This paper reports the piezoresistive effect of a resonant tunneling diode （RTD） in a microstructure. The fourbeam structure is analyzed and fabricated by positing RTDs at the stress sensitive regions. Stress along ...This paper reports the piezoresistive effect of a resonant tunneling diode （RTD） in a microstructure. The fourbeam structure is analyzed and fabricated by positing RTDs at the stress sensitive regions. Stress along the [110] orienta- tion and [110]ientation induces a change in the RTD＇s current-voltage （I-V） curves,i, e., the meso-piezoresistance variety,mainly in its negative different resistance （NDR） region. By different methods,the mechanic-electric coupling characteristic of RTD is studied and the consistent 10^9Pa^1 piezoresistive coefficients are discovered.展开更多
A mechanic-electric analogous method on rotational degree of freedom is used to establish the analogous circuit for moment actuator and its calibration system. The correctness for the analogous circuit is proved by so...A mechanic-electric analogous method on rotational degree of freedom is used to establish the analogous circuit for moment actuator and its calibration system. The correctness for the analogous circuit is proved by some experiments. The result in this paper provides an useful basis for the optimization of the design of the moment actuator.展开更多
文摘This paper reports the piezoresistive effect of a resonant tunneling diode （RTD） in a microstructure. The fourbeam structure is analyzed and fabricated by positing RTDs at the stress sensitive regions. Stress along the [110] orienta- tion and [110]ientation induces a change in the RTD＇s current-voltage （I-V） curves,i, e., the meso-piezoresistance variety,mainly in its negative different resistance （NDR） region. By different methods,the mechanic-electric coupling characteristic of RTD is studied and the consistent 10^9Pa^1 piezoresistive coefficients are discovered.
文摘A mechanic-electric analogous method on rotational degree of freedom is used to establish the analogous circuit for moment actuator and its calibration system. The correctness for the analogous circuit is proved by some experiments. The result in this paper provides an useful basis for the optimization of the design of the moment actuator.
