Design and implementation of digital closed-loop drive control system of a MEMS gyroscope

In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system （MEMS） gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop （PLL） in frequency control and an automatic gain control （AGC） method in amplitude control. A digital processing circuit with a field programmable gate array （FPGA） is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.

Accuracy improvement of GPS/MEMS-INS integrated navigation system during GPS signal outage for land vehicle navigation

To improve the reliability and accuracy of the global po- sitioning system （GPS）/micro electromechanical system （MEMS）- inertial navigation system （INS） integrated navigation system, this paper proposes two different methods. Based on wavelet threshold denoising and functional coefficient autoregressive （FAR） model- ing, a combined data processing method is presented for MEMS inertial sensor, and GPS attitude information is also introduced to improve the estimation accuracy of MEMS inertial sensor errors. Then the positioning accuracy during GPS signal short outage is enhanced. To improve the positioning accuracy when a GPS signal is blocked for long time and solve the problem of the tra- ditional adaptive neuro-fuzzy inference system （ANFIS） method with poor dynamic adaptation and large calculation amount, a self-constructive ANFIS （SCANFIS） combined with the extended Kalman filter （EKF） is proposed for MEMS-INS errors modeling and predicting. Experimental road test results validate the effi- ciency of the proposed methods.

ANALYZING ON THE VIBRATION CHARACTERISTICS OF A MICRO PIEZOELECTRIC ROBOT IN PIPELINE

The mathematical model of a micro piezoelectric elastic legged robot in pipeline was founded. The robotic resonant frequency worked out with the mathematical model is nearly equal to the frequency from experiment. It indicates that the mathematical model of the robot is correct. Besides, it studied the piezoelectric robotic structure parameters’ effect on the robotic performance. The result of the analysis on the robot constructs the base of an optimal design of a piezoelectric robot.

Design on a Multi-Sensor Integrated Attitude Determination System for Small UAVs

This paper discusses the design and implementation of a low cost multi-sensor integrated attitude determination system for small unmanned aerial vehicles( UAVs),which uses strapdown inertial navigation system( SINS) based on micro electromechanical system( MEMS) inertial sensors,commercial GPS receiver,and 3-axis magnetometer.MEMS-SINS initial attitude determination cannot be well performed for the reason that the MEMS inertial sensors biases are time-varying and poor repeatability,therefore in this paper the magnetometer and inclinometer are used to assist the MEMS-SINS initial attitude determination and MEMS inertial sensors field calibration.Furthermore,the attitude determination algorithms are presented to estimate the full attitude during GPS signal outage and non-accelerating situation.Additionally,the attitude information estimation results are compared with the reference of the non-magnetic marble platform and 3-axis turntable.Then the attitude estimation precision satisfies the requirement of attitude measurement for small UAVs during GPS signal outage and availability.Finally,the small UAV autonomous flight test results show that the low cost and real-time attitude determination system can yield continuous,reliable and effective attitude information for small UAVs.

Effect of staggered array structure on the flow field of micro gas chromatographic column

A new design of staggered array semi-packed micro gas chromatographic column was presented based on the micro electromechanical system(MEMS)technology.It was a sensor for gas sample analysis.The internal velocity fields of ten types of semi-packed micro gas chromatographic column were studied.The effects of array spacing and dislocation spacing on the flow field distribution were investigated.The results show that on the basis of ensuring the formation of virtual wall,with the increase of array spacing,the maximum velocity difference between the flow channels in the vertical direction decreases gradually,but the velocity difference in the flow channels a and b increases.When the inlet velocity was set to be 0.18 m/s,the maximum velocity difference in the channel of the staggered semi-packed micro gas chromatography column 3(CSAC3)was 0.05610 m/s.The maximum velocity difference in the channel a was 0.09160 m/s.The maximum velocity difference in the channel b was 0.02401 m/s.CSAC3 had a more uniform velocity field distribution,which can effectively suppress the laminar flow effect during chromatographic separation,and had a smaller pressure distribution,which puts forward lower requirements for carrier gas system.The staggered array semi-packed micro gas chromatography column proposed in this paper can effectively improve the velocity field distribution and pressure distribution in the channel,and provide a theoretical basis for the design of the new micro gas chromatography column structure.

Design, fabrication and performance test of an integrated exploding foil initiator system

The integration method of exploding foil initiator system(EFIs) used to be researched to broaden its application range in military and aerospace in the last few decades.In order to lower the firing voltage below 1 kV,an integrated EFIs with enhanced energy efficiency was designed.Corresponding exploding foil initiator chips were fabricated in batch via micro electromechanical systems technology by integrating a unified foil,a flyer layer and a barrel on a glass substrate successively,meanwhile its package of the whole system was proposed at a volume of 2.194 cm^(3).The structural parameters were determined by predicted performance including flyer velocity,impact behavior and conduction property via the proposed theoretical models and the static electric field simulation.As expect,this integrated EFIs exhibited excellent functions,which could accelerate the flyer to a terminal velocity over 4 km/s and preeminently initiate HNS-IV pellet at a circuit of 0.24 μF/0.9 kV.Furthermore,the theoretical design,fabrication and performance test have been all included to validate the feasibility of this integrated EFIs that was beneficial for its commercial development in the future.

Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes

The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.

Multi-try Counter-meshing Gears Discrimination Device Based on MEMS Technology

A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified information fields. The discrimination device consists of two groups of metal CMG, two pawl/ratchet mechanisms, two driving micromotors and two re-setting micromotors, which make the CMG withdraw by raising the pawls. The energy-coupling element is a photoelectric sensor with a circular plate which is notched. Micromotor is fabricated using the ultraviolet LiGA (UV-LiGA) fabrication process and precision mechanical engineering. The discrimination device has the function which can automatically reset, with the correct resetting code, it can be tried another times.

Counter-meshing gears stronglink with multi-try function based on MEMS technology

A multi-try counter-meshing gears stronglink based on micro electromechanical system （MEMS） technology is introduced, including research, design, couple and fabrication of unique signal （UQS） for some specified fields of information security. The stronglink consists of two groups of metal counter-meshing gears, two pawl/ratchet mechanisms, two driving micromotors and two resetting micromotors. The resetting micromotors make counter-meshing gears withdraw by raising pawls so that the interfered counter-meshing gears will be relieved. The energy-coupling element is a photoelectric sensor with a circular notched plate. The counter-meshing mechanism is fabricated using the ultraviolet-lithographie~ galvanoformung and abformung （UV-LiGA） process and a precision mechanical technique. The stronglink can be tried several times if the correct resetting code is known.

Transparent micropatterned conductive films based on highlyordered nanowire network

Transparent conductive films that are based on nanowire networks are essential to construct flexible,wearable,and even stretchable electronics.However,large-scale precise micropatterning,especially with regard to the controllability of the organizing orientation of nanowires,is a critical challenge.Herein,we proposed a liquid film rupture self-assembly approach for manufacturing transparent conductive films with microstructure arrays based on a highly ordered nanowire network.The large-scale microstructure conductive films were fabricated through air-liquid interface self-assembly and liquid film rupture self-assembly.Six typical micropattern morphologies,including square,hexagon,circle,serpentine,etc.,were prepared to reveal the universal applicability of the proposed approach.The homogeneity and controllability of this approach were verified for multiple assemblies.With the assembly cycles increasing,the optical transmittance decreases slightly.In addition,theoretical model analysis is carried out,and the analytical formula of the speed of the film moving with the surface tension and the density of the liquid film is presented.Finally,the feasibility of this approach for piezoresistive strain sensors is verified.This fabrication approach demonstrated a cost-effective and efficient method for precisely arranging nanowires,which is useful in transparent and wearable applications.

A micro amperometric immunosensor for detection of human immunoglobulin

A novel amperometric immunosensor based on the micro electromechanical systems （MEMS） technology, using protein A and self-assembled monolayers （SAMs） for the orientation-controlled immobilization of antibodies, has been developed. Using MEMS technology, an ＂Au, Pt, Pt＂ three-microelectrode system enclosed in a SU-8 micro pool was fabricated. Employing SAMs, a monolayer of protein A was immobilized on the cysteamine modified Au electrode to achieve the orientation-controlled immobilization of the human immunoglobulin （HIgG） antibody. The immunosensor aimed at low unit cost, small dimension, high level of integration and the prospect of a biosensor system-on-a-chip. Cyclic voltammetry and chronoamperometry were conducted to characterize the immunosensor. Compared with the traditional immunosensor using bulky gold electrode or screen-printed electrode and the procedure directly binding protein A to electrode for immobilization of antibodies, it had attractive advantages, such as miniaturization, compatibility with CMOS technology, fast response （30 s）, broad linear range （50-400 pg/L） and low detection limit （10 pg/L） for HIgG. In addition, this immunosensor was easy to be designed into micro array and to realize the simultaneously multi-parameter detection.

Biomechanical energy harvesting technologies for wearable electronics:Theories and devices

Wearable biomechanical energy harvesting devices have received a lot of attention recently,benefiting from the rapid advancement of theories and devices in the field of the micro electromechanical system(MEMS).They not only fulfil the requirements for powering wearable electronic devices but also provide an attractive prospect for powering self-powered flexible electronic devices when wearing.In this article,we provide a review of the theories and devices of biomechanical energy harvesting technology for wearable applications.Three different forms of biomechanical energy harvesting mechanisms,including the piezoelectric effect,electromagnetic effect,and electrostatic effect,are investigated in detail.The fundamental principle of converting other types of energy from the biomechanical environment into electrical energy,as well as the most commonly-used analytical theoretical models,are outlined for each process.Therefore,the features,properties,and applications of energy harvesting devices are summarized.In addition,the coupled multi-effect hybrid energy harvesting devices are listed,showing the various possibilities of biomechanical energy harvesting devices for serving as sources,sensors,and actuators.Finally,we present perspectives on the future trends of biomechanical energy harvesting devices for wearable electronics applications.

Graphene foam resonators:Fabrication and characterization

Three-dimensional graphene foams(GFs)benefit from a large surface area and unique physical properties.We present here the first-ever miniaturized GF-based resonators.We developed a simple yet reliable fabrication process,in which GFs are synthesized and assembled on a cavity to form suspended GF devices.We electrostatically excited these devices and analyzed their resonance and ring-down responses.We observed significant energy dissipation,as the quality factor of the devices was in the order of several tens.Additionally,we investigated the influence of temperature on the operation of the devices and found that high temperatures mechanically soften the resonators but also considerably enhance energy dissipation.Finally,our devices demonstrated a mode-coupling of a resonance mode and a mode having twice its frequency.Thus,this work paves the way toward the development of novel GF resonators that could be integrated into future devices,such as GF-based nano-electromechanical sensors,electrical circuits,and oscillators.