Micro-displacement amplifying mechanism driven by piezoelectric actuator

Piezoelectric actuator has high stiffness, high frequency and infinite control precision, but a short output displacement which is often 1/1 000 of its length. In order to meet the requirements that tools feeding should be long-travel, high-frequency and high-precision in non-circular precision turning, a new one-freedom flexure hinge structure is put forward to amplify the output displacement of piezoelectric actuator. Theoretical analysis is done on the static and dynamic characteristics of the structure, differential equations are presented, and it is also verified by the finite element method. It's proved by experiments that the output displacement of the structure is 293 μm and its resonant frequency is 312 Hz.

Optical micro/nanofiber enabled tactile sensors and soft actuators:A review

As a combination of fiber optics and nanotechnology,optical micro/nanofiber(MNF)is considered as an important multifunctional building block for fabricating various miniaturized photonic devices.With the rapid progress in flexible optoelectronics,MNF has been emerging as a promising candidate for assembling tactile sensors and soft actuators owing to its unique optical and mechanical properties.This review discusses the advances in MNF enabled tactile sensors and soft actuators,specifically,focusing on the latest research results over the past 5 years and the applications in health monitoring,human-machine interfaces,and robotics.Future prospects and challenges in developing flexible MNF devices are also presented.

Model of Polysilicon Electro-thermal Micro Actuator and Research of Micro Scale Effect

A type of crank beam electro-thermal micro actuator was prescribed. Mechanical model of the actuator was established, and the static characteristic was analyzed.Comparing the theoretical analysis with experimental data, it is found that the thermodynamic character of material in micro actuator has a different variable regularity contrasted to that used in macro scale machines. It is the micro scale effect that results in the deviation between the simulating result and experimental results. The thermodynamic expression of polysilicon, which was fitted by means of the experimental data concerned, was used to modify the mechanical model. The modified model, in which the micro scale thermodynamic characteristic was considered, was more reasonable and could make the optimal design and control strategies analyzing the straight-line micro actuator more feasible.

Research on an inertial piezoelectric actuator for a micro in-pipe robot

A new kind of inertial piezoelectric actuator for a micro in-pipe robot is proposed and studied. The actuator is composed of a body, corresponding to a mass rod, and four elastic legs. Each leg is a composite piezoelectric bimorph beam, made up of a middle metal element, an upper and lower piezoelectric elements. The mechanism is driven by an asymmetric waveform voltage, such as saw-toothed waveform, and utilizes the dynamic relationship between the maximum static friction force and the inertial force. To study the actuator, firstly, the constituent equation of a composite piezoelectric bimorph under both applied voltage and external force was inferred by thermodynamics. Secondly, the dvnamic model of the actuator was established analyzing the relationship between the locomotive states, viz. displacement and velocity, and design parameters, such as piezoelectric strain constant, elastic modulus,length, width and thickness of the piezoelectric element, actuator mass, and driving vohage. At last, the dynamic equation was solved and the theoretical calculation of the inherent frequency was more consistent with the experimental data, which proved the rationality of the model. All these lay a theoretical foundation of the micro actuator parameter optimization and more research on a micro robot.

The Experimental Study of Micro-Tool Servo with Electrostrictive Actuator

An experimental study of micro-tool servo with electrostrictive actuator is presented.The design methods as well as the performance of the entire mechanism is given out.The results of the experiment show that the resolution of the micro-tool servo is 0.02μm and the frequency response is up to 200Hz,which satisfies the requirements of the ultra-precision machining.

Research on Micro-Flow Self-Sensing Actuators Based on Piezoelectric Ceramic Stack `

The paper is concerned with the micro-flow self-sensing actuators,the work of which is based on the secondary piezoelectric effect. The piezoelectric ceramic stack can yield micro-displacement due to its first inverse piezoelectric effect. Therefore,we apply this micro-displacement to cell micro-flow injection. Moreover, due to the charge of the secondary direct piezoelectric effect,the piezoelectric ceramic stack is able to detect the force and displacement in the injection by itself. The experiments of first inverse piezoelectric effect and secondary direct piezoelectric effect are conducted. The experiment results show that,subjected to 0- 60 V input,the piezoelectric ceramic stack can generate 13. 45 μm displacement,and control accuracy can achieve 2 nm. It can completely meet the needs of cell micro-flow injection. Also,the experiments demonstrate that the micro-displacement due to the first inverse piezoelectric effect can be well self-sensed by the electric charge due to the secondary direct piezoelectric effect.

Development of Wearable Micro-actuator Array for 3-D Virtual Tactile Displays

A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators generate an illusion of touching a moving pattern. In comparison to earlier designs [1-3], the device has smaller dimensions of 2.28 mm in diameter and 7 mm in length, which allowed its use in an array capable of hosting up to a 5 by 5 set of actuators with a rectangular shape covering an area of 18 mm by 21 mm. Using finite element analysis of several conceptual designs of actuators [1,4,5], it was established that the voice-coil type device (where the coil is the moving part) has most beneficial characteristics for the envisioned application. These include sufficient force over a relatively large distance, allowing tactile stimulation of surfaces with irregular shape, fast response, and small foot-print that matches the density of the tactile sensory neurons in the human finger. Eexperimental evaluation of the operation of neighboring actuators spaced at 3.3 mm apart, indicates that there is no crosstalk between the actuators. The resulting density exceeds that of previously reported alternative designs based on moveable permanent magnets [4,6]. Static force measurement indicate that each micro-actuator can produce at least 26 mN of repulsive force over a stroke of 2100 μm with a peak force of 34 mN. The driving circuit operates at 13.5V and generates a vibration frequency of up to 265 Hz without significant change of the force-displacement characteristics. In the higher frequency range (above 100 Hz) the actuator provides at least 15 mN of force over a slightly reduced stroke of 2300 μm, and a peak force of 21 mN. All of the above parameters meet the required threshold values of tactile human perception known from [2] and [3].

Nonlinear static characteristics of piezoelectric unimorph bending micro actuators

The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory.The cantilever actuator consists of a piezoelectric layer,a passive（elastic）layer and two electrode layers.First,the nonlinear static characteristic of the actuator caused by the electrostriction of the piezoelectric layer under a strong applied electric field is analyzed using the Rayleigh-Ritz method.Secondly,since the thickness of the cantilever beam is in micro scale and there exists a size effect,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the nonlinearities of the beam deflection increase along with the increase of the applied electric field which means that softening of the micro beam rigidity exists when a strong external electric field is applied.Meanwhile,the optimal value of the thickness ratio for the passive layer and the piezoelectric layer is not around 1.0 which is usually adopted by some previous researchers.Since there exists a size effect of the micro beam deflection,the optimal value of this thickness ratio should be greater than 1.0 in micro scale.

Fabricating a Micro Electromagnetic Actuator with High Energy Density

This paper introduces a new technology to fabricate a micro electromagnetic actuator with high energy density without an enclosed magnetic circuit. This technology includes fabricating multi-turns planar micro coils and fabricating the thick magnetic （NiFe） core on the silicon wafer. The multi-turns planar micro coils are fabricated by the electroplating method from the surface along the line and by dynamically controlling the current density of the copper electrolytes. In order to fabricate thick NiFe plating,the adhesion properties between the NiFe plating and the silicon substrates are improved by changing the surface roughness of the silicon substrates and increasing the thickness of the seed layer. Furthermore,the micro electromagnetic actuator is tested and the energy density of the actuator is evaluated by force testing. The experiments show that the microactuator is efficient in producing high magnetic energy density and high magnetic force.

GIANT MAGNETOSTRICTIVE ACTUATOR IN SERVO VALVE AND MICRO PIPE ROBOT

Performance of giant magnetostrictive material (GMM) is introduced. Principleof work, basic structure and key techniques of giant magnetostrictive actuator (GMA) are analyzed.Its dynamic models of magneto-mechanical coupling are established. The structure and principle ofthe pneumatic servo valve and the micro pipe robot with new homemade GMM are presented. Theexperiment is carried out under typical working conditions. The experiment results show that the GMMpneumatic servo valve has wide pressure control characteristics, good linearity, and fast responsespeed. The movement principles of the GMM robot system are reliably feasible and its maximal movingspeed is about 8 mm/s. It is preferable to the driving frequency of the robot within 100 approx 300Hz.

Design and fabrication of a bistable electromagnetic microactuator

An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.

Hardware Neural Networks Controlled MEMS Rotational Actuators and Application to Micro Robot

Hardware neural networks controlled rotational actuators and application to an insect type micro robot are reported in this paper. Millimeter size rotational actuators are fabricated by combining MEMS （Micro Electro Mechanical System） technology and shape memory alloy based artificial muscle wires. The actuator is composed of a pair of disk rotators and each rotor is suspended by four artificial muscle wires that are connected to the silicon frame. The rotational motion is generated by flowing the electrical current to each wire successively. Two actuators of different sizes are fabricated. The large actuator shows the displacement of 0.5 mm at the cycle time of 4 s. The small actuator shows 0.3 mm at 2 s. For controlling the actuator, the hardware neural networks are used. The hardware neural networks are composed of electrical circuits imitating cell bodies, excitatory synapses and inhibitory synapses. Four signal ports are extracted from four pairs of excitatory and inhibitory neurons and they are connected to the actuator. The small actuator is applied to the robot and built in the mid body of the robot. The shaft of the actuator is connected to the link mechanisms that transform the rotational motion to the locomotion. The appearance dimensions of the robot are 4.0, 2.7, 2.5 mm width, length and height. The robot performs forward and backward foot step like insects. The speed is 26.4 mm·min^-1 and the stepping width is 0.88 mm. Also, the robot changes the direction by external trigger pulses.

Analysis and Design of Thermally Actuated Micro-Cantilevers for High Frequency Vibrations Using Finite Element Method

Vibrational behavior of thermally actuated cantilever micro-beams and their mechanical response at moderately high frequency under a non-harmonic periodic loading is studied in this paper. Two different configurations are considered: 1) a straight beam with two actuation layers on top and bottom which utilizes the bimorph effect to induce bending;2) a uniform beam with base excitation, where the beam is mounted on an actuator which moves it periodically at its base perpendicular to its axis. Generally, vibrating micro-cantilevers are required to oscillate at a specified frequency. In order to increase the efficiency of the system, and achieve deflections with low power consumption, geometrical features of the beams can be quantified so that the required vibrating frequency matches the natural frequencies of the beam. A parametric modal analysis is conducted on two configurations of micro-cantilever and the first natural frequency of the cantilevers as a function of geometrical parameters is extracted. To evaluate vibrational behavior and thermo-mechanical efficiency of micro-cantilevers as a function of their geometrical parameters and input power, a case study with a specified vibrating frequency is considered. Due to significant complexities in the loading conditions and thermo-mechanical behavior, this task can only be tackled via numerical methods. Selecting the geometrical parameters in order to induce resonance at the nominal frequency, non-linear time-history (transient) thermo-mechanical finite element analysis (using ANSYS) is run on each configuration to study its response to the periodic heating input. Approaches to improve the effectiveness of actuators in each configuration based on their implementation are investigated.

NEW ROD-SHAPED ULTRASONIC MICROMOTOR AND ITS DRIVING PRINCIPLE

A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshaped ultrasonic motor is simulated. The stator structure and the position to lay these piezoelectric ceramics are calculated to improve the electro mechanical conversion efficiency. A flexible rotor is designed to reduce the radial slip between the stator and the rotor, and to improve the motor efficiency. The prototype motor and its micror driver are tested. The motor is 9 mm in out-diameter, 15 mm in length and 3.2 g in weight. When the motor operates with the first bending frequency （72 kHz） of the stator, its maximal rotational speed and the torque reach 520 r/rain and 4.5 mN · m. Results show that the motor has good stability. The speed fluctuation is controlled within 3% by the frequency automatic tracking technique.

5-羟色胺转运蛋白显像剂^(11)C-DASB的自动化合成及Micro PET/CT显像

目的:自动化合成5-羟色胺转运蛋白显像剂11 C-DASB并进行大鼠Micro PET/CT显像;方法:通过改变甲基化试剂、溶解前体溶剂及反应条件,得到优化的标记条件作为碳-11多功能合成模块的输入参数,进行自动化合成11 C-DASB,大鼠静脉注射11 C-DASB 45 min后进行显像;结果:采用11 C-CH3-Triflate作为甲基化试剂,通入新配制的含1mg去甲基DASB前体的500μL DMSO溶液内,80℃下加热2min,标准率为63.7%,大鼠显像表明,11 C-DASB特异性的浓聚于SERT富集区域;结论:经优化,11 C-DASB自动化合成可得到较高产率,大鼠显像表明,其特异性浓聚于SERT富集区域,有望作为5-羟色胺转运蛋白显像剂。

^(18)F-氟赤硝基咪唑micro PET/CT评价裸鼠乳腺癌早期放疗疗效实验研究

目的探讨^(18)F-氟赤硝基咪唑micro PET/CT评价裸鼠MDA-MB231乳腺癌早期放疗疗效的价值。方法建立16只裸鼠MDA-MB231乳腺癌模型,将其按照随机对照原则分为两组:对照组(A组)、放疗组(B组),每组8只。每组裸鼠行micro PET/CT显像,测定每只裸鼠肿瘤SUVmax值。完成显像后,常规HE染色观察每组肿瘤组织形态学特征,免疫组化方法测定每组肿瘤细胞乏氧诱导因子-1α(HIF-1α)的表达情况。结果放疗前,对照组与放疗组SUVmax值差异无统计学意义(t=0. 375,P> 0. 05)。放疗组放疗后48 h裸鼠肿瘤组织SUVmax值较放疗前(t=9. 958,P <0. 05)、放疗后24 h(t=16. 506,P <0. 05)明显降低,差异有统计学意义(F=58. 860,P <0. 05)。放疗后24 h SUVmax值也低于放疗前24 h(t=5. 405,P <0. 05),差异有统计学意义。HE染色结果显示放疗组肿瘤细胞坏死较对照组更加明显。免疫组化结果显示放疗组放疗后HIF-1α表达阳性率明显低于放疗前(t=14. 802,P <0. 05),差异具有统计学意义。相关性分析结果显示肿瘤SUVmax与HIF-1α的表达呈明显正相关性(r=0. 865,P <0. 05)。结论^(18)F-氟赤硝基咪唑micro PET/CT可以监测肿瘤内部的乏氧状态,并且可以评价裸鼠MDA-MB231乳腺癌的早期放疗疗效。

NEW KIND OF WIRELESS MICRO ROBOT ACTUATED AND CONTROLLED THROUGH OUTSIDE MAGNETIC FIELD

A new method to drive and control micro in-pipe robot by means of magneticfield outside pipe is put forward, in which wireless micro robot can move forward driven by thevibration of its legs through converting magnetic energy into mechanical one under the action ofpiezomagnetism and magnetomechanical coupling of its micro GMA, when time varied oscillatingmagnetic field with different frequency applied outside pipe. Firstly its systematical structure andoperation principle are introduced, and energy converting process from outside magnetic one intomechanical one is analyzed through setting up the magnetic and mechanical dynamic model of GMA andestablishing dynamic model of two stage amplifier of mobile earner. Robot systematical experimentsshow the correctness of the theoretical analysis and its feasibility. As a result, drive and controlmethod without cable through outside magnetic field is realized.

Encryption/decryption and microtarget capturing by pH-driven Janus microstructures fabricated by the same femtosecond laser printing parameters

Several natural organism can change shape under external stimuli. These natural phenomena have inspired a vast amount of research on exploration and implementation of reconfigurable shape transformation. The Janus structure is a promising approach to achieve shape transformation based on its heterogeneous chemical or physical properties on opposite sides.However, the heterogeneity is generally realized by multi-step processing, different materials,and/or different processing parameters. Here, we present a simple and flexible method of producing p H-sensitive Janus microactuators from a single material, using the same laser printing parameters. These microactuators exhibit reversible structural deformations with large bending angles of ~31°and fast response(~0.2 s) by changing the p H value of the aqueous environment. Benefited from the high flexibility of the laser printing technique and the spatial arrangements, pillar heights, and bending directions of microactuators are readily controlled,enabling a variety of switchable ordered patterns and complex petal-like structures on flat surfaces and inside microchannels. Finally, we explore the potential applications of this method in information encryption/decryption and microtarget capturing.

Review:Recent advances in nonlinear control technologies for shape memory alloy actuators

This paper reviews recent developments in nonlinear control technologies for shape memory alloy (SMA) actuators in robotics and their related applications. SMA possesses large hysteresis, low bandwidth, slow response, and non-linear behavior, which make them difficult to control. The fast response of the SMA actuator mostly depends upon, (1) type of controller, (2) rate of addition and removal of heat, and (3) shape or form of the actuator. Though linear controllers are more desirable than nonlinear ones, the review of literature shows that the results obtained using nonlinear controllers were far better than the former one. Therefore, more emphasis is made on the nonlinear control technologies taking into account the intelligent controllers. Various forms of SMA actuator along with different heating and cooling methods are presented in this review, followed by the nonlinear control methods and the control problems encountered by the researchers.

Modeling and simulation of a novel vertical actuator based on electrowetting on dielectric

A novel vertical actuator based on electrowetting on dielectric （EWOD） was designed, analyzed and simulated. Modeling results indicated that the vertical driving force of the actuator obeyed a second order polynomial of applied voltage, which was verified by Covent_ware 2006. As a resuit, the vertical driving force of the EWOD actuator with a 1.1 nL droplet and a 1.75 μm thick polymer was about 0.5 μN under an applied voltage 100V which was comparable to that of the electrostatic actuators. Moreover, the noise from plane forces we analyzed and simulated was very low. Therefore, we made a conclusion that the EWOD actuator can be used in MEMS transducer.