimposed signal-to-noise ratio is high and the phase offset is small,but the results of the waveform quality and linear stack are larger than the deviation; the S-transform stack has a relatively higher signal-to-noise ratio and a small loss of waveform amplitude,but there is a certain phase shift phenomenon. It is therefore suggested that linear stack technology should be used when the requirements of both waveform quality and time precision are high. However,the selection of the stack method when the airgun source excitation is limited should be emphasized. If high fidelity is required, the S-transform stack method should be selected; if the required time is high,accuracy can be selected by phase-weighted stack method to achieve reasonable extraction of weak signals.
文摘In high-energy flash radiography,scattered photons degrade the acquiring image,which limits the resolving power of interfaces and density of dense object.The application of large anti-scatter grid can reduce the scattered photons remarkably,but this requires a stable source position in order to reduce the loss of signal photons in the grid structure.The pinhole imaging technique is applied to observe spatial jitters of a triple-pulse radiographic source of a linear induction accelerator.Numerical simulations are conducted to analyze the imaging performance with the same or close parameters of the pinhole object and experimental alignment.Experiments are carried out to observe spatial jitters of the source between different measurements.Deviations of the source position between different pulses are measured in each experiment.
文摘In order to more easily highlight the influence of cooled ambient air through an air-ground heat exchanger on the process of diffusion and mixing of heat around an electronic component and a photovoltaic solar module, we undertook to study the thermal field beforehand. The turbulent model has applied a realizable k-ε two equations model and the two-dimensional Reynolds Averaged Navier-Stokes (RANS) equations are discretized with the second order upwind scheme. The SIMPLE algorithm, which is developed using control volumes, is adopted as the numerical procedure. Calculations were performed for a wide variation of the Reynolds numbers. Our results reveal, on the one hand, that the use of an air-ground heat exchanger accelerates the dispersion of the thermal field around the PV panel. On the other hand, with increasing Reynolds number, the instabilities appear in the wake zone, showing an oscillatory flow, also called von Karman Vortex Street. Our air-ground heat exchanger has an important influence on the diffusion process of the thermal field. Comparison of numerical results with the experimental data available in the literature is satisfactory.
基金The study was jointly supported by the Strategic Priority Research Program of the Chinese Academy of Sciences[grant number XDA20060502]the National Natural Science Foundation of China[grant numbers 41425086,41661144016,and 41706026]the State Key Laboratory of Tropical Oceanography,South China Sea Institute of Oceanology,Chinese Academy of Sciences[project number LTO1704].