The mechanism of the FA/O chelating agent in the process of chemical mechanical polishing （CMP） is introduced. CMP is carried on a φ300 mm copper film. The higher polishing rate and lower surface roughness are acqu...The mechanism of the FA/O chelating agent in the process of chemical mechanical polishing （CMP） is introduced. CMP is carried on a φ300 mm copper film. The higher polishing rate and lower surface roughness are acquired due to the action of an FA/O chelating agent with an extremely strong chelating ability under the condition of low pressure and low abrasive concentration during the CMP process. According to the results of several kinds of additive interaction curves when the pressure is 13.78 kPa, flow rate is 150 mL/min, and the rotating speed is 55/60 rpm, it can be demonstrated that the FA/O chelating agent plays important role during the CMP process.展开更多
The Tibetan Plateau is characterized by lower atmospheric pressure, lower air temperature and high daily and seasonal variation due to high elevation. The photosynthesis of aaplants is significantly influenced by thes...The Tibetan Plateau is characterized by lower atmospheric pressure, lower air temperature and high daily and seasonal variation due to high elevation. The photosynthesis of aaplants is significantly influenced by these alpine environmental factors. Apparent quantum yield (αA) is one of the basic parameters of photosynthesis and mass production. Its accuracy determination is of significance to model photosynthesis of C3 plants and global change on the plateau. In the Lhasa Plateau Ecological Station with 65.4 kPa of atmospheric pressure at an elevation of 3688 m, Li-Cor 6400 portable photosynthesis system was used to measure light response curves of winter wheat in different temperatures and intercellular CO2 concentration (C,). The slope of light response curve in weak light area of PFD from 0 to 150 μmol m-2 s-1 was used to evaluate the value of αA. The dependence of αA on temperature and intercellular concentration was analyzed. In 30℃, the average value of αA was 0.0476±0.0038. It is not quite different from the values in low elevation areas. αA is influenced both by temperature and by the ratio of CO2 and O2 partial pressure ([CO2]/[O2]). The measured values in the previous study were much lower. This might be due to systematic errors from instrument and data processing methods. The values of αA decreased linearly with temperature. It decreased 0.0007 in every 1℃ increase of temperature. The decrease slope is similar to those of C3 plants in the previous researches. While [O2] is constant,αA increases with Ciwith a hyperbolic relationship. In comparison with low elevation areas, the αA on the Tibetan Plateau is more sensitive to increase of CO2.展开更多
Compared with the traditional atm ospheric carburization, low-pressure carburization has the benefits of producing no surface oxidation and leaving fine, uniformly dispersed carbides in the carburized layer. However, ...Compared with the traditional atm ospheric carburization, low-pressure carburization has the benefits of producing no surface oxidation and leaving fine, uniformly dispersed carbides in the carburized layer. However, the process param eters for low-pressure carburization of 16Cr3NiWMoVNbE steel have yet to be optimized. Thus, we use the saturation-value method to optimize these parameters for aviation-gear materials. Toward this end, the m icrostructure and properties of 16Cr3NiWMoVNbE steel after different carburization processes are studied by optical microscopy, scanning electron microscopy, transm ission electron microscopy, and electron probe microanalysis. Considering the saturated austenite carbon concentration, we propose a model of carbon flux and an alloy coefficient for low -pressure carburization to reduce the carbon concentration in austenite and avoid the surface carbide network. At the early stage of carburization (30 s), the gas-solid interface has a higher concentration gradient. The averaging method is not ideal in practical applications, but the carbon flux measured by using the segm ented average m ethod is 2.5 times that measured by the overall average method, which is ideal in practical applications. The corresponding carburization tim e is reduced by 60%. By using the integral average method, the actual carburization time increases, which leads to the rapid form ation of carbide on the surface and affects the entire carburization process. Nb and Wcombine with C to form carbides, which hinders carbon diffusion and consumes carbon, resulting in a sharp decrease in the rate of C diffusion in austenite (the diffusion rate is reduced by 52% for 16Cr3NiWMoVNbE steel). By changing the diffusion coefficient model and comparing the hardness gradient of different processes, the depth of the actual layer is found to be very similar to the design depth.展开更多
基金supported by the Major National Science and Technology Special Projects(No.2009ZX02308)the National Natural Science Foundation of Hebei Province(No.E2013202247)the Fund Project of Hebei Provincial Department of Education(No.2011128)
文摘The mechanism of the FA/O chelating agent in the process of chemical mechanical polishing （CMP） is introduced. CMP is carried on a φ300 mm copper film. The higher polishing rate and lower surface roughness are acquired due to the action of an FA/O chelating agent with an extremely strong chelating ability under the condition of low pressure and low abrasive concentration during the CMP process. According to the results of several kinds of additive interaction curves when the pressure is 13.78 kPa, flow rate is 150 mL/min, and the rotating speed is 55/60 rpm, it can be demonstrated that the FA/O chelating agent plays important role during the CMP process.
基金This work was supported by the National Key Basic Research and Development Project(Grant No.2002CB41250l)the National Natural Science Foundation of China(Grant Nos.90211006,30370257 and 30470280)the Knowledge Innovation Project of Institute of Geographical Sciences and Natural Resources Research,CAS(Grant No.CXIOG-E01-03-03).
文摘The Tibetan Plateau is characterized by lower atmospheric pressure, lower air temperature and high daily and seasonal variation due to high elevation. The photosynthesis of aaplants is significantly influenced by these alpine environmental factors. Apparent quantum yield (αA) is one of the basic parameters of photosynthesis and mass production. Its accuracy determination is of significance to model photosynthesis of C3 plants and global change on the plateau. In the Lhasa Plateau Ecological Station with 65.4 kPa of atmospheric pressure at an elevation of 3688 m, Li-Cor 6400 portable photosynthesis system was used to measure light response curves of winter wheat in different temperatures and intercellular CO2 concentration (C,). The slope of light response curve in weak light area of PFD from 0 to 150 μmol m-2 s-1 was used to evaluate the value of αA. The dependence of αA on temperature and intercellular concentration was analyzed. In 30℃, the average value of αA was 0.0476±0.0038. It is not quite different from the values in low elevation areas. αA is influenced both by temperature and by the ratio of CO2 and O2 partial pressure ([CO2]/[O2]). The measured values in the previous study were much lower. This might be due to systematic errors from instrument and data processing methods. The values of αA decreased linearly with temperature. It decreased 0.0007 in every 1℃ increase of temperature. The decrease slope is similar to those of C3 plants in the previous researches. While [O2] is constant,αA increases with Ciwith a hyperbolic relationship. In comparison with low elevation areas, the αA on the Tibetan Plateau is more sensitive to increase of CO2.
基金financially supported by the National Key R&D Program of China (Grant No. 2016YFB0300600)the National Natural Science Foundation of China (Grant No. 51604074)
文摘Compared with the traditional atm ospheric carburization, low-pressure carburization has the benefits of producing no surface oxidation and leaving fine, uniformly dispersed carbides in the carburized layer. However, the process param eters for low-pressure carburization of 16Cr3NiWMoVNbE steel have yet to be optimized. Thus, we use the saturation-value method to optimize these parameters for aviation-gear materials. Toward this end, the m icrostructure and properties of 16Cr3NiWMoVNbE steel after different carburization processes are studied by optical microscopy, scanning electron microscopy, transm ission electron microscopy, and electron probe microanalysis. Considering the saturated austenite carbon concentration, we propose a model of carbon flux and an alloy coefficient for low -pressure carburization to reduce the carbon concentration in austenite and avoid the surface carbide network. At the early stage of carburization (30 s), the gas-solid interface has a higher concentration gradient. The averaging method is not ideal in practical applications, but the carbon flux measured by using the segm ented average m ethod is 2.5 times that measured by the overall average method, which is ideal in practical applications. The corresponding carburization tim e is reduced by 60%. By using the integral average method, the actual carburization time increases, which leads to the rapid form ation of carbide on the surface and affects the entire carburization process. Nb and Wcombine with C to form carbides, which hinders carbon diffusion and consumes carbon, resulting in a sharp decrease in the rate of C diffusion in austenite (the diffusion rate is reduced by 52% for 16Cr3NiWMoVNbE steel). By changing the diffusion coefficient model and comparing the hardness gradient of different processes, the depth of the actual layer is found to be very similar to the design depth.
