Linear Plasma Sources for Large Area Film Deposition:A Brief Review

By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll （air-to-air） process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.

Linear Track Estimation Using Double Pulse Sources for Near-Field Underwater Moving Target

双脉搏来源(DPS ) 方法在这个工作为线性轨道评价被介绍。在在水下的移动的噪音鉴定的领域里指向， Doppler 将弄歪散发的噪音的频率和振幅。消除这，轨道评价是必要的。在 DPS 方法，我们首先估计通过放方法的基线在动人的目标安装的二正弦曲线脉搏来源的轴承。同时，每脉搏的射出并且记录的时间也被获得。然后，线性磁道参数将在两倍来源间距的帮助下基于几何学模式被完成。模仿的结果证实 DPS 改进以前的双来源间距方法的表演。模仿的实验用一辆动人的电池汽车被执行进一步评估它的表演。当目标离开是 4060m 时，实验结果证明那轨道方位角并且垂直偏导 DPS 的距离分别地在 0.6o 和 3.4m 下面。并且估计的速度的平均偏差在 0.25m/s 附近。

An investigation on improving the homogeneity of plasma generated by linear microwave plasma source with a length of 1550 mm

To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.

Mixing matrix estimation of underdetermined blind source separation based on the linear aggregation characteristic of observation signals

Under the underdetermined blind sources separation(UBSS) circumstance,it is difficult to estimate the mixing matrix with high-precision because of unknown sparsity of signals.The mixing matrix estimation is proposed based on linear aggregation degree of signal scatter plot without knowing sparsity,and the linear aggregation degree evaluation of observed signals is presented which obeys generalized Gaussian distribution(GGD).Both the GGD shape parameter and the signals' correlation features affect the observation signals sparsity and further affected the directionality of time-frequency scatter plot.So a new mixing matrix estimation method is proposed for different sparsity degrees,which especially focuses on unclear directionality of scatter plot and weak linear aggregation degree.Firstly,the direction of coefficient scatter plot by time-frequency transform is improved and then the single source coefficients in the case of weak linear clustering is processed finally the improved K-means clustering is applied to achieve the estimation of mixing matrix.The proposed algorithm reduces the requirements of signals sparsity and independence,and the mixing matrix can be estimated with high accuracy.The simulation results show the feasibility and effectiveness of the algorithm.

Reliability Evaluation on Weak Signal Extraction for Airgun Source Surveys

Based on the data synthesis simulation and the actual processing of the airgun seismic source signal,three quantitative indicators of signal-to-noise ratio,waveform correlation coefficient and phase offset,are superimposed. We systematically evaluate the functions of the following three stack methods including linearity,phase weighting and S-transform in the extraction of weak signals under strong background noise and quantitatively estimate the reliability of the stack results. Through the comprehensive discussion of the above three methods of stack results,the preliminary comparative analysis believes that the linear stack signal-to-noise ratio is low,but the waveform distortion is minimal; the phase-weighted superimposed signal-to-noise ratio is high and the phase offset is small,but the results of the waveform quality and linear stack are larger than the deviation; the S-transform stack has a relatively higher signal-to-noise ratio and a small loss of waveform amplitude,but there is a certain phase shift phenomenon. It is therefore suggested that linear stack technology should be used when the requirements of both waveform quality and time precision are high. However,the selection of the stack method when the airgun source excitation is limited should be emphasized. If high fidelity is required, the S-transform stack method should be selected; if the required time is high,accuracy can be selected by phase-weighted stack method to achieve reasonable extraction of weak signals.

Pinhole imaging to observe spatial jitters of a triple-pulse X-ray source on the Dragon-Ⅱ LIA

In high-energy flash radiography,scattered photons degrade the acquiring image,which limits the resolving power of interfaces and density of dense object.The application of large anti-scatter grid can reduce the scattered photons remarkably,but this requires a stable source position in order to reduce the loss of signal photons in the grid structure.The pinhole imaging technique is applied to observe spatial jitters of a triple-pulse radiographic source of a linear induction accelerator.Numerical simulations are conducted to analyze the imaging performance with the same or close parameters of the pinhole object and experimental alignment.Experiments are carried out to observe spatial jitters of the source between different measurements.Deviations of the source position between different pulses are measured in each experiment.

Study of the Thermal Field Upstream and Downstream of Two Heat Sources Placed in the Turbulent Flow of the Ambient Air Cooled through an Air-Ground Heat Exchanger

In order to more easily highlight the influence of cooled ambient air through an air-ground heat exchanger on the process of diffusion and mixing of heat around an electronic component and a photovoltaic solar module, we undertook to study the thermal field beforehand. The turbulent model has applied a realizable k-ε two equations model and the two-dimensional Reynolds Averaged Navier-Stokes (RANS) equations are discretized with the second order upwind scheme. The SIMPLE algorithm, which is developed using control volumes, is adopted as the numerical procedure. Calculations were performed for a wide variation of the Reynolds numbers. Our results reveal, on the one hand, that the use of an air-ground heat exchanger accelerates the dispersion of the thermal field around the PV panel. On the other hand, with increasing Reynolds number, the instabilities appear in the wake zone, showing an oscillatory flow, also called von Karman Vortex Street. Our air-ground heat exchanger has an important influence on the diffusion process of the thermal field. Comparison of numerical results with the experimental data available in the literature is satisfactory.

Optimal heat source for the interannual variability of the western North Pacific summer monsoon

西北太平洋夏季风是热带影响东亚气候的桥梁,具有很强的年际变率。西北太平洋夏季风异常能造成东亚夏季旱涝和高低温灾害,因此研究它的年际变率驱动因子具有重要意义。本文利用一个格林函数方法定量的评估了热带各个格点热源对西北太平洋夏季风的贡献。具体为将南北55纬度之间的区域划分成132个小格子,在每个格子加上一个椭圆形理想热源;接着利用一个线性理论大气环流模式计算每个热源对西北太平洋夏季风的贡献。研究表明导致西北太平洋夏季风增强的最理想加热场结构是位于热带印度洋和中纬度东亚地区上空的冷源和位于副热带西北太平洋地区的热源。

氢闸流管驱动三同轴电缆Blumlein线的kHz重频脉冲功率源

闪光X射线摄影技术在军事和民用等多个领域具有重要场景。针对重频直线感应加速器高重频的要求,提出了基于氢闸流管驱动三同轴电缆Blumlein线的脉冲功率源方案,设计和研制了一种三同轴电缆,研究了氢闸流管的导通特性,搭建了氢闸流管驱动三同轴电缆Blumlein线脉冲功率源的验证平台,开展了kHz重频脉冲功率源实验研究,以及kHz重频脉冲功率源驱动重频感应腔的实验研究,结果表明:基于氢闸流管驱动三同轴电缆Blumlein线脉冲功率源实现了波形品质优异的kHz重频方波脉冲输出。

一种小尺寸轫致辐射转换靶设计

以减小直线感应加速器X射线光源横向尺寸为目标,开展轫致辐射转换靶的设计。对聚焦打靶过程中电子束运动轨迹进行分析,指出同一个电子束轨迹分布,既可以描述为电子束在某纵向位置处具有一定的横向展宽,也可以描述为电子束保持较小横向尺寸时的轴向分布展宽,由此提出在束腰附近放置多个小靶片实现聚焦电子束有效阻挡的小尺寸多层靶概念设计。采用EGS4程序对X射线产额进行计算,发现靶厚度在一定范围内改变时X射线产额变化较小,基于这一规律完成了小尺寸多层靶的结构设计。进一步考察了一个设计应用实例,当聚焦电子束最小包络直径3 mm、会聚角100 mrad时,对比大尺寸靶,采用小尺寸多层靶可以获得等效直径减小约50%、产额减小约10%的X射线光源。该设计方法有望在相同的电子束品质和聚焦条件下,获得横向尺寸小于电子束最小束包络直径的X射线光源,具有一定的应用价值。

基于线性调频连续波的合作式通信辐射源测距

针对加速运动目标参数估计中,离散多项式变换方法无法进行非整数估计的问题,本文提出基于瑞夫算法的离散多项式变换法和基于Chirp-Z变换的离散多项式变换法2种新型离散多项式变换算法,对加速运动目标速度和加速度进行估计,并对2种算法的估计误差和计算量进行了分析比较。结果表明:2种算法在信噪比-20 dB时均方误差开始接近克拉美罗界。基于瑞夫算法的离散多项式变换法与3次迭代基于Chirp-Z变换的离散多项式变换法均可在较低信噪比下可实现任意频率的有效估计且性能接近,二者均可实现低信噪比下速度、加速度的有效估计,但基于瑞夫算法的离散多项式变换法计算量远小于3次迭代基于Chirp-Z变换的离散多项式变换法。

一种基于脊间隙波导的宽频带馈电线源设计

设计了以脊间隙波导(RGW)功分网络为基本结构的宽频带馈电线源,该线源可用以激励平行板波导中的准TEM模式波,并用作宽带连续横向枝节(CTS)天线的馈电结构。首先对RGW阻带和单模带宽特性进行分析,以确定RGW的结构参数;进一步研究了宽带1分2功分器的设计方法、RGW模式到平行板波导模式的过渡结构方案;借助多级阻抗匹配和感性金属柱加载技术,实现了低反射等功率分配,以及输出端口到平行板波导的宽带匹配;最后将各分级结构级联得到1分8 RGW网络线源。对宽频带馈电线源进行了样机加工、装配和测试,在12 GHz~22 GHz频率范围内,其反射系数低于-15 dB,实测方向图与等幅同相均匀线源方向图吻合度很高,证明该馈电线源幅相一致性优异,是一种高效率的CTS天线馈电线源。

均匀半空间CSAMT折线形线源的场源数值模拟

可控源音频大地电磁法(CSAMT)在野外进行测量时,通常认为发射线源是简化为长度极小的电偶极子源,但是在野外实测中,CSAMT发射线源都是折线形布设。本文在前人研究成果的基础上,根据电磁场的线性叠加原理推导出折线形电流线源激发的电磁场数值计算方法,通过对不同的折线形线源模型进行计算,分析均匀半空间情况下折线形线源对视电阻率、阻抗相位曲线的影响。模型计算表明折线形线源对视电阻率、阻抗相位曲线的近区和过渡区有较大影响,远区则不受影响;近区和过渡区受到的影响主要是由各个折线段的方位角引起,折线段方位角越大,对测点的视电阻率和阻抗相位的影响越大。当折线段方位角很小时,可以将其忽略并近似为直线源进行处理,这样既可以充分考虑发射源的形态又可以提高工作效率。为后续CSAMT数据处理的近场校正以及CSAMT数值模拟提供了理论支持。

基于EMD-NLPCA的欠定非线性盲源分离算法及应用

对欠定非线性混合信号的盲源分离算法进行研究,提出一种基于经验模式分解与非线性主成分分析(EMD-NLPCA)的盲源分离算法。首先对观测信号做EMD处理,重构信号后引入高阶统计量,再进行主成分分析,完成信号分离。该算法既可以应对欠定环境,又解决了非线性混合问题。仿真实验中,将该算法与稀疏分量分析法的结果进行比照,证明了该算法的正确性以及相较于稀疏分量分析法更具普适性。将该算法用于无人机发动机开车音频信号的分离,效果较好。

一种基于非均匀线性麦克风阵列的窄带声源定向方法及系统

提出了一种基于窄带信号相位时延估计的信号定位方法,通过非均匀线性阵列的布放,解决增大阵元孔径带来的相位卷绕问题,提高定位精度。提出了非均匀线性布阵方式情况下,修正卷绕量计算延时量的估计算法,并给出了非均匀阵列间距需要满足的条件。此方法提高了定位可用基阵孔径,与一般均匀间隔线性阵列相比,大大减少了同孔径下所需的阵元个数,从而降低了对后续信号处理设备的需求。构建了定位系统并进行实际测试。实验表明,所提方法有效地提高了在开放空间中对窄带声源的定位精度。

计及源荷相关度类线性紧缩法的配电网有功无功协同优化

随着分布式电源的高比例渗透,主动配电网的稳定性受到很大影响,因此主动配电网有功-无功协同优化至关重要。对此,提出一种计及源荷相关度类线性紧缩法(Quasi-Linear Contraction,QLC)的配电网有功无功协同优化方法。首先,基于相关性分析方法分析新能源出力以及负荷的相关度,给出源荷相关度概率约束,完善系统优化模型。然后,针对优化模型非凸非线性容易导致局部最优解问题,采用泰勒展开式求解分支电流的上下界并代入节点电压和功率流方程,完成主动配电网模型的类线性紧缩,再采用罚函数方法校正,当得出的解在缩小后的约束范围内时该解为实际最优解,当得出的解在紧缩的约束边界上时,在满足原有约束范围的前提下向外寻优,得到实际最优解。最后,通过Yalmip等仿真计算软件验证所提方法的稳定性、准确性以及有效性。

考虑声源尺度的声屏障插入损失优化算法

声屏障与声源距离较近时,声源尺度对其插入损失计算结果有较大影响。将声源细化为多个子声源能提高准确度,但会导致计算过程复杂化。以靠近声屏障的线声源为研究对象,利用接收点至声屏障顶点的延伸线将声源划分为两部分,提出一种对声源动态划分的插入损失修正公式,从声屏障对噪声源不同区域的影响效果角度优化了插入损失计算方法。与将声源等效为单个线声源及划分为多个子线声源的计算结果对比表明,该优化算法的计算结果近似于将声源划分为无限个子线声源的计算结果,但计算复杂度并未显著增加,既解决了声影区边界处插入损失突变的问题,又提高了插入损失计算的准确度,对提升噪声预测的精度、规划适宜的声屏障结构、提出经济有效的噪声防护措施等具有重要意义。

基于改进双闭环的V2G并网逆变器直流母线电压控制

V2G双向功率变换器处于放电模式即作为并网逆变器使用时,具有非线性、强耦合、负载扰动大等特性,传统的PI双闭环控制难以取得很好的控制效果。针对直流母线电压控制易受多源干扰影响的问题,提出了一种自抗扰模型预测功率控制。模型预测功率控制作为功率内环,自抗扰控制作为电压外环;使用在工程中更具意义的线性自抗扰控制技术,并进行降阶处理,降低了系统的复杂度;对传统PI双闭环、模型预测功率控制以及以自抗扰模型预测功率控制进行了对比研究。仿真结果验证了所提出的改进双闭环控制策略在多源扰动下的暂态性能更好,抗扰性能更强。

延安市枯水期地表水污染源识别及贡献率研究

定量解析污染源是有效控制水污染的基础,研究综合利用数理统计、GIS空间分析和主成分分析-绝对主成分得分-多元线性回归模型(PCA-APCS-MLR)等方法,提出了一种数据预处理方式,对2018-2020年延安市地表水系内49个采样点的23项水质关键指标进行污染源及其贡献率定量分析。结果表明:污染源以营养物污染(54.02%)及重金属污染(17.97%)为主,营养物污染对各水质指标的平均贡献率(52.70%)大于重金属污染(47.30%),营养物污染主要对延安市东北部影响较大,重金属污染对延河、秀延河上游地区影响较大。相比原始数据预处理方法的分析结果,该结果更具有地区代表性,可对延安市地表水污染治理提供数据支持,为地表水水质保护政策的制定提供科学参考。

基于电网多源数据的电力知识图谱构建方法

电力知识图谱构建方法重复采集电网多源数据,针对构建得到的知识图谱置信度过小的问题,设计一种基于电网多源数据的电力知识图谱构建方法。通过设定实体电网多源数据采集架构,采用局部线性嵌入算法筛选重复采集的电网多源数据。将电力知识间的关系转变可识别特征数值,抽取多源数据中的电力知识划分图谱层级,构建电力知识图谱结构。结合电力知识采集环境完成实验,实验结果表明,文中设计的构建方法准确率为97%,召回率为0.78%,F值为93,满足电力知识图谱的构建需求。