Surface defects incorporated diamond machining of silicon

This paper reports the performance enhancement benefits in diamond turning of the silicon wafer by incorporation of the surface defect machining(SDM)method.The hybrid micromachining methods usually require additional hardware to leverage the added advantage of hybrid technologies such as laser heating,cryogenic cooling,electric pulse or ultrasonic elliptical vibration.The SDM method tested in this paper does not require any such additional baggage and is easy to implement in a sequential micro-machining mode.This paper made use of Raman spectroscopy data,average surface roughness data and imaging data of the cutting chips of silicon for drawing a comparison between conventional single-point diamond turning(SPDT)and SDM while incorporating surface defects in the(i)circumferential and(ii)radial directions.Complementary 3D finite element analysis(FEA)was performed to analyse the cutting forces and the evolution of residual stress on the machined wafer.It was found that the surface defects generated in the circumferential direction with an interspacing of 1 mm revealed the lowest average surface roughness(Ra)of 3.2 nm as opposed to 8 nm Ra obtained through conventional SPDT using the same cutting parameters.The observation of the Raman spectroscopy performed on the cutting chips showed remnants of phase transformation during the micromachining process in all cases.FEA was used to extract quantifiable information about the residual stress as well as the sub-surface integrity and it was discovered that the grooves made in the circumferential direction gave the best machining performance.The information being reported here is expected to provide an avalanche of opportunities in the SPDT area for low-cost machining solution for a range of other nominal hard,brittle materials such as SiC,ZnSe and GaAs as well as hard steels.

Research on automatic inspection system for defects on precise optical surface based on machine vision

In manufacture of precise optical products, it is important to inspect and classify the potential defects existing on the products’ surfaces after precise machining in order to obtain high quality in both functionality and aesthetics. The existing methods for detecting and classifying defects all are low accuracy or efficiency or high cost in inspection process. In this paper, a new inspection system based on machine vision has been introduced, which uses automatic focusing and image mosaic technologies to rapidly acquire distinct surface image, and employs Case-Based Reasoning(CBR)method in defects classification. A modificatory fuzzy similarity algorithm in CBR has been adopted for more quick and robust need of pattern recognition in practice inspection. Experiments show that the system can inspect surface diameter of 500mm in half an hour with resolving power of 0.8μm diameter according to digs or 0.5μm transverse width according to scratches. The proposed inspection principles and methods not only have meet manufacturing requirements of precise optical products, but also have great potential applications in other fields of precise surface inspection.

Study on Machining Properties of Eucalyptus urophylla×E. grandis:I. Planing and Sanding Properties

The research method in this paper is based on the standard of American Society for Testing andMaterials (ASTM). Planing and sanding are selected to study the machining properties of E. urophylla × E.grandis plantation wood. Moreover, the reasons for machining defects are analyzed. The results show E.urophylla × E. grandis planted in south China is a good species with a great potential for solid woodutilization.