Development and application of ferrite materials for low temperature co-fired ceramic （LTCC） technology are dis- cussed, specifically addressing several typical ferrite materials such as M-type barium ferrite, NiCuZ...Development and application of ferrite materials for low temperature co-fired ceramic （LTCC） technology are dis- cussed, specifically addressing several typical ferrite materials such as M-type barium ferrite, NiCuZn ferrite, YIG ferrite, and lithium ferrite. In order to permit co-firing with a silver internal electrode in LTCC process, the sintering temperature of ferrite materials should be less than 950 ℃. These ferrite materials are research focuses and are applied in many ways in electronics.展开更多
The quality of a via hole on a multilayer stack of Low Temperature Co-fired Ceramic (LTCC) tape is of utmost importance to its functionality. This paper investigates a substitute for the commonly used circular shape h...The quality of a via hole on a multilayer stack of Low Temperature Co-fired Ceramic (LTCC) tape is of utmost importance to its functionality. This paper investigates a substitute for the commonly used circular shape hole to a more complex one and its implications when different parameters such as sheet thickness, punch speed, travel distance and tool clearance are?changed. Fabrication of the punch tools and the punching process is carried out at the same machine, ensuring alignment. Two types of non-circular shape are chosen to carry out the experiment. Pre-sintered complex shape hole measurements show that while punch conditions such as speed and tool gap have?little effect on the size, sheet thickness and travel depth play a vital role in the overall dimension. Albeit having only a slight effect on the size, those parameters are significant in other aspects of hole quality. Post-sintering investigation is also observed and discussed.展开更多
Modern electronic circuit requires compact,multifunctional technology in communication systems.However,it is very difficult due to the limitations in passive component miniaturization and the complication of fabricati...Modern electronic circuit requires compact,multifunctional technology in communication systems.However,it is very difficult due to the limitations in passive component miniaturization and the complication of fabrication process.The bandpass filter is one of the most important passive components in millimeter（mm）-wave communication system,attracting significant interest in three-dimension（3D） miniaturized design,which is few reported.In this paper,a bandpass filter structure using low-temperature co-fired ceramic（LTCC） technology,which is fully integrated in a system-in package（SIP） communication module,is presented for miniaturized and high reliable mm-wave application.The bandpass filter with 3D end-coupled microstrip resonators is implemented in order to achieve a high performance bandwidth characteristic.Specifically,all of the resonators are embedded into different ceramic layers to decrease the insertion loss and enhance the out-of-band rejection performance by optimizing the coupling coefficient and the coupling strength.A fence structure,which is formed by metal-filled via array with the gap less than quarter wavelength,is placed around the embedded bandpass filter to avoid electromagnetic（EM） interference problem in multilayer structure.This structural model is validated through actual LTCC process.The bandpass filter is successfully manufactured by modifying the co-fireablity characteristics,adjusting the sintering profile,releasing the interfacial stress,and reducing the shrinkage mismatch with different materials.Measured results show good performance and agree well with the high frequency EM full wave simulation.The influence of layer thickness and dielectric constant on the frequency response in fabricated process is analyzed,where thicker ceramic sheets let the filter response shift to higher frequency.Moreover,measured S-parameters denote the center frequency is also strongly influenced by the variation of ceramic material＇s dielectric constants.By analyzing the relationship between the characteristics of the ceramic tape and the center frequency of the filter,both theoretical and experimental data are accumulated for broadening application filed.With the coupling resonators embedded into the ceramic layers,the bandpass filter exhibits advantages of small size and high reliability compared to conventional planar filter structure,which makes the bandpass filter suitable for SIP communicational application.展开更多
The implementation and characteristics of a compact lumped-element three-order low pass filter are presented in this paper. The filter with 120 MHz cut off frequency, as well as more than 20 dB of the attenuation abov...The implementation and characteristics of a compact lumped-element three-order low pass filter are presented in this paper. The filter with 120 MHz cut off frequency, as well as more than 20 dB of the attenuation above 360 MHz frequency band is successfully manufactured in an LTCC substrate with 40 pm layer thickness. The overall size of the filter is 2.0 mm×1.2 mm×0.9 mm. A good coincidence between the measured results and the full-wave electromagnetic designed responses is observed.展开更多
This paper describes technology of the electromagnetic pump made in a hybrid polymer-ceramic technology. The pumping mechanism is realized with a mutual excitation between an electromagnetic coil and a neodymium magne...This paper describes technology of the electromagnetic pump made in a hybrid polymer-ceramic technology. The pumping mechanism is realized with a mutual excitation between an electromagnetic coil and a neodymium magnet bonded to a flexible membrane. A PDMS （poly（dimethylsiloxane）） material was used to manufacture a membrane sufficient for the presented micropump. A fish trap construction is adapted to the ceramic technology. The bonding process of ceramics and polymer, using plasma oxidation method, is described as well. Moreover, a membrane deflection depending on magnet dimensions and applied voltage was measured.展开更多
The sintering temperature of Li2ZnTi3O8 ceramics is still high for LTCC-based applications. In this work, V2O5 was doped as the sintering aid. The sintered density, phase composition, grain size, as well as microwave ...The sintering temperature of Li2ZnTi3O8 ceramics is still high for LTCC-based applications. In this work, V2O5 was doped as the sintering aid. The sintered density, phase composition, grain size, as well as microwave dielectric properties of Li2ZnTi3O8 ceramics with the addition of V2O5 were investigated. Based on our research, V2O5 doping effectively promoted the densification of Li2ZnTi3O8 ceramics at about 900°C, without affecting the main crystal phase of the ceramics. Li2ZnTi3O8 ceramics with 0.5 wt% V2O5 doping (sintered at 900°C) exhibited the best microwave dielectric properties (Qf =?22,400 GHz at about 6 GHz, εr = 25.5, and τf = -10.8 ppm/°C). The V2O5-doped Li2ZnTi3O8 ceramics were well cofired with Ag inner paste without cracks and diffusion, indicating its significant potential for LTCC applications.展开更多
基于宽边耦合带状线结构,该文设计了一种基于低温共烧陶瓷(LTCC)技术的高隔离低插损3 dB 90°电桥。该电桥使用螺旋耦合线有效地减小了器件尺寸,同时以对称式结构建模更便于后期的优化调整。在宽边螺旋耦合带状线垂直方向引入一个...基于宽边耦合带状线结构,该文设计了一种基于低温共烧陶瓷(LTCC)技术的高隔离低插损3 dB 90°电桥。该电桥使用螺旋耦合线有效地减小了器件尺寸,同时以对称式结构建模更便于后期的优化调整。在宽边螺旋耦合带状线垂直方向引入一个伸入式可调隔离电容,极大地提高了该电桥的隔离度,使其可达27 dB,且插入损耗≤0.2 dB,较之传统的定向耦合器结构,其在提升性能的同时大幅减小了器件尺寸。对耦合线直角拐弯处的电场强度进行分析与优化,采用45°斜切的方式使拐角处的电场强度与直线处大致相等。对上接地金属板进行环形镂空处理,这将改善带内的幅度平衡度。该文设计的3 dB 90°电桥通带为0.96~1.53 GHz,插入损耗≤0.2 dB,幅度平衡度≤±0.7 dB,相位平衡度为90°±1°,隔离度≥27 dB,其具有良好的应用市场。展开更多
基于提升低温共烧陶瓷(low temperature co-fired ceramic,LTCC)厚度的检测精度、测量效率和可溯源性的需求,设计一套LTCC激光测厚系统。针对测量精度难以满足需求的问题,对存在误差进行分析,采用厚度测量用调整夹具消除同轴度误差和线...基于提升低温共烧陶瓷(low temperature co-fired ceramic,LTCC)厚度的检测精度、测量效率和可溯源性的需求,设计一套LTCC激光测厚系统。针对测量精度难以满足需求的问题,对存在误差进行分析,采用厚度测量用调整夹具消除同轴度误差和线性度误差,优化设计结构降低倾角误差,循环传感器标定消除重复度误差,通过数据优化和滤波处理降低机械振动误差,提高了系统测量精度。与实际产品厚度数据对比,最终精度误差≤5μm,符合产品的应用要求,具有广阔的应用市场。展开更多
Novel low-firing BiMg_(2)PO_(6)(BMP)and BiMg_(2)VO_(6)(BMV)ceramics with excellent microwave properties were synthesized and analyzed.The Rietveld refinement indicated that BiMg_(2)MO_(6)(M=p,V)ceramics crystallized i...Novel low-firing BiMg_(2)PO_(6)(BMP)and BiMg_(2)VO_(6)(BMV)ceramics with excellent microwave properties were synthesized and analyzed.The Rietveld refinement indicated that BiMg_(2)MO_(6)(M=p,V)ceramics crystallized in orthorhombic structure.The analysis results of the scanning electron microscope proved a dense and uniform microstructure.Further research showed that there was a strong correlation among permittivity,quality factor,and bulk density at different temperatures.The correlation between the properties and the structure of BiMg_(2)MO_(6)(M=P,V)ceramics were characterized by the chemical bond theory.The outstanding dielectric properties of BiMg_(2)MO_(6)(M=P,V)ceramics(BMP:εr=12.503,Q×f=25,760 GHz,tf=-20×10^(-6)/℃;BMV:εr=13.472,Q×f=37,270 GHz,tf=78×10^(-6)/℃)make them expected to become the novel low temperature co-fired ceramics(LTCC).展开更多
基金Project supported by the National Basic Research Program of China(Grant No.2012CB933100)the National Natural Science Foundation of China(Grant Nos.51132003,61021061,and 61171047)the Second Item of Strongpoint Industry of Guangdong Province,China(Grant No.2012A090100001)
文摘Development and application of ferrite materials for low temperature co-fired ceramic （LTCC） technology are dis- cussed, specifically addressing several typical ferrite materials such as M-type barium ferrite, NiCuZn ferrite, YIG ferrite, and lithium ferrite. In order to permit co-firing with a silver internal electrode in LTCC process, the sintering temperature of ferrite materials should be less than 950 ℃. These ferrite materials are research focuses and are applied in many ways in electronics.
文摘The quality of a via hole on a multilayer stack of Low Temperature Co-fired Ceramic (LTCC) tape is of utmost importance to its functionality. This paper investigates a substitute for the commonly used circular shape hole to a more complex one and its implications when different parameters such as sheet thickness, punch speed, travel distance and tool clearance are?changed. Fabrication of the punch tools and the punching process is carried out at the same machine, ensuring alignment. Two types of non-circular shape are chosen to carry out the experiment. Pre-sintered complex shape hole measurements show that while punch conditions such as speed and tool gap have?little effect on the size, sheet thickness and travel depth play a vital role in the overall dimension. Albeit having only a slight effect on the size, those parameters are significant in other aspects of hole quality. Post-sintering investigation is also observed and discussed.
基金supported by Research Fund for the Doctoral Program of Higher Education of China(Grant No.20060614021)Sichuan Provincial Fundamental Research of China(Grant No.2008JY0057),Fundamental Research Funds for the Central Universities of China(Grant No.ZYGX2009J091)
文摘Modern electronic circuit requires compact,multifunctional technology in communication systems.However,it is very difficult due to the limitations in passive component miniaturization and the complication of fabrication process.The bandpass filter is one of the most important passive components in millimeter（mm）-wave communication system,attracting significant interest in three-dimension（3D） miniaturized design,which is few reported.In this paper,a bandpass filter structure using low-temperature co-fired ceramic（LTCC） technology,which is fully integrated in a system-in package（SIP） communication module,is presented for miniaturized and high reliable mm-wave application.The bandpass filter with 3D end-coupled microstrip resonators is implemented in order to achieve a high performance bandwidth characteristic.Specifically,all of the resonators are embedded into different ceramic layers to decrease the insertion loss and enhance the out-of-band rejection performance by optimizing the coupling coefficient and the coupling strength.A fence structure,which is formed by metal-filled via array with the gap less than quarter wavelength,is placed around the embedded bandpass filter to avoid electromagnetic（EM） interference problem in multilayer structure.This structural model is validated through actual LTCC process.The bandpass filter is successfully manufactured by modifying the co-fireablity characteristics,adjusting the sintering profile,releasing the interfacial stress,and reducing the shrinkage mismatch with different materials.Measured results show good performance and agree well with the high frequency EM full wave simulation.The influence of layer thickness and dielectric constant on the frequency response in fabricated process is analyzed,where thicker ceramic sheets let the filter response shift to higher frequency.Moreover,measured S-parameters denote the center frequency is also strongly influenced by the variation of ceramic material＇s dielectric constants.By analyzing the relationship between the characteristics of the ceramic tape and the center frequency of the filter,both theoretical and experimental data are accumulated for broadening application filed.With the coupling resonators embedded into the ceramic layers,the bandpass filter exhibits advantages of small size and high reliability compared to conventional planar filter structure,which makes the bandpass filter suitable for SIP communicational application.
基金This work was supported by the National Nature Science Foundation of China under Grant No. 60425102.
文摘The implementation and characteristics of a compact lumped-element three-order low pass filter are presented in this paper. The filter with 120 MHz cut off frequency, as well as more than 20 dB of the attenuation above 360 MHz frequency band is successfully manufactured in an LTCC substrate with 40 pm layer thickness. The overall size of the filter is 2.0 mm×1.2 mm×0.9 mm. A good coincidence between the measured results and the full-wave electromagnetic designed responses is observed.
文摘This paper describes technology of the electromagnetic pump made in a hybrid polymer-ceramic technology. The pumping mechanism is realized with a mutual excitation between an electromagnetic coil and a neodymium magnet bonded to a flexible membrane. A PDMS （poly（dimethylsiloxane）） material was used to manufacture a membrane sufficient for the presented micropump. A fish trap construction is adapted to the ceramic technology. The bonding process of ceramics and polymer, using plasma oxidation method, is described as well. Moreover, a membrane deflection depending on magnet dimensions and applied voltage was measured.
文摘The sintering temperature of Li2ZnTi3O8 ceramics is still high for LTCC-based applications. In this work, V2O5 was doped as the sintering aid. The sintered density, phase composition, grain size, as well as microwave dielectric properties of Li2ZnTi3O8 ceramics with the addition of V2O5 were investigated. Based on our research, V2O5 doping effectively promoted the densification of Li2ZnTi3O8 ceramics at about 900°C, without affecting the main crystal phase of the ceramics. Li2ZnTi3O8 ceramics with 0.5 wt% V2O5 doping (sintered at 900°C) exhibited the best microwave dielectric properties (Qf =?22,400 GHz at about 6 GHz, εr = 25.5, and τf = -10.8 ppm/°C). The V2O5-doped Li2ZnTi3O8 ceramics were well cofired with Ag inner paste without cracks and diffusion, indicating its significant potential for LTCC applications.
文摘基于提升低温共烧陶瓷(low temperature co-fired ceramic,LTCC)厚度的检测精度、测量效率和可溯源性的需求,设计一套LTCC激光测厚系统。针对测量精度难以满足需求的问题,对存在误差进行分析,采用厚度测量用调整夹具消除同轴度误差和线性度误差,优化设计结构降低倾角误差,循环传感器标定消除重复度误差,通过数据优化和滤波处理降低机械振动误差,提高了系统测量精度。与实际产品厚度数据对比,最终精度误差≤5μm,符合产品的应用要求,具有广阔的应用市场。
基金This work was supported by Major Projects of Science and Technology in Tianjin(No.18ZXJMTG00020)the Natural Science Foundation of Hebei Province,China(No.E2020202011).
文摘Novel low-firing BiMg_(2)PO_(6)(BMP)and BiMg_(2)VO_(6)(BMV)ceramics with excellent microwave properties were synthesized and analyzed.The Rietveld refinement indicated that BiMg_(2)MO_(6)(M=p,V)ceramics crystallized in orthorhombic structure.The analysis results of the scanning electron microscope proved a dense and uniform microstructure.Further research showed that there was a strong correlation among permittivity,quality factor,and bulk density at different temperatures.The correlation between the properties and the structure of BiMg_(2)MO_(6)(M=P,V)ceramics were characterized by the chemical bond theory.The outstanding dielectric properties of BiMg_(2)MO_(6)(M=P,V)ceramics(BMP:εr=12.503,Q×f=25,760 GHz,tf=-20×10^(-6)/℃;BMV:εr=13.472,Q×f=37,270 GHz,tf=78×10^(-6)/℃)make them expected to become the novel low temperature co-fired ceramics(LTCC).
