On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics.However,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely challenging.Herein,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane substrate.Its tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are observed.Our proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.

Micro-arc oxidization fabrication and ethanol sensing performance of Fe-doped TiO_2 thin films

In-situ pure TiO2 and Fe-doped TiO2 thin films were synthesized on Ti plates via the micro-arc oxidation （MAO） technique. The as-fabricated anatase TiO2 thin film-based conductometric sensors were employed to measure the gas sensitivity to ethanol. The results showed that Fe ions could be easily introduced into the MAO-TiO2 thin films by adding precursor K4（FeCN）6＇3H20 into the NaaPO4 electrolyte. The amount of doped Fe ions increased almost linearly with the concentration of Kg（FeCN）63H20 increasing, eventually affecting the ethanol sensing performances of TiO2 thin films. It was found that the enhanced sensor signals obtained had an optimal concentration of Fe dopant （1.28at%）, by which the maximal gas sensor signal to 1000 ppm ethanol was estimated to be 7.91 at 275℃. The response time was generally reduced by doped Fe ions, which could be ascribed to the increase of oxygen vacancies caused by Fe3＋ substituting for Ti4＋.

Oxidation Resistance of Fe-13Cr Alloy with Micro-Laminated (ZrO_2-Y_2O_3)/(Al_2O_3-Y_2O_3) Films

The micro-laminated （ZrO2-Y2O3）/（Al2O3-Y2O3） composite films were prepared on the surface of Fe-13Cr alloy by an electrochemical process and a sintering process alternately. High-resolution field emission scanning electron microscopy （FE-SEM） was used to characterize the laminated films, indicating that the micro-laminated （ZrO2-Y2O3）] （Al2O3-Y2O3） films have nano-structures. SEM, EDS and mass gain measurement were adopted to study the oxidation resistance of films on Fe-13Cr alloy. It is proved that such micro-laminated films are more effective than ZrO2-Y2O3 or Al2O3-Y2O3 films to resist the oxidation of the alloy, and the oxidation resistance is increased with increasing layers in micro-laminated films. These beneficial effects can be contributed to the mechanism, by which such micro-laminated （ZrOE- YEO3）/（Al2O3-Y2O3） composite film combines all the beneficial effects and overcomes all the disadvantages of both ZrOE- Y2O3 film and Al2O3-Y2O3 film during oxidation of alloy.

Synthesis of tetragonal BaTiO_3 film on Ti substrate by micro-arc oxidation

BaTiO3 films on Ti substrate were fabricated by alternative current(AC) and direct current(DC) micro arc oxidation (MAO).Microstructures of films were investigated by means of SEM,XRD and TEM.The results show that the amorphous phase and primitive cubic phase are the main phases in the films prepared by AC MAO.Even after being annealed at 1 200 ℃ for 8 h,only a few tetragonal phases can be observed in films prepared by AC MAO.However,tetragonal BaTiO3 phase can be produced by DC MAO directly.In the films prepared by DC MAO,a mixture of cubic phase and tetragonal phase is formed.After sparking spacious distribution,sparking duration and temperature gradient near sparking sites were taken into account,and a mechanism of synthesis of tetragonal BaTiO3 phase by DC MAO was proposed.

Studying thin film damping in a micro-beam resonator based on non-classical theories

In this paper, a mathematical model is presented for studying thin film damping of the surrounding fluid in an in-plane oscillating micro-beam resonator. The proposed model for this study is made up of a clamped-clamped micro-beam bound between two fixed layers. The microgap between the micro-beam and fixed layers is filled with air. As classical theories are not properly capable of predicting the size dependence behaviors of the micro-beam,and also behavior of micro-scale fluid media, hence in the presented model, equation of motion governing longitudinal displacement of the micro-beam has been extracted based on non-local elasticity theory. Furthermore, the fluid field has been modeled based on micro-polar theory. These coupled equations have been simplified using Newton-Laplace and continuity equations. After transforming to non-dimensional form and linearizing, the equations have been discretized and solved simultaneously using a Galerkin-based reduced order model. Considering slip boundary conditions and applying a complex frequency approach, the equivalent damping ratio and quality factor of the micro-beam resonator have been obtained. The obtained values for the quality factor have been compared to those based on classical theories. We have shown that applying non-classical theories underestimate the values of the quality factor obtained based on classical theo-ries. The effects of geometrical parameters of the micro-beam and micro-scale fluid field on the quality factor of the resonator have also been investigated.

CHARACTERIZATION OF THE FRACTURE WORK FOR DUCTILE FILM UNDERGOING THE MICRO-SCRATCH

The interface adhesion strength(or interface toughness)of a thin film/substrate system is often assessed by the micro-scratch test.For a brittle film material,the interface adhesion strength is easily obtained through measuring the scratch driving forces.However,to measure the interface adhesion strength(or in- terface toughness)for a metal thin film material(the ductile material)by the micro- scratch test is very difficult,because intense plastic deformation is involved and the problem is a three-dimensional elastic-plastic one.In the present research,using a double-cohesive zone model,the failure characteristics of the thin film/substrate system can be described and further simulated.For a steady-state scratching pro- cess,a three-dimensional elastic-plastic finite element method based on the double cohesive zone model is developed and adopted,and the steady-state fracture work of the total system is calculated.The parameter relations between the horizontal driving forces(or energy release rate of the scratching process)and the separation strength of thin film/substrate interface,and the material shear strength,as well as the material parameters are developed.Furthermore,a scratch experiment for the Al/Si film/substrate system is carried out and the failure mechanisms are explored. Finally,the prediction results are applied to a scratch experiment for the Pt/NiO material system given in the literature.

Preparation of narrow band gap V_2O_5/TiO_2 composite films by micro-arc oxidation

V2Os/TiO2 composite films were prepared on pure titanium substmtes via micro-arc oxidation （MAO） in electrolytes consisting of NaVO3. Their morphology and dements were characterized by scanning electron microscopy （SEM） and energy-dispersive X-ray （EDX） analysis. Phase composition and valence states of species in the films were characterized by X-ray diffraction （XRD） and X-ray photoelec- tron spectroscopy （XPS）. Ultraviolet-visible diffuse reflectance spectra （UV-Vis DRS） were also employed to evaluate the photophysical property of the films. The VEOs/TiO2 composite films show a sheet-like morphology. Not only V205 phase appears in the films when the NaVO3 concentration of the electrolyte is higher than 6,10 g/L and is loaded at the surface of anatase, but also V4＋ is incorporated into the crystal lattice of anatase. In comparison with pure TiO2 films the V2Os/TiO2 composite films exhibit significantly narrow band gap energy. The film prepared in an electrolyte consisting of NaVO3 with a concentration of 8.54 g/L exhibits the narrowest band gap energy, which is approximately 1.89 eV. The V2Os/TiO2 composite films also have the significantly enhanced visible light photocatalytic activity. The film prepared in an electrolyte consisting of NaVO3 with a concentration of 8.54 g/L exhibits the best photocatalytic activity and about 93% of rhodamine is degraded after 14 h visible light radiation.

Microstructures and properties of Si_3N_4/TiN ceramic nano-multilayer films

The polycrystalline Si3N4/TiN ceramic nano-multilayer films have been synthesized on Si substrates by a reactive magnetron Sputtering technique, aiming at investigating the effects of modulation ratio and modulation period on the microhardness and to elucidate the hardening mechanisms of the synthesized nanomultilayer films. The results showed that the hardness of Si3N4/TiN nano-multilayers is affected not only by modulation period, but also by modulation ratio. The hardness reaches its maximum value when modulation period equa1s a critical value λ0, which is about 12 nm with a modulation ratio of 3: 1. The maximum hardness value is about 40% higher than the value calculated from the rule of mixtures. The hardness of nano-multilayer thin films was found to decrease rapidly with increasing or decreasing modulation period from the Point of λ0. The microstructures of the nano-multilayer films have been investigated using XRD and TEM. Based on experimental results, the mechanism of the superhardness in this system was proposed.

Necking of anisotropic micro-films with strain-gradient effects

Necking of stubby micro-films of aluminum is investigated numerically by considering tension of a specimen with an initial imperfection used to onset localisation. Plastic anisotropy is represented by two different yield criteria and strain-gradient effects are accounted for using the visco-plastic finite strain model. Furthermore, the model is extended to isotropic anisotropic hardening （evolving anisotropy）. For isotropic hardening plastic anisotropy affects the predicted overall nominal stress level, while the peak stress remains at an overall logarithmic strain corresponding to the hardening exponent. This holds true for both local and nonlocal materials. Anisotropic hardening delays the point of maximum overall nominal stress.

Research on Optical Properties and Micro-processing Characteristics of Collodion Thin Film

Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique.The visible light transmittance,IR absorption spectra and optical constants of collodion thin film are measured by UV-3501Spectrophotometer,Fourier transform infrared spectrometer(FTIR)and spectroscopic ellipsometry.The measured results show that its average visible light transmittance is 91.9%,and its average infrared absorptivity is better than 0.69/um.In the visible light region,the refractive index of collodion thin film changes in the range of 1.5—1.53,which accords with normal dispersion.The collodion films are etched using oxygen gas plasma.The surface morphology and thickness of etched thin film are measured by the polarizing microscope and MP-100S thickness measurement system,respectively.The results show that the collodion thin film is etched out in the oxygen gas plasma.

ZnO micro-nano composite hydrophobic film prepared by the three-step method

The hydrophobicity of the lotus leaf is mainly due to its surface micro-nano composite structure. In order to mimic the lotus structure, ZnO micro-nano composite hydrophobic films were prepared via the three-step method. On thin buffer films of SiO2, which were first fabricated on glass substrates by the so,gel dip-coating method, a ZnO seed layer was deposited via RF magnetron sputtering. Then two different ZnO films, micro-nano and micro-only flowerlike structures, were grown by the hydrothermal method. The prepared films have different hydrophobic properties after surface modification. The structures of the obtained ZnO films were characterized using x-ray diffraction and field-emission scanning electron microscopy. A conclusion that a micro-nano composite structure is more beneficial to hydrophobicity than a micro-only structure was obtained through research into the effect of structure on hydrophobic properties.

Facile Synthesis of 3D Porous Flower-like ZnO Micro/nanostructure Films and Their Photocatalytic Performance

3D porous flower-like ZnO micro/nanostructure films grown on Ti substrates are synthesized via a very facile electrodeposition technique followed by heat treatment process. The ZnO architecture is assembled with ultra thin sheets, which consist of numbers of nanoparticles and pores, and the size of the nanoparticles can be controlled by adjusting the electrodepo- sition time or calcination temperature. It is worth noting that this synthetic method can provide an effective route for other porous metal oxide nanostructure films. Moreover, the photocatalytic performance shows the porous ZnO is an ideal photocatalyst.

MICROSTRUCTURAL CHANGE OF YSZ-SUPPORTED YBaCuO SUPPERCONDUCTING FILM BY PROTON BEAM BOMBARDMENTS

Microstructural change of YBaCuO film/YSZ substrate with and without proton irradiation has been studied by scanning electron microscope and X- ray diffraction techniques. Structural analysis has shown that conversion from tetragonal to orthorhombic phases, reduction of nonsuperconducting phase and preferential rearrangement of crystal grains are all favorable to the improvement of superconductivity in the YBaCuO film supported by YSZ substrate by proton beam bombardment.

A Monolithic, FEM-Based Approach for the Coupled Squeeze Film Problem of an Oscillating Elastic Micro-Plate Using 3D 27-Node Elements

In this study we describe an FEM-based methodology to solve the coupled fluid-structure problem due to squeeze film effects present in vibratory MEMS devices, such as resonators, gyroscopes, and acoustic transducers. The aforementioned devices often consist of a plate-like structure that vibrates normal to a fixed substrate, and is generally not perfectly vacuum packed. This results in a thin film of air being sandwiched between the moving plate and the fixed substrate, which behaves like a squeeze film offering both stiffness and damping. Typically, such structures are actuated electro-statically, necessitating the thin air gap for improving the efficiency of actuation and the sensitivity of detection. To accurately model these devices the squeeze film effect must be incorporated. Extensive literature is present on mod- eling squeeze film effects for rigid motion for both perforated as well as non-perforated plates. Studies which model the plate elasticity often use approximate mode shapes as input to the 2D Reynolds Equation. Recent works which try to solve the coupled fluid elasticity problem, report iterative FEM-based solution strategies for the 2D Reynolds Equation coupled with the 3D elasticity Equation. In this work we present a FEM-based single step solution for the coupled problem at hand, using only one type of element (27 node 3D brick). The structure is modeled with 27 node brick elements of which the lowest layer of nodes is also treated as the fluid domain (2D) and the integrals over fluid domain are evaluated for these nodes only. We also apply an electrostatic loading to our model by considering an equivalent electro-static pressure load on the top surface of the structure. Thus we solve the coupled 2D-fluid-3D-structure problem in a single step, using only one element type. The FEM results show good agreement with both existing analytical solutions and published experimental data.

Research on the Characteristics of Aesthetic Acceptance of Micro-Film Based on Micro-Age

With the development of society and the progress of information science and technology, it has entered into the "Micro-Era". In the micro-era micro-film was born, micro film playback time is short, and the amount of investment in the production cycle is short, forming a unique advantage, and micro-film aesthetic acceptance characteristics are different from the traditional film, the audience's aesthetic acceptance of features has also changed accordingly. This paper analyzes the relationship between micro-film and micro-era, and analyzes the micro-film to change the aesthetic acceptance of the audience from the aesthetic acceptance, aesthetic needs, aesthetic psychology and aesthetic experience to analyze and summarize. Hope to be able to cause domestic and foreign micro-film-related researchers and practitioners of thinking, and strive to micro-film can be further develop.

5-羟色胺转运蛋白显像剂^(11)C-DASB的自动化合成及Micro PET/CT显像

目的:自动化合成5-羟色胺转运蛋白显像剂11 C-DASB并进行大鼠Micro PET/CT显像;方法:通过改变甲基化试剂、溶解前体溶剂及反应条件,得到优化的标记条件作为碳-11多功能合成模块的输入参数,进行自动化合成11 C-DASB,大鼠静脉注射11 C-DASB 45 min后进行显像;结果:采用11 C-CH3-Triflate作为甲基化试剂,通入新配制的含1mg去甲基DASB前体的500μL DMSO溶液内,80℃下加热2min,标准率为63.7%,大鼠显像表明,11 C-DASB特异性的浓聚于SERT富集区域;结论:经优化,11 C-DASB自动化合成可得到较高产率,大鼠显像表明,其特异性浓聚于SERT富集区域,有望作为5-羟色胺转运蛋白显像剂。

^(18)F-氟赤硝基咪唑micro PET/CT评价裸鼠乳腺癌早期放疗疗效实验研究

目的探讨^(18)F-氟赤硝基咪唑micro PET/CT评价裸鼠MDA-MB231乳腺癌早期放疗疗效的价值。方法建立16只裸鼠MDA-MB231乳腺癌模型,将其按照随机对照原则分为两组:对照组(A组)、放疗组(B组),每组8只。每组裸鼠行micro PET/CT显像,测定每只裸鼠肿瘤SUVmax值。完成显像后,常规HE染色观察每组肿瘤组织形态学特征,免疫组化方法测定每组肿瘤细胞乏氧诱导因子-1α(HIF-1α)的表达情况。结果放疗前,对照组与放疗组SUVmax值差异无统计学意义(t=0. 375,P> 0. 05)。放疗组放疗后48 h裸鼠肿瘤组织SUVmax值较放疗前(t=9. 958,P <0. 05)、放疗后24 h(t=16. 506,P <0. 05)明显降低,差异有统计学意义(F=58. 860,P <0. 05)。放疗后24 h SUVmax值也低于放疗前24 h(t=5. 405,P <0. 05),差异有统计学意义。HE染色结果显示放疗组肿瘤细胞坏死较对照组更加明显。免疫组化结果显示放疗组放疗后HIF-1α表达阳性率明显低于放疗前(t=14. 802,P <0. 05),差异具有统计学意义。相关性分析结果显示肿瘤SUVmax与HIF-1α的表达呈明显正相关性(r=0. 865,P <0. 05)。结论^(18)F-氟赤硝基咪唑micro PET/CT可以监测肿瘤内部的乏氧状态,并且可以评价裸鼠MDA-MB231乳腺癌的早期放疗疗效。

Microstructures and properties of aluminum film and its effect on corrosion resistance of AZ31B substrate

Aluminum films with thickness of 8.78-20.82μm were deposited on the AZ31B magnesium alloys by DC magnetron sputtering.The influences of aluminum film on the micro-mechanical properties and corrosion behavior of the magnesium alloys were investigated.The morphology of aluminum film was examined by scanning electron microscopy and the microstructure of aluminum film was analyzed by X-ray diffiactometry.Nanoindentation and nanoscratch tests were conducted to investigate their micromechanical properties.Moreover,potentiodynamical polarization test performed in 3.5%NaCl solution was carried out to study their anticorrosion performances.The results show that the surface hardness of AZ31B magnesium alloy with aluminum film is 1.38-2.01 GPa,higher than that of the magnesium alloy substrate.The critical load of Al film/AZ31B substrate is in the range of 0.68-2.77 N. The corrosion current density of AZ31B with aluminum film is 2-3 orders of magnitude less than that of bare AZ31B.And the corrosion potential with aluminum film positively shifts.Thus aluminum film can increase the corrosion resistance of Mg alloys obviously.

SURFACE-ENHANCED CANTILEVER SENSORS WITH NANO-POROUS FILMS

Developing surface-enhanced microcantilevers with improved sensitivities is of longstanding interest. In this paper, the design of surface-enhanced cantilever sensors using nano- （micro-） porous films as surface layers is proposed. The static deformation and resonance frequencies of these surface-enhanced sensors with the simultaneous effects of the eigenstrain, the surface stress and the adsorption mass are analyzed. It is shown that the sensitivities of these novel cantilever sensors for the static deformation and resonance frequencies can be tuned by the porosity, the size of the pores and the structure of the porous films. For the three kinds of cantilever consisting of solid films, films with aligned cylindrical micro-scale pores, and those with nano-scale pores, the nano-porous one has the highest static and dynamic sensitivities, whereas the solid one has the lowest.

Effects of Plastic Film Mulching of Millet on Soil Moisture and Temperature in Semi-Arid Areas in South Ningxia of China

The effects of film mulching of millet on soil water content were studied in semi-arid areas in the Loess Plateau of South Ningxia, China. Different mulching methods including water micro-collecting farming （WF）, water micro-collecting farming in winter fallow （WW）, hole seeding on film （HF）, hole seeding on film in winter fallow （HW） were compared to determine the effects of mulching methods on soil water collecting and conservation during millet growth periods of 2003-2004, as well as the variation tendency of water content after rainfall, output of millet and water use efficiency （WUE）. The experimental results in the two successive years indicated that water micro-collecting farming had a better function of collecting water after rainfall, and side infiltrated water was stored under the ridges and the top layer 0-40 cm soil water changes were great. WF had obvious role in water collection and preservation of soil moisture. It effectively improved the water supply capacity by about 19.05% in the end of growth seasons. The storage of HW and WW increased by 24.9 and 7.1 mm compared with CK, and output of yield were obviously increased. Film mulching increased the yield of millet and enhanced water use efficiency （WUE）. During different growth periods, WF exhibited better water storage function with lower water consumption, and demonstrated optimal social and ecological benefits.