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Calculation,Simulation,and Testing for the Natural Frequency of a Micro Accelerometer 被引量:2
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作者 熊继军 范波 +1 位作者 郭虎岗 高建飞 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第9期1715-1722,共8页
A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural ... A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer's mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency. 展开更多
关键词 natural frequency micro accelerometer Rayleigh-Ritz formula
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System level simulation of a micro resonant accelerometer with geometric nonlinear beams 被引量:1
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作者 焦文龙 苑伟政 常洪龙 《Journal of Semiconductors》 EI CAS CSCD 2015年第10期80-85,共6页
Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS (micro- electro-mechanical systems) researchers, and MEMS transducers utilizing these behaviors have been widely re- search... Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS (micro- electro-mechanical systems) researchers, and MEMS transducers utilizing these behaviors have been widely re- searched and used due to the advantages of essentially digital output. Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method. In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by sys- tem level modeling and simulation method MuPEN (multi port element network). A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library. The AC (alternating current) analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference. Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available. 展开更多
关键词 micro-electro-mechanical systems system level simulation micro resonant accelerometer nonlinearbeam RESONATOR
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Application of Novel Rotation Angular Model for 3D Mouse System Based on MEMS Accelerometers
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作者 钱莉 陈文元 徐国平 《Journal of Shanghai Jiaotong university(Science)》 EI 2009年第2期137-142,共6页
A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse syst... A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse system.To sense 3D angular motion,the static property of MEMS accelerometer,sensitive to gravity acceleration,is exploited.With the three outputs of configured accelerometers,the proposed model is implemented to get the rotary motion of the rigid object.In order to validate the effectiveness of the proposed model,an input device is developed with the configuration of the scheme.Experimental results show that a simulated 3D cube can accurately track the rotation of the input device.The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system. 展开更多
关键词 micro electro mechanical systems (MEMS) accelerometer 3D mouse rotation angular model homogeneous transformation matrix 3D graphical user interface
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